TW200538260A - Cutting tool for glass or wafer - Google Patents
Cutting tool for glass or wafer Download PDFInfo
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- TW200538260A TW200538260A TW93115441A TW93115441A TW200538260A TW 200538260 A TW200538260 A TW 200538260A TW 93115441 A TW93115441 A TW 93115441A TW 93115441 A TW93115441 A TW 93115441A TW 200538260 A TW200538260 A TW 200538260A
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- Taiwan
- Prior art keywords
- cutting
- cutting wheel
- patent application
- wheel blade
- item
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- 238000005520 cutting process Methods 0.000 title claims abstract description 126
- 239000011521 glass Substances 0.000 title abstract description 16
- 230000002093 peripheral effect Effects 0.000 claims description 6
- 230000001788 irregular Effects 0.000 claims 1
- 235000012431 wafers Nutrition 0.000 description 8
- 239000000463 material Substances 0.000 description 7
- 238000005516 engineering process Methods 0.000 description 5
- 238000010586 diagram Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 230000008092 positive effect Effects 0.000 description 1
- 239000004575 stone Substances 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B33/00—Severing cooled glass
- C03B33/10—Glass-cutting tools, e.g. scoring tools
- C03B33/105—Details of cutting or scoring means, e.g. tips
- C03B33/107—Wheel design, e.g. materials, construction, shape
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Processing Of Stones Or Stones Resemblance Materials (AREA)
- Polishing Bodies And Polishing Tools (AREA)
- Dicing (AREA)
- Re-Forming, After-Treatment, Cutting And Transporting Of Glass Products (AREA)
Abstract
Description
200538260 五、發明說明ο) 【發明所屬之技術領域】 本發明係有關於一種刀具結構,詳而言之,尤指一種 可應用於玻璃、晶圓之切割刀具之結構,透過本發明所提 供切割輪刀之内凹曲率,可積極提升其切割品質及使用壽 命之切割輪刀結構。 【先前技術】 按,一般二氧化石夕所產生之玻璃與晶圓片,其切割操 作係以特製之刀具進行,由於晶圓片之生產過程昂貴,於 進行切割時必須盡量的避免因為切割所產生之損耗,以免 造成生產成本之增加,且因為切割所造成之晶圓品或玻璃 之表面之破裂面積,係為一重大必須控制之因素,因為過 大之破裂面積會造成周圍之晶圓片或玻璃無法利用,而造 成因為切割所產生之損失,且,因為切割時所產生之縱向 破裂,也會跟切割刀具也有關係。 而習知所使用之一種切割輪刀係應用於玻璃乃至晶圓 片的切割,而玻璃的切割主要係利用切割輪刀於玻璃上進 行切割畫線,然後再沿該切割線將玻璃予以斷裂,此類玻 璃切割輪刀之相關技術有專利公告第3 0 8 5 8 1號等。而如第 6、7圖所示,係該習知技術之切割輪刀9 0示意圖,該切割 輪刀9 0係呈一圓盤體刀具,其包括有一軸孔9 1及前後二圓 形環面9 2、9 3,該前、後環面9 2、9 3的外周端緣各以一 0 角度的徑向向外去角而相切形成一具20角度的切割環端94 及該切割環端9 4之前後二切面9 5、9 6,該切割環端9 4上並 設有固定節距且相互交替的凹、凸部9 7、9 8設置,用以便200538260 V. Description of the invention ο [Technical field to which the invention belongs] The present invention relates to a tool structure, in particular, a structure of a cutting tool that can be applied to glass and wafers. The cutting provided by the present invention The concave curvature of the wheel blade can actively improve its cutting quality and service life of the cutting wheel blade structure. [Previous technology] According to the general, the cutting operation of glass and wafers produced by stone dioxide is performed by special tools. Because the wafer production process is expensive, it must be avoided as much as possible when cutting. The loss caused to avoid increasing the production cost, and the cracked area of the surface of the wafer or glass caused by cutting is a major factor that must be controlled, because an excessively large cracked area will cause the surrounding wafers or Glass cannot be used, resulting in losses due to cutting, and because of the longitudinal cracks generated during cutting, it is also related to the cutting tool. A cutting wheel knife that is commonly used is used for cutting glass and even wafers. The cutting of glass is mainly using a cutting wheel knife to cut lines on the glass, and then break the glass along the cutting line. Related technologies of such glass cutting wheel blades include Patent Bulletin No. 3 0 8 5 8 1 and the like. As shown in FIGS. 6 and 7, it is a schematic diagram of a cutting wheel blade 90 of the conventional technology. The cutting wheel blade 90 is a disc-shaped cutting tool, which includes a shaft hole 91 and front and rear circular rings. Faces 9 2, 9 3, and the outer and peripheral edges of the front and rear annular faces 9 2, 9 3 are tangentially angled outward at a radial angle of 0 to form a 20-degree cutting ring end 94 and the cutting The ring end 9 4 has two front and rear cutting planes 9 5 and 9 6. The cutting ring end 9 4 is provided with concave and convex portions 9 7 and 9 8 of a fixed pitch and alternating with each other.
第5頁 200538260 五、發明說明(2) 利對玻璃進行切割。 前述該切割輪刀9 0之切割環端9 4具有較大的20角度及 相對組成該20角度的二徑向平面切面,該較大角度雖可使 切割輪刀9 0之使用壽命變長,但卻會使切割時玻璃的水平 裂痕因材料於該平面切面推擠的問題而加大,進而導致切 割品質不良的缺失,而此缺失若出現於晶圓片的切割上, 則其所形成的後果損失顯然會更加嚴重,因此,該習知切 割輪刀技術顯非最佳之設計及較佳切割方式的解決手段, 而有待業界或有智之士再加以研發、突破之必要。 鐾於前述切割輪刀其切面角度所形成之使用壽命及切 割品質相衝突之缺點及其結構設計上未臻理想之事實,本 案發明人即著手研發其解決方案,希望能開發出一種兼具 較長使用壽命及較佳切割品質之切割輪刀結構以服務產業 及社會大眾,遂經多時之構思而有本發明之產生。 【發明内容】 本發明之目的在於提供一種切割輪刀結構,其係利用 一切割輪刀其係具有一内凹曲率,使該切割輪刀於其結構 設計上具有較長之使用壽命,且並能有效減緩切割時材料 所產生推擠之現象,進而獲得較佳的切割品質者。 本發明之再一目的在於提供一種切割輪刀結構,其係 利用一切割輪刀其係具有一内凹曲率,其能使切割時減低 橫向壓力而減少水平裂痕程度,進而兼顧其使用壽命及切 割品質者。Page 5 200538260 V. Description of the invention (2) It is beneficial to cut glass. The aforementioned cutting ring end 9 4 of the cutting wheel blade 90 has a larger 20 angle and two radial plane cutting planes which relatively constitute the 20 angle. Although the larger angle can make the life of the cutting wheel blade 90 longer, However, the horizontal crack of the glass during dicing will be enlarged due to the problem of the material pushing on the plane cut surface, which will lead to the lack of poor cutting quality. If this defect appears on the wafer cutting, it will be formed. Consequential losses will obviously be more serious. Therefore, the conventional cutting wheel technology is obviously not the best design and a better cutting method. It needs to be researched and breakthrough by the industry or a person with wisdom.鐾 Because of the disadvantages of the conflicting service life and cutting quality formed by the cutting surface angle of the aforementioned cutting wheel blade and the fact that its structural design is not ideal, the inventor of this case set out to develop its solution, hoping to develop a solution The cutting wheel blade structure with long service life and better cutting quality serves the industry and the public, and the invention came into being after many years of conception. [Summary of the Invention] The object of the present invention is to provide a cutting wheel cutter structure, which uses a cutting wheel cutter which has a concave curvature, so that the cutting wheel cutter has a long service life in its structural design, and Can effectively slow down the phenomenon of material pushing during cutting, and then obtain better cutting quality. Another object of the present invention is to provide a cutting wheel blade structure, which utilizes a cutting wheel blade which has a concave curvature, which can reduce the lateral pressure during cutting and reduce the level of horizontal cracks, thereby taking into account its service life and cutting Quality person.
