TW200539981A - Laser processing device - Google Patents

Abstract

The present invention provides a laser processing device, which comprises a optics system compounded by majority of optics elements guides light released from laser oscillator (1) into processed object (20), and divides one laser light into two laser lights by the first polarization separation means (5), wherein one is by mirror (14), another one is scanned in two axis directions by the first galvano scan mirror (13), after two laser lights guided into the second polarization separation means (8), it is scanned by the second galvano scan mirror (12), and prosesses the processed object (20). The laser processing device is characterizd by arrange the the first and the second polarization separation means by 45 DEG in regard to optical axis of laser light.

Description

200539981 IX. Description of the invention: [Technical field to which the invention belongs] The present invention relates to a laser processing device whose main purpose is to perform hole processing on a processed object such as a printed circuit board. In particular, it can improve its productivity and processing quality. Laser processing device. [Prior art] Among the conventional laser processing devices whose main purpose is to perform hole processing on a workpiece such as a printed circuit board, in particular, a laser processing device that can perform processing at two locations at the same time, for example, is provided in Japan International The structure shown in FIG. 9 in the publication No. W003 / 041904. In Figure 9 of Figure 1, 1 is the laser oscillator, 2 is the laser light, and 3 is the light that cuts the required part of the laser light from the incident laser light so that the processed hole has the desired size and shape. The cover 4 is a plurality of reflecting mirrors that reflect the laser light 2 and guide the light path. 24 is a first polarizing beam splitter that splits the laser light into two laser beams, 6 is a field beam on the side of the second light beam in the first polarizing beam splitter 24, 6P is a polarization direction of the laser light 6, and 7 is the first -The laser light on the other side of the beam splitter in the polarizing beam splitter is the polarization direction of the laser light 7, 25 is the reflected laser light 6, and allows the laser light 7 to pass through: the second polarized light is guided to the first galvanic scanning mirror 12. Beamsplitter. W is the laser light reflected by the light beam splitter, 11 is the second polarized light beam splitter: transparent laser light, 14 is the mirror for guiding the laser light 6 to the second polarized light beam splitter, 17 is used for the laser The light 1Q and n are condensed on the processed lens '13 to scan the laser light 7 in the 2 axis direction, and to the 1st—galvanic scanning mirror of the polarizing beam splitter 25, 12 on the 2 316248 5 200539981 axis The laser light 10 and the laser light u are scanned in the directions, and the bow i is guided to the second galvano-scanning mirror of the workpiece 20. 18 is a moving object stage in the χγ direction, 19 is an energy sensor (p〇wersens〇r) that measures the energy of the laser light emitted by the lens 17, and 15 is a first shutter that blocks the laser light 6, 16 is a second shutter that blocks the laser light 7. In addition, the energy sensing state 19 is fixed to the χγ stage 8 and can be moved to a position where the laser light irradiates the photosensitive portion of the energy sensor 19 when measuring the energy of the laser light. —As shown in Figure 9, split a laser beam into two laser beams in a polarizing beam splitter, and scan the two laser beams independently, so that the two holes can be applied at the same time. When the laser processing device is a nail, the laser light 2 that is oscillated by linearly polarizing the laser oscillating light 1 is guided to the first polarizing beam splitter% through the mask 3 and the mirror 4. Then, in the first polarizing beam splitter 24, the p-wave component of the laser light 2 penetrates the first polarizing beam splitter 24 to become the laser light 6, and the S-wave component is reflected by the second polarizing beam splitter 24 and is split into laser light 7 . The laser light 6 which has penetrated the first polarizing beam splitter 24 is guided to the second polarizing beam splitter 25 via the reflecting mirror 14. On the other hand, the laser light 7 reflected by the first polarizing beam splitter 24 is scanned by the first galvano-scanning mirror 13 in the two-axis direction, and then guided to the second polarizing beam splitter 25. The laser light 6 is often guided to the second polarizing beam splitter 25 at the same position, and the laser light 7 can adjust the position and incidence of the second polarizing beam splitter 25 by controlling the swing angle of the first galvano-scanning mirror 13. angle. 6 316248 200539981. After that, the laser light 10 and u are scanned by the second galvano-scanning mirror n and are guided to the mirror 17 and each at a specific position of the workpiece 20. Nine, break this time 'By scanning the first galvanic sweep 13, the laser light can be set.' The optical axes of the three pairs of laser light 1G are within a certain setting range, for example, within the dry range of a 4 position square. By this, for example, Through the second galvano-scanning mirror 12 that can be processed in the range of swinging on each side, laser light can be irradiated onto any two different points of the object 20 at the same time. Figure 10 shows the polarized light. Schematic diagram of the principle of the beam splitter 24. The center is the front view, the left and right sides are side views, and the top is the top view. 乂 In Figure 10, 26 is the window part of the polarizing beam splitter. In the case of inverse acid gas laser, Znse or Ge is used. 27 is a reflector for generating 90% of the laser light. The polarizing beam splitter 24 separates the polarized light and makes the incident light beam blue. The structure of the special angle (Brewster Angle). So 'once the incident laser light 28 enters the polarizing beam splitter 24, the component (P wave component) with the polarization direction 28p will pass through, and the component (S wave with the polarization direction 28s) will pass through. Composition) will reflect the nature. Also, if for all If the light direction is a homogeneous circularly polarized light and a polarization direction at an angle of 45G to the P wave and S wave, the laser light will be divided into equal amounts, and the laser light 29 and the laser light 30 have the same energy. By making it into circularly polarized light, or at an angle of 45 ° to the P wave and S wave, the incident light beam 2 to the first polarizing beam splitter 24 can be provided with a structure that separates the energy by 7 316248 200539981. In addition, of course It has the property that if the polarization direction of the laser light incident on the polarizing beam splitter 24 has only the P-wave component, it will penetrate all, and if it has only the s-wave component, it will have the property of total reflection. Therefore, by making the laser light 7 Only the p-wave component is provided and the laser light is provided, and only the S-wave component is provided, and the incident light beam guided to the second polarizing beam splitter 25 without generating energy loss can be obtained. In the conventional laser processing apparatus as described above, the first polarized light beam splitter, the brother 4 and the first polarized light beam splitter 25 are all used to make the incident angle of the window hole part 26 of the laser beam Wang Bruce. Special corner way to configure window holes The laser light 2 is light with s-wave and P-wave components. For example, in the case of using ZnSe as the