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Application filed by Powerchip Semiconductor CorpfiledCriticalPowerchip Semiconductor Corp
Priority to TW094144676ApriorityCriticalpatent/TW200725442A/en
Publication of TW200725442ApublicationCriticalpatent/TW200725442A/en
Container, Conveyance, Adherence, Positioning, Of Wafer
(AREA)
Warehouses Or Storage Devices
(AREA)
Abstract
Amethod for storage management of wafer in process. A wafer in process (WIP) and information relating to a tool and a stocker are analyzed to create a criterion index table, comprising a plurality of index values. A predicted value corresponding to a current inventory level of the stocker is obtained and a criterion value corresponding to the WIP is retrieved from the criterion index table according to collected information. It is determined whether the criterion value corresponds to the current inventory level of the stocker. If so, the criterion value is set as the current inventory level of the stocker. It is determined whether a number of WIP lots is greater than the criterion value. If not, the WIP lots in the tool is moved to the stocker.
TW094144676A2005-12-162005-12-16Method for storage management of wafer in process
TW200725442A
(en)
System for managing operating state of machine tool displays operating state of number of machine tools grouped according to defined group property; machine tools can be grouped according to different group properties