第6頁 200538260 五、發明說明(3) 本發明為達成上述之目的及功效,所採用之技術手段 係包括有一切割輪刀,該切割輪刀係呈一具有厚度之圓盤 刀具,其包括有前、後二圓形環面,該環面的外周端緣係 向外連結有一内凹切面,該内凹切面具有一曲率半徑R, 而該曲率半徑R係介於2〜2 0 0 mm之間,該連結環面外周端緣 的内凹切面並相交而形成一切割環端,藉該切割環端可對 玻璃、晶圓片等進行切割操作。 【實施方式】 茲為使 貴審查委員對本發明之結構特徵及所達成 之功效有更進一步之瞭解與認識,謹佐以較佳之實施例及 配合詳細之說明,說明如後: 本發明係為解決習知技術之切割工具於進行切割時, 所造成之縱向與橫向之破壞面,因為切割工具之角度越大 可使其壽命變長,但會因切割時的水平裂痕因材料推擠的 問題而加大,因而增加因為切割所造成之成本壓力,故, 本發明係提供一具有内凹曲率之切割工具,使得切割材料 推擠的現象減緩,橫向的壓力較相同角度之切割輪刀為 小,可減少水平裂痕的程度,進而獲得較佳的切割品質。 首先,請參閱第1至第2圖,本發明切割輪刀結構係包 括有一切割輪刀1 〇,該切割輪刀1 〇係呈一具有厚度T之圓 盤刀具,其包括有一軸孔1 2及前、後二圓形環面1 4、1 6, 該軸孔1 2係用以供一刀具心軸之穿設(未圖示),且該刀具 心軸亦可與該切割輪刀1 0—體成形,而該前、後環面1 4、Page 6 200538260 V. Description of the invention (3) In order to achieve the above-mentioned object and effect, the technical means adopted by the present invention includes a cutting wheel cutter, which is a disc cutter having a thickness, which includes: The front and back circular toroids, the outer peripheral edge of the torus is outwardly connected with a concave concave surface, the concave concave mask has a radius of curvature R, and the radius of curvature R is between 2 ~ 2 0 0 mm In the meantime, the inner concave cutting surface connecting the outer peripheral edges of the annular surface and intersect to form a cutting ring end, and the cutting ring can be used to perform cutting operations on glass, wafers and the like. [Embodiment] In order for your review members to have a better understanding and understanding of the structural features and achieved effects of the present invention, I would like to provide a better embodiment and a detailed description, as described below: The present invention is to solve The cutting surface of the cutting tool of the conventional technology is caused by the vertical and horizontal damage surface, because the larger the angle of the cutting tool, the longer the life of the cutting tool, but the horizontal crack during cutting will be caused by the problem of material pushing. It increases the cost pressure caused by cutting. Therefore, the present invention provides a cutting tool with concave curvature, which reduces the phenomenon of cutting material pushing. The lateral pressure is smaller than a cutting wheel with the same angle. It can reduce the level of horizontal cracks, and then obtain better cutting quality. First, referring to FIG. 1 to FIG. 2, the cutting wheel structure of the present invention includes a cutting wheel blade 10, which is a disk cutter having a thickness T, which includes a shaft hole 1 2 And front and back circular toroids 1 4 and 1 6, the shaft hole 12 is used for penetrating a cutter spindle (not shown), and the cutter spindle can also be connected with the cutting wheel cutter 1 0—body forming, and the front and back torus 1 4,
第7頁 200538260 t*、發明吕兄明(4) 6的外周端緣141、161係向外連社 該内凹切面18、2。係具有—内卜面…20’ 率半徑R係介於2〜2〇〇mm間, f丰徑R,而該内凹曲 交而形成一切割環端2 2,二冉者,該内凹切面1 8、2 0係才E 片等進行切割操作。 藉""亥切σ彳環端2 2可對玻璃、晶園 繼請參閱第3圖,太 ^ 時,由於該内凹切面 X明藉該切割環端22進行切割 割時材料於該内凹 、20具有内凹狀之弧斜面,可使切Page 7 200538260 t *, the invention of Lu Xiongming (4) 6 The outer peripheral edges 141, 161 of the outer concavity cut surface 18, 2 of the outer association. The system has an inner surface ... 20 'rate radius R is between 2 ~ 200mm, f abundance diameter R, and the concave curve intersects to form a cutting ring end 2 Cutting planes 1 and 20 are used for cutting operations such as E-pieces. Borrow " " Haiche σ 彳 ring end 2 2 can be used for glass, crystal garden, please refer to Figure 3, too, because the concave cut surface X is cut by the cutting ring end 22 when cutting material. Recessed, 20 has a concave arc slope, which can cut
