TW200630757A - Rendering method and device - Google Patents
Rendering method and deviceInfo
- Publication number
- TW200630757A TW200630757A TW094133888A TW94133888A TW200630757A TW 200630757 A TW200630757 A TW 200630757A TW 094133888 A TW094133888 A TW 094133888A TW 94133888 A TW94133888 A TW 94133888A TW 200630757 A TW200630757 A TW 200630757A
- Authority
- TW
- Taiwan
- Prior art keywords
- position information
- substrate
- plotting
- reference mark
- wiring pattern
- Prior art date
Links
- 238000000034 method Methods 0.000 title 1
- 238000009877 rendering Methods 0.000 title 1
- 239000000758 substrate Substances 0.000 abstract 5
- 230000015572 biosynthetic process Effects 0.000 abstract 1
Landscapes
- Length Measuring Devices By Optical Means (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Control Of Position Or Direction (AREA)
Abstract
In the case of plotting a plurality of small wiring pattern on one large substrate, high precise alignment is performed without affecting the formation of the substrate. Detecting a plurality of reference mark 12a disposed on a substrate 12 where a plurality of preset position information of reference mark is shown and obtaining a detected position information showing the position of the reference marks, then compensating, respectively, the plotting position information 12c showing positions of two wiring pattern p1, p2 disposed on the predetermined position on the substrate 12 according to the declination between detecting position information of the common reference mark 12a and position information of the reference mark, and arranging and plotting the wiring pattern p1, p2 on the substrate 12 according to the compensated plotting position information 12c.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2004287320 | 2004-09-30 | ||
| JP2005069332 | 2005-03-11 | ||
| JP2005247166A JP4588581B2 (en) | 2004-09-30 | 2005-08-29 | Drawing method and apparatus |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| TW200630757A true TW200630757A (en) | 2006-09-01 |
Family
ID=37407141
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW094133888A TW200630757A (en) | 2004-09-30 | 2005-09-29 | Rendering method and device |
Country Status (2)
| Country | Link |
|---|---|
| JP (1) | JP4588581B2 (en) |
| TW (1) | TW200630757A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI771080B (en) * | 2020-09-23 | 2022-07-11 | 日商斯庫林集團股份有限公司 | Substrate position detection method, drawing method, substrate position detection apparatus and drawing apparatus |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6116456B2 (en) * | 2013-09-25 | 2017-04-19 | 株式会社Ｓｃｒｅｅｎホールディングス | Drawing method and drawing apparatus |
| JP6355544B2 (en) * | 2014-12-15 | 2018-07-11 | 株式会社Ｓｃｒｅｅｎホールディングス | Position measuring apparatus, data correcting apparatus, position measuring method and data correcting method |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2578519B2 (en) * | 1990-06-01 | 1997-02-05 | 株式会社日立製作所 | Charged particle beam exposure system with position detection function by light beam |
| JP3309747B2 (en) * | 1996-12-20 | 2002-07-29 | 株式会社日立製作所 | Alignment method of ceramic multilayer wiring board and thin film pattern |
| JP2000122303A (en) * | 1998-10-20 | 2000-04-28 | Asahi Optical Co Ltd | Drawing equipment |
| JP4203307B2 (en) * | 2002-12-03 | 2008-12-24 | 独立行政法人科学技術振興機構 | Pattern transfer method and exposure apparatus |
| JP2006251160A (en) * | 2005-03-09 | 2006-09-21 | Fuji Photo Film Co Ltd | Drawing method and apparatus |
-
2005
- 2005-08-29 JP JP2005247166A patent/JP4588581B2/en not_active Expired - Fee Related
- 2005-09-29 TW TW094133888A patent/TW200630757A/en unknown
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI771080B (en) * | 2020-09-23 | 2022-07-11 | 日商斯庫林集團股份有限公司 | Substrate position detection method, drawing method, substrate position detection apparatus and drawing apparatus |
Also Published As
| Publication number | Publication date |
|---|---|
| JP4588581B2 (en) | 2010-12-01 |
| JP2006285186A (en) | 2006-10-19 |
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