200422165 (1) 玖、發明說明 【發明所屬之技術領域】 本發明是有關藉著薄膜材料及基板的加熱且加壓，將 薄膜狀材料層疊在基板上，埋入及/或使基板上的薄膜狀 材料平坦化用的層疊壓製裝置及真空層疊裝置。 【先前技術】 在印刷電路基板會因爲導電形圖案成形等的理由而在 表面產生凹凸或孔。在上述基板的表面黏貼如薄膜狀絕緣 材或感光材的薄膜狀材料時，使用一般的層疊時，容易在 基板表面的凹部或孔內殘留氣泡，其結果會產生多量的不 良品。 因此，以上的用途中，使用在真空中將薄膜狀材料黏 貼在基板表面的真空層疊壓製裝置。 使用真空層疊壓製裝置之前，薄膜狀材料保持著輕壓 接基板表面上的狀態。該作業是使用一般的層疊進行。 以往，一般所廣泛使用的真空層疊壓製裝置是在壓製 部具有彼此可密封卡合的上下外框構件所構成的真空室。 真空室內配置有上下一對的加壓塊。表面保持薄膜狀材料 的基板是以保持在上下一對的薄膜帶間的狀態，運入及運 出於壓製部的上下一對的加壓塊間。加壓塊的一側是固定 在一側外框構件的內側，具有加熱器。另一側的加壓塊固 定在上下驅動裝置上，同樣具有加熱器。 將基板插入上下一對加壓塊間之後，上下外框構件彼 (2) (2)200422165 此密封卡合構成真空室。真空室的內部一邊進行排氣，基 板保持在薄膜帶的狀態下，利用設置在上下加壓塊的加熱 器加熱。藉著加熱器的熱，軟化基板上的薄膜狀材料。 基板加熱至預疋的溫度爲止之後，利用上下加壓塊濟 將表面保持薄膜狀材料的基板夾在上下加壓塊間加壓 ，使軟化後的薄膜材料形成大致密接地黏貼在基板上的凹 凸面上。 上下加壓塊的加壓面可以形成彈性體或剛性的平板。 以上的習知真空層疊壓製裝置具有以下應解決的課題 〇 以往爲了使運送基板用的上下一對薄膜帶不致撓曲， 而對於薄膜帶的縱向施以拉力。具體而言，在捲出薄膜帶 側的輥子上外加迴轉阻力的狀態下，以另一側的輥子捲繞 薄膜帶，可對於薄膜帶的縱向即基板運送方向賦予拉力。 但是，僅對於薄膜帶的縱向施以拉力時，薄膜帶上容 易產生「縱皺褶」。並且，薄膜帶利用加熱器和基板同時 加熱，由於加熱的影響容易產生部分的「撓曲」。 如上述在薄膜帶產生「縱皴褶」或「撓曲」的狀態下 ，利用上下加壓塊再加熱下加壓基板時，基板上的薄膜狀 材料的表面上會形成薄膜帶的「皴褶」爲起因的凹凸。而 會造成基板上的薄膜狀材料的密接性、充分埋入及表面平 坦化的障礙。此係本發明應解決的第]課題。 以往的真空層疊裝置從別的觀點來看，具有以下所述 -6 - (3) (3)200422165 應解決的課題。 以往，一般廣泛所使用的真空層疊裝置大致區分爲2 種類。其中之一是使用彈性體構成的隔膜的真空層疊裝置 作爲加壓手段，另外之一是加壓面使用平滑剛體的加壓板 的真空層疊壓製裝置作爲加壓手段。 使用膈膜的真空層疊裝置具有可彼此密封卡合的上下 外框構件所構成的真空室。 表面保持著暫時固定的薄膜狀材料的基板藉著上下一 對的薄膜帶，以保持在該帶間的狀態運送，插入上下一對 的加壓塊間。一側的加壓塊，其加壓面是彈性體所構成， 固定在一側的外框構件的內側，具有加熱器。 另一側的加壓塊是將具有撓性的彈性體所構成的隔膜 安裝在加壓面上，固定在另一側外框構件的內側，同樣具 有加熱器。 基板插入一對的加壓塊間之後，上下的外框構件彼此 密封卡合構成真空室。 一邊將基板室的內部排氣減壓，基板保持在薄膜帶的 狀態下，利用設置在上下加壓塊的加熱器加熱。藉加熱器 的熱，使基板上的薄膜狀材料軟化。 基板加熱至預定的溫度爲止之後，藉著氣體壓力使上 述彈性體所構成的隔膜向著基板的方向伸展。薄膜狀材料 保持在表面的基板在安裝於一側加壓塊的彈性體所構成的 伸展後的隔膜外表面，及相同的彈性體構成的另一側加壓 塊的加壓面之間，夾持一對薄膜帶加壓，使軟化後的薄膜 (4) (4)200422165 狀材料大致密接地黏貼在基板上的凹凸面。 另一方面，使用加壓面平滑的剛體之加壓板的真空層 疊壓製裝置，壓製部具有可彼此密封卡合的上下外框構件 所構成的真空室。 真空室內配置有上下一對的加壓塊。表面保持薄膜狀 材料的基板利用上下一對的薄膜帶，在保持其間的狀態運 送，相對於壓製部的上下一對加壓塊之間進行運入及運出 。一側的加壓塊是固定在一側外框構件的內側，具有加熱 器。另一側的加壓塊是固定在上下驅動裝置上，具有同樣 的加熱器。 上下加壓塊的加壓面是以剛體的平板平滑的面所形成 〇 基板插入上下一對的加壓塊間之後，上下外框構件彼 此米封卡合構成真空室。 真空室的內部進行排氣減壓之後，利用上下驅動裝置 使上下加壓塊彼此接近，位於其間的基板保持在薄膜帶的 狀態下，藉著設置在上下加壓塊的加熱器加熱。利用加熱 器的熱，使基板上的薄膜狀材料軟化。 表面保持著薄膜狀材料的基板加熱至預定的溫度之後 ，藉著上下驅動裝置使上下加壓塊更爲接近，在上下加壓 塊間夾持一對薄膜帶的狀態下加壓，其結果，使軟化後的 薄膜狀材料黏貼大致密接在基板上的凹凸面上。 作爲相關真空層疊裝置的重要功能是在基板表面的深 的凹部及孔內，同樣埋入薄膜狀材料使其不殘留氣泡，及 (5) (5)200422165 考慮對於後步驟的影響，使埋入後的薄膜狀材料的表 面平坦，可以高產量的實現。 但是，使用隔膜的習知真空層疊裝置在構造上，由於 不能調節真空室內的排氣減壓和基板及薄膜狀材料的加熱 時機，因此在爲充分脫氣期間使得薄膜狀材料軟化，會有 氣泡殘留可能性高的問題。 另外，任意的加壓面皆是以彈性體構成，因此埋入基 板後的薄膜狀材料的表面會隨著基板表面的凹凸而產生凹 凸，側必須要設置另外的表面平坦化的步驟，增加裝置成 本和裝置大大型化，並且有難以實現高產量的問題。 另外，由於是使彈性體構成的隔膜伸展加壓的方式， 因此彈性體的強度上不能賦予充分的加壓力，同時會有深 的凹部或孔內埋入薄膜狀材料困難的缺點，該等點上仍有 改善的餘地。 另一方面，對於使用平滑加壓板的真空層疊裝置也有 應改善的缺點。即，在使用剛體的平板的平滑面加壓的構 造上，壓力不能及於基板的凹部，因此會有在凹部殘留氣 泡埋入薄膜狀材料等的困難。 【發明內容】 因此本發明所欲解決的另一課題（第2課題）是提供一 種小型且廉價的均勻埋入薄膜狀材料使深的凹部及孔內同 時不會殘留氣泡’並且可以使埋入後的薄膜狀材料的表面 平坦，具有高產量的真空層疊裝置。 -9- (6) (6)200422165 〔解決課題用的手段〕 爲了解決上述第1的課題，根據本發明在基板上層疊 薄膜狀材料，使埋入或基板上的薄膜狀材料平坦化用的層 疊壓製裝置，提供具備： 壓製部； 具有形成上下一對薄膜帶，將表面保持薄膜狀材料的 基板保持在其間，可縱向移動的上下一對薄膜帶，藉著對 於該一對薄膜帶一邊縱向施以拉力一邊移動，使上述基板 相對於上述壓製部進行運入及運出用的基板運送機構； 爲了對夾持上述基板運送機構運入的基板加壓用而配 置在上述壓製部的上側及下側加壓塊；及 至少在上述壓製部中對於上述一對薄膜帶施以橫向拉 力用的拉力賦予手段的層疊壓製裝置。 上述拉力賦予手段可以包含從上下方向夾持上述一對 薄膜帶的兩側緣部，對於該薄膜帶施以橫向拉力的夾持構 件。 上述夾持構件爲安裝於上述上側及下側加壓塊的分別 兩側緣部的具有彈性的構件，上述上側及下側加壓塊隨著 彼此的接近而夾持上述薄膜帶之後，根據上述上側及下側 加壓塊的更爲接近，賦予上述薄膜帶可朝著橫向外側變形 的力。 安裝在上述上側加壓塊的夾持構件具有從上述上側加 壓塊的兩側緣部向下方且向外側延伸的部分，安裝在上述 下側加壓塊的夾持構件具有從上述下側加壓塊的兩側緣部 -10- (7) (7)200422165 向上方且向外側延伸的部分。 上述夾持構件可以彈性材料製作。 根據本發明，並提供： 形成具備上側及下側外框構件所構成的真空室，使該 上側及下側外框構件彼此密封卡合可藉著內部的排氣製成 減壓狀態，藉著該上側及下側外框構件彼此的分開，將可 以形成基板出入口用開口部的真空室配置在上述壓製部， 上述上側及下側加壓塊配置在上述真空室內爲特徵的 層疊壓製裝置。 並且，爲了解決上述第2課題，根據本發明在基板上 層疊薄膜狀材料，使埋入或基板上的薄膜狀材料平坦化用 的真空層疊裝置，提供具備： 具有可彼此密封卡合及分離的上側及下側外框構件的 真空室； 使上述上側及下側外框構件彼此密封卡合及分離用的 驅動手段； 以上述上側及下側外框構件包圍，使上述真空室內的 第1空間減壓用的減壓手段； 具有形成撓性的上下一對薄膜帶，將表面保持薄膜狀 材料的基板保持於其間，可縱向移動的上下一對薄膜帶， 該一對薄膜帶通過彼此分離狀態的上述上側及下側外框構 件間所形成的開口部移動，藉此對於上述基板進行運入及 運出上述真空室用的基板運送機構； 形成設於上述真空室內的上側及下側加壓構件，藉上 -11 - (8) (8)200422165 述一對薄膜帶所夾持上述基板的加壓用加壓面爲平滑剛體 所構成的上側及下側加壓構件； 使該上側及下側加壓構件中的至少一側相對於另一側 接近及分開用的驅動手段； 加熱上述基板及上述薄膜狀材料用的加熱手段； 形成設置上述真空室內的封入手段，以上述基板的周 圍使上述一對薄膜帶彼此密接，在上述一對薄膜帶間形成 封入上述基板的密閉空間用的封入手段；及 上述真空室內形成較內部壓力高之上述密閉空間外部 的壓力用的壓力差產生手段等的真空層疊裝置。 使上述上側及下側外框構件彼此密封卡合及分離用的 上述驅動手段；使上述上側及下側加壓構件的至少一側相 對於另一側接近及分開用的上述驅動手段，可以分別獨立 動作的其他手段構成。 上述封入手段可以包含從上下方向夾持上述一對薄膜 帶使其彼此密接用的一對夾持手段。 上述一對夾持手段從上下方向夾持上下一對薄膜帶時 ，該一對夾持手段的至少一側構成可對於上述密閉空間內 的上述薄膜帶整體施以向外的拉力。 可以具有彈性的構件構成上述一對夾持手段的一側， 也可以利用和具有上述彈性的構件相對的面構成上述一對 夾持手段的另一側。 或者也可以具有彈性的構件構成上述一對夾持手段雙 方。 -12 - (9) (9)200422165 具有上述彈性的構件配置呈可包圍上述基板周圍的環 形’並且也可以具有朝上述一對薄膜帶接近而朝著外側擴 開的延伸部分。 也可以將上述一對夾持手段的至少一側設置在上述上 側或下側加壓構件。 也可以將上述一對夾持手段中的上述至少一側；設有 該至少一側夾持手段的上述上側或下側加壓構件的上述加 壓面；及和該加壓面相對的上述薄膜帶的外表面所圍繞的 第2空間，及上述真空室內的上述第1空間連通的通路， 設置在設有上述至少一側夾持手段的上述上側或下側加壓 構件。 根據本發明，並提供， 將薄膜狀材料層疊在基板上，埋入，並使基板上的薄 膜狀材料平坦化用的真空層疊方法，具備： 在基板上重疊薄膜狀材料暫時固定在該基板上的過程 將暫時固定上述薄膜狀材料的上述基板保持在撓性的 上下一對薄膜帶之間，使該一對薄膜帶縱向移動，將上述 基板運送至預定位置爲止的運送過程； 在上述預定位置將上述基板的周邊環境減壓至預定壓 力的過程； 和上述薄膜狀材料同時將上述基板加熱至預定溫度爲 止的過程； 減壓後的周圍環境中，在上述基板的周圍彼此密接上 -13- 200422165 do) 述上下一對薄膜帶，藉此在該上下一對的薄膜帶間形成封 入上述基板的密閉空間的過程； 該密閉空間外部的壓力高於內部的壓力，藉著上述上 下一對薄膜帶將暫時固定上述薄膜狀材料的上述基板加壓 的過程；及200422165 (1) Description of the invention [Technical field to which the invention belongs] The present invention relates to laminating a film-like material on a substrate by heating and pressing the film material and the substrate, and burying and / or making the film on the substrate A lamination pressing device and a vacuum lamination device for planarizing a material. [Prior art] In printed circuit boards, irregularities or holes are formed on the surface due to reasons such as the formation of conductive patterns. When a film-like material such as a film-like insulating material or a photosensitive material is stuck on the surface of the substrate, when general lamination is used, it is easy to leave bubbles in the recesses or holes on the surface of the substrate, resulting in a large number of defective products. Therefore, in the above applications, a vacuum lamination press apparatus for bonding a film-like material to a substrate surface in a vacuum is used. Prior to the use of the vacuum lamination press, the film-like material was held on the surface of the substrate with light pressure bonding. This operation is performed using general lamination. In the past, a vacuum lamination press apparatus which is widely used in general has a vacuum chamber formed of upper and lower outer frame members capable of sealingly engaging with each other in a pressing portion. A pair of upper and lower pressure blocks are arranged in the vacuum chamber. The substrate holding the film-like material on the surface is held between a pair of upper and lower film strips, and is carried into and out of a pair of pressurized blocks of the pressing section. One side of the pressure block is fixed to the inner side of the outer frame member and has a heater. The pressure block on the other side is fixed to the up-and-down drive and also has a heater. After the substrate is inserted between the pair of upper and lower pressure blocks, the upper and lower outer frame members are sealed (2) (2) 200422165. This seal engages to form a vacuum chamber. The inside of the vacuum chamber was evacuated, and the substrate was held in a film strip, and heated by a heater provided on the upper and lower pressure blocks. The film-like material on the substrate is softened by the heat of the heater. After the substrate is heated to a pre-cranked temperature, the substrate holding the film-like material on the surface is sandwiched between the upper and lower pressing blocks by using the upper and lower pressing blocks to pressurize the softened thin film material to form an unevenness that is closely adhered to the substrate. Surface. The pressing surfaces of the upper and lower pressing blocks can form an elastic body or a rigid flat plate. The above-mentioned conventional vacuum lamination press has the following problems to be solved. In the past, in order to prevent the pair of upper and lower film tapes for conveying a substrate from being deflected, a longitudinal direction is applied to the film tapes. Specifically, when the roll resistance is applied to the roll on the side of the unwinding film, the roll of the film is wound on the other roll, and a tensile force can be applied to the longitudinal direction of the film, that is, the substrate conveyance direction. However, when a tensile force is applied only to the longitudinal direction of the film strip, "longitudinal wrinkles" tend to occur on the film strip. In addition, the film tape is heated by the heater and the substrate at the same time, and it is easy to cause partial "deflection" due to the influence of heating. As described