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TW200636291A - Illumination optical system - Google Patents

Illumination optical system

Info

Publication number
TW200636291A
TW200636291A TW095101729A TW95101729A TW200636291A TW 200636291 A TW200636291 A TW 200636291A TW 095101729 A TW095101729 A TW 095101729A TW 95101729 A TW95101729 A TW 95101729A TW 200636291 A TW200636291 A TW 200636291A
Authority
TW
Taiwan
Prior art keywords
optical system
integrator lens
illumination optical
integrator
lens group
Prior art date
Application number
TW095101729A
Other languages
Chinese (zh)
Inventor
Naoki Uchida
Yoshiyuki Enomoto
Original Assignee
Topcon Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Topcon Corp filed Critical Topcon Corp
Publication of TW200636291A publication Critical patent/TW200636291A/en

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/28—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for polarising
    • G02B27/283—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for polarising used for beam splitting or combining
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/30—Polarising elements
    • G02B5/3025—Polarisers, i.e. arrangements capable of producing a definite output polarisation state from an unpolarised input state
    • G02B5/3075—Polarisers, i.e. arrangements capable of producing a definite output polarisation state from an unpolarised input state for use in the UV
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03B—APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
    • G03B21/00—Projectors or projection-type viewers; Accessories therefor
    • G03B21/14—Details
    • G03B21/20—Lamp housings
    • G03B21/2073—Polarisers in the lamp house
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70216—Mask projection systems
    • G03F7/70308—Optical correction elements, filters or phase plates for manipulating imaging light, e.g. intensity, wavelength, polarisation, phase or image shift

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Microscoopes, Condenser (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)

Abstract

A plurality of integrator lenses are provided in series to form an integrator lens group. A multiplicity of such integrator lens groups are provided in parallel in the form of compound eyes. Polarizing prisms are arranged for every integrator lens group. The polarizing prism is arranged on the inner side or outer side of each integrator lens. The cementing surfaces of the adjacent polarizing prisms are arranged so as not to be paralleled to each other, and so as to be made, for example, perpendicular to each other.
TW095101729A 2005-03-08 2006-01-17 Illumination optical system TW200636291A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005063942A JP2006251032A (en) 2005-03-08 2005-03-08 Illumination optics

Publications (1)

Publication Number Publication Date
TW200636291A true TW200636291A (en) 2006-10-16

Family

ID=37091659

Family Applications (1)

Application Number Title Priority Date Filing Date
TW095101729A TW200636291A (en) 2005-03-08 2006-01-17 Illumination optical system

Country Status (3)

Country Link
JP (1) JP2006251032A (en)
KR (1) KR20060099401A (en)
TW (1) TW200636291A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102927525A (en) * 2011-08-10 2013-02-13 许光荣 Large multi-light source fly-eye condenser lens device

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5057382B2 (en) * 2007-12-18 2012-10-24 Ｎｓｋテクノロジー株式会社 Exposure apparatus and substrate manufacturing method
JPWO2010024106A1 (en) * 2008-08-28 2012-01-26 株式会社ニコン Illumination optical system, exposure apparatus, and device manufacturing method

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102927525A (en) * 2011-08-10 2013-02-13 许光荣 Large multi-light source fly-eye condenser lens device

Also Published As

Publication number Publication date
JP2006251032A (en) 2006-09-21
KR20060099401A (en) 2006-09-19

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