material of the window hole for the splitting of carbon dioxide gas laser, if the Brewster angle is 67.5, go to the window. The incident angle of the hole becomes larger. If the laser light diameter guided to the polarizing beam splitter is p 35mm, the laser light diameter on the window hole will be 94mm in the long axis direction. Therefore, the window hole must have the above-mentioned laser light privacy. It is difficult to maintain the production precision when the effective diameter is more than 57. In addition, as the P wave component, the laser light 6 that penetrates the first polarizing beam splitter 24 is necessary in the second polarizing beam splitter 25. Is it necessary to reflect as the s-wave component and the laser light 7 'reflected as the s-wave component in the first polarizing beam splitter 24 in the second polarizing beam splitter 25? The wave component penetrates, so it is necessary to set each of the first and second polarizing beam splitters to make the laser light 90 °. The folded-back mirror 27, in addition, due to the relative position of the window hole 316248 200539981 part 26 and the mirror 27, has a great impact on the precision of the light path behind the polarizing beam splitter '. Therefore, it is necessary to pay attention to the window hole part 26 and the mirror 27 The relative positional relationship between the polarizing beam splitter and the polarizing beam splitter makes an expensive optical element. In addition, "taking into consideration the characteristics of the θ lens 17", in order to obtain more stable processing quality, it is necessary to minimize the length of the light path from the first polarizing beam splitter to the lens η, and to increase the effective diameter of the polarizing beam splitter. And because it is difficult to design a sufficiently large effective diameter of the polarizing beam splitter, the effective diameter of the actual polarizing beam splitter is not enough. When guided to the M lens 17_, the light path diameter is smaller than the desired optical path. The focal length of the lens ^ is set to == 'the laser light path on the object to be processed is larger than the desired light path', and it cannot form a light path suitable for small opening processing '. The problem that the required processing quality cannot be obtained. : Xi = used for each optical element in the optical system, in the process = =), the more the precision of flatness is required, the yield tolerance is poor, and the cost is too high. Therefore, it is generally based on the laser light wavelength. = To about 1/20 of optical aberration. If a large number of optical elements with such a degree are combined to construct an optical lens, the aberrations of each optical element will accumulate and be produced into: Image: Xueyuan :: Dagger ::: Yuan, due to the production of each surface shape The photonic element is a flat photonic element with the same manufacturing process on the surface and the back surface. Therefore, the surface shape of the photon element and the back surface are both concave and convex. It is a transmissive light. 316248 9 200539981 The problem of enlarged distortion (aberration). The present invention was developed to solve the above-mentioned problems. The first object is: Γ is used to add and polarize the laser light that has been split by a polarization separating mechanism. Γ can use relatively inexpensive optical elements in the Γ device. , = 1 mechanism 'and obtain a laser processing device that can reduce the laser light path on the workpiece. In addition, the purpose of "Brother 2" is to obtain a laser beam processing device with aberration caused by ρ / shape, and improve the surface shape of the processing element. S2 achieves the above-mentioned objective. The laser processing device of the 1st invention when I2: Γ guides the laser light emitted by the laser oscillator to an optical system composed of optical elements that are added and numbered. The first polarized light is separated from two light beams—the laser beam is split into two laser beams, and one is reflected by the rain. One is scanned from the first: galvanometer scanning mirror in the direction of 2 axes, and it is introduced at the entrance to the wooden gate 1 After the second polarized light separation mechanism, scanning is performed by the second galvanic scanning scan, and the processing axis is 45. The above-mentioned method is configured to separate the first and second polarized light for two pairs of laser light. In the laser processing device invented by the mechanism Γ, a polarizing beam splitter in which a dielectric multilayer film is formed on the surfaces of the first and second polarized light beams A. In the laser processing device of the third invention, the above-mentioned first light _ 、 喜 Ｍ & & — The side surface of the separation mechanism is concave, and the back of the surface is convex. In the laser processing device invented by Brother 4, the first polarization separation mechanism described above reflects the laser beam. The surface of the front side of this / 丨 Α 夂 射 田 射 is convex, Taking the back of the surface as a concave shape, the laser light reflected in the sub-inductor helium-polarized light separation mechanism, to the surface 316248 10 200539981, said first galvano-scanning mirror having a concave shape and said second polarized light separation mechanism The laser-reflecting surface is concave, and the back of the surface is convex. In the laser processing apparatus of the fifth invention, the first-polarized-light separating means has a concave laser-reflecting surface, and the The back surface of the surface is convex, and the laser light reflected in the first polarization separation mechanism is sub-guided to the above-mentioned _galvanic scanning mirror whose surface shape is convex, and the above-mentioned: the polarization separation mechanism uses the two-laser laser light side When the surface of the surface is convex, the back surface of the surface is concave. In the laser processing device # 6 of the invention, when the wave of the laser light:. ,, and λ, the first and second polarized light separation mechanisms are described. The concave shape of the surface is convex. It is formed with a precision of λ / 20 or less. In the laser processing device of the seventh invention, in the above-mentioned group of optical elements whose light = distribution surface shape is slightly the same, The side of the ^ beam shot at the other side of the optical element The incident angle of the two light beams on the incident surface of the beam and I: the optical element of the broad-side optical element is the same as the incident angle of the beam to the first 70 sons of -k. The laser light emitted by the laser device of the eighth invention is supreme ， 十 、 / 自 ，; from the above laser exhaustion path, the laser beam up to m-polarization separation mechanism ± 1 bar, and the above-mentioned group of optics is placed between this mask and the workpiece Components. U Add a bracket for the laser plus a group of optical components of the ninth invention (in the case of hold, it is configured to represent the same direction in this direction. In the construction device, the above-mentioned er is individually fixed) 'In the direction of the above bracket The axis of temperament is that with the laser processing device of the tenth invention incident to each optical element, the wave length of the laser light 316248 200539981 is λ day. The surface shape of the above-mentioned group of optical elements is λ / It is formed with a precision of 10 to λ / 20. In the laser processing device invented by Tu Ba Yudi, the above-mentioned first and second deflection mechanisms are provided with a mechanism that is perpendicular to the traveling direction of the laser light and can adjust the angle in two mutually orthogonal directions.