above, in the state where the film strip has "longitudinal folds" or "deflection", when the substrate is pressed under heating with the upper and lower pressure blocks, the "folds" of the film strip are formed on the surface of the film-like material on the substrate. "Is the cause of unevenness. In addition, it may impede the adhesion of the thin film-like material on the substrate, sufficient embedding, and flattening of the surface. This is the first problem to be solved by the present invention. The conventional vacuum lamination apparatus has a problem to be solved as described below from another viewpoint. (6) (3) (3) 200422165. Conventionally, vacuum lamination apparatuses which are widely used generally are roughly classified into two types. One of them is a vacuum lamination device using a diaphragm made of an elastomer as a pressing means, and the other is a vacuum lamination pressing device using a smooth rigid pressing plate on the pressing surface. A vacuum lamination apparatus using a diaphragm has a vacuum chamber composed of upper and lower outer frame members that can be sealed and engaged with each other. The substrate holding the temporarily fixed film-like material on its surface is transported in a state of being held between the pair of film tapes by being inserted between the pair of film tapes, and inserted between the pair of upper and lower pressure blocks. The pressure block of one side has an elastic body, and is fixed to the inside of the outer frame member on one side, and has a heater. The pressure block on the other side is a diaphragm made of a flexible elastomer mounted on the pressure surface and fixed to the inside of the outer frame member on the other side, and also has a heater. After the substrate is inserted between the pair of pressure blocks, the upper and lower outer frame members are sealed and engaged with each other to form a vacuum chamber. While depressurizing the inside of the substrate chamber, the substrate was held in a film tape, and heated by a heater provided on the upper and lower pressure blocks. The film-like material on the substrate is softened by the heat of the heater. After the substrate is heated to a predetermined temperature, the diaphragm made of the elastic body is stretched toward the substrate by a gas pressure. The substrate with the film-like material held on the surface is sandwiched between the outer surface of the stretched diaphragm made of an elastic body mounted on one pressure block and the pressure surface of the other pressure block made of the same elastic body. Hold a pair of film tapes to press the softened film (4) (4) 200422165 into the uneven surface of the substrate approximately tightly. On the other hand, in a vacuum lamination pressing apparatus using a rigid body pressing plate having a smooth pressing surface, the pressing portion has a vacuum chamber composed of upper and lower outer frame members that can be sealed and engaged with each other. A pair of upper and lower pressure blocks are arranged in the vacuum chamber. The substrate holding the film-like material on the surface is transported with a pair of upper and lower film strips in between, and is carried in and out with respect to a pair of upper and lower pressure blocks in the press section. The pressure block on one side is fixed to the inner side of the outer frame member and has a heater. The pressure block on the other side is fixed to the up and down drive and has the same heater. The pressing surface of the upper and lower pressure blocks is formed by the smooth surface of a rigid flat plate. After the substrate is inserted between the upper and lower pair of pressure blocks, the upper and lower frame members are engaged with each other to form a vacuum chamber. After exhausting and decompressing the inside of the vacuum chamber, the upper and lower pressurizing blocks are brought close to each other by the up-and-down driving device, and the substrate located therebetween is kept in a film tape state, and is heated by a heater provided on the upper and lower pressurizing blocks. The heat of the heater softens the film-like material on the substrate. After the substrate holding the film-like material on the surface is heated to a predetermined temperature, the upper and lower pressing blocks are brought closer to each other by the up and down driving device, and the pair of film strips are pressed between the upper and lower pressing blocks. As a result, The softened film-like material is adhered to the rough surface on the substrate. As an important function of the related vacuum lamination device, a thin film-like material is also buried in the deep recesses and holes on the surface of the substrate so that no air bubbles remain, and (5) (5) 200422165 considers the impact on the subsequent steps and makes the embedding The surface of the thin film-like material is flat, which can be achieved with high yield. However, the conventional vacuum lamination device using a diaphragm is structurally incapable of adjusting the decompression of the exhaust gas in the vacuum chamber and the timing of heating the substrate and the film-like material. Therefore, the film-like material is softened during the period of sufficient degassing, and there are bubbles High residual possibility. In addition, any pressing surface is made of an elastomer. Therefore, the surface of the film-like material after being embedded in the substrate will be uneven with the unevenness of the surface of the substrate, and another step of flattening the surface must be provided on the side to increase the device. The cost and equipment are large and large, and there is a problem that it is difficult to achieve a high yield. In addition, since the diaphragm made of an elastomer is stretched and pressurized, sufficient strength cannot be applied to the strength of the elastomer, and at the same time, it has the disadvantage that it is difficult to embed the thin film material in the deep recesses or holes. There is still room for improvement. On the other hand, there is a disadvantage that a vacuum lamination apparatus using a smooth pressing plate should be improved. That is, in the structure for pressing the smooth surface of a flat plate using a rigid body, the pressure cannot reach the recessed portion of the substrate, so that it is difficult to embed bubbles in the recessed portion to embed the film-like material. [Summary of the Invention] Therefore, another problem (second problem) to be solved by the present invention is to provide a small, inexpensive, uniformly embedded thin film-like material so that deep recesses and holes do not remain in air bubbles at the same time, and can be embedded. The surface of the resulting film-like material is flat and has a high-volume vacuum lamination device. -9- (6) (6) 200422165 [Means for solving problems] In order to solve the above-mentioned first problem, according to the present invention, a film-like material is laminated on a substrate, and the film-like material buried or planarized on the substrate is flattened. The laminating press device includes: a pressing section; and a pair of upper and lower film tapes that form a pair of upper and lower film tapes that hold a substrate holding a film-like material on the surface therebetween and are vertically movable. A substrate transport mechanism for loading and unloading the substrate with respect to the pressing section while moving with a pulling force; it is arranged on the upper side of the pressing section and for pressing the substrate transported by the substrate transport mechanism. A lower pressurizing block; and a laminating press device that applies a tensile force applying means for lateral tension to the pair of film strips at least in the pressing section. The tensile force applying means may include a clamping member that sandwiches the edge portions of both sides of the pair of film tapes in the vertical direction, and applies a lateral tensile force to the film tapes. The clamping member is an elastic member attached to each of the edge portions of the upper and lower pressure blocks. After the upper and lower pressure blocks approach the film band as they approach each other, The closer the upper and lower pressure blocks are, the more force can be imparted to the film strip that can be deformed toward the