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TW200728022A - Cleaning sheet and cleaning method - Google Patents

Cleaning sheet and cleaning method

Info

Publication number
TW200728022A
TW200728022A TW095115072A TW95115072A TW200728022A TW 200728022 A TW200728022 A TW 200728022A TW 095115072 A TW095115072 A TW 095115072A TW 95115072 A TW95115072 A TW 95115072A TW 200728022 A TW200728022 A TW 200728022A
Authority
TW
Taiwan
Prior art keywords
cleaning
particles
base sheet
grinding
sheet
Prior art date
Application number
TW095115072A
Other languages
Chinese (zh)
Inventor
Munehisa Uetani
Masahiro Hosoi
Katsura Ikuta
Ryo Takahashi
Original Assignee
Nippon Micro Coating Kk
Koyo Sha Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Micro Coating Kk, Koyo Sha Co filed Critical Nippon Micro Coating Kk
Publication of TW200728022A publication Critical patent/TW200728022A/en

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D3/00—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
    • B24D3/02—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent
    • B24D3/20—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent and being essentially organic
    • B24D3/28—Resins or natural or synthetic macromolecular compounds
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D11/00—Constructional features of flexible abrasive materials; Special features in the manufacture of such materials
    • B24D11/001—Manufacture of flexible abrasive materials

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Polishing Bodies And Polishing Tools (AREA)
  • Laminated Bodies (AREA)

Abstract

This invention provides a cleaning sheet and cleaning method capable of removing foreign objects from a panel surface without leaving any scrape. Cleaning sheet (10) consists of a base sheet (11), a first adhesive film (14) forming on top of the base sheet (11), and grinding particles (20) adhered by the first adhesive film (14) on the base sheet (11) in a single layer manner. Each grinding particle (20) consists of plurality of hard particles (21), jointing resin (22) used to join the hard particles (21). The even particle diameter of the hard particles (21) is between 0.5 μm and 5 μm; and the even particle diameter of the grinding particles (20) is between 0.5 mm and 3 mm. The hard particles (21) is particle of cerium oxygen. The difference of height (ΔH) of the grinding particles (20) mounted on the base sheet (11) in single layer manner is within 1mm; and the mount of the grinding particles (20) mounted on the base sheet is between 80 to 200 per 10 mm x 10 mm area.
TW095115072A 2006-01-19 2006-04-27 Cleaning sheet and cleaning method TW200728022A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2006011129A JP2007190643A (en) 2006-01-19 2006-01-19 Cleaning sheet and method

Publications (1)

Publication Number Publication Date
TW200728022A true TW200728022A (en) 2007-08-01

Family

ID=38446724

Family Applications (1)

Application Number Title Priority Date Filing Date
TW095115072A TW200728022A (en) 2006-01-19 2006-04-27 Cleaning sheet and cleaning method

Country Status (4)

Country Link
JP (1) JP2007190643A (en)
KR (1) KR20070077012A (en)
CN (1) CN101069962A (en)
TW (1) TW200728022A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI476073B (en) * 2008-12-31 2015-03-11 Metal Ind Res & Developmentct Abrasive grain making device

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5429844B2 (en) * 2007-10-04 2014-02-26 Ｍｉｐｏｘ株式会社 Cleaning tape and manufacturing method thereof
JP5600400B2 (en) * 2009-05-26 2014-10-01 株式会社クラレ Polishing apparatus and polishing pad fixing method
JP2012179704A (en) * 2011-03-03 2012-09-20 Ebara Corp Polishing tape, and polishing method and polishing device using the polishing tape
JP6016301B2 (en) * 2013-02-13 2016-10-26 昭和電工株式会社 Surface processing method of single crystal SiC substrate, manufacturing method thereof, and grinding plate for surface processing of single crystal SiC substrate
CN106847083B (en) 2017-03-20 2019-08-09 合肥鑫晟光电科技有限公司 Foreign matter collection structure, display device and its operating method

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI476073B (en) * 2008-12-31 2015-03-11 Metal Ind Res & Developmentct Abrasive grain making device

Also Published As

Publication number Publication date
KR20070077012A (en) 2007-07-25
JP2007190643A (en) 2007-08-02
CN101069962A (en) 2007-11-14

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