Ab Dan: The laser processing apparatus of the twelfth aspect includes a damper for absorbing laser light leaked from the second polarized light separation mechanism of the upper part as a beam loss. Aurora :: Ben Yuming ’s hunting angle is 45 °. ❾A polarizing beam splitter comes with a polarization splitting mechanism. The lens can be used to shoot a large optical path of light. The laser beam path on the workpiece can be reduced, and a more precise polarizing splitting mechanism can be implemented. Cheap and reduce costs. [Implementation method]-The first implementation of criminal energy ^ The figure is about the first implementation form of the present invention, which shows that a polarizing beam splitter with a price of $ 45 is used as the polarization separation mechanism, and a laser beam is divided into 1 light beam = The strip laser light scans two laser lights independently, and at the same time, the structure diagram of the laser processing device for openings that is continuously applied at two places. Slightly detailed. Π constituents, given the same symbol and saved in the figure of the first brother, 5 is the first polarizing beam splitter, 6 is the laser light penetrating the first polarizing beam splitter 5 '6p is the pair of the laser light 6-the first polarizing beam splitter 5 5 is the polarization direction of the P-wave component, & is the polarization direction of the S-wave component of the laser light 6 for the first polarizing beam splitter 5, and 7 is the laser light reflecting the first polarization 316248 12 200539981 , 7s is the polarization direction of the s-wave component in terms of f, 々 is-the polarization beam splitter, and the polarization direction of the P-wave component in the spectroscope is the opposite direction of the polarized light-cutting, and 8 is the second Polarization 9 is used to absorb as the energy loss the first, see, A ^ ^ ^, Tian Shexian's damper, 10 is the laser light reflected by the second polarizing beam splitter 8 in Tian Shexian, 11 is the laser light transmitted by the 7th—the eighth copy of the field, the Jiutian T B7 million, and the first-passing beam splitter 8. The laser light penetrated by the polarized light in the conventional technology. Using a window with Brewster's angle as the angle of incidence, laser light containing equal p-wave components and S-wave components is separated by polarized light, To equally distribute the transmitted p-wave component and the reflected S-wave component, and equally divide the energy of the laser light. However, in this embodiment mode, for example, by applying a dielectric multilayer film coating on the reflective surface The polarizing beam splitter is configured to have an incident angle of 45 ° to the optical axis of the laser light, instead of the Brewster angle, and penetrates the P wave with a fixed precision and reflects the S wave with a fixed precision. The energy of the laser light is equally divided. Here, it is explained that a polarizing beam splitter of a coating film that penetrates 95% of P waves and 5% of S waves and reflects 95% of S waves and 5% of P waves is used. As an example, if the energy of the laser light incident on the first polarizing beam splitter 5 is 100%, the laser light 6 penetrating the first polarizing beam splitter 5 contains 47.5% of the P-wave component and 2 · 5% S-wave component. After that, laser light including 47.5% S-wave component and 2.5% P-wave component is incident on the first polarizing beam splitter 8 and the laser light reflected by the second polarizing beam splitter 8 , Including 45.125% of the S-wave component and 0.125% of the P-wave component, are guided to the 13th 316248 200539981, the thunder of the second galvanometer scanning mirror 12 The energy of% 10 is 4525% at last.: The laser light that becomes the energy loss penetrating the second polarizing beam splitter 8 includes 2.375% of the S-wave component and 2.375% of the P-wave component. On the other hand, it is related to the first polarization beam splitting The laser light 7 reflected by the mirror 5 is also 'passed through the same process' 45.25% of the energy is directed to the second galvanic scanning mirror i2, and 4.75% of the energy is lost. Therefore, a total of 9.5% is not lost as energy. It is guided to the second galvano-scanning mirror 12, but in the case of constituting the light path of this embodiment, the loss amount of the laser light 6 penetrates the second polarizing beam splitter and the reflection of the loss of the laser light 7 occurs. All the laser light that is an energy loss can be concentrated at the damper 9, and the laser light that is an amount of loss can be prevented from causing damage to the optical element and the like. The polarizing beam splitter is set at an incident angle of 45. , Penetrates 95% of P waves and 5% of S waves' and reflects 95% of S waves and 5% of P waves, but the incident angle is from 45. In the case of an offset, the ratio of the transmitted p wave and the reflected s wave _ is low and the energy loss is increased. Therefore, it is desirable to set the incident angle to 45. . In the escape, it is explained that the monthly b! Loss of a polarizing beam splitter that penetrates 95% of p waves and 5% of s waves and reflects 95% of S waves and 5% of P waves is 9.5%, It can be clearly understood that if the transmittance of the p wave and the reflectance of the S wave are higher than 95%, the energy loss can be lowered to 9.5%. In addition, the polarizing beam splitter of this embodiment is arranged so that the incident angle of the laser beam is 45. Therefore, if the laser beam guided to the polarizing beam splitter 14 316248 200539981 is φ 3 5mm, the window hole The laser light diameter is 52 mm in the long axis direction, which is about 15 times the laser light diameter. Compared with a conventional polarizing beam splitter having an incident angle of Brewster angle, the effective diameter of the aperture of the window must be 2.5 times or more the incident laser light diameter, and it can be made smaller. Comparing the area of the window hole, it can be 35mm in the short axis direction. Compared with the conventional polarizing beamsplitter with an incident angle of Brewster angle, the polarizing beamsplitter with an incident angle of 45 can be reduced. 44.6% of the area. This allows miniaturization of the processing equipment. In addition, in the case of a window hole of the same diameter, for example, 53mm, in the conventional polarizing beam splitter, since the Brewster angle is 67y, the laser light diameter that can be divided into = is about p20mm, and the incident angle is 45. Among the polarizing beam splitters, the laser beam diameter that can be split is p35mm, which can form a light path with a larger laser beam diameter. Here, the laser light having a light path of 0 is incident on a lens having a focal length of f, and if the beam spot condensed on the workpiece at this time is obtained as d ', the beam spot diameter u f0 is the focal length of the lens f and the incident light The relationship of the diameter D can be expressed by the following formula (1). The d cc f / d (τ) formula shows that the beam spot diameter d condensed on the object to be processed by the f lens with focal length f is inversely proportional to the optical path D of the laser light incident on the lens. Therefore, in the case of thinking of forming a polarizing beam splitter with a window L of the same diameter, a polarizing beam splitter with an incident angle of 45 ° as described above can more effectively ensure the effectiveness of the laser light. In the case of the M lens, the beam diameter D incident on the lens can be increased by the square, so it is possible to perform a smaller beam spot diameter d of 316248 15 200539981. In addition, since it is not necessary to have a light path of 90. Reflector's can make the polarization and beamsplitters cheaper, and reduce the cost of processing equipment. Among the square and home's yoke type, because it constitutes a light path that allows the laser light to be folded back at 90%, it can be used for incidence. A polarizing beam splitter with an angle of 45 °. By adopting 'because on the XY stage 18, the two-axis galvanometer mirror is orthogonal', so as shown in Figure 1, by matching this positive The direction of intersection is in the X and Y directions. You can change the X and Y directions with! = Each galvanometer scanning mirror, and it is easy to understand the control of galvanometer scanning at the time of processing, to achieve a simple structure. Yu. Also, the reflex angle of the laser light of the polarizing beam splitter is smaller than 90. It is a small acute angle. In the case of the polarizing beam splitter, the effective diameter of the polarizing beam splitter can be enlarged, and further processing of the beam spot diameter can be performed. However, in this case, the scanning direction of the two-axis galvano-scanning mirror on the χγ stage 18 Uncorrected, so even if, for example, the scanning direction of the galvano-scanning mirror with the -side is in the X direction, the square ^ can only be combined with the galvano-scanning mirror of the other-side and the galvano-scanning mirror in the 乂 -direction. Scanning is performed on the beam, so compared to the above, the laser light is arranged in a row. The control of the galvanometer scanning mirror when turning back to the junction of the light path L side is more complicated. The two laser lights after applying the energy splitting pass through the second After the polarizing beam splitter, it is necessary to be guided to the “center” of the second galvanometer scanning mirror in parallel with the axis in the X direction in FIG. 1. Therefore, it is necessary to perform independent optical axis adjustments on the split laser light 6 and 7. In order to guide the laser light more precisely] 〇'u to the second galvano-scanning mirror 316248 16 200539981 12, in the reverse path provided in front of the first polarizing beam splitter 5, 'at least two or more must be placed separately for the optical path == A mirror whose direction is vertical and whose angle can be adjusted in two mutually orthogonal directions. In this embodiment, the laser light 10 can pass through the mirror 4z and the first part of the first polarizing beam splitter 5. The two polarizing beam splitters 8 are used to adjust the optical axis. On the other hand, the laser light 11 can be adjusted by using the first polarizing beam splitter 5 and the first galvano mirror 13. Here, the first galvano-scanning mirror 13 is provided with two mirrors that can adjust the angle in mutually twisted directions, and can be regarded as having the same function as the i mirrors that adjust the angle in the two-axis directions of each other's positive father. _ can. Fig. 2 is a diagram showing a second embodiment of the present invention, which shows a mechanism that makes the polarizing beam splitter perpendicular to the traveling direction of the laser light and can adjust the angles in two orthogonal directions that are orthogonal to each other. In FIG. 2, the polarizing beam splitter 5 or 8 is supported by a fixed bracket 31, and the fixed bracket 31 is rotatably supported by a bracket support 32 via a first rotation axis 35a '. In addition, the stand support 32 is rotatably supported on the optical base 36 for supporting the Fengxue system via a second rotation axis 35b orthogonal to the first rotation axis 35a. Thereby, the polarizing beam splitter can be adjusted to be perpendicular to the traveling direction of the light path ', and the angle can be adjusted in two mutually orthogonal directions. In addition, the joint portion of the bracket support 32 and the fixing bracket 31 is provided with a first adjusting hole 34a which is longer in the rotation direction of the fixing bracket 31, and the first fixing screw 33a penetrates and is locked to the fixing bracket η. After the rotation adjustment, the structure of the fixing bracket 31 can be fixed on the bracket support 32 by tightening the first fixing screw 33a. The joint portion of the bracket support 32 and the optical base 36 is also the same. 316248 200539981 is a structure that can be fixed by rotating the second adjustment hole 34b and the second fixing screw 33b.