lateral outer side. The clamping member attached to the upper pressure block has a portion extending downward and outward from the edge portions of both sides of the upper pressure block, and the clamping member attached to the lower pressure block has a portion extending from the lower side. The edges of both sides of the clamp are -10- (7) (7) 200422165 upward and outward. The clamping member may be made of an elastic material. According to the present invention, there is provided: forming a vacuum chamber including upper and lower outer frame members, sealing and engaging the upper and lower outer frame members with each other, and reducing the pressure by internal exhaust, The upper and lower outer frame members are separated from each other, and a vacuum chamber capable of forming a substrate entrance and exit opening is disposed in the pressing section, and the upper and lower pressure blocks are disposed in the laminated pressing device characterized in that the vacuum chamber is disposed. In addition, in order to solve the second problem described above, according to the present invention, a vacuum lamination apparatus for laminating a thin film-like material on a substrate and flattening the thin-film material buried or on the substrate is provided, including: Vacuum chambers for upper and lower outer frame members; driving means for sealingly engaging and separating the upper and lower outer frame members with each other; surrounding the upper and lower outer frame members to make the first space in the vacuum chamber Decompression means for decompression; It has a pair of upper and lower film strips forming a flexible shape, and a substrate holding a film-like material on its surface is held therebetween. Openings formed between the upper and lower outer frame members are moved, thereby carrying the substrate into and out of the vacuum chamber; and a substrate conveying mechanism for forming the vacuum chamber; forming pressure on the upper and lower sides of the vacuum chamber The component is borrowed from -11-(8) (8) 200422165. The pressing surface for pressing the substrate held by the pair of film strips is an upper side made of a smooth rigid body and A side pressing member; a driving means for approaching and separating at least one of the upper and lower pressing members from the other side; a heating means for heating the substrate and the film-like material; and forming and installing the vacuum chamber Means for sealing the pair of film tapes around the substrate, forming a sealing means for sealing the sealed space between the pair of film tapes, and forming the sealed space in the vacuum chamber with a higher internal pressure than the inside A vacuum lamination device such as a pressure difference generating means for external pressure. The driving means for sealingly engaging and separating the upper and lower outer frame members from each other; and the driving means for approaching and separating at least one side of the upper and lower pressure members with respect to the other side may be performed separately. Constructed by other means of independent action. The sealing means may include a pair of holding means for holding the pair of film tapes in close contact with each other. When the pair of clamping means clamps the upper and lower film tapes from the up and down direction, at least one side of the pair of clamping means is configured to apply an outward pulling force to the entire film tape in the closed space. One side of the pair of holding means may be formed by a member having elasticity, or the other side of the pair of holding means may be formed by a surface facing the member having the elasticity. Alternatively, both of the pair of holding means may be constituted by a member having elasticity. -12-(9) (9) 200422165 The elastic member is disposed in a ring shape that surrounds the periphery of the substrate, and may have an extended portion approaching the pair of film strips and expanding toward the outside. At least one side of the pair of holding means may be provided on the upper or lower pressing member. The at least one side of the pair of clamping means; the pressing surface of the upper or lower pressing member provided with the at least one clamping means; and the film facing the pressing surface. A second space surrounded by the outer surface of the belt and a passage communicating with the first space in the vacuum chamber are provided on the upper or lower pressure member provided with the at least one side clamping means. According to the present invention, there is provided a vacuum lamination method for laminating a thin film material on a substrate, embedding the thin film material on the substrate, and flattening the thin film material on the substrate. A process of holding the substrate temporarily fixing the film-like material between a pair of flexible upper and lower film strips, moving the pair of film strips longitudinally, and transporting the substrate to a predetermined position; at the predetermined position A process of decompressing the surrounding environment of the substrate to a predetermined pressure; and a process of heating the substrate to a predetermined temperature simultaneously with the film-like material; in a reduced-pressure surrounding environment, the peripheries of the substrates are closely adhered to each other -13- 200422165 do) the process of forming a pair of upper and lower film strips, thereby forming a sealed space enclosed by the substrate between the pair of upper and lower film strips; the pressure outside the closed space is higher than the internal pressure, and by the above pair of films A process of pressing the substrate temporarily fixing the film-like material; and
形成分別相對於上述基板的表背面而設置的一對加壓 構件，各個加壓面爲平滑的剛體所構成的一對加壓構件， 可藉上述一對薄膜帶夾持上述基板加壓的過程等的真空層 疊方法。 利用上述撓性的上下一對薄膜帶將上述基板加壓的上 述過程，及藉著上述加壓面爲平滑的剛體所構成的上述一 對加壓構件，將上述基板加壓的上述過程之間，更具備再 次減壓上述密閉空間外部的壓力至預定壓力的過程。 【實施方式】A pair of pressing members are formed opposite to the front and back surfaces of the substrate. Each pressing surface is a pair of pressing members composed of a smooth rigid body. The substrate can be pressed by the pair of film tapes to press the substrate. And other vacuum lamination methods. Between the process of pressing the substrate using the flexible pair of upper and lower film strips, and the process of pressing the substrate by the pair of pressing members composed of the rigid body with a smooth pressing surface It further includes a process of decompressing the pressure outside the closed space to a predetermined pressure again. [Embodiment]
參閱第1圖及第2圖’說明解決上述第1課題用的本 發明的實施例如下。 第1圖爲根據本發明第1實施例的真空層疊壓製裝置 的側面圖，以縱向剖面表示一部份。 真空壓製裝置的壓製部p上設有真空室1。真空室1 爲上側外框構件2及下側外框構件3所構成。上側外框構 件2是安裝在支撐塊4上。並且，真空壓製部p設有作爲 基部的下側支撐構件5 ’支撐塊4和下側支撐構件5藉著 在上端固定支撐塊4，下端固定下側支撐構件5的支柱6 - 14- (11) (11)200422165 彼此連結。 形成真空室1的另一側構件的下側外框構件3的下面 ’例如樞支著如汽缸裝置的驅動裝置7。驅動裝置7形成 使上側外框構件2及下側外框構件3彼此卡合及分離用的 驅動手段。 下側外框構件3藉著上述驅動裝置7上升時，上側外 框構件2和下側外框構件3的周緣彼此呈密封卡合，真空 室】內部是形成密封狀態。在此狀態下，從設置在真空室 1的排氣□(未圖示）排出內部空氣時，可以使真空室1內 形成減壓狀態。另一方面’利用上述驅動裝置7使下側外 框構件3下降時，使上下的外框構件2、3彼此分離，形 成基板8的出入口用的開口部9。 真空室1內配置有夾持基板進行加熱及加壓用的上側 加壓塊1 0和下側加壓塊丨〗。上側加壓塊丨〇具有加熱板（ 未圖示）’安裝在上側外框構件2上。上側加壓塊1 〇的基 板8側的面’即加壓面側上安裝有平滑加工形成加壓面的 表面的剛體加壓板（未圖示）。 下側加壓塊1 1同樣具有加熱板（未圖示），在基板側 的面’即加壓面側安裝有加壓面呈平滑的剛體加壓板（未 圖示）。上側加壓塊1 0和安裝在上側外框構件2不同，下 側加壓塊1 1並非安裝在下側外框構件3上。 下側支撐構件5上設有如油壓缸裝置的驅動裝置1 2 ’下側加壓塊1 1是安裝在貫穿下側外框構件3而延伸的 驅動裝置1 2的桿1 3上端。下側外框構件3和桿丨3之間 -15- (12) 200422165 設有密封手段1 4，因此桿1 3是以密封狀態貫穿下側外框 構件3延伸，形成可以保持真空室1氣密性的構造。藉著 驅動裝置1 2的動作，可以使上側加壓塊1 〇和下側加壓塊 1 1相對地接近及分開。