TW200643403A - Inspection device, inspection method, and positioning method - Google Patents
Inspection device, inspection method, and positioning methodInfo
- Publication number
- TW200643403A TW200643403A TW095106064A TW95106064A TW200643403A TW 200643403 A TW200643403 A TW 200643403A TW 095106064 A TW095106064 A TW 095106064A TW 95106064 A TW95106064 A TW 95106064A TW 200643403 A TW200643403 A TW 200643403A
- Authority
- TW
- Taiwan
- Prior art keywords
- stage
- inspection
- angle
- axis
- alignment mark
- Prior art date
Links
- 238000007689 inspection Methods 0.000 title abstract 7
- 238000000034 method Methods 0.000 title abstract 3
- 238000006073 displacement reaction Methods 0.000 abstract 1
- 238000003384 imaging method Methods 0.000 abstract 1
- 239000000523 sample Substances 0.000 abstract 1
- 239000000758 substrate Substances 0.000 abstract 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
- G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
- G01R31/2887—Features relating to contacting the IC under test, e.g. probe heads; chucks involving moving the probe head or the IC under test; docking stations
Landscapes
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- General Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Testing Of Short-Circuits, Discontinuities, Leakage, Or Incorrect Line Connections (AREA)
- Tests Of Electronic Circuits (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Abstract
An inspection device and inspection method, where, even if an object to be inspected is changed, an inspection probe can be automatically in contact with a desired portion of the object. The θ-axis of a stage of a jig positioning device (400), on which alignment section ((40), inspection jig (300)) is placed, is moved in a plus direction (S5) to recognize the position of an alignment mark, and the recognized position is recorded together with the angle (θ Angle) of rotation of the stage (S6). Then, the θ-axis of the stage is moved, for example, in a minus direction (S7), the position of the alignment mark is recognized, and the recognized position is recorded together with the angle of (θ Angle) rotation of the stage (S8). The positional coordinates of imaging cameras (500, 600) measured from the θ-axis center of the stage are obtained by calculation based on the position of the alignment mark relative to the centers of the cameras and on the angle of the θ-axis (S10). The positions (displacement amount) of the imaged position of the alignment mark on a tape substrate relative to the imaging center positions of the cameras are measured (S11), and the amount of movement of the stage is calculated to positionally control the inspection jig (S12).
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2005047937A JP4799880B2 (en) | 2005-02-23 | 2005-02-23 | Inspection apparatus, inspection method, and positioning method |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| TW200643403A true TW200643403A (en) | 2006-12-16 |
Family
ID=36927518
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW095106064A TW200643403A (en) | 2005-02-23 | 2006-02-23 | Inspection device, inspection method, and positioning method |
Country Status (3)
| Country | Link |
|---|---|
| JP (1) | JP4799880B2 (en) |
| TW (1) | TW200643403A (en) |
| WO (1) | WO2006090891A1 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI550373B (en) * | 2011-11-14 | 2016-09-21 | 鴻海精密工業股份有限公司 | System and method for automatically replacing measuring probes |
Families Citing this family (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5120027B2 (en) | 2007-09-28 | 2013-01-16 | 東京エレクトロン株式会社 | Probe apparatus and probing method |
| WO2009147712A1 (en) * | 2008-06-02 | 2009-12-10 | 株式会社アドバンテスト | Tcp handling apparatus and tcp test apparatus |
| JP4725650B2 (en) * | 2009-01-07 | 2011-07-13 | 東京エレクトロン株式会社 | Probe device |
| JP4878385B2 (en) * | 2009-12-07 | 2012-02-15 | コグネックス・コーポレイション | Object control system, object control method, program, and rotation center position specifying device |
| KR101891681B1 (en) * | 2016-11-07 | 2018-08-24 | (주)하이비젼시스템 | Apparatus for alignment of pivot point using vision |
| TWI794324B (en) * | 2017-11-24 | 2023-03-01 | 日商日本電產理德股份有限公司 | Substrate inspection device, inspection position correction method, position correction information generation method, and position correction information generation system |
| CN107806844B (en) * | 2017-11-24 | 2023-08-01 | 成都瑞戈科技有限公司 | Automatic detector for dust cover framework deviation |
| JP7018784B2 (en) * | 2018-02-23 | 2022-02-14 | 東京エレクトロン株式会社 | Contact accuracy assurance method and inspection equipment |
| CN111102940B (en) * | 2018-10-29 | 2022-07-05 | 北京金风科创风电设备有限公司 | Blade pitch angle deviation detection method, device, storage medium and system |
| KR102153910B1 (en) * | 2019-04-09 | 2020-09-09 | 주식회사 이엘피 | Inspection apparatus capable of aligning and inspecting both sides of display panel |
| CN112683422A (en) * | 2020-12-02 | 2021-04-20 | 昆山广钰德智能装备有限公司 | Exhaust temperature sensor detection equipment |
| CN116060329A (en) * | 2023-02-17 | 2023-05-05 | 苏州天准科技股份有限公司 | Electromagnetic valve detection equipment of automobile air shock absorber ware |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0662380U (en) * | 1993-01-29 | 1994-09-02 | 安藤電気株式会社 | Measuring mechanism for TAB |
| JPH11326229A (en) * | 1998-05-21 | 1999-11-26 | Hitachi Electron Eng Co Ltd | Foreign matter inspection apparatus |
| JP4119137B2 (en) * | 2002-02-27 | 2008-07-16 | ヤマハ発動機株式会社 | Parts testing equipment |
-
2005
- 2005-02-23 JP JP2005047937A patent/JP4799880B2/en not_active Expired - Fee Related
-
2006
- 2006-02-22 WO PCT/JP2006/303823 patent/WO2006090891A1/en active Application Filing
- 2006-02-23 TW TW095106064A patent/TW200643403A/en unknown
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI550373B (en) * | 2011-11-14 | 2016-09-21 | 鴻海精密工業股份有限公司 | System and method for automatically replacing measuring probes |
Also Published As
| Publication number | Publication date |
|---|---|
| JP4799880B2 (en) | 2011-10-26 |
| JP2006234510A (en) | 2006-09-07 |
| WO2006090891A1 (en) | 2006-08-31 |
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