On the other hand, compared with the reflected laser light, the change in the optical axis of the laser light passing through the polarizing beam splitter is extremely small and can be ignored because of the angle adjustment of the polarizing beam splitter, so even if the first polarizing beam splitter is adjusted, The optical axes of the laser light 7, 11 reflected by 5 hardly affect the optical axes of the laser light 6, 10, and even if the optical axes of the laser light 6, 10 reflected by the second polarizing beam splitter 8 are adjusted It also hardly affects the transmitted laser light 7. The optical axis can be adjusted independently. In addition, when the reflecting mirror 4z and the first and second polarizing beam splitters 5 are adjusted to a wide angle, it is also possible that the incident angle to the polarizing beam splitter is 45. In this case, although the energy loss of the laser light will increase, the energy loss will be very small because the angle adjustment is very small. In addition, it can also be corrected based on the output of the laser oscillator, so it is ideal to give priority to improving the processing precision by adjusting the optical axis. Mirroring == Love: The angle of the mirror 42 in front of the mirror 5 is adjusted by the polarized beam splitter / adjuster with the above-mentioned adjustment mechanism, and the light rays 10 and u are moved on the second galvano-scanning mirror 13 at the same time. Therefore, as the order of adjusting the direction of the optical axis, first of all, after the laser and laser mirrors that act on the two laser beams are adjusted, the laser must be lasered. After completing the adjustment of the optical axis: the axis is 5 rounds. The angle of the mirror 4z in front of this mirror 5 :: The polarized light beam splitting angle is "rectified" to maintain the second galvanic scan 316248 18 200539981 on the mirror 12 In the state where the optical axes pn 1 of the phase-exposed lights 10 and 11 of the two laser lights are turned off, a Rayou glaze can be performed. Zhou Sha, so it is easy to adjust with high precision to guide the two laser light gates. The optical axis of the center of the H-spring scanning mirror 12 is more than three. The third figure is about the third embodiment of the present invention, which shows that one laser beam is split into two laser beams. On 9th, 2nd, and sub-hunting, the laser processing device for openings that independently scans two lasers and prepares them for processing at nM, is equipped with an optical system that transfers the light into the cover first and then transfers the light behind the photomask. The shape of the surface is slightly different, so that the beam incident surface of the reflector AA C 4+ ^ with the configuration of 4a, M14a, 14b, and ^ ir optical elements is facing the other two = = the incident surface of the beam is perpendicular, In addition, the reflection on one side = 45 is the same as the incident angle of the light beam on the mirror on the other side. (,,,, and (for example, on a -side mirror, the laser light incident from the = direction is reflected to Z Direction, and then the configuration of 'reflection to the γ direction' on the mirror on the other side). In Figure 3, 4a and 4b are the guides for the laser light 2 to the-polarizing beam splitter 5 from the mask 3. The surface shape is slightly the same, and ⑷, ⑽ are used to lead from the first polarizing beam splitter 5 The shape of the surface of the second polarizing beam splitter 8 is slightly the same. Regarding the polarizing beam splitter, the third embodiment is the same as the first embodiment. However, the configuration and surface shape of the mirrors 4 and 14 are different. Fig. 4 is used to describe the arrangement of the optical elements that are characteristic of the present invention. In Fig. 4, pru (α), prv (α) are, and the incident light beam incident at the incident angle j 316248 19 200539981 is reflected by the mirror The refraction power (power) in the U and v directions of the reflected light beam. Ptu (α), ptv (α) are the u direction and V direction of the penetrating beam of the reflecting beam that is incident at the incident angle α of the beam. Here, the u direction is the direction perpendicular to the traveling direction of each beam and is parallel to the incident surface of the beam (the surface formed by the incident beam and the reflected beam), and the V direction is perpendicular to the traveling direction of each beam. And perpendicular to the direction of the incident surface of the light beam. Here, the refractive power (Power) is one of the parameters showing the refractive performance of the optical element. 73 shows the state of the refracting surface, and generally speaking, it is inversely proportional to the surface curvature ^ radius R, With fold The emissivity n is directly proportional. In Figure 4, the surface curvature radii R are the same, in the case of uniform, and have a maximum value relative to the optical system (when the surface shape of the optical element is slightly flat), If the refractive index is η, the refractive powers ^ ⑷ and ^ ⑷ can be expressed by the following T formula. ⑵ (3)