An embodiment of the present invention for solving the above-mentioned first problem will be described with reference to Figs. 1 and 2 '. Fig. 1 is a side view of a vacuum lamination and pressing apparatus according to a first embodiment of the present invention, showing a part in a longitudinal section. A vacuum chamber 1 is provided on the pressing part p of the vacuum pressing device. The vacuum chamber 1 is composed of an upper outer frame member 2 and a lower outer frame member 3. The upper outer frame member 2 is mounted on a support block 4. Further, the vacuum pressing part p is provided with a lower support member 5 ′ as a base, a support block 4, and a lower support member 5 by fixing the support block 4 at an upper end, and a pillar 6-14- (11 ) (11) 200422165 connected to each other. The lower surface of the lower outer frame member 3 forming the other side member of the vacuum chamber 1 is, for example, a driving device 7 such as a cylinder device. The driving device 7 forms driving means for engaging and disengaging the upper outer frame member 2 and the lower outer frame member 3 with each other. When the lower outer frame member 3 is raised by the driving device 7, the peripheral edges of the upper outer frame member 2 and the lower outer frame member 3 are hermetically engaged with each other, and the inside of the vacuum chamber is hermetically sealed. In this state, when the internal air is exhausted from the exhaust gas (not shown) provided in the vacuum chamber 1, the vacuum chamber 1 can be brought into a reduced pressure state. On the other hand, when the lower outer frame member 3 is lowered by the driving device 7, the upper and lower outer frame members 2 and 3 are separated from each other to form an opening 9 for the entrance and exit of the substrate 8. The vacuum chamber 1 is provided with an upper pressing block 10 and a lower pressing block for holding and heating the substrate and pressing. The upper pressure block 丨 〇 has a heating plate (not shown) and is mounted on the upper frame member 2. A rigid body pressure plate (not shown) on the surface 8 side of the base plate 8 of the upper pressure block 10, i.e., the pressure surface side, is provided with a surface that is smoothly processed to form the pressure surface. The lower pressure block 11 also has a heating plate (not shown). A rigid body pressure plate (not shown) with a smooth pressing surface is mounted on the substrate-side surface ', that is, the pressing surface side. The upper pressure block 10 is different from the upper frame member 2, and the lower pressure block 11 is not mounted on the lower frame member 3. The lower support member 5 is provided with a driving device 12 such as a hydraulic cylinder device. The lower pressure block 11 is an upper end of a rod 13 mounted on the driving device 12 extending through the lower outer frame member 3. Between the lower outer frame member 3 and the rod 丨 -15- (12) 200422165 A sealing means 14 is provided, so the rod 13 extends through the lower outer frame member 3 in a sealed state to form a space that can hold the vacuum chamber 1 Dense structure. By the operation of the driving device 12, the upper pressure block 10 and the lower pressure block 11 can be relatively approached and separated from each other.
真空層疊壓製裝置的壓製部P的前後配置有薄膜帶捲 出部1 5及薄膜帶捲繞部〗6。薄膜帶捲出1 5及薄膜帶捲 繞部1 6將基板8保持其間進行運送用的上下一對薄膜帶 17及18的捲出。薄膜帶17及18配置貫穿延伸於上下及 下側外框構件2及3彼此分離擴開狀態的真空室1。表面 保持薄膜狀材料的基板8藉著滾子運送機1 9從前步驟朝 著薄膜帶捲出部1 5運送，投入薄膜帶1 7及1 8間。在薄 膜帶捲出部1 5中賦予迴轉阻力的狀態下，在薄膜捲繞部 1 6進行捲繞動作，使一邊賦予縱向的適當拉力而移動的 薄膜帶1 7及1 8可以將保持在該薄膜帶間的基板8經由開 口部9運入真空室1內。同樣地，可以將基板8從真空室 1運出。運出後的基板8利用滾子運送機20運送至其次 步驟。薄膜帶捲出部1 5和薄膜帶捲繞部1 6之間，在適當 的位置複數設置作爲薄膜帶引導的滾子2 1。如上述，薄 膜帶1 7、1 8、薄膜帶捲出部1 5、滾子2 1及薄膜帶捲繞部 1 6形成可相對於壓製部P運入及運出表面保持薄膜狀材 料的基板8用的基板運送機構。 根據第2圖，說明本發明第1實施例中安裝於上下加 壓塊1 0及1 1的拉力賦予手段的構成及動作。從薄膜帶的 縱向表示圖的第2圖中，（a)是表示上下加壓塊彼此分開 -16- (13) (13)200422165 的狀態，（b)是表示上下加壓塊彼此接近的狀態，（c)是表 示上下加壓塊更接近而夾持基板加壓的狀態。第2(a)的狀 態下，保持在薄膜帶1 7、1 8之間的基板8是位在壓製部 P的上下加壓塊1 0、1 1間。上下加壓塊1 0、1 1的各兩側 緣部22、23的內側安裝有如橡膠的彈性材料所構成的夾 持構件24、25。夾持構件24、25以加壓塊10、Π的兩 側緣部22、23的大致全長，至少以大於基板8長度的長 度範圍延伸爲佳。夾持構件24、2 5具有橫向朝外側擴開 的V字形剖面形狀。夾持構件24、25的一邊部分24a、 25a是以水平狀態安裝在上下的加壓塊10、1 1上，因此 另一邊部分24b、25b是相對於水平斜向延伸。具體而言 ，安裝在上側加壓塊1 0的夾持構件24的另一邊部分24b 是從上側加壓塊1 〇的兩側緣部向下方且外側延伸，安裝 在下側加壓塊Π的夾持構件25的另一邊部分25b是從下 側加壓塊1 1的兩側緣部向上方且外側延伸。 夾持構件24、25也可以在其全長連續具有圖示V字 型剖面形狀的構件，但是以至少另一邊部分24b、25b中 設置間歇性的缺口（notch)爲佳。 第2(b)圖中，上下加壓塊10、1 1彼此接近時，夾持 構件24、25的另一邊部份24b、25b的前緣從上下方向夾 持著薄膜帶1 7、1 8。 另外，如第2(c)圖表示，上下加壓塊10、] 1夾持基 板8以至加壓爲止的期間，以彈性材料構成的夾持構件 24、25的另一邊部分24b、25b分別朝著一邊部分24a、 -17- (14) (14)200422165 25a變形。此時，另—邊部分24b、25b在夾持著薄膜帶 1 7、1 8的狀態下，賦予該薄膜帶橫向的拉力。 構成夾持構件24、25的彈性材料也可以使用橡膠以 外的材料。 賦予夾持構件2 4、2 5彈性時，除了上述以彈性材料 構成整體之外，也可以彈簧鉸鏈等連結一邊部分24a、 25a和另一邊部分24b、25b。此時，一邊部分24a、25a 當然另一邊部份24b、25b也可以不須以彈性材料構成。 上述第1實施例中，利用安裝在上下加壓塊1 〇、1 1 的夾持構件2 4、2 5構成橫向拉力施於薄膜帶1 7、；[ 8的拉 力賦予手段，加壓塊的驅動力雖可利用在拉力賦予，但是 不僅限於此。也可以不論加壓塊設置拉力賦予手段，也可 以利用個別的驅動源作爲拉力賦予之用。 並且，不僅是壓製部的範圍，也可以在更廣範圍施以 薄膜帶橫向的拉力。 其中，根據上述說明的本發明第1實施例，對於薄膜 帶的橫向施以拉力，因此可抑制薄膜帶的「縱向皺褶」或 「撓曲」的產生，藉此防止該等爲起因的基板上的薄膜狀 材料表面的凹凸形成，可充分良好地進行對於基板的薄膜 狀材料的密接性及埋入，同時可以使薄膜狀材料表面高精 度平坦化。 其次，參閱第3圖至第14圖，說明解決上述第2課 題用的本發明的實施例如下。 第3圖爲本發明第2實施形態的真空層疊裝置的側面 -18- (15) 200422165 圖，以縱向剖面表示其一部份。 真空層疊裝置具有真空層疊部V，真空層疊部 真空室1。真空室1爲上側外框構件2及下側外相 所構成。真空室‘ 1設有連接內部呈減壓狀態用的排 (未圖示）的排氣□(未圖示）和連接開放減壓狀態用 置（未圖不）的供氣口（未圖示）。排氣口及排氣裝置 成減壓手段。上側外框構件2是安裝在支撐塊4上 在真空層疊部V設有作爲基底的下側支撐構件5， 4和下側支撐構件5是以上端固定在支撐塊4，下 在下側支撐構件5的支柱6將其彼此連結。 形成真空室1的另一側構件的下側外框構件3 ’例如樞支汽缸裝置的驅動裝置7。驅動裝置7形 側外框構件2及下側外框構件3彼此密封卡合及分 驅動手段。 下側外框構件3利用上述驅動裝置7上升時， 外框構件2和下側外框構件3的周緣部彼此密封卡 真空室1內部形成密封裝置。在此狀態下，從設置 室1的排氣口藉著排氣裝置排出內部空氣時，可以 外框構件2、3所包圍的真空室1內的空間（第1 參閱第7圖）形成減壓狀態。另一方面，利用上述 置7使下側外框構件3下降時，上下的外框構件2 此分離，形成基板8的出口用的開口部9。 真空室1內配置有上側加壓塊1 〇和下側加壓友 該等上下的加壓塊1 0、1 1是構成以後述的一對薄 V設有 【構件3 氣裝置 供氣裝 同時構 。並且 支撐塊 端固定 的下面 成使上 離用的 將上側 合，使 在真空 使上下 芝間）s( 驅動裝 :、3彼 笔1 1 ° 膜帶夾 -19- (16) (16)200422165 持基板用的加壓構件。 上側加壓塊1 0具有加熱器（未圖示），安裝在上側外 框構件2上。上側加壓塊1 〇的基板8的相對面，即加壓 面側安裝有加壓面平滑的剛體的加壓板（未圖示）。 下側加壓塊1 1同樣具有加熱器（未圖示），和基板8 相對的面即加壓面側上，安裝有加壓面平滑的剛體的加壓 板（未圖示）。和上側加壓塊]0安裝在上側外框構件2不 同，下側加壓塊1 1並未安裝在下側外框構件3上。 下側支撐構件5上，例如設有如油壓缸裝置的驅動裝 置1 2，下側加壓塊1 1是安裝在貫穿下側外框構件3延伸 的驅動裝置1 2的桿1 3的上端。下側外框構件3和桿！ 3 之間設有密封手段1 4，因此桿1 3是以密封狀態貫穿下側 外框構件3延伸，形成可以保持真空室1的氣密性的構造 。藉著驅動裝置〗2的動作，可以使上側加壓塊〗〇和下側 加壓塊1 1相對地接近及分開。 驅動裝置7和驅動裝置1 2可以彼此獨立動作的其他 手段構成。 真空層疊裝置的真空層疊部V的前後配置有薄膜帶 捲出部15及薄膜帶捲繞部16。薄膜帶捲出部15及薄膜 帶捲繞部1 6可以進行基板8保持其間之運送用上下一對 的薄膜帶17及18的捲出及捲繞。薄膜帶17及is是貫穿 上側及下側外框構件2及3彼此分離擴開狀態的真空室j 延伸配置。表面保持著暫時固定後薄膜狀材料的基板8是 藉著滾子運送機19從前步驟運送至薄膜帶捲出部，投入 -20- (17) 200422165 薄膜帶1 7及1 8間。薄膜帶捲出部丨5中賦予迴轉阻 狀態下’薄膜帶捲繞部1 6中進行捲繞動作，藉此一 予適當的拉力使縱向移動的薄膜帶17及18，可以將 在該薄膜帶間的基板8經由開口部9運入真空室1內 樣地’可以將基板8從真空室丨運出。運出的基板8 子運送機20運送至其次步驟。薄膜帶捲出部15和薄 捲繞部1 6之間，在適當位置上設置複數作爲薄膜帶 用的滾子21。如上述’薄膜帶17、薄膜捲出部 滾子2 1及薄膜捲繞部1 6形成可對於真空層疊部v 及運出表面保持著薄膜狀材料的基板8用的基板運送 〇 使用第4圖及第5圖說明本發明第2實施例的裝 成如下。 第4圖爲本發明第2實施例的真空層疊部的側面 採其部分剖面。 另外，第5圖是表示第4圖箭頭部的剖面圖。 如第5圖所示，在下側加壓塊1 1的外緣部2 3 & 側，例如以橡膠的彈性材料構成的下側夾持構件2 5 基板8的周圍，環狀安裝在下側加壓塊n的外，緣音p 的全周圍。同樣地，在上側加壓塊1 0的外緣部2 2 a 側，例如以橡膠的彈性材料構成的上側夾持構件24 基板8的周圍，環狀安裝在上側加壓塊1 〇的外,緣@ 的全周圍（參閱第4圖）。該實施樣態中，真空室丨@ 設置於上下加壓塊1〇、Π的上下夾持構件24、25 g 力的 邊賦 保持 。同 以滾 膜帶 引導 15、 運入 機構 置構 圖， 的內 包圍 23a 的內 包圍 22a 分別 成在 -21 - (18) (18)200422165 基板8的周圍使一對薄膜帶1 7、1 8彼此密接，藉此形成 將基板8封閉一對薄膜帶17、18間的密閉空間30 (參閱 第8圖）用的封閉手段。 上述夾持構件24及下側夾持構件25具有徑向外側擴 開的V字形剖面形狀。上側夾持構件24及下側夾持構件 25的一邊部分24a.、25a由於是水平狀態安裝在上下的加 壓塊10、11上，因此另一邊部分24b、25b朝著薄膜帶 1 7、1 8逐漸向外側擴開傾斜延伸。具體而言，安裝在上 側加壓塊1 〇的上側夾持部2 4的另一邊部分2 4 b是從上側 加壓塊1 0的外緣部22a向下方且外側延伸，安裝在下側 加壓塊1 1的下側夾持部25的另一邊部分25b是從下側加 壓塊1 1的外緣部2 3 a向上方且外側延伸。 並且，包圍上下加壓塊10、11的各個上下夾持構件 24、25的範圍內，設有分別貫穿上下加壓塊1〇、1 1的至 少之一的孔26、27。孔26、27構成可連通夾持構件24、 2 5 ;加壓塊1 0、1 1 ;分別和加壓塊1 〇、1 1的加壓面相對 的薄膜帶17、18的外表面所包圍的空間（第2空間）2 8、 2 9 (參閱第8圖）；及真空室1內第1空間的通路。 其次，根據第6圖至第1〇圖說明本發明的第2實施 例的動作如下。第6圖至第1 〇圖爲本發明第2實施例的 真空層疊部的側面圖，採其部分剖面。 首先，將上下外框構件2、3分開，通過基板出入口 用的開口部9，利用一對薄膜帶1 7、1 8將表面保持薄膜 狀材料的基板8，在保持其間的狀態下，運入位在真空室 -22- (19) (19)200422165 1內的上下加壓塊1 0、1 1間的預定位置（第6圖）。 其次，下側外框構件3藉著驅動裝置（相當於第3圖 的驅動裝置7)上升，使上側外框構件2和下側外框構件3 的周緣部彼此密封卡合，在真空室丨內部形成密封狀態後 以排氣手段（未圖示）使真空室丨內的第1空間s減壓製預 定的壓力爲止（第7圖）。 並且，藉驅動裝置（相當於第3圖的驅動裝置12)使下 側加壓塊1 1上升至預定的位置爲止。 上下加壓塊1 0、1 1彼此接近的狀態下利用加壓塊i 〇 、1 1所具備的加熱器（位圖示）將基板8加熱的同時，使分 別設置在上下加壓塊1 0、1 1上的上側夾持構件24及下側 夾持構件25的另一邊部分24b、25b的前緣從上下方向夾 持薄膜帶1 7、1 8 (第8圖）。 上側夾持構件24及下側夾持構件25是分別呈環形安 裝在上側加壓塊1 0及下側加壓塊1 1的外緣部2 2 a、2 3 a 的全周圍上，因此在此狀態下分別形成上側加壓塊10、 上側夾持構件24及上側薄膜帶1 7圍繞的空間2 8 ;下側 加壓塊1 1、下側夾持構件2 5及下側薄膜帶1 8圍繞的空 間29 ;及上下薄膜帶17、18間的密閉空間30。 將基板8加熱至預定的溫度，充分地使保持在基板的 薄膜狀材料軟化後，利用供氣裝置從供氣口供給一定量的 空氣至真空室丨時，使真空室1內的第1空間S上升至預 定的壓力。