橫向的壓力較相同且 8、20的推擠現象減緩,而使得其 j2少切割時因度之習知平面型切面為小,而可 又付又佳、較精密〜擠之水平裂痕的擴張程度,進而 /、相同角度的切割&刀』°口質。因&,本發明可使與習知 度切割輪刀的優點广刀具有相近之壽♦,卻可獲得較小角 提升切割品質之而兼具有增長切割輪刀之使用壽命及 繼請參閱第3圖重積極性功效。The lateral pressure is relatively the same and the pushing phenomenon of 8 and 20 is slowed down, which makes the j2 less cutting. The flat cutting plane is smaller, which can be better and more accurate. The degree of expansion of the horizontal crack is more precise. , And / or cutting & knife with the same angle. Because of & the present invention can make the advantages of the conventional cutting wheel blades. The wide blade has a similar life. However, it can obtain a smaller angle to improve the cutting quality and increase the service life of the cutting wheel blades. Figure 3 focuses on positive effects.
則性或不規則性的曰該切割環端22上係可進一步設有規 222及凸部223,如,面221 ’該端面221包括有複數凹部 及一凸部223的遠It4圖所示,該端面221可為一凹部222 部222及—凸部二父錯組合,亦可如第5圖所示,為二凹 部223係可為不的連續交錯組合,其中該凹部222及凸 部、U行凹部、疋形狀設置(如平面凸部、三角形面凸 割力。 凹部等),用以增加該切割環端2 2的切 因疋,本發明 凹切面具有容蜗、刀割輪刀結構藉由上述設計,可使該内 ’咸緩切副時材料的推擠現象,並使得其Regularity or irregularity can be said that the cutting ring end 22 can further be provided with a gauge 222 and a convex portion 223, for example, the surface 221 'the end surface 221 includes a plurality of concave portions and a convex portion 223, as shown in the far It4 figure, The end surface 221 may be a combination of a concave portion 222 and a convex portion 222, or as shown in FIG. 5, the two concave portions 223 may be a discontinuous staggered combination. The concave portion 222 and the convex portion, U Row recesses and ridge shapes are provided (such as flat convex portions, triangular plane convex cutting forces. Recesses, etc.) to increase the cutting factor 该 of the cutting ring end 22. The concave cutting surface of the present invention has a snail-receiving structure and a cutting wheel structure. According to the above design, the material pushing phenomenon of the internal 'salty and slow cutting side can be made, and the
200538260 五、發明說明(5) 橫向的壓力較相同具0角度之習知徑向平面切面為小,而 可大為減少切割時因材料推擠之水平裂痕的擴張程度,進 而獲得較佳、較精密的切割品質,且並與具相同角度的切 割輪刀具有相近之壽命,而為同時顧及切割輪刀使用壽命 及切割品質之較佳設計者。 綜合上述,本發明確已符合發明專利之要件,爰依法 提出專利申請。惟,以上所述僅為本發明之較佳實施例, 舉凡熟悉本案技藝之人士援依本發明精神所應用之等效結 構變化,皆應涵蓋在本申請專利範圍内。200538260 V. Description of the invention (5) The transverse pressure is smaller than the same conventional radial plane with a 0-degree angle, which can greatly reduce the expansion of horizontal cracks caused by the material pushing during cutting. Precise cutting quality, and has a similar life as the cutting wheel blade with the same angle, and is a better designer who takes into account both the life of the cutting wheel blade and the cutting quality. Based on the above, the present invention has indeed met the requirements for an invention patent, and a patent application has been filed in accordance with the law. However, the above description is only a preferred embodiment of the present invention. For example, those who are familiar with the skills of the present case and apply the equivalent structural changes applied in accordance with the spirit of the present invention should be covered by the scope of the patent of this application.
