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TW200635726A - Robot arm and robot - Google Patents

Robot arm and robot

Info

Publication number
TW200635726A
TW200635726A TW095106762A TW95106762A TW200635726A TW 200635726 A TW200635726 A TW 200635726A TW 095106762 A TW095106762 A TW 095106762A TW 95106762 A TW95106762 A TW 95106762A TW 200635726 A TW200635726 A TW 200635726A
Authority
TW
Taiwan
Prior art keywords
robot
arm
power transmission
robot arm
transmission mechanism
Prior art date
Application number
TW095106762A
Other languages
Chinese (zh)
Other versions
TWI392568B (en
Inventor
Takayuki Yazawa
Yasunori Takeuchi
Hiroto Nakajima
Original Assignee
Nidec Sankyo Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP2005052276A external-priority patent/JP4603388B2/en
Priority claimed from JP2005351325A external-priority patent/JP4719562B2/en
Application filed by Nidec Sankyo Corp filed Critical Nidec Sankyo Corp
Publication of TW200635726A publication Critical patent/TW200635726A/en
Application granted granted Critical
Publication of TWI392568B publication Critical patent/TWI392568B/en

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/06—Programme-controlled manipulators characterised by multi-articulated arms
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/02—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type
    • B25J9/04—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type by rotating at least one arm, excluding the head movement itself, e.g. cylindrical coordinate type or polar coordinate type
    • B25J9/041—Cylindrical coordinate type
    • B25J9/042—Cylindrical coordinate type comprising an articulated arm
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J17/00—Joints
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J18/00—Arms
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J18/00—Arms
    • B25J18/02—Arms extensible
    • B25J18/04—Arms extensible rotatable
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/10—Programme-controlled manipulators characterised by positioning means for manipulator elements
    • B25J9/104—Programme-controlled manipulators characterised by positioning means for manipulator elements with cables, chains or ribbons

Landscapes

  • Engineering & Computer Science (AREA)
  • Robotics (AREA)
  • Mechanical Engineering (AREA)
  • Manipulator (AREA)

Abstract

The invention is provided a robot arm that is not in large-scale to be able to advance the precision of position control of the robot arm. It comprises a first arm with a first transmission mechanism, an operation means with a second transmission mechanism, and a robot arm of a first connecting means used for connecting the first and the second transmission mechanisms. The first connecting means comprises a first power transmission element composed by a rigid element, a second power transmission element, and a connection portion used for connecting the rigid element. The diameter of the first transmission mechanism is larger than the diameter of the second transmission mechanism, and the length of the second power transmission element is shorter than the length of the first power transmission element.
TW095106762A 2005-02-28 2006-03-01 Machine arm TWI392568B (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2005052276A JP4603388B2 (en) 2005-02-28 2005-02-28 Robot arm
JP2005351325A JP4719562B2 (en) 2005-12-05 2005-12-05 Robot arm and robot

Publications (2)

Publication Number Publication Date
TW200635726A true TW200635726A (en) 2006-10-16
TWI392568B TWI392568B (en) 2013-04-11

Family

ID=36941162

Family Applications (2)

Application Number Title Priority Date Filing Date
TW095106762A TWI392568B (en) 2005-02-28 2006-03-01 Machine arm
TW100142199A TWI447004B (en) 2005-02-28 2006-03-01 Machine and robot arm

Family Applications After (1)

Application Number Title Priority Date Filing Date
TW100142199A TWI447004B (en) 2005-02-28 2006-03-01 Machine and robot arm

Country Status (3)

Country Link
KR (1) KR101265356B1 (en)
TW (2) TWI392568B (en)
WO (1) WO2006093133A1 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI386353B (en) * 2008-07-10 2013-02-21 Wonik Ips Co Ltd Transfer apparatus, transfer chamber having the same, and vacuum processing system including the same

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07151190A (en) * 1993-11-29 1995-06-13 Bando Chem Ind Ltd Toothed belt
JP2000141270A (en) * 1998-11-06 2000-05-23 Matsushita Electric Ind Co Ltd Articulated robot
JP2001056043A (en) * 1999-05-31 2001-02-27 Mitsuboshi Belting Ltd Toothed belt
JP4509344B2 (en) * 2000-09-28 2010-07-21 株式会社ダイヘン Wafer transfer robot
JP2002307365A (en) * 2001-04-11 2002-10-23 Aitec:Kk Arm of scalar robot
JP2004160568A (en) * 2002-11-11 2004-06-10 Sankyo Seiki Mfg Co Ltd Robot arm

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI386353B (en) * 2008-07-10 2013-02-21 Wonik Ips Co Ltd Transfer apparatus, transfer chamber having the same, and vacuum processing system including the same

Also Published As

Publication number Publication date
TWI392568B (en) 2013-04-11
WO2006093133A1 (en) 2006-09-08
TW201213071A (en) 2012-04-01
KR101265356B1 (en) 2013-05-20
TWI447004B (en) 2014-08-01
KR20070106623A (en) 2007-11-02

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