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TW200504386A - Center adjustment method of mixed laser, mixed laser light source, and exposure machine - Google Patents

Center adjustment method of mixed laser, mixed laser light source, and exposure machine

Info

Publication number
TW200504386A
TW200504386A TW093108052A TW93108052A TW200504386A TW 200504386 A TW200504386 A TW 200504386A TW 093108052 A TW093108052 A TW 093108052A TW 93108052 A TW93108052 A TW 93108052A TW 200504386 A TW200504386 A TW 200504386A
Authority
TW
Taiwan
Prior art keywords
light source
mixed
mixed laser
core portion
adjustment method
Prior art date
Application number
TW093108052A
Other languages
English (en)
Other versions
TWI329747B (en
Inventor
Yuichi Teramura
Youji Okazaki
Original Assignee
Fuji Photo Film Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fuji Photo Film Co Ltd filed Critical Fuji Photo Film Co Ltd
Publication of TW200504386A publication Critical patent/TW200504386A/zh
Application granted granted Critical
Publication of TWI329747B publication Critical patent/TWI329747B/zh

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G02B6/4201—Packages, e.g. shape, construction, internal or external details
    • G02B6/4204—Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms
    • G02B6/4206—Optical features
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G02B6/4201—Packages, e.g. shape, construction, internal or external details
    • G02B6/4219—Mechanical fixtures for holding or positioning the elements relative to each other in the couplings; Alignment methods for the elements, e.g. measuring or observing methods especially used therefor
    • G02B6/422—Active alignment, i.e. moving the elements in response to the detected degree of coupling or position of the elements
    • G02B6/4226—Positioning means for moving the elements into alignment, e.g. alignment screws, deformation of the mount

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Optical Couplings Of Light Guides (AREA)
  • Semiconductor Lasers (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
TW093108052A 2003-03-25 2004-03-25 Center adjustment method of mixed laser, mixed laser light source, and exposure machine TWI329747B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2003083125 2003-03-25

Publications (2)

Publication Number Publication Date
TW200504386A true TW200504386A (en) 2005-02-01
TWI329747B TWI329747B (en) 2010-09-01

Family

ID=33487032

Family Applications (1)

Application Number Title Priority Date Filing Date
TW093108052A TWI329747B (en) 2003-03-25 2004-03-25 Center adjustment method of mixed laser, mixed laser light source, and exposure machine

Country Status (4)

Country Link
US (1) US7181105B2 (zh)
KR (1) KR101062192B1 (zh)
CN (1) CN100507623C (zh)
TW (1) TWI329747B (zh)