第9頁 200538260 圖式簡單說明 第1圖係本發明之平面正視圖。 第2圖係本發明之平面上視圖。 第3圖係本發明切割環端結構示意圖。 第4圖係本發明切割環端組合結構示意圖。 第5圖係本發明另一切割環端組合結構示意圖。 第6圖係習知切割輪刀之平面正視圖。 第7圖係習知切割輪刀之平面上視圖。Page 9 200538260 Brief Description of Drawings Figure 1 is a plan front view of the present invention. Figure 2 is a top plan view of the present invention. Figure 3 is a schematic diagram of the structure of the cutting ring end of the present invention. FIG. 4 is a schematic diagram of the combined structure of the cutting ring ends of the present invention. FIG. 5 is a schematic view of another cutting ring end combination structure of the present invention. Figure 6 is a plan front view of a conventional cutting wheel blade. FIG. 7 is a top plan view of a conventional cutting wheel blade.
明 說 單 簡 !# 圖 rL ο 9 刀 輪 割 切 軸孔9 1 環面9 2、9 3 切割環端94 切面9 5、9 6 凹部97 凸部98 切割輪刀1 0 軸孔1 2 環面1 4、1 6 外周端緣1 4卜1 6 1 内凹切面1 8、 2 0 切割環端2 2 端面2 2 1 凹部22 2The description is simple! # 图 rL ο 9 The cutter wheel cuts the shaft hole 9 1 torus 9 2, 9 3 cutting ring end 94 cutting surface 9 5, 9 6 recessed part 97 convex part 98 cutting wheel cutter 1 0 shaft hole 1 2 torus 1 4, 1 6 Outer peripheral edge 1 4 Bu 1 6 1 Inner cut surface 1 8, 2 0 Cutting ring end 2 2 End surface 2 2 1 Recess 22 2
第10頁 200538260 圖式簡單說明 凸部223 ΙΗΗ 第11頁Page 10 200538260 Brief Explanation of Drawings Convex 223 ΙΗΗ Page 11
Claims (1)
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW93115441A TWI249460B (en) | 2004-05-28 | 2004-05-28 | A cutting wheel structure |
JP2005149876A JP2005335385A (en) | 2004-05-28 | 2005-05-23 | Cutting tool for glass or wafer |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
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TW93115441A TWI249460B (en) | 2004-05-28 | 2004-05-28 | A cutting wheel structure |
Publications (2)
Publication Number | Publication Date |
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TW200538260A true TW200538260A (en) | 2005-12-01 |
TWI249460B TWI249460B (en) | 2006-02-21 |
Family
ID=35489448
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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TW93115441A TWI249460B (en) | 2004-05-28 | 2004-05-28 | A cutting wheel structure |
Country Status (2)
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JP (1) | JP2005335385A (en) |
TW (1) | TWI249460B (en) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
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JP4836150B2 (en) * | 2008-11-26 | 2011-12-14 | 株式会社日本製鋼所 | Cutter wheel |
JP5174112B2 (en) * | 2010-09-28 | 2013-04-03 | 三星ダイヤモンド工業株式会社 | Scribing wheel |
JP5409726B2 (en) * | 2011-08-30 | 2014-02-05 | 三星ダイヤモンド工業株式会社 | Scribing wheel |
JP2015003513A (en) * | 2013-05-24 | 2015-01-08 | 三星ダイヤモンド工業株式会社 | Cutter wheel and manufacturing method thereof |
CN104961328A (en) * | 2015-06-17 | 2015-10-07 | 京东方科技集团股份有限公司 | Cutter wheel for cutting brittle materials |
JP2022038435A (en) * | 2020-08-26 | 2022-03-10 | ファインテック株式会社 | Scribing wheel for brittle material substrate and method for producing the same |
-
2004
- 2004-05-28 TW TW93115441A patent/TWI249460B/en not_active IP Right Cessation
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2005
- 2005-05-23 JP JP2005149876A patent/JP2005335385A/en active Pending
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Publication number | Publication date |
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JP2005335385A (en) | 2005-12-08 |
TWI249460B (en) | 2006-02-21 |
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