A film tape unwinding part 15 and a film tape winding part 6 are arranged before and after the pressing part P of the vacuum laminating press. The film tape unwinding 15 and the film tape winding unit 16 unwind the upper and lower pair of film tapes 17 and 18 for transporting the substrate 8 therebetween. The film strips 17 and 18 are arranged so as to extend through the vacuum chamber 1 in which the upper and lower outer frame members 2 and 3 are separated and expanded from each other. The substrate 8 holding the film-like material on the surface thereof is transported toward the film tape unwinding portion 15 by the roller conveyor 19 from the previous step, and is put into the film tapes 17 and 18. In the state where the turning resistance is provided in the film tape unwinding portion 15, the film winding portion 16 performs a winding operation, and the film tapes 17 and 18 which are moved while applying an appropriate tensile force in the longitudinal direction can be held at this position. The substrate 8 between the film strips is carried into the vacuum chamber 1 through the opening 9. Similarly, the substrate 8 can be carried out from the vacuum chamber 1. The unloaded substrate 8 is transferred to the next step by the roller conveyor 20. Between the film strip unwinding part 15 and the film strip winding part 16 a plurality of rollers 21 serving as film strip guides are provided at appropriate positions. As described above, the film tapes 17 and 18, the film tape unwinding section 15, the roller 21, and the film tape winding section 16 form a substrate capable of holding a film-like material in and out of the pressing section P. 8 substrate transfer mechanism. The structure and operation of the tension-applying means attached to the upper and lower pressing blocks 10 and 11 in the first embodiment of the present invention will be described with reference to FIG. In the second diagram of the longitudinal direction of the film strip, (a) shows a state where the upper and lower pressure blocks are separated from each other -16- (13) (13) 200422165, and (b) shows a state where the upper and lower pressure blocks are close to each other. (C) shows a state where the upper and lower pressure blocks are closer and the substrate is pressed. In the second state (a), the substrate 8 held between the film strips 17 and 18 is located between the upper and lower pressure blocks 10 and 11 of the pressing portion P. Holding members 24 and 25 made of an elastic material such as rubber are mounted on the inner sides of the edge portions 22 and 23 of each of the upper and lower pressure blocks 10 and 11. The clamping members 24 and 25 preferably extend over at least the entire length of both the edge portions 22 and 23 of the pressure blocks 10 and Π, at least over a length range longer than the length of the substrate 8. The holding members 24, 25 have a V-shaped cross-sectional shape that is widened laterally outward. One side portions 24a, 25a of the clamping members 24, 25 are mounted on the upper and lower pressure blocks 10, 11 in a horizontal state, and the other side portions 24b, 25b extend obliquely with respect to the horizontal. Specifically, the other side portion 24b of the holding member 24 attached to the upper pressure block 10 extends downward and outward from both side edges of the upper pressure block 10, and is attached to the lower pressure block Π. The other side portion 25b of the holding member 25 extends upward and outward from both side edge portions of the lower pressure block 11. The clamp members 24 and 25 may have members having a V-shaped cross-sectional shape continuously throughout their entire length, but it is preferable to provide intermittent notches in at least the other side portions 24b and 25b. In FIG. 2 (b), when the upper and lower pressure blocks 10 and 11 are close to each other, the leading edges of the other side portions 24b and 25b of the clamping members 24 and 25 hold the film strips 17 and 18 from the up and down direction. . In addition, as shown in FIG. 2 (c), during the period between the upper and lower pressing blocks 10 and 1 holding the substrate 8 and pressing, the other side portions 24b and 25b of the clamping members 24 and 25 made of elastic material face The side portions 24a, -17- (14) (14) 200422165 25a are deformed. At this time, the other side portions 24b, 25b apply a tensile force to the film tape in a lateral direction while the film tapes 17 and 18 are sandwiched. The elastic material constituting the holding members 24 and 25 may be made of materials other than rubber. When elasticity is given to the holding members 24, 25, in addition to the above-mentioned construction of an elastic material as a whole, one side portions 24a, 25a and the other side portions 24b, 25b may be connected by a spring hinge or the like. At this time, of course, one side portion 24a, 25a need not be made of an elastic material. In the above-mentioned first embodiment, the clamping members 2 4, 2 and 5 mounted on the upper and lower pressurizing blocks 10, 11 are used to constitute a lateral tensile force applied to the film belt 17; Although a driving force can be used for giving a pulling force, it is not limited to this. It is not necessary to provide a means for applying a tension force to the pressure block, and it is also possible to use an individual driving source for the purpose of applying a tension force. In addition, it is possible to apply a tensile force in the transverse direction of the film strip not only to the range of the pressing portion, but also to a wider range. Among them, according to the first embodiment of the present invention described above, since the tensile force is applied to the transverse direction of the film tape, it is possible to suppress the occurrence of "longitudinal wrinkles" or "deflection" of the film tape, thereby preventing such substrates from being caused. The unevenness on the surface of the film-like material on the substrate can sufficiently and sufficiently adhere to and embed the film-like material on the substrate, and at the same time, can flatten the surface of the film-like material with high accuracy. Next, an embodiment of the present invention for solving the above-mentioned second problem will be described with reference to Figs. 3 to 14. Fig. 3 is a side view of a vacuum lamination apparatus according to a second embodiment of the present invention. Fig. 18- (15) 200422165 shows a part thereof in a longitudinal section. The vacuum lamination apparatus includes a vacuum lamination unit V and a vacuum lamination unit vacuum chamber 1. The vacuum chamber 1 is composed of an upper outer frame member 2 and a lower outer phase. The vacuum chamber '1 is provided with an exhaust gas (not shown) connected to a row (not shown) for reducing the pressure inside, and an air supply port (not shown) for connecting to an open pressure-reduced state (not shown). ). The exhaust port and exhaust device are used to reduce pressure. The upper outer frame member 2 is a lower support member 5 provided on the support block 4 as a base in the vacuum lamination section V. The lower support member 5 and the lower support member 5 are fixed to the support block 4 at the upper end and the lower support member 5 is lower. The pillars 6 connect them to each other. The lower outer frame member 3 'forming the other side member of the vacuum chamber 1 is, for example, a drive device 7 of a pivot cylinder device. The driving device 7 has a side outer frame member 2 and a lower outer frame member 3 which are hermetically engaged with each other and separate driving means. When the lower outer frame member 3 is raised by the driving device 7, the peripheral portions of the outer frame member 2 and the lower outer frame member 3 are sealed to each other. The inside of the vacuum chamber 1 forms a sealing device. In this state, when the internal air is exhausted from the exhaust port of the installation chamber 1 through the exhaust device, the space in the vacuum chamber 1 surrounded by the outer frame members 2 and 3 (see FIG. 7) can be reduced in pressure. status. On the other hand, when the lower outer frame member 3 is lowered by the above-mentioned arrangement 7, the upper and lower outer frame members 2 are separated from each other to form the opening portion 9 for the exit of the substrate 8. The vacuum chamber 1 is provided with an upper pressurizing block 10 and a lower pressurizing member. The upper and lower pressurizing blocks 10 and 11 are a pair of thin Vs which will be described later.结构。 