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TW200504382A - Electrical scanning probe microscopy device - Google Patents

Electrical scanning probe microscopy device

Info

Publication number
TW200504382A
TW200504382A TW092119918A TW92119918A TW200504382A TW 200504382 A TW200504382 A TW 200504382A TW 092119918 A TW092119918 A TW 092119918A TW 92119918 A TW92119918 A TW 92119918A TW 200504382 A TW200504382 A TW 200504382A
Authority
TW
Taiwan
Prior art keywords
microscopy device
scanning probe
electrical scanning
probe microscopy
electrical
Prior art date
Application number
TW092119918A
Other languages
Chinese (zh)
Other versions
TWI288248B (en
Inventor
Mau-Nan Chang
Original Assignee
Nat Applied Res Laboratries
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nat Applied Res Laboratries filed Critical Nat Applied Res Laboratries
Priority to TW92119918A priority Critical patent/TWI288248B/en
Priority to US10/861,385 priority patent/US6975129B2/en
Publication of TW200504382A publication Critical patent/TW200504382A/en
Application granted granted Critical
Publication of TWI288248B publication Critical patent/TWI288248B/en

Links

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  • Microscoopes, Condenser (AREA)

Abstract

The present invention provides an electrical scanning probe microscopy device. The microscopy device includes an atomic force microscopy device using a long wavelength laser light source as a surface image formation architecture to obtain a surface profile image, and an electrical scanning detecting sensor for simultaneously obtaining a two-dimensional electrical image corresponding to the surface profile image.
TW92119918A 2003-06-17 2003-07-22 Electrical scanning probe microscopy device TWI288248B (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
TW92119918A TWI288248B (en) 2003-07-22 2003-07-22 Electrical scanning probe microscopy device
US10/861,385 US6975129B2 (en) 2003-06-17 2004-06-07 Electrical scanning probe microscope apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW92119918A TWI288248B (en) 2003-07-22 2003-07-22 Electrical scanning probe microscopy device

Publications (2)

Publication Number Publication Date
TW200504382A true TW200504382A (en) 2005-02-01
TWI288248B TWI288248B (en) 2007-10-11

Family

ID=39202962

Family Applications (1)

Application Number Title Priority Date Filing Date
TW92119918A TWI288248B (en) 2003-06-17 2003-07-22 Electrical scanning probe microscopy device

Country Status (1)

Country Link
TW (1) TWI288248B (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI495838B (en) * 2011-01-10 2015-08-11 Hon Hai Prec Ind Co Ltd Image measuring apparatus
TWI601955B (en) * 2012-09-06 2017-10-11 愛美科公司 Method for determing local resistivity and carrier concentration using scanning spreading resistance measurement set-up

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI495838B (en) * 2011-01-10 2015-08-11 Hon Hai Prec Ind Co Ltd Image measuring apparatus
TWI601955B (en) * 2012-09-06 2017-10-11 愛美科公司 Method for determing local resistivity and carrier concentration using scanning spreading resistance measurement set-up

Also Published As

Publication number Publication date
TWI288248B (en) 2007-10-11

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees