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TW200604491A - Transparent film measurements - Google Patents

Transparent film measurements

Info

Publication number
TW200604491A
TW200604491A TW094123905A TW94123905A TW200604491A TW 200604491 A TW200604491 A TW 200604491A TW 094123905 A TW094123905 A TW 094123905A TW 94123905 A TW94123905 A TW 94123905A TW 200604491 A TW200604491 A TW 200604491A
Authority
TW
Taiwan
Prior art keywords
transparent film
interface
determining
film measurements
profile
Prior art date
Application number
TW094123905A
Other languages
Chinese (zh)
Inventor
Xavier Colonna Lega
Original Assignee
Zygo Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Zygo Corp filed Critical Zygo Corp
Publication of TW200604491A publication Critical patent/TW200604491A/en

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)

Abstract

Transparent film measurement techniques are disclosed. A method, comprising: determining a height profile of a first interface of an object based on measurement data of the object; determining a height profile of a second interface of the object based on the measurement data and a model of a shape of the second interface; and determining a profile of a distance between the first and second interfaces based on the height profiles of the first and second interfaces.
TW094123905A 2004-07-15 2005-07-14 Transparent film measurements TW200604491A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US58813804P 2004-07-15 2004-07-15

Publications (1)

Publication Number Publication Date
TW200604491A true TW200604491A (en) 2006-02-01

Family

ID=57807123

Family Applications (1)

Application Number Title Priority Date Filing Date
TW094123905A TW200604491A (en) 2004-07-15 2005-07-14 Transparent film measurements

Country Status (1)

Country Link
TW (1) TW200604491A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI408332B (en) * 2007-01-15 2013-09-11 Disco Corp A measuring device and a laser processing machine which are held in the workpiece
TWI417509B (en) * 2007-02-27 2013-12-01 Disco Corp A measuring device and a laser processing machine which are held at the chuck table
TWI734761B (en) * 2016-03-28 2021-08-01 美商克萊譚克公司 System and method for all surface film metrology

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI408332B (en) * 2007-01-15 2013-09-11 Disco Corp A measuring device and a laser processing machine which are held in the workpiece
TWI417509B (en) * 2007-02-27 2013-12-01 Disco Corp A measuring device and a laser processing machine which are held at the chuck table
TWI734761B (en) * 2016-03-28 2021-08-01 美商克萊譚克公司 System and method for all surface film metrology

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