Families Citing this family (86)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7181105B2 (en) * 2003-03-25 2007-02-20 Fuji Photo Film Co., Ltd. Method for adjusting alignment of laser beams in combined-laser-light source where the laser beams are incident on restricted area of light-emission end face of optical fiber
US20090101845A1 (en) * 2005-04-02 2009-04-23 Punch Graphix Prepress Germany Gmbh Exposure Device for Printing Plates
JP4773146B2 (ja) * 2005-07-01 2011-09-14 富士フイルム株式会社 半導体レーザの駆動方法および装置、並びに半導体レーザ駆動電流パターンの導出方法および装置
WO2007013351A1 (ja) * 2005-07-25 2007-02-01 Fujifilm Corporation 画像記録装置及び方法
GB0718706D0 (en) 2007-09-25 2007-11-07 Creative Physics Ltd Method and apparatus for reducing laser speckle
US20080232419A1 (en) * 2007-03-22 2008-09-25 Seiko Epson Corporation Laser array chip, laser module, manufacturing method for manufacturing laser module, manufacturing method for manufacturing laser light source, laser light source, illumination device, monitor, and projector
JP2009134217A (ja) * 2007-12-03 2009-06-18 Seiko Epson Corp プロジェクタ
US8306077B2 (en) * 2008-04-29 2012-11-06 Daylight Solutions, Inc. High output, mid infrared laser source assembly
KR100937868B1 (ko) * 2008-12-10 2010-01-21 삼성모바일디스플레이주식회사 스타일러스 펜 및 이를 구비한 평판 디스플레이 장치
JP4375497B1 (ja) 2009-03-11 2009-12-02 住友電気工業株式会社 Ｉｉｉ族窒化物半導体素子、エピタキシャル基板、及びｉｉｉ族窒化物半導体素子を作製する方法
KR101725542B1 (ko) * 2009-04-09 2017-04-10 가부시키가이샤 브이 테크놀로지 노광 장치용 광 조사 장치 및 그 점등 제어 방법, 그리고 노광 장치 및 기판
US11726332B2 (en) 2009-04-27 2023-08-15 Digilens Inc. Diffractive projection apparatus
US9335604B2 (en) 2013-12-11 2016-05-10 Milan Momcilo Popovich Holographic waveguide display
EP2467079A4 (en) * 2009-08-21 2012-12-26 Alcon Res Ltd FIXED OPTICAL SYSTEM WITH AN ADJUSTABLE TARGET
US8233204B1 (en) 2009-09-30 2012-07-31 Rockwell Collins, Inc. Optical displays
US11320571B2 (en) 2012-11-16 2022-05-03 Rockwell Collins, Inc. Transparent waveguide display providing upper and lower fields of view with uniform light extraction
US11300795B1 (en) 2009-09-30 2022-04-12 Digilens Inc. Systems for and methods of using fold gratings coordinated with output couplers for dual axis expansion
US10795160B1 (en) 2014-09-25 2020-10-06 Rockwell Collins, Inc. Systems for and methods of using fold gratings for dual axis expansion
US9341846B2 (en) 2012-04-25 2016-05-17 Rockwell Collins Inc. Holographic wide angle display
US8659826B1 (en) 2010-02-04 2014-02-25 Rockwell Collins, Inc. Worn display system and method without requiring real time tracking for boresight precision
US8848175B2 (en) * 2010-03-10 2014-09-30 Commscope, Inc. Of North Carolina Test systems that include a centering system for aligning an optical pulse launching device with a multi-mode fiber and methods of operating the same
JP5687013B2 (ja) * 2010-09-14 2015-03-18 株式会社Ｓｃｒｅｅｎホールディングス 露光装置および光源装置
CN102121662B (zh) * 2011-01-24 2013-04-17 广州市雅江光电设备有限公司 一种用于能够成像的灯具的多颗led灯珠合光聚光方法
WO2012136970A1 (en) 2011-04-07 2012-10-11 Milan Momcilo Popovich Laser despeckler based on angular diversity
US8724667B2 (en) * 2011-07-22 2014-05-13 Insight Photonic Solutions, Inc. System and method for multiple laser sources using high semiconductor optical amplifier extinction
WO2016020630A2 (en) 2014-08-08 2016-02-11 Milan Momcilo Popovich Waveguide laser illuminator incorporating a despeckler
EP2748670B1 (en) 2011-08-24 2015-11-18 Rockwell Collins, Inc. Wearable data display
US10670876B2 (en) 2011-08-24 2020-06-02 Digilens Inc. Waveguide laser illuminator incorporating a despeckler
US8634139B1 (en) 2011-09-30 2014-01-21 Rockwell Collins, Inc. System for and method of catadioptric collimation in a compact head up display (HUD)
US9366864B1 (en) 2011-09-30 2016-06-14 Rockwell Collins, Inc. System for and method of displaying information without need for a combiner alignment detector
US9599813B1 (en) 2011-09-30 2017-03-21 Rockwell Collins, Inc. Waveguide combiner system and method with less susceptibility to glare
US9692207B2 (en) 2011-09-30 2017-06-27 Aurrion, Inc. Tunable laser with integrated wavelength reference
US9715067B1 (en) 2011-09-30 2017-07-25 Rockwell Collins, Inc. Ultra-compact HUD utilizing waveguide pupil expander with surface relief gratings in high refractive index materials
US20150010265A1 (en) 2012-01-06 2015-01-08 Milan, Momcilo POPOVICH Contact image sensor using switchable bragg gratings
US9523852B1 (en) 2012-03-28 2016-12-20 Rockwell Collins, Inc. Micro collimator system and method for a head up display (HUD)
US9933684B2 (en) 2012-11-16 2018-04-03 Rockwell Collins, Inc. Transparent waveguide display providing upper and lower fields of view having a specific light output aperture configuration
US9674413B1 (en) 2013-04-17 2017-06-06 Rockwell Collins, Inc. Vision system and method having improved performance and solar mitigation
US9727772B2 (en) 2013-07-31 2017-08-08 Digilens, Inc. Method and apparatus for contact image sensing
US9244281B1 (en) 2013-09-26 2016-01-26 Rockwell Collins, Inc. Display system and method using a detached combiner
US10732407B1 (en) 2014-01-10 2020-08-04 Rockwell Collins, Inc. Near eye head up display system and method with fixed combiner
US9519089B1 (en) 2014-01-30 2016-12-13 Rockwell Collins, Inc. High performance volume phase gratings
US9310560B2 (en) 2014-02-26 2016-04-12 TeraDiode, Inc. Systems and methods for multiple-beam laser arrangements with variable beam parameter product
US9244280B1 (en) 2014-03-25 2016-01-26 Rockwell Collins, Inc. Near eye display system and method for display enhancement or redundancy
RU2560745C1 (ru) * 2014-04-23 2015-08-20 Акционерное общество "Государственный Рязанский приборный завод" Устройство ввода лазерного излучения в торец оптического элемента
US10359736B2 (en) 2014-08-08 2019-07-23 Digilens Inc. Method for holographic mastering and replication
WO2016042283A1 (en) 2014-09-19 2016-03-24 Milan Momcilo Popovich Method and apparatus for generating input images for holographic waveguide displays
US9715110B1 (en) 2014-09-25 2017-07-25 Rockwell Collins, Inc. Automotive head up display (HUD)
US10088675B1 (en) 2015-05-18 2018-10-02 Rockwell Collins, Inc. Turning light pipe for a pupil expansion system and method
FR3030790B1 (fr) * 2014-12-19 2017-02-10 Commissariat Energie Atomique Dispositif optique de projection pour des moyens d'affichage tels que des lunettes a realite augmentee.
EP3241045B1 (en) 2014-12-31 2021-06-16 Dolby Laboratories Licensing Corporation Discrete laser fiber inputs for image projectors
CN111323867A (zh) 2015-01-12 2020-06-23 迪吉伦斯公司 环境隔离的波导显示器
US9632226B2 (en) 2015-02-12 2017-04-25 Digilens Inc. Waveguide grating device