cosa R

Household rv (a) = 2cosa 丄 R: Generally speaking, even if the surface shape of the optical parts is flat, there will still be a difference in the clothing field. _General processing precision is about no to / 20, If the surface shape is formed with a higher precision than Λ / 20, it will take a great deal of cost and time. Since &, a general optical element has a surface curvature radius r which is approximately λ / 20. For example, in the case of forming a polarized beam splitter with a beam angle of 45 on a dielectric multilayer film on (η: 2.41), 316248 20 200539981 can be obtained by using the M⑺ and ⑺ formulas, respectively. Household π '(45.) == 2 · 8χ 丄 (4) R w Household rv (45 °) = ΐ · 4χ 丄 (5)

R can be known from the formulas W and (5) that the incident angle at the light beam is 45. In the report, during the reflection, the refractive power in the u direction is greater than the refractive power in the 乂 direction, which is Daejeon to the right. If the difference between the refractive power in the u direction and the ν direction is transmitted to the processing point, it becomes astigmatism, and it may not be possible. Obtain stable processing quality. On the other hand, in the present invention, when the optical fiber is constructed, the surface shape of several optical elements is slightly reduced so that the light beam of one optical element enters the light beam of the ^ element facing the other. The incident surface is vertical, and the beam angle of the optical element on one side and the optical element on the other side are arranged first. In the same way, the incident angles of the first beams are the same. Here, the mirrors 14a, 14b are used to describe 1V, r, φ, and c, i4b; In FIG. 5, when the / mirror ’reflector 14a will radiate light from the person in the x direction == the heart will be reflected by the mirror 14a = R: ;;, b, the mirror surface of the mirror:

"," The mirror surface curvature half of AR 14b and AR are defined by the u side of mirror 14a. Rb ° =] The refractive power in the direction is ρ_ (45 ν and the radiation is Parv (45.) , ^ W 力 立, fold P⑷ towards the direction., The refraction in the U direction of Shishe 1 and 14b is