Structure. And the lower part of the support block is fixed so that the upper side is closed, and the upper side is closed in a vacuum so that it is between the upper and lower sides of the vacuum) s (driving device: 3 3 pens 1 1 ° film belt clip -19- (16) (16) 200422165 The pressing member for holding the substrate. The upper pressing block 10 has a heater (not shown) and is mounted on the upper outer frame member 2. The opposing surface of the substrate 8 of the upper pressing block 10 is the pressing surface side. A pressure plate (not shown) having a rigid body with a smooth pressing surface is attached. The lower pressure block 11 also has a heater (not shown), and the surface opposite to the substrate 8 is the pressure surface side, and A rigid body pressure plate (not shown) with a smooth pressing surface. Unlike the upper pressure block] 0, which is mounted on the upper frame member 2, the lower pressure block 11 is not mounted on the lower frame member 3. The lower support member 5 is provided with, for example, a driving device 12 such as a hydraulic cylinder device. The lower pressure block 11 is an upper end of a rod 13 mounted on the driving device 12 extending through the lower outer frame member 3. There is a sealing means 14 between the lower outer frame member 3 and the rod! 3, so the rod 13 extends through the lower outer frame member 3 in a sealed state, A structure capable of maintaining the airtightness of the vacuum chamber 1 is formed. By the action of the driving device 2, the upper pressure block 0 and the lower pressure block 11 can be relatively close to and separated from each other. The driving device 7 and the driving device 1 2 It can be configured by other means that can operate independently of each other. The film lamination section 15 and the film tape winding section 16 are arranged at the front and back of the vacuum lamination section V of the vacuum lamination apparatus. The film tape winding section 15 and the film tape winding section 1 6 It is possible to unwind and wind up and down the pair of upper and lower film tapes 17 and 18 for transporting the substrate 8 therebetween. The film tapes 17 and is a vacuum that penetrates the upper and lower outer frame members 2 and 3 apart and expanded from each other. The chamber j is extended. The substrate 8 holding the film-like material temporarily fixed on the surface is transported to the film-tape unwinding part by the roller conveyor 19 from the previous step, and the -20- (17) 200422165 film tape 17 and 18 are loaded. In the film tape unwinding section 丨 5, the film is wound in a state where a rotation resistance is given, and the film tape winding section 16 performs a winding operation to thereby allow the film tapes 17 and 18 to move longitudinally by an appropriate pulling force. The substrate 8 between the film strips is carried in through the opening 9 The substrate 8 in the vacuum chamber 1 can transport the substrate 8 out of the vacuum chamber. The transported substrate 8 is transported to the next step by the sub-conveyor 20. Between the film tape unwinding section 15 and the thin winding section 16 A plurality of rollers 21 for film tapes are provided at positions. As described above, the film tape 17, the film roll-out roller 21, and the film roll-up section 16 are formed so that the film-like shape can be maintained for the vacuum lamination section v and the carrying surface. Substrate transportation for the material substrate 8 The assembly of the second embodiment of the present invention will be described with reference to Figs. 4 and 5. Fig. 4 is a partial cross-section of the side surface of the vacuum lamination section of the second embodiment of the present invention. FIG. 5 is a cross-sectional view showing an arrow portion in FIG. 4. As shown in FIG. 5, on the outer edge portion 2 3 & side of the lower pressure block 1 1, for example, the periphery of the lower clamping member 2 5 made of a rubber elastic material is mounted annularly on the lower side. Outside of the block n, all around the edge sound p. Similarly, on the outer edge portion 2 2 a side of the upper pressure block 10, for example, around the upper clamping member 24 made of a rubber elastic material, the substrate 8 is annularly mounted outside the upper pressure block 10. The entire periphery of 缘 @ (see Figure 4). In this embodiment, the vacuum chamber 丨 @ 24 and 25 g of the upper and lower clamping members provided at the upper and lower pressurizing blocks 10 and Π is maintained. With the rolling film guide 15, the loading mechanism is framed, the inner envelope 23a and the inner envelope 22a are respectively formed around -21-(18) (18) 200422165 around the substrate 8 so that a pair of film tapes 17 and 18 are connected to each other. The sealing means forms a sealing means 30 (see FIG. 8) for closing the substrate 8 between the pair of film tapes 17 and 18. The holding member 24 and the lower holding member 25 have a V-shaped cross-sectional shape that expands radially outward. One side portions 24a., 25a of the upper clamping member 24 and the lower clamping member 25 are horizontally mounted on the upper and lower pressure blocks 10, 11. Therefore, the other side portions 24b, 25b face the film belt 1 7, 1 8 Gradually expand outward to extend obliquely. Specifically, the other side portion 2 4 b of the upper clamping portion 24 mounted on the upper pressure block 10 is extended downward and outward from the outer edge portion 22a of the upper pressure block 10, and is mounted on the lower pressure. The other side portion 25b of the lower clamping portion 25 of the block 11 is extended upward and outward from the outer edge portion 23a of the lower pressing block 11. In addition, holes 26 and 27 are formed in the range surrounding each of the upper and lower clamping members 24 and 25 of the upper and lower pressure blocks 10 and 11 and penetrate at least one of the upper and lower pressure blocks 10 and 11 respectively. The holes 26 and 27 constitute communicating clamp members 24 and 25; the pressure blocks 10 and 11 are surrounded by the outer surfaces of the film strips 17 and 18 opposite the pressure surfaces of the pressure blocks 10 and 11 respectively. Space (second space) 2 8, 2 9 (see Figure 8); and the passage of the first space in the vacuum chamber 1. Next, the operation of the second embodiment of the present invention will be described with reference to Figs. 6 to 10 as follows. 6 to 10 are side views of a vacuum lamination section according to a second embodiment of the present invention, and a partial cross section is taken. First, the upper and lower outer frame members 2 and 3 are separated, and the substrate 8 with a film-like material on its surface is transported through a pair of film tapes 17 and 18 through the opening 9 for substrate entrance and exit. It is located at a predetermined position between the upper and lower pressure blocks 10 and 11 in the vacuum chamber -22- (19) (19) 200422165 1 (Figure 6). Next, the lower outer frame member 3 is lifted by the driving device (equivalent to the driving device 7 in FIG. 3), and the peripheral portions of the upper outer frame member 2 and the lower outer frame member 3 are sealed and engaged with each other, and the vacuum chamber 丨After the inside is sealed, the first space s in the vacuum chamber 丨 is decompressed to a predetermined pressure by exhaust means (not shown) (FIG. 7). Then, the driving device (corresponding to the driving device 12 in Fig. 3) is used to raise the lower pressure block 11 to a predetermined position. While the upper and lower pressurizing blocks 10 and 11 are close to each other, the substrate 8 is heated by the heater (bit diagram) provided in the pressurizing blocks i 0 and 11 while being installed on the upper and lower pressurizing blocks 1 0 respectively. The leading edges of the other side portions 24b and 25b of the upper and lower clamping members 24 and 25 on 11 are clamped from above and below the film tapes 17 and 8 (FIG. 8). The upper clamping member 24 and the lower clamping member 25 are annularly mounted on the entire periphery of the outer edge portions 2 2 a and 2 3 a of the upper pressure block 10 and the lower pressure block 11, respectively. In this state, a space 2 8 surrounded by the upper pressure block 10, the upper holding member 24, and the upper film belt 1 7 is formed; the lower pressure block 11, the lower holding member 25, and the lower film belt 1 8 are respectively formed. The surrounding space 29; and the closed space 30 between the upper and lower film strips 17,18. When the substrate 8 is heated to a predetermined temperature to sufficiently soften the film-like material held on the substrate, a certain amount of air is supplied from the air supply port to the vacuum chamber by the air supply device, and the first space in the vacuum chamber 1 is made. S rises to a predetermined pressure.