US20160327721A1 (en) * 2015-05-04 2016-11-10 Corning Incorporated Optical fiber lighting device and method
US11366316B2 (en) 2015-05-18 2022-06-21 Rockwell Collins, Inc. Head up display (HUD) using a light pipe
US10247943B1 (en) 2015-05-18 2019-04-02 Rockwell Collins, Inc. Head up display (HUD) using a light pipe
US10126552B2 (en) 2015-05-18 2018-11-13 Rockwell Collins, Inc. Micro collimator system and method for a head up display (HUD)
JP6132995B2 (ja) * 2015-05-27 2017-05-24 三菱電機株式会社 レーザモジュールおよびレーザ加工装置
US10108010B2 (en) 2015-06-29 2018-10-23 Rockwell Collins, Inc. System for and method of integrating head up displays and head down displays
CN106483608A (zh) * 2015-08-24 2017-03-08 青岛海信宽带多媒体技术有限公司 光模块
EP3359999A1 (en) 2015-10-05 2018-08-15 Popovich, Milan Momcilo Waveguide display
WO2017099056A1 (ja) * 2015-12-07 2017-06-15 古河電気工業株式会社 光ファイバ引出部構造、光モジュール
US10598932B1 (en) 2016-01-06 2020-03-24 Rockwell Collins, Inc. Head up display for integrating views of conformally mapped symbols and a fixed image source
EP3433659B1 (en) 2016-03-24 2024-10-23 DigiLens, Inc. Method and apparatus for providing a polarization selective holographic waveguide device
CN109154717B (zh) 2016-04-11 2022-05-13 迪吉伦斯公司 用于结构光投射的全息波导设备
CN105934136B (zh) * 2016-05-17 2019-06-04 广东海信宽带科技有限公司 光模块
EP3548939A4 (en) 2016-12-02 2020-11-25 DigiLens Inc. UNIFORM OUTPUT LIGHTING WAVEGUIDE DEVICE
US10545346B2 (en) 2017-01-05 2020-01-28 Digilens Inc. Wearable heads up displays
US10295824B2 (en) 2017-01-26 2019-05-21 Rockwell Collins, Inc. Head up display with an angled light pipe
CN116149058A (zh) 2017-10-16 2023-05-23 迪吉伦斯公司 用于倍增像素化显示器的图像分辨率的系统和方法
WO2019136476A1 (en) 2018-01-08 2019-07-11 Digilens, Inc. Waveguide architectures and related methods of manufacturing
KR20250089565A (ko) 2018-01-08 2025-06-18 디지렌즈 인코포레이티드. 도파관 셀을 제조하기 위한 시스템 및 방법
KR102745805B1 (ko) 2018-01-08 2024-12-20 디지렌즈 인코포레이티드. 광 도파관의 제조 방법
US10732569B2 (en) 2018-01-08 2020-08-04 Digilens Inc. Systems and methods for high-throughput recording of holographic gratings in waveguide cells
WO2020023779A1 (en) 2018-07-25 2020-01-30 Digilens Inc. Systems and methods for fabricating a multilayer optical structure
WO2020149956A1 (en) 2019-01-14 2020-07-23 Digilens Inc. Holographic waveguide display with light control layer
KR20210138609A (ko) 2019-02-15 2021-11-19 디지렌즈 인코포레이티드. 일체형 격자를 이용하여 홀로그래픽 도파관 디스플레이를 제공하기 위한 방법 및 장치
US20220283377A1 (en) 2019-02-15 2022-09-08 Digilens Inc. Wide Angle Waveguide Display
JP2022525165A (ja) 2019-03-12 2022-05-11 ディジレンズ インコーポレイテッド ホログラフィック導波管バックライトおよび関連する製造方法
US20200386947A1 (en) 2019-06-07 2020-12-10 Digilens Inc. Waveguides Incorporating Transmissive and Reflective Gratings and Related Methods of Manufacturing
CN110320617B (zh) * 2019-07-04 2020-08-18 武汉光迅科技股份有限公司 一种基于光路位移补偿的发射光功率稳定组件
KR20220038452A (ko) 2019-07-29 2022-03-28 디지렌즈 인코포레이티드. 픽셀화된 디스플레이의 이미지 해상도와 시야를 증배하는 방법 및 장치
KR20250030038A (ko) 2019-08-29 2025-03-05 디지렌즈 인코포레이티드. 진공 격자 및 이의 제조 방법
CN111446625A (zh) * 2020-04-28 2020-07-24 中国科学院西安光学精密机械研究所 一种大功率短波半导体激光照明器
CN114114675B (zh) * 2020-08-27 2024-02-06 成都理想境界科技有限公司 一种拼接式扫描投影装置及方法
US11870491B2 (en) * 2021-01-20 2024-01-09 Fluke Corporation Method and apparatus for measurement of mode delay in optical fibers
WO2022187870A1 (en) 2021-03-05 2022-09-09 Digilens Inc. Evacuated periotic structures and methods of manufacturing