Pbru (45), the refraction of 64 · 丄 4 ^ Qiaomen in the V direction is Pbrv (45.), Then the laser light reflected by! 4b is reflected by the mirror 14a and the mirror 14b The refraction power Pru in the U direction of all persons &, so that a becomes a 1 π knife, which can be expressed by the following formula 316248 21 (6) 200539981. ^ = ^ (45 °) + / > m (45 °) =: i.4x ^ = ^ (45 ^ + ^ (450) = 2.8 x

⑺. Here, since the mirror and the mirror 14b are slightly the same shape, the above Pru is slightly equal to Pα, so the difference in the refractive power in the u direction / direction can be eliminated, and as a result, the image at the processing point can be reduced. Astigmatism, and stable processed product f can be obtained. Since the mirror 4 & also has the same structure, the same effect can be obtained. The above is based on α = 45. To discuss, if it is a general angle, it can be expressed by the following formula. ⑻ (9)

Household ",-+ ΡΛγμ (a) = 2cos α 丄 + —-—— L

Ra cos a Rb ⑺ = Ka) + 〇) = JLL + 2cos α 丄 cos a R Rl —In the case of Ra% Rb ’, we can know from equations ⑻ and (9) that p

It is slightly equal to Prv ', so the difference in refractive power between the U direction and the v direction can be eliminated, which is the same as when U α = 45. Astigmatism at the processing point can be reduced, and a certain processing quality can be obtained. Heart ▲ The bracket element that fixes the optical element has a directional structure. The surface curvature half # R of the mirror supported by the bracket changes along the directionality. Therefore, in the case of astigmatism, placement i The reflectors supported by the brackets are set so that the directivity of the brackets faces the same direction for each person, and the light beams of the optical elements on one side are incident to the light incident surfaces of the optical elements on the other side. 'And the human angle of the beam of the optical element 316248 22 200539981 to one side and the light of the optical chirp to the other side ^ Figure 6 is an example. In Figure 6, the second and second are the same. Sub-element 37a and second optical element 37b are sub-elements 37a-Garden, an optical element with the same surface shape, the support piece 38a and the second support member have a "..." Without the direction axis of the bracket member, the radius of curvature of the two surfaces of the optical element such as the mirror-mirror on this bracket is in the direction of A and the mirror, and the direction of mu is rB. As shown in the figure In general, the beam incident surface of the first HHBH 7 弟 child piece 37a is perpendicular to the beam incident surface of the first-learning piece 37b, and the incident angle of the light beam of the first # = piece 37a and The angle of incidence of the other optical beams on the second optical element is the same (for example, 45. ΛΛ 士 + and the second optical element 37b, l): Set the first optical element 37a

In order to match the directivity of the bracket member with A f on the incident surface, the refractive power Uv in the broad direction of the reflection of the second optical element 37 b and the v direction can be expressed by the following formula: 0 4-^ (45 ^ + / ^ (45) = 1.4) ^ + 2.8) ^ (1〇) 8 Ra Α = 4 (45Κλ (45. Bu 2.8χ 丄 + i 4 x 丄 (1 ^ Rn from the (10), ( 11) It can be known from the formula that Pru is equal to Prv, so astigmatism caused by a directional bracket can be eliminated. As a result, astigmatism at the processing point can be reduced, and stable processing quality can be obtained. From the above, we can know that It is known that the incident angle is 45. In addition, astigmatism can also be eliminated. In addition, a cheaper bracket with directivity can be used to reduce the cost of processing equipment. 23 3] 6248 200539981 So far it has been explained In the optical system for performing mask transfer in this embodiment, there are a plurality of optical elements arranged behind the mask. This is mainly because during the mask transfer, the image of the optical element after the mask is The difference affects the beam quality of the processing point. In addition, most of the You can also use the same way of thinking to configure the transmission effect of the optical element. Tian Tian '' is not only an optical system for mask transfer, but also can be used to configure the optical element, which can also reduce the optical aberration. The difference is 4. The seventh embodiment is about the fourth embodiment of the present invention, which shows that a polarizing beam splitter with a convex surface and a concave lunar surface is used as the first polarizing beam splitting =: The polarizing beam splitter with a concave shape on the surface and a convex shape on the back! The polarization splitting mechanism splits a laser beam into two laser beams. 66 = f vertical ~ depicts two laser beams, which can be implemented at two places at the same time. Plus, 砀 = Structure diagram of the laser processing device. In the second figure of the eight parallel shovel, '22 is a polarizing knife light mirror whose surface is convex and the back is concave (Figure 8 of the shame, π master & _ 23 is a concave surface and a convex surface on the back = (refer to Figure 8 (5)). Here, since the shape of each surface is determined by the shape of the grinder, etc., it can be controlled by the control system = and: : Choose the composition of a dense shape according to the desired :; two: shape polarization polarization The following will be described on a surface of the polarization beam splitter of the present invention wherein the shaped 31624824 200 539 981 shape.

In Figure 8, P Λ ,,., U) and Ptv (α) are, with the incident angle of the beam "the incident incident light beam penetrates the optical element, and its refractive power is in the U and ν directions. , The curvature of the surface is half ... the case of concentric circles 2 = the optical system has a maximum value (for the surface shape of the optical element: ^ the refractive index is ")

Ptv (a) can be expressed by the following formula. k cos or A⑷ = cos " sin2 (R cosa] ^ * 〇2) 〇3) 形成 The dielectric angle of incidence is 45 on ZnSe (n-2.41). The polarized beam splitter is used to obtain the following formula. The hunting consists of 4 (12), (13) == 3.2x— (14) ^ ν (45 °) = ΐ.6χ-1 (15) from (4), (5), (Η), (15 ) Can be found in the formula, the angle is 45. # 中 ’At the time of reflection and at the time of penetration, the refractive power in the u direction is greater than the refractive power in the v direction. If the difference between the shooting force and the shooting force is transmitted to the processing point, == and the refraction in the V direction can obtain stable processing quality. ? '丨 Becomes astigmatism' and may not be able to focus on the refractive power of the polarizing beam splitter at the time of penetration. The refractive power on the surface of the polarizing beam splitter is added to: 316248 25 200539981 at Refraction on the back. That is, the refraction powers Ptua (45 °) and Ptva (45.) in the U direction and the v direction at the time of penetration are obtained by adding 1 and 2 to the front and back surfaces respectively in equations (14) and (15). Subscript to display, and you can get the following formula 0 1 (45.) =. + 12 = 32: ^ (45 °) = ^ i + ^ 2 = L6 > (l6)