藉此，經由孔2 6、2 7連通真空室1內的第】空間S -23- (20) 200422165 的第2空間2 8 ' 2 9內的壓力是和第1空間S內的壓 樣地上升至預定的値，和密閉空間3 0內的壓力比較 相對較高的壓力。因此，孔2 6、2 7和供氣裝置及供 在真空室1內構成密閉空間3 0外部的壓力高於內部 用的壓力差產生手段。 藉著該第2空間2 8、2 9內和密閉空間3 0內的壓 ，使保持薄膜狀材料的基板8利用上下薄膜帶1 7、1 壓。 此時，由於是根據使用撓性的薄膜帶I 7、1 8的 壓進行加壓，因此並非如剛體的平板進行的加壓只是 的壓力傳播方向而是全方向壓力傳播，因此薄膜狀材 以隨著基板的凹凸在不形成氣泡的狀態下埋入。 另外，上下加壓塊10、11藉著驅動裝置接近， 裝在上下加壓塊1 0、1 1的剛體加壓板的平滑的加壓 持著基板8加壓，不需另外設置平坦化的步驟即可以 膜材料表面平坦化（第10圖）。 又，上下加壓塊1 0、1 1夾持基板8以至加壓爲 期間，彈性材料構成的上側夾持構件24及下側夾持 25的另一邊部分24b、25b分別朝著一邊部分24a、 變形。 因此，另一邊部分24b、25b可以在夾持著薄膜夺 、：I 8的狀態，賦予密閉空間3 0內的薄膜帶整體向外 力，因此，可以抑制在薄膜帶上產生「皺褶」、「撓 力同 形成 氣口 壓力 力差 8加 空氣 單向 料可 使安 面夾 使薄 止的 構件 25a 替17 的拉 曲j -24- (21) (21)200422165 其結果，以加壓塊加壓時，可以更確實地使薄膜狀材 料表面平坦化。 另外，如第8圖的狀態，彈性材料構成的上側夾持構 件24及下側夾持構件25的另一邊部分24b、25b分別朝 著一邊部分24a、25a變形，如上述賦予薄膜帶向外的拉 力’藉著上下薄膜帶的伸展，減小上下薄膜帶的間隙，形 成上下薄膜帶本身將薄膜狀材料壓接基板上的狀態。其結 果’可提高薄膜狀材料和基板的密接性，對薄膜狀材料形 成良好的熱傳導，可以迅速軟化薄膜狀材料，提昇產量。 構成夾持構件24、25的彈性材料也可以使用橡膠以 外的材料，並且只要可以形成第2的空間2 8、2 9及密閉 空間3 0，也可以採用具有第1 2圖表示剖面形狀的夾持構 件2 5 5。另外，夾持構件也可以不須賦予薄膜帶向外拉力 的形狀，如第Π圖及第1 2圖表示只安裝在上側加壓塊或 只安裝在下側加壓塊上。夾持構件僅安裝在上下加壓塊的 一方時，取代另一方夾持構件的夾持手段是以相對於一方 夾持構件之加壓塊的面所構成。 圖示實施樣態中，夾持構件24、25至少安裝在上下 加壓塊1 〇、1 1的至少一方，藉著加壓塊的驅動，夾持上 下薄膜帶形成第2空間2 8、2 9及密閉空間3 0，但是不僅 限於此。不論加壓塊，也可以另外設置形成第2空間2 8 、29及密閉空間3 0的封閉手段。 另外，爲了在第2空間28、29及密閉空間30之間產 生壓力差，也可以將加壓空氣從另外的真空室1的外部導 -25- (22) 200422165 入第2空間2 8、2 9內，第2空間2 8、2 9和密 之間產生壓力差的其他適當手段，該業者可以任 又，上述實施樣態雖已說明了上下夾持構件 配置在上下加壓塊外緣部的全周圍，但是第2 5 2 9及密閉空間3 0內只要在必要範圍的時間內可 範圍的壓力値，不需要完全的密閉性，例如第i 也可以不連續的狀態下配置環形的上下夾持構件 本發明的真空層疊方法中，首先準備階段是 材料重疊在基板8上暫時固定。此一過程可以使 層疊進行。 其次，將保持著暫時固定在表面的薄膜狀材 8投入撓性的上下一對薄膜帶1 7、1 8間。使其 基板8的薄膜帶1 7、1 8縱向移動，通過開口部 8運入真空室1內的預定位置（第6圖）。 隨著利用驅動裝置使下側外框構件3上升和 構件2密封卡合，形成真空室1內部的第1空間 狀態（第7圖）。隨後藉著排氣手段進行第1空間 。藉此將基板8周邊環境減壓至預定的壓力。 第1的空間S在減壓的狀態下，藉著驅動裝 加壓塊1 1上升至預定位置爲止，和上側加壓塊 第8圖）。藉此，使分別設置在上下加壓塊1 〇、I 下夾持構件24、25以基板8的周圍夾持上下的？ 、1 8 ’彼此密接，在上下一對的薄膜帶1 7、1 8 封入基板8的密閉空間3 0的同時，利用上下加| 空間3 0 在 CBB 裡 思进擇。 連續環狀 g 間 2 8、 維持必要 3圖表示 〇 將薄膜狀 用一般的 料的基板 間保持著 9將基板 上側外框 S的密封 S的排氣 置使下側 1 〇接近（ 1上的上 奪膜帶17 間，形成 g 塊 1 0 ' -26- (23) (23)200422165 1 1所具備的加熱器，將基板8和薄膜狀材料同時加熱至 預定的溫度爲止。 保持在基板8上的薄膜狀材料在加熱充分軟化之後， 利用供氣裝置從供氣口供給一定量的空氣至真空室1內的 第1空間S內，藉以使真空室1內的第1空間S的壓力上 升至預定壓力。其結果，經由設置在上下加壓塊1 0、1 1 的孔26、27同樣使得和第1的空間S連通的第2空間28 、2 9，上升至與第1空間S相同的壓力値爲止。藉此，將 密閉空間3 0外部的壓力側形成高於密閉空間3 0的內部壓 力，暫時固定薄膜狀材料的基板8形成藉著上下的一對薄 膜帶1 7、1 8加壓（第9圖）。由於使用撓性薄膜帶1 7、1 8 的空氣壓進行加壓，因此被推壓的撓性薄膜帶1 7、1 8順 著基板8的凹凸形狀變形，可以將壓力全方向的傳播至基 板8上的薄膜狀材料。其結果，基板8的孔或凹陷部不會 殘留氣泡地埋入薄膜狀材料。 最後，更使得下側加壓塊1 1上升，藉著分別設置在 上下加壓塊1 〇、1 1上的剛體加壓板的平滑加壓面，經薄 膜帶1 7、1 8夾持基板8加壓（第1 0圖）。雖然可能根據前 過程的撓性薄膜帶1 7、1 8的基板8的加壓產生，薄膜狀 材料的外表面的凹凸形狀，可藉著剛體加壓板的平滑加壓 面進行本過程的加壓形成平坦化。 如上述，基板8上的薄膜狀材料表面的平坦化可不須 設置另外步驟即可進行。 另外，密閉空間3 0外部的壓力高於內部的壓力下， -27- (24) 200422165 也可以在以一對薄膜帶1 7、1 8將基板加壓的過程，及以 上下加壓塊1 〇 ' Π夾持基板8加壓的過程之間，設置使 密閉空間3 0外部的壓力再度減壓至預定壓力爲止的過程 。藉此，由於間隔在上下加壓塊1 0、1 1和薄膜狀材料之 間的空氣更爲減少，可以更提昇層疊後薄膜表面的平坦性As a result, the pressure in the second space S -23- (20) 200422165 in the second space 2 8 ′ 2 9 in the vacuum chamber 1 is communicated through the holes 2 6 and 2 7 to the pressure sample site in the first space S. The pressure rises to a predetermined level, which is relatively high compared to the pressure in the enclosed space 30. Therefore, the pressure at the outside of the holes 26, 27, the gas supply device, and the enclosed space 30 provided in the vacuum chamber 1 is higher than the internal pressure difference generating means. The substrate 8 holding the film-like material is pressed by the upper and lower film strips 17 and 1 by the pressure in the second spaces 28 and 29 and the closed space 30. At this time, since the pressure is applied according to the pressure using the flexible film strips I 7 and 18, the pressure is not propagated in the omnidirectional direction, but the pressure is propagated in all directions. It is embedded in the state where bubbles are not formed in accordance with the unevenness of the substrate. In addition, the upper and lower pressurizing blocks 10 and 11 are approached by the driving device, and the rigid body pressing plates mounted on the upper and lower pressurizing blocks 10 and 11 are smoothly pressed and held by the substrate 8 without additional flattening. In this step, the surface of the film material can be flattened (Figure 10). In addition, while the upper and lower pressurizing blocks 10 and 11 hold the substrate 8 under pressure, the other side portions 24b and 25b of the upper side clamping member 24 and the lower side clamp 25 made of elastic material face the one side portions 24a and 24a, respectively. Deformation. Therefore, the other side portions 24b and 25b can hold the film strip in the state of: I 8 to give the film strip in the closed space 30 an overall outward force. Therefore, it is possible to suppress the occurrence of "wrinkles", " The deflection force is the same as the pressure difference between the port and the air. 8 plus air one-way material can make the mounting surface clamp the thin-clamped member 25a instead of 17's j -24- (21) (21) 200422165. As a result, the pressure is pressurized In this case, the surface of the film-like material can be flattened more reliably. In addition, as shown in FIG. 8, the other side portions 24 b and 25 b of the upper clamping member 24 and the lower clamping member 25 made of elastic material face one side, respectively. The portions 24a and 25a are deformed. As described above, the outward tensile force is given to the film tape. The gap between the upper and lower film tapes is reduced by the extension of the upper and lower film tapes, and a state in which the upper and lower film tapes press the film-like material onto the substrate is formed. 'It can improve the adhesion between the film-like material and the substrate, form a good heat conduction to the film-like material, and can quickly soften the film-like material and increase the yield. The elastic materials constituting the clamping members 24 and 25 can also use rubber. Materials other than glue can be used as long as they can form the second spaces 28, 29, and the closed space 30, and the holding member 2 5 5 having a cross-sectional shape shown in FIG. 12 can also be used. Alternatively, the holding member may be It is not necessary to give the film belt an outward tensile shape, as shown in Figures Π and 12 shows that it is only installed on the upper pressure block or only on the lower pressure block. The clamping member is only installed on one side of the upper and lower pressure blocks. In this case, the clamping means instead of the other clamping member is constituted by the surface of the pressure block facing the one clamping member. In the illustrated embodiment, the clamping members 24 and 25 are installed at least on the upper and lower pressing blocks 1 〇 At least one of 11 and 1 is driven by the pressure block to form the second space 28, 29, and the closed space 30 by clamping the upper and lower film strips, but it is not limited to this. The pressure block may be separately provided. Forming means for closing the second spaces 28, 29 and the closed space 30. In addition, in order to generate a pressure difference between the second spaces 28, 29 and the closed space 30, pressurized air may be removed from the other vacuum chamber 1 External guide -25- (22) 200422165 into the second space 2 8, 2 9 Other suitable means for generating a pressure difference between the second space 28, 29, and the dense can be used by the operator. Although the above embodiment has been described above, the upper and lower clamping members are arranged around the outer edge of the upper and lower pressure blocks. However, as long as the pressure can be within a required range of time within the 2nd 5 2 9 and the confined space 30, complete sealing is not required. For example, the i-shaped upper and lower clamping members may be arranged in a discontinuous state. In the vacuum lamination method of the present invention, firstly, in the preparation stage, the material is temporarily fixed on the substrate 8. This process can be laminated. Second, the film-like material 8 that is temporarily fixed on the surface is put into a flexible upper and lower pair. There are 17 and 18 film strips. The film strips 17 and 18 of the substrate 8 are moved longitudinally, and are carried into a predetermined position in the vacuum chamber 1 through the opening 8 (Fig. 6). As the lower outer frame member 3 is raised and the member 2 is hermetically engaged with the driving device, a first space state inside the vacuum chamber 1 is formed (Fig. 7). Then, the first space is carried out by exhausting means. Thereby, the surrounding environment of the substrate 8 is decompressed to a predetermined pressure. The first space S is depressurized, and the pressure block 11 is driven up to a predetermined position by the driving device, and the upper pressure block (Fig. 8). Thereby, the lower clamping members 24, 25 respectively provided on the upper and lower pressing blocks 10, I are clamped up and down around the substrate 8? , 1 8 ′ are in close contact with each other, while the upper and lower pair of film strips 17 and 18 are sealed in the closed space 3 0 of the substrate 8, the space 3 0 is added and applied in the CBB. Continuous ring g 2 8 、 Maintenance necessary 3 The figure shows 〇 The film is held between the substrates of general material 9 The exhaust of the seal S of the upper frame S of the substrate is set so that the lower side 1 is close to (1 on the There are 17 upper film strips to form a block of 10 '-26- (23) (23) 200422165 1 1 The heater provided in the substrate heats the substrate 8 and the film-like material to a predetermined temperature at the same time. After the film-like material on the substrate is sufficiently softened by heating, a certain amount of air is supplied from the air supply port to the first space S in the vacuum chamber 1 by the air supply device, so that the pressure in the first space S in the vacuum chamber 1 is increased. As a result, the second spaces 28 and 29 communicating with the first space S are also raised to the same as the first space S via the holes 26 and 27 provided in the upper and lower pressure blocks 10 and 11. Thus, the pressure side outside the closed space 30 is formed to be higher than the internal pressure of the closed space 30, and the substrate 8 for temporarily fixing the film-like material is formed by a pair of upper and lower film strips 17 and 18. Pressurization (figure 9). Due to the air pressure of the flexible film tapes 17 and 18 Since the pressurized flexible film tapes 17 and 18 are deformed along the uneven shape of the substrate 8, the pressure can be transmitted to the film-like material on the substrate 8 in all directions. As a result, the holes of the substrate 8 Or the recessed part is buried in the film-like material without remaining air bubbles. Finally, the lower pressure block 11 is further raised, and the rigid pressure plate provided on the upper and lower pressure blocks 10 and 11 is smoothly added. The pressing surface is pressurized by holding the substrate 8 through the film strips 17 and 18 (Fig. 10). Although it may be generated by the pressing of the substrate 8 of the flexible film strips 17 and 18 in the previous process, the film-like material The uneven shape of the outer surface can be flattened by pressing in this process by the smooth pressing surface of the rigid body pressing plate. As described above, the planarization of the surface of the film-like material on the substrate 8 can be performed without additional steps. In addition, if the external pressure of the enclosed space 30 is higher than the internal pressure, -27- (24) 200422165 can also be used in the process of pressing the substrate with a pair of film strips 17, 7, and up and down. Block 1 〇 ′ Π is provided between the substrate 8 and the pressurization process to provide a sealed space The process of depressurizing the external pressure to a predetermined pressure again by 30. As a result, since the air space between the upper and lower pressure blocks 10, 11 and the film-like material is further reduced, the surface of the laminated film can be further improved. Flatness
【圖式簡單說明】 弟1圖爲本發明層疊裝置的第1實施例的側面圖，一* 部分取縱向剖面。 第2圖是階段性表示本發明層疊裝置的第1實施例的 拉力賦予手段的夾持構件的作用的片段圖，從薄膜帶的縱 向表示的圖。 第3圖爲本發明層疊裝置的第2實施例的側面圖，取 部分剖面。[Brief Description of the Drawings] Figure 1 is a side view of the first embodiment of the laminating device of the present invention, and a * section is taken in a longitudinal section. Fig. 2 is a fragmentary view showing the operation of the holding member of the tension applying means of the first embodiment of the laminating apparatus of the present invention in stages, and is a view showing the film tape in the longitudinal direction. Fig. 3 is a side view of a second embodiment of the laminating apparatus of the present invention, and a partial cross section is taken.
第4圖爲本發明層疊裝置的第2實施例的真空層疊部 的詳細側面圖，取部分剖面。 第5圖爲第4圖箭頭部的箭頭方向的剖面圖。 第6圖爲本發明層疊裝置的第2實施例的真空層疊部 的詳細側面圖，階段性表示將薄膜狀材料埋入基扳的過程 的最初過程圖，取部分剖面。 第7圖爲本發明層疊裝置的第2實施例的真空層疊部 的詳細側面圖，階段性表示將薄膜狀材料埋入基板過程的 第2階段的圖，取部分剖面。 -28- (25) (25)200422165 第8圖爲本發明層疊裝置的第2實施例的真空層疊部 的詳細側面圖，階段性表示將薄膜狀材料埋入基板過程的 第3階段的圖，取部分剖面。 第9圖爲本發明層疊裝置的第2實施例的真空層疊部 的詳細側面圖，階段性表示將薄膜狀材料埋入基板過程的 第3階段的圖，取部分剖面。 第10圖爲本發明層疊裝置的第2實施例的真空層疊 部的詳細側面圖，階段性表示將薄膜狀材料埋入基板過程 的第4階段的圖，取部分剖面。 第II圖爲本發明層疊裝置的其他實施例的真空層疊 部的詳細側面圖，取部分剖面。 弟12圖爲本發明層璺裝置的另外實施例的真空層疊 部的詳細側面圖，取部分剖面。 第1 3圖爲本發明層疊裝置的另一其他實施例，沿著 第4圖箭頭部表示方向所示的剖面圖。 〔符號說明〕 1 真空室、2 上側外框構件、3 下側外框構件 、4 支撐塊、5 下側支撐構件、6 支柱、7 驅動 裝置、8 基板、9 開口部、1 〇 上側加壓塊、 11 下側加壓塊、1 2 驅動裝置、1 3 桿、1 4 密封 手段、1 5 薄膜帶捲出部、1 6 薄膜帶捲繞部、1 7 上 側薄膜帶、18 下側薄膜帶、]9 滾子運送機、20 滾 子運送機、2 1 滾子、22 上側加壓塊的兩端緣部、 -29- (26) 200422165 22a 上側加壓塊的外緣部、2 3下側加壓塊的兩端緣部、 2 3a 下側加壓塊的外緣部、2 4 上側夾持構件、 2 4 a 上側夾持構件的一邊部分、2 4 b 上側夾持構件的 另一邊部分、2 5 下側夾持構件、2 5 a 下側夾持構件的 一邊部分、2 5 b 下側夾持構件的另一邊部分、2 5， 夾 持構件、26 孔、27 孔、28 第2空間、29 第2 空間、3 0 密閉空間、P 壓製部、S 第1空間、 V 真空層疊部。 -30-Fig. 4 is a detailed side view of a vacuum lamination section of a second embodiment of the lamination apparatus of the present invention, and a partial cross section is taken. Fig. 5 is a cross-sectional view in the direction of the arrow of the arrow portion in Fig. 4. Fig. 6 is a detailed side view of a vacuum lamination unit according to a second embodiment of the laminating apparatus of the present invention. Fig. 6 is an initial process diagram showing a step of embedding a film-like material in a base plate, and a partial cross section is taken. Fig. 7 is a detailed side view of the vacuum lamination section of the second embodiment of the laminating apparatus of the present invention, which shows the second stage of the process of embedding the film-like material into the substrate in stages, and is partially sectioned. -28- (25) (25) 200422165 FIG. 8 is a detailed side view of the vacuum lamination part of the second embodiment of the lamination device of the present invention, and is a diagram showing the third stage of the process of embedding a thin film material into a substrate, Take a section. Fig. 9 is a detailed side view of the vacuum lamination section of the second embodiment of the laminating apparatus of the present invention, which shows the third stage of the process of embedding the film-like material into the substrate in stages, and is partially sectioned. Fig. 10 is a detailed side view of the vacuum lamination section of the second embodiment of the laminating apparatus of the present invention, which is a stepwise diagram showing the fourth stage of the process of embedding the film-like material into the substrate, and a partial cross section is taken. Fig. II is a detailed side view of a vacuum lamination section of another embodiment of the laminating apparatus of the present invention, and a partial cross section is taken. Fig. 12 is a detailed side view of a vacuum lamination section of another embodiment of the layered device of the present invention, and a partial cross section is taken. Fig. 13 is a cross-sectional view showing another embodiment of the laminating apparatus of the present invention, taken along the direction indicated by the arrow portion in Fig. 4. [Description of Symbols] 1 vacuum chamber, 2 upper outer frame member, 3 lower outer frame member, 4 support block, 5 lower support member, 6 pillars, 7 driving device, 8 base plate, 9 openings, 10 upper pressure Block, 11 lower pressure block, 1 2 drive unit, 1 3 rod, 1 4 sealing means, 1 5 film tape unwinding part, 1 6 film tape winding part, 1 7 upper film tape, 18 lower film tape ,] 9 roller conveyor, 20 roller conveyor, 2 1 roller, 22 both ends of the upper pressure block, -29- (26) 200422165 22a outer edge of the upper pressure block, 2 3 times Both end edge portions of the side pressure block, 2 3a Outer edge portion of the lower pressure block, 2 4 upper side clamping member, 2 4 a side portion of the upper side clamping member, 2 4 b other side of the upper side clamping member Part, 2 5 lower clamping member, 2 5 a side of lower clamping member, 2 5 b other side of lower clamping member, 2 5, clamping member, 26 hole, 27 hole, 28 section 2 space, 29 second space, 30 closed space, P pressing section, S first space, V vacuum stacking section. -30-