Family Cites Families (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5928222A (en) * 1982-08-06 1999-07-27 Kleinerman; Marcos Y. Fiber optic sensing techniques in laser medicine
US5333077A (en) * 1989-10-31 1994-07-26 Massachusetts Inst Technology Method and apparatus for efficient concentration of light from laser diode arrays
US5185758A (en) 1989-11-28 1993-02-09 Massachusetts Institute Of Technology Multiple-laser pump optical system
US5208881A (en) * 1991-12-20 1993-05-04 Hughes Aircraft Company Method and apparatus for optical beam combination and cleanup using stimulated scattering
US5513201A (en) * 1993-04-30 1996-04-30 Nippon Steel Corporation Optical path rotating device used with linear array laser diode and laser apparatus applied therewith
JPH07281053A (ja) * 1994-04-11 1995-10-27 Mitsui Petrochem Ind Ltd ファイバ光結合装置
CA2196186A1 (en) * 1994-07-29 1996-02-15 John R. Lewis Device for optically converting a plurality of beams
JPH0894890A (ja) * 1994-09-28 1996-04-12 Nec Corp 光ファイバの光軸合わせ方法
US5617492A (en) * 1996-02-06 1997-04-01 The Regents Of The University Of California Fiber optic coupling of a microlens conditioned, stacked semiconductor laser diode array
US5790729A (en) * 1996-04-10 1998-08-04 Ohmeda Inc. Photoplethysmographic instrument having an integrated multimode optical coupler device
US5761234A (en) * 1996-07-09 1998-06-02 Sdl, Inc. High power, reliable optical fiber pumping system with high redundancy for use in lightwave communication systems
DE19645150C2 (de) * 1996-10-28 2002-10-24 Fraunhofer Ges Forschung Optische Anordnung zur Symmetrierung der Strahlung von Laserdioden
KR100211939B1 (ko) * 1996-12-12 1999-08-02 이계철 경사진 광섬유 지지용 브이홈 블록을 이용한 광결합 방법
US6327292B1 (en) * 1998-09-08 2001-12-04 Massachusetts Institute Of Technology External cavity laser source using spectral beam combining in two dimensions
US6530697B1 (en) * 1998-09-22 2003-03-11 Digital Optics Corp. Multi-mode fiber coupler, system and associated methods
US6215598B1 (en) * 1998-10-05 2001-04-10 Ruey Jennifer Hwu Apparatus and method for concentrating beams from broad area diode lasers, diode laser bars and/ or diode laser arrays
US6005717A (en) * 1998-11-17 1999-12-21 Ceramoptec Industries, Inc. Diode laser beam combiner system
US6400513B1 (en) * 2000-03-15 2002-06-04 Quantum Devices, Inc. Optical beam coupling of multiple wavelengths into an output channel using spatial wavefront segmentation
JP2002202442A (ja) * 2000-11-06 2002-07-19 Fuji Photo Film Co Ltd 合波レーザー光源および露光装置
JP3833889B2 (ja) * 2000-11-29 2006-10-18 古河電気工業株式会社 レーザダイオード素子と光ファイバの調心方法およびその方法を用いた調心装置およびレーザダイオードモジュール
CN1313861C (zh) * 2001-03-30 2007-05-02 新日本制铁株式会社 半导体激光装置和采用它的固体激光装置
JP2003011430A (ja) 2001-07-04 2003-01-15 Fuji Photo Film Co Ltd 画像記録方法及び装置
JP2003338432A (ja) 2002-05-22 2003-11-28 Rohm Co Ltd 固体電解コンデンサに使用するコンデンサ素子及びこれに誘電体層を形成する方法
US7181105B2 (en) * 2003-03-25 2007-02-20 Fuji Photo Film Co., Ltd. Method for adjusting alignment of laser beams in combined-laser-light source where the laser beams are incident on restricted area of light-emission end face of optical fiber

Also Published As

Publication number Publication date
KR20040084851A (ko) 2004-10-06
KR101062192B1 (ko) 2011-09-05
TWI329747B (en) 2010-09-01
US7181105B2 (en) 2007-02-20
US20040247240A1 (en) 2004-12-09
CN100507623C (zh) 2009-07-01
CN1532581A (zh) 2004-09-29

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