--1-- J 07) Therefore, 'If the surface is convex as shown in Fig. 8⑷, I: == (: 2 < 0)', then the refraction of the surface and the backside and the direction of each other : The refractive power becomes smaller during penetration. As a result, the effect of reducing astigmatism can be obtained because the difference in the u direction becomes smaller. The back is like a convex catwalk ... cancel each other out, so that wearing = the same ’due to the refractive power of the surface and the back

The refraction becomes smaller when the teeth are penetrated.士士 罢 盘, ^ direction and V direction of the refractive power: As a result, due to the U effect. The absolute value of the radius of curvature of the astigmatism and the back surface in the present invention can be reduced later: Table: Shape 'must make the surface processing precision more precise, comparable and accurate, so it must reach a more general connection It is explained below that the full engraving Γ '4 is λ / 20 or less. 0 The maximum of the second polarizing beam splitter: shape: the first polarizing beam splitter in the system and the refraction described previously: the addition of each optical element is the same, The refractive power of the whole optical system acts as a bull, and determines whether the aberrations are large or small. 316248 26 200539981 Therefore, the optical element between the first polarizing beam splitter 22 to the second polarizing beam splitter 23 used in the optical system of FIG. 7 is divided into laser light 6 that penetrates the first polarizing beam splitter 6 The light path a and the light path B of the reflected laser light 7 are described. In the light path A, the laser light 6 'passing through the first polarizing beam splitter 22 is guided to the second polarizing beam splitter 23 by the reflecting mirrors 14a & 14b. Since the mirrors 14a and 14b are relatively easy to fabricate, they can be used with mirrors with a precision of about 10 to about / 20. : As follows = not unusual 'Since the flatness of the galvanometer mirror is relatively deteriorated, it is more desirable to have a precision from completion to about / 15 to λ / 20. = Here, in the light path B, the first: the polarizing beam splitter 22 is placed: the second 7 :, the first galvanic scanning mirror 13 ... 3b is used to determine the position ... and 13b. Because the first galvano mirror nw, it must be extremely lightweight. In addition, as the first large swallowed brother, in order not to deteriorate the processing quality, it is necessary to make the thickness of the area plus the flat clothing into a thinner and larger shape. The finished == described mirror is deteriorated 'about " " M. In addition, 'W depends on the production machine, and becomes, for example, a concave shape. For the light path A and the light path β a +, the added refractive power may be r. If the flatness is different, it becomes the light path A and the light two = distance. This compromise is the difference in focus on ~ kβ. In the present invention, the shape of each of the first galvanometer scanning mirror 133 and other surfaces is convex, and the shape of the surface of the polarizing beam splitter 22 is concave in the case of the moon. , The surface shape of the table 316248 27 200539981 of the second polarizing beam splitter 23 is concave, and the shape of the back surface is convex. With such a structure, in the eighth light path, there is almost no refractive power when penetrating the first polarizing beam splitter 22, and among the mirrors ... and ⑽, the surface shape is slightly concave and slightly The refractive power in the convergence direction is then guided to the second polarizing beam splitter 23, and when the second polarizing beam splitter ^ reflects, the refractive power in the slightly converging direction is added from the slightly concave shape of the surface. As a result, the refractive power slightly converged. On the other hand, in the light path B, when the first polarizing beam splitter M reflects, the refractive power from the surface is slightly convex, and is guided to the first galvanic scanning mirrors 13a and m. Since the first galvano-scanning mirrors 13a and 13b are relatively concave, the refractive power of the stronger convergence direction is added. As a result, the laser with a slightly smaller refractive power of the convergence direction "7, with almost the same refractive power Penetrates the second polarizing beam splitter 23.

