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TW200511361A - Excimer lamp bulb - Google Patents

Excimer lamp bulb

Info

Publication number
TW200511361A
TW200511361A TW093120140A TW93120140A TW200511361A TW 200511361 A TW200511361 A TW 200511361A TW 093120140 A TW093120140 A TW 093120140A TW 93120140 A TW93120140 A TW 93120140A TW 200511361 A TW200511361 A TW 200511361A
Authority
TW
Taiwan
Prior art keywords
discharge
discharge container
excimer lamp
lamp bulb
container
Prior art date
Application number
TW093120140A
Other languages
Chinese (zh)
Other versions
TWI287819B (en
Inventor
Masahide Kiyose
Satoru Furue
Kenichi Hirose
Taku Sumitomo
Original Assignee
Ushio Electric Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ushio Electric Inc filed Critical Ushio Electric Inc
Publication of TW200511361A publication Critical patent/TW200511361A/en
Application granted granted Critical
Publication of TWI287819B publication Critical patent/TWI287819B/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J65/00—Lamps without any electrode inside the vessel; Lamps with at least one main electrode outside the vessel
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J5/00—Details relating to vessels or to leading-in conductors common to two or more basic types of discharge tubes or lamps
    • H01J5/50—Means forming part of the tube or lamps for the purpose of providing electrical connection to it
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J65/00—Lamps without any electrode inside the vessel; Lamps with at least one main electrode outside the vessel
    • H01J65/04—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2893/00—Discharge tubes and lamps
    • H01J2893/0096—Transport of discharge tube components during manufacture, e.g. wires, coils, lamps, contacts, etc.
    • H01J2893/0098—Vessels

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Electromagnetism (AREA)
  • Vessels And Coating Films For Discharge Lamps (AREA)

Abstract

To provide an excimer lamp having a new structure in which the structure is simple, the discharge container is not damaged by thermal expansion, and discharge can be generated stably. The excimer lamp comprises a discharge container that is made of a material for transmitting ultraviolet rays while the gas for discharge is sealed inside; an internal electrode that is extended in the longitudinal direction inside the discharge container, and is airtightly sealed at the end section of the discharge container; and an external electrode arranged on the outer surface of the discharge container. Its feature is: in the internal electrode, an outer surface in a part for discharging on an area with at least the outer electrode is covered with an inner pipe made of a dielectric material in which at least one end is open in the discharge space.
TW093120140A 2003-09-04 2004-07-05 Excimer lamp bulb TWI287819B (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2003312478 2003-09-04
JP2004178761A JP4013923B2 (en) 2003-09-04 2004-06-16 Excimer lamp

Publications (2)

Publication Number Publication Date
TW200511361A true TW200511361A (en) 2005-03-16
TWI287819B TWI287819B (en) 2007-10-01

Family

ID=34467617

Family Applications (1)

Application Number Title Priority Date Filing Date
TW093120140A TWI287819B (en) 2003-09-04 2004-07-05 Excimer lamp bulb

Country Status (4)

Country Link
JP (1) JP4013923B2 (en)
KR (1) KR100734127B1 (en)
CN (1) CN100472705C (en)
TW (1) TWI287819B (en)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100821999B1 (en) * 2005-07-29 2008-04-15 가부시키가이샤 지에스 유아사 코포레이션 UV lamp and UV irradiation device
JP4400547B2 (en) 2005-10-28 2010-01-20 ウシオ電機株式会社 Excimer lamp and ultraviolet irradiation equipment equipped with excimer lamp
JP4730212B2 (en) * 2006-06-01 2011-07-20 ウシオ電機株式会社 Excimer lamp
JP5019156B2 (en) * 2006-08-21 2012-09-05 ウシオ電機株式会社 Excimer lamp device
JP4830722B2 (en) * 2006-08-29 2011-12-07 ウシオ電機株式会社 Excimer lamp
US8314538B2 (en) * 2008-02-21 2012-11-20 Osram Ag Dielectric barrier discharge lamp with a retaining disc
DE102009007859A1 (en) * 2009-02-06 2010-08-12 Osram Gesellschaft mit beschränkter Haftung Dielectric barrier-discharge lamp for UV-illumination in e.g. process engineering, has centering disk extending from inner electrode till to inner side of tube and loosely supported by burl that is formed by part of wall of external tube
JP5304354B2 (en) * 2009-03-16 2013-10-02 ウシオ電機株式会社 Excimer lamp
CA3123418C (en) * 2010-09-29 2023-10-10 Neo Tech Aqua Solutions, Inc. Excimer light source
JP6212850B2 (en) * 2012-10-12 2017-10-18 ウシオ電機株式会社 Excimer lamp
JP7185521B2 (en) * 2018-12-26 2022-12-07 株式会社オーク製作所 discharge lamp
KR102207676B1 (en) * 2019-04-24 2021-01-26 주식회사 원익큐엔씨 Uv lamp for implant surface treatment
KR102207678B1 (en) * 2019-04-24 2021-01-26 주식회사 원익큐엔씨 Uv lamp for implant surface treatment
KR102229631B1 (en) * 2019-05-13 2021-03-18 주식회사 원익큐엔씨 Uv lamp for implant surface treatment
KR102229630B1 (en) * 2019-05-13 2021-03-18 주식회사 원익큐엔씨 Uv lamp for implant surface treatment
CN114050103A (en) * 2020-11-11 2022-02-15 肯扎纳因达普特拉萨迪股份有限公司 Extreme ultraviolet 222nm excimer lamp and manufacturing method thereof

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3180548B2 (en) * 1994-02-10 2001-06-25 ウシオ電機株式会社 Dielectric barrier discharge lamp
JP3256928B2 (en) * 1996-04-12 2002-02-18 スタンレー電気株式会社 Fluorescent lamp
JP3240603B2 (en) * 1997-07-04 2001-12-17 スタンレー電気株式会社 Fluorescent lamp
JPH1125921A (en) * 1997-07-04 1999-01-29 Stanley Electric Co Ltd Fluorescent lamp
JP2000113861A (en) * 1998-10-02 2000-04-21 Stanley Electric Co Ltd Xenon fluorescent lamp
JP2001185089A (en) * 1999-12-28 2001-07-06 Quark Systems Co Ltd Excimer irradiation device
JP3506055B2 (en) * 1999-07-28 2004-03-15 ウシオ電機株式会社 Dielectric barrier discharge lamp and light irradiation device thereof
JP2002175781A (en) * 2000-09-28 2002-06-21 Harison Toshiba Lighting Corp Discharge lamp and ultraviolet irradiation device
JP2002289150A (en) * 2001-03-26 2002-10-04 Harison Toshiba Lighting Corp Dielectric barrier discharge lamp and ultraviolet irradiation device
JP2003317668A (en) * 2002-04-19 2003-11-07 Hamamatsu Photonics Kk Dielectric barrier discharge lamp

Also Published As

Publication number Publication date
KR100734127B1 (en) 2007-06-29
JP4013923B2 (en) 2007-11-28
CN100472705C (en) 2009-03-25
TWI287819B (en) 2007-10-01
KR20050025251A (en) 2005-03-14
JP2005100934A (en) 2005-04-14
CN1591769A (en) 2005-03-09

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees