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TW200725442A - Method for storage management of wafer in process - Google Patents

Method for storage management of wafer in process

Info

Publication number
TW200725442A
TW200725442A TW094144676A TW94144676A TW200725442A TW 200725442 A TW200725442 A TW 200725442A TW 094144676 A TW094144676 A TW 094144676A TW 94144676 A TW94144676 A TW 94144676A TW 200725442 A TW200725442 A TW 200725442A
Authority
TW
Taiwan
Prior art keywords
stocker
wafer
criterion
wip
storage management
Prior art date
Application number
TW094144676A
Other languages
Chinese (zh)
Inventor
Shih-Chang Chang
Shih-Hao Liu
Wwi Chen
Ming-Tang Yeh
De-Lung Wu
Original Assignee
Powerchip Semiconductor Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Powerchip Semiconductor Corp filed Critical Powerchip Semiconductor Corp
Priority to TW094144676A priority Critical patent/TW200725442A/en
Publication of TW200725442A publication Critical patent/TW200725442A/en

Links

Landscapes

  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Warehouses Or Storage Devices (AREA)

Abstract

Amethod for storage management of wafer in process. A wafer in process (WIP) and information relating to a tool and a stocker are analyzed to create a criterion index table, comprising a plurality of index values. A predicted value corresponding to a current inventory level of the stocker is obtained and a criterion value corresponding to the WIP is retrieved from the criterion index table according to collected information. It is determined whether the criterion value corresponds to the current inventory level of the stocker. If so, the criterion value is set as the current inventory level of the stocker. It is determined whether a number of WIP lots is greater than the criterion value. If not, the WIP lots in the tool is moved to the stocker.
TW094144676A 2005-12-16 2005-12-16 Method for storage management of wafer in process TW200725442A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW094144676A TW200725442A (en) 2005-12-16 2005-12-16 Method for storage management of wafer in process

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW094144676A TW200725442A (en) 2005-12-16 2005-12-16 Method for storage management of wafer in process

Publications (1)

Publication Number Publication Date
TW200725442A true TW200725442A (en) 2007-07-01

Family

ID=57912529

Family Applications (1)

Application Number Title Priority Date Filing Date
TW094144676A TW200725442A (en) 2005-12-16 2005-12-16 Method for storage management of wafer in process

Country Status (1)

Country Link
TW (1) TW200725442A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI821293B (en) * 2018-05-24 2023-11-11 日商昕芙旎雅股份有限公司 Substrate storage container management system, loading port, substrate storage container management method

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI821293B (en) * 2018-05-24 2023-11-11 日商昕芙旎雅股份有限公司 Substrate storage container management system, loading port, substrate storage container management method

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