In the above, the surface shapes of the mirrors 14 & and 14 ′ are slightly concave, and even in the case of a slight convexity, the surface shapes of the first galvanic scanning mirrors 13a and 13b are relatively concave and concave. In this case, the light path can be reduced by making the surface shape of the first polarizing beam splitter 22 convex and the shape of the back surface concave, and making the surface shape of the second polarizing beam splitter 23 concave and the shape of the back surface convex. The difference in refractive power between A and the diameter 3. However, since the effect of reducing the surface shape of the mirrors 14a and 14b is slightly concave, it is preferable to have a concave shape. ... As described above, according to the present invention, "the elimination of the aberration component of each optical element in the optical system" has the effect of having an optical system that obtains less optical aberrations such as astigmatism and focus aberration. 316248 28 200539981 In addition, in this embodiment, the polarizing beam splitter with the convex surface on the back and concave on the back is used as the first polarization separating mechanism, and the polarizing beam splitting on the surface is concave with the convex on the back. Mirror as the second polarization splitter. In the case where the first galvano-scanning mirrors 13a and 13b are convex and convex, a polarizing beam splitter with a concave surface and a convex surface on the back can be configured. It is the first polarizing knife branching structure, and uses a polarizing beam splitter with a convex shape on the surface and a concave shape on the back as the second polarization separation mechanism. Contrary to the above configuration, each optical element can be eliminated from the optical system. It can be seen from the above-mentioned sub-brightness that the optimal values of the shape and flatness vary depending on the optical system or the optical element used in the optical system. In addition, in this embodiment, the shape of the first and second polarized light separation mechanisms is focused on, and from the above description, it can be known that among other optical components, the same thinking method will be used. best value. In addition, although the description is divided into the first, second, and third embodiments, these embodiments may be combined. (Industrial Applicability) When a laser beam is split into two or more laser beams, and laser processing is performed at two or more locations at the same time, the laser processing device of the present invention is suitable for reducing production Difficulties and costs and improve processing quality. [Brief description of the drawings] Fig. 1 is a configuration diagram showing a laser processing apparatus according to a first embodiment of the present invention. Le 2 is a schematic view of a 316248 29 200539981 bracket part of a polarizing beam splitter according to the first embodiment of the present invention. Fig. 3 is a diagram showing the second through the second through the present invention. The figure 4 of the shooting processing device for household and a 孓 evil is used to explain the surface shape of the first learned piece of laser processing clothing placed in this type of hairpin — ψ βκ-Spooner. • All ^ y /, A model diagram of the relationship between refractive power. The liver is used to explain the arrangement mode of the optical element of the two-radiation device of the bear of the second embodiment of the present invention. Field processing • Figure 6 is a schematic diagram for explaining the laser processing of the 22-type optical fiber with directivity of the 2nd, +, and directional devices of the present invention. The relationship between the arrangement of the M-piece holder and the refractive power. Fig. 7 is a structural diagram showing the flute of the present invention. Brother's 3rd laser processing mode of the first model: Figure ⑷ is used to explain the third embodiment of the optical processing device of the present invention on the surface of the photo processing. Mode of Relation between φ-shape and Refractive Power FIG. 9 is a structural diagram showing a conventional technique related to the present invention. Fig. 1 is a schematic diagram for explaining a polarizing beam splitter of a conventional processing device related to the present invention. Laser of Τ [Description of Symbols of Main Components] 1 Laser Oscillator. 2 '6' 7 '10, 11, 28 Laser Light 3 Mask 4, 4a, 4b, 4z, 14, 14a, 14b, 27 Reflector 316248 30 200539981 5 > 22 First polarization splitting mechanism (first polarizing beam splitter) 6p " 6s 7p '7s' 28p' 28s Polarizing direction 8, 23 Second polarization splitting mechanism (second polarizing beam splitter) 9 Damper 12 First galvanic scanning mirror 13, 13a, 13b First galvanic scanning mirror 15 First shutter 16 Second shutter 17 Lens 18 XY stage 19 Energy sensor 20 Workpiece 24 First polarizing beam splitter 25 Second polarizing light Beamsplitter 26 Window hole portion 31 Fixing bracket 32 Bracket support 33a 1st fixing screw 33b 2nd fixing screw 34a 1st adjusting hole 34b 2nd adjusting hole 35a 1st rotating car by 35b 2nd rotating shaft 36 optical base 37a 1st Optical element 37b Second optical element 38a First support element 38b Second support element D Incident light path d Beam point diameter f Focal length n Refractive index R Surface curvature radius

316248

Claims (1)

200539981 10. Scope of patent application: 1. A laser processing device is provided with an optical system that guides laser light emitted from a laser oscillator to a majority of optical elements of a workpiece and is separated by a first polarization The mechanism splits one laser beam into two i laser beams, one passes through a mirror and the other is scanned by the first galvano-scanning mirror in the 2 axis direction. After guiding the two laser beams to the second polarized light separating mechanism, the first The two galvano scanning mirrors scan and process the object, which is characterized in that the optical axis of the laser light is 45. Way to configure the first and second polarized light separation mechanisms. 2. The laser processing device according to item 丨 in the patent application range, wherein the first and second polarizing separation mechanisms are polarizing beam splitters having a dielectric multilayer film coating on the surface. , I 3 .: Application: The laser processing device of item i of the luxury patent scope, wherein the surface of one side of the first and second polarization separating mechanisms is concave, and the back of the surface is convex. The laser light reflected in the first polarized light separation mechanism is to the first galvano-scanning mirror whose surface shape is concave, and the first polarized light separation mechanism is configured such that the side reflecting the laser light is concave. The back of this surface is convex. Among them, the above convex shape is the surface. For example, the laser processing device of the third scope of the patent application, wherein the polarization separation mechanism is concave with the surface reflecting the laser light side as the concave shape, and the above concave shape is the surface 316248 32 200539981 has a convex back surface and guides the laser light reflected in the first polarized light separation mechanism to the first galvano-scanning mirror with a convex surface shape, and the second polarized light separation mechanism is a side that reflects the laser light The surface of is convex, and the back of the surface is concave. … 6 .: Laser processing of any one of items 3 to 5 of the scope of patent application: set, wherein the wavelength of the laser light is taken as; when I, the surface of the first and second polarized light separation mechanism The concave or convex shape is formed with a precision of / 2 or less. 7. = Please: In the laser processing of any of the items i to 6 of the range of interest, 'in the above optical system, the surface shape is arranged slightly similar to the optical element, so that the beam incident surface of the -side chirped element In addition, the incident surface of the optical element on one side is perpendicular, and the incident angle of the beam of the photon element is the same as the incident angle of the optical element on the other side. The laser protection device according to item 7 of the T patent 1 scope, wherein a photomask is provided in the field light path up to the above-mentioned first polarized light splitter of the structure A emitted by the MEMS oscillator. The above-mentioned set of optical elements is arranged between the square, the photomask, and the object to be processed. 9. If the scope of the patent application is the seventh, fix the above-mentioned "... element two-one set, where" m has individuality, and the m-frame has the direction. " The force arrangement is in the direction of the incident surface of each optical element. 316248 33 200539981 10: The laser processing device of any one of items 6 to 8 of the application range. The wavelength of the above laser light is: The surface shape of the laser beam is set to a precision of η. The laser force ^ is set as the w term of the material range, where the H-th optical device is perpendicular to the traveling direction of the laser light, and can be A mechanism for adjusting the angle in the two-axis direction, which is orthogonal to each other, ^ ^ 3 12. The laser processing device such as the one claimed in the May patent surface, which is provided with the second polarized light for energy loss Laser light damper for separators. 35 316248 34