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TW200616876A - Apparatus for treating substrates, apparatus for carrying substrates, and method of treating substrates - Google Patents

Apparatus for treating substrates, apparatus for carrying substrates, and method of treating substrates

Info

Publication number
TW200616876A
TW200616876A TW093135984A TW93135984A TW200616876A TW 200616876 A TW200616876 A TW 200616876A TW 093135984 A TW093135984 A TW 093135984A TW 93135984 A TW93135984 A TW 93135984A TW 200616876 A TW200616876 A TW 200616876A
Authority
TW
Taiwan
Prior art keywords
substrates
department
treating
substrate
treating substrates
Prior art date
Application number
TW093135984A
Other languages
Chinese (zh)
Other versions
TWI271374B (en
Inventor
Harumichi Hirose
Original Assignee
Shibaura Mechatronics Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shibaura Mechatronics Corp filed Critical Shibaura Mechatronics Corp
Publication of TW200616876A publication Critical patent/TW200616876A/en
Application granted granted Critical
Publication of TWI271374B publication Critical patent/TWI271374B/en

Links

Landscapes

  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
  • Intermediate Stations On Conveyors (AREA)

Abstract

This invention of an apparatus for treating substrates consists of a conveying mechanism capable of conveying substrates in a vertical manner, a process department to exert designated process to the substrate conveyed in the vertical manner, a loading department to embark the substrate onto the process department, and an unloading department to receive the processed substrate. And at least one of the loading department and the unloading department has a conveyer capable of rotating, a supporting plane to carry the substrate, and a motor to drive the conveyer and to position the supporting plane at a preset tilt angle.
TW93135984A 2003-05-22 2004-11-23 Apparatus for treating substrates, apparatus for carrying substrates, and method of treating substrates TWI271374B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2003144889A JP4452033B2 (en) 2003-05-22 2003-05-22 Substrate transfer apparatus and transfer method

Publications (2)

Publication Number Publication Date
TW200616876A true TW200616876A (en) 2006-06-01
TWI271374B TWI271374B (en) 2007-01-21

Family

ID=33532226

Family Applications (1)

Application Number Title Priority Date Filing Date
TW93135984A TWI271374B (en) 2003-05-22 2004-11-23 Apparatus for treating substrates, apparatus for carrying substrates, and method of treating substrates

Country Status (2)

Country Link
JP (1) JP4452033B2 (en)
TW (1) TWI271374B (en)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101149455B1 (en) * 2004-11-19 2012-05-25 시바우라 메카트로닉스 가부시키가이샤 Substrate processing equipment, substrate carrying equipment and substrate processing method
JP4643384B2 (en) * 2005-07-25 2011-03-02 芝浦メカトロニクス株式会社 Substrate processing apparatus and processing method
JP4685618B2 (en) * 2005-12-13 2011-05-18 芝浦メカトロニクス株式会社 Substrate processing equipment
JP4652991B2 (en) * 2006-02-23 2011-03-16 芝浦メカトロニクス株式会社 Substrate processing equipment
WO2009148077A1 (en) * 2008-06-06 2009-12-10 株式会社アルバック Apparatus for manufacturing thin film solar cell
KR101210533B1 (en) * 2008-06-06 2012-12-10 가부시키가이샤 아루박 thin film solar cell manufacturing equipment
JP4892543B2 (en) * 2008-12-22 2012-03-07 芝浦メカトロニクス株式会社 Substrate processing equipment
JP6148900B2 (en) * 2013-05-23 2017-06-14 東京応化工業株式会社 Coating device
KR102458914B1 (en) * 2022-05-17 2022-10-26 주식회사 아라(Ara) Glass substrate transfer system to perform tag dispersion

Also Published As

Publication number Publication date
TWI271374B (en) 2007-01-21
JP4452033B2 (en) 2010-04-21
JP2004349475A (en) 2004-12-09

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees