TW200421332A - Optical recording medium and manufacturing method thereof - Google Patents
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(一)、【發明所屬之技術領域】 本發明係關於一種光學記錄媒體及其製造方法,特別 葡於種”有硬膜保濩層(hard coating layer)之光學 記錄媒體及其製造方法。 (二)、【先前技術】 近f來’由於光學記錄媒體可以儲存大量的資料、具 释:攜邢性、且能夠長久保存資料,所以利用光學記錄媒 儲存貝料已經是越來越普及的資料儲存方式,其應用 、項域^括,存影像、音樂或大筆資料等用途。 τν . 、】最吊見的光學記錄媒體包括CD (Compact η· λ 及數位影音光碟(DVD,Digital Versatile u i s c ),复έ士槐丄 % ,、二構大致相仿而數位影音光碟的資料儲存容量 灸日〃=⑶的貝料儲存容量。以丁以CD為例說明其結構,請 >尸、?、圖1戶斤+ 料,第_ 一般而言,光學記錄媒體1通常包括三層材 銀等6凰層為形成有孔洞(P 1七)之基板1 1 ’第二層為金或 成之仅%才料所形成之反射層13 ’而第三層為由樹脂所形 錄式光風:°為注意者’前述之光學記錄媒體係包括可 層由有2 ^錄媒體,其係於基板11與反射層1 3之間形成一 9 承幾染料(Dye )所構成的記錄層(圖中未顯示)。 。八上所述,當利用讀取裝置,如CD-Player、DVD- 丄3yer等歩7罢 , 取駐罢、直’來讀取光學記錄媒體1所儲存的資料時,讀 夂衣童所私ψ 此Φ+ x 之S射光會穿過基板11,並由反射層1 3反射 ^ 7Γ\ 1 jr 在 厶士 安者項取裝置會接收被反射層1 3所反射之雷射(1) [Technical field to which the invention belongs] The present invention relates to an optical recording medium and a manufacturing method thereof, and particularly to an optical recording medium having a "hard coating layer" and a manufacturing method thereof. 2.) [Previous technology] In recent years, because optical recording media can store a large amount of data, it is easy to carry and can store data for a long time, so using optical recording media to store shell materials has become increasingly popular. Storage method, its application, field, including video, music or large data. Τν.,] The most popular optical recording media include CD (Compact η · λ and digital video discs (DVD, Digital Versatile uisc) ), Fu Shihuai 丄%, and the two structures are similar, but the data storage capacity of digital audio-visual discs is moxibustion date = ⑶ shell material storage capacity. Taking Ding as an example to explain its structure, please > corpse,?, Fig. 1 Household materials + Article _ Generally speaking, optical recording medium 1 usually includes three layers of silver, etc. 6 layers are formed with holes (P 17) on the substrate 1 1 'The second layer is gold or only % Expected to form The reflective layer 13 'and the third layer are recorded by a resin-type light wind: ° is the attention' The aforementioned optical recording medium includes a recording medium, which is a substrate 11 and a reflective layer 13 A recording layer (not shown in the figure) composed of 9 dyes (Dye) is formed between them. As mentioned above, when using a reading device such as CD-Player, DVD-DVD3yer, etc. When you read the data stored in the optical recording medium 1, read the clothes of the children ψ This Φ + x S light will pass through the substrate 11 and reflected by the reflective layer 1 3 ^ 7Γ \ 1 jr in The Anchorman's Pickup Device will receive the laser light reflected by the reflective layer 1 3
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光,並據此反射〜π…〜_印山/u于5ϋ酃蛛體^ 料,·其中,光學記錄媒體1之基板u的一面,一=存的資 取面。但,光學記錄媒體在搬運、使用、儲存的過 為讀 常會產生碰撞、摩擦,進而磨損光學記錄媒體之中, 結果會造成讀取裝置無法正常讀取光學記錄媒體;的=, 料;因此,熟知技術者便利用旋轉塗佈方式,在光成貝 媒體2之讀取面上形成有一硬膜保護層17 (如圖2所錄 以期旎夠增加頊取面的表面硬度並增進其耐磨能力y。、 b^然而,上述之旋轉塗佈製程不易控如,而且在形成麻 膜保護層1 7的過程中,美柘n溆綠描#地 仕^成硬 ㈠η㈣ace)會產生内基;^與硬+膜保護層17間的接合面 接合狀況不佳,而且利田你 )的隹積’及 層17合有均勻性f •用紋轉塗佈方式所製得之硬膜保護 學圮^媒體π1”)不佳的情形,結果會對光 干。己錄媒體2的後續機械性 了九 因此,如何於^、 尤冤14 1造成不良的影響。 避免對光學t :> 保邊光學§己錄媒體之讀取面,並 實。=學械與光電性質造成不良的影響 、彔媒體衣造技術的重要課題之一。 本發明之目的為提供一種能夠有效 機械與光電性質的光學記錄媒體及 (二)、【發明内容】 有鑑於上述課題, 保護讀取面並避免影響 其製造方法。 取面形成有至少 之間的介面層。Light, and reflect accordingly ~ π ... ~ _ Yinshan / u Yu 5 体 spider body, of which, on one side of the substrate u of the optical recording medium 1, one = the stored capital side. However, when the optical recording medium is transported, used, or stored, it will often cause collision and friction when it is read, which will cause wear on the optical recording medium. As a result, the reading device cannot read the optical recording medium normally; therefore, A person skilled in the art can conveniently use a spin coating method to form a hard film protective layer 17 on the reading surface of the optical film 2 (as shown in FIG. 2 in order to increase the surface hardness of the extraction surface and improve its wear resistance). y., b ^ However, the above-mentioned spin coating process is not easy to control, and in the process of forming a protective film 17, 柘 n 柘 绿 溆 # 地 仕 ^ 成 硬 ㈠η㈣ace) will produce an internal base; ^ The bonding surface with the hard + protective film 17 is not in good condition, and Litian you) and the layer 17 has uniformity f • Hard film protection method made by grain coating method ^ Media π1 ”) in a poor situation, the result will be light-dry. The subsequent mechanical properties of the recorded media 2 are nine, so how to make a bad impact on ^, especially injustice 14 1. Avoid the optical t: > edge-protection optics § The reading side of the recorded media, and it is true. = School machine and photoelectricity The object of the present invention is to provide an optical recording medium capable of effective mechanical and optoelectronic properties and (2) and [Summary of the Invention] In view of the above-mentioned problems, protection of reading Take the surface and avoid affecting its manufacturing method. The surface is formed with at least an interface layer between them.
第6頁 200421332 五、發明說明(3) 緣是’為達上述目的’依本發明之光學記錄媒體包括 一光學記錄基板、一介面層、以及一硬膜保護層(hard coating layer )。在本發明中,介面層及硬膜保護層形成 於光學記錄基板之一側;且介面層係位於光學記錄基板與 硬膜保護層之間。其中,介面層及硬膜保護層係形成於光 學記錄媒體之讀取面的一側;而光學記錄基板包括一基 板、一反射層及一保護層。 另外,本發明亦提供一種光學記錄媒體製造方法,包 括預製一光學記錄基板;於光學記錄基板之一側形成一介 面層;以及於介面層上形成一硬膜保護層。在本發明中, 介面層係形成於基板與硬膜保護層之間。其中,介面層及 硬膜保護層可以是利用濺鍍方式所形成。 承上所述,因依本發明之光學記錄媒體及其製造方法 係於光學記錄媒體之讀取面形成有介面層及硬膜保護層, 所以能夠利用硬膜保護層來有效地保護光學記錄媒體之讀 取面’並利用設置於基板與硬膜保護層之間的介面層來避 免接合面的内應力堆積及接合狀況不佳的情形,進而排除 對光學記錄媒體的機械與光電性質造成的不良影響;此 外,由於依本發明之光學記錄媒體及其製造方法係玎以是 利用錢鑛方式來形成介面層及硬膜保護層,所以能夠避免 利用旋轉塗佈方式所造成之均句性不佳的問題,更進4 改善光學記錄媒體的機械與光電性質。 (四)、【實施方式】Page 6 200421332 V. Description of the invention (3) The optical recording medium according to the present invention includes an optical recording substrate, an interface layer, and a hard coating layer. In the present invention, the interface layer and the hard film protective layer are formed on one side of the optical recording substrate; and the interface layer is located between the optical recording substrate and the hard film protective layer. The interface layer and the hard film protective layer are formed on one side of the reading surface of the optical recording medium; and the optical recording substrate includes a substrate, a reflective layer, and a protective layer. In addition, the present invention also provides a method for manufacturing an optical recording medium, including prefabricating an optical recording substrate; forming an interface layer on one side of the optical recording substrate; and forming a hard film protective layer on the interface layer. In the present invention, the interface layer is formed between the substrate and the hard film protective layer. The interface layer and the hard film protective layer may be formed by a sputtering method. As mentioned above, since the optical recording medium and the manufacturing method thereof according to the present invention have an interface layer and a hard film protective layer formed on the reading surface of the optical recording medium, the hard film protective layer can effectively protect the optical recording medium. The reading surface 'and the use of an interface layer provided between the substrate and the hard film protective layer to avoid the internal stress accumulation of the joint surface and the poor joint condition, thereby eliminating the defects caused by the mechanical and optoelectronic properties of the optical recording medium In addition, because the optical recording medium and the manufacturing method thereof according to the present invention use the money ore method to form the interface layer and the hard film protective layer, it can avoid the poor uniformity caused by the spin coating method. The problem is further improved by improving the mechanical and optoelectronic properties of the optical recording medium. (D), [Implementation]
200421332 五、發明說明(4) 以下將參照相關圖式,說明依本發明較佳實施例之光 學記錄媒體及其製造方法,其中相同的元件將以相同的參 照符號加以說明。 請參照圖3所不’依本杂明車乂佳貫施例之光學記錄媒體 3包括一基板31、一反射層33、一保遵層35、一硬膜保護層 37及一介面層39。 在本實施例中,基板3 1之一側面上係形成有複數個孔 洞3 11 ; —般而言,熟知技術者係先製作與基板3 1相對應之 一母版(stamper),並利用射出成型方式配合此母版形成 基板31。 反射層3 3及保護層3 5係依序形成於基板3 1具有孔洞3 1 1 之一側,如圖所示。在本實施例中,反射層3 3可以是由金 或銀卓金屬材料所形成’而保護層3 5通常由樹脂所形成。 需注意者,基板31、反射層33及保護層35係構成前文定義 之光學記錄基板,其可以是習知的CD或DVD等光學記錄媒 It 〇 ° 如圖3所示,介面層3 9及硬膜保護層3 7則依序形成於基 板3 1具有孔洞3 1 1之另一側。在本實施例中,介面層3 g及硬 膜保護層3 7係以濺鍍方式形成,而且介面層3 9係形成於基 板3 1與硬膜保護層3 7之間,其係由能夠分別與基板3 1及硬 膜保護層37穩定接合的材質所形成,例如是環氧樹脂、含 :二匕:物、氧化石”,所以能夠避免習知以旋轉塗佈方式 冰仏否之接合面的内應力堆積及接合狀況不佳的情形;另 膜保濩層3 7係為能夠提供增加表面硬度及耐磨能力200421332 V. Description of the invention (4) The optical recording medium and its manufacturing method according to the preferred embodiment of the present invention will be described below with reference to related drawings, in which the same components will be described with the same reference symbols. Referring to FIG. 3, the optical recording medium 3 according to the present embodiment of the hybrid vehicle includes a substrate 31, a reflective layer 33, a compliance layer 35, a hard film protective layer 37, and an interface layer 39. In this embodiment, a plurality of holes 3 11 are formed on one side of the substrate 31; in general, a person skilled in the art first creates a stamper corresponding to the substrate 31 and uses injection A molding method is used to form the substrate 31 in accordance with the master. The reflective layer 3 3 and the protective layer 3 5 are sequentially formed on one side of the substrate 3 1 having the holes 3 1 1, as shown in the figure. In this embodiment, the reflective layer 3 3 may be formed of a gold or silver metal material 'and the protective layer 3 5 is generally formed of a resin. It should be noted that the substrate 31, the reflective layer 33, and the protective layer 35 constitute an optical recording substrate as defined above, which may be a conventional optical recording medium such as CD or DVD It 0 ° As shown in FIG. 3, the interface layer 39 and The hard film protective layer 37 is sequentially formed on the other side of the substrate 3 1 having the holes 3 1 1. In this embodiment, the interface layer 3 g and the hard film protective layer 37 are formed by sputtering, and the interface layer 3 9 is formed between the substrate 31 and the hard film protective layer 37. It is formed of a material that is stably bonded to the substrate 31 and the hard film protective layer 37. For example, it is epoxy resin, containing: two daggers: objects, oxide stones. In the case of poor internal stress accumulation and joint conditions; the other film retaining layer 3 7 series can provide increased surface hardness and wear resistance
200421332 五、發明說明(5) 的物質,例如是有機化合物、熱熔樹脂(therm〇fusibie n)Q、環氧樹脂、二氧化矽、氧化鋁等。需注意者,因 二面層39及硬膜保護層37係形成於光學記錄媒體3之讀取 介面層39及硬膜保護層37必須是能夠讓讀取裝 置二&雷射光順利穿過的物質,以便讀取裝 置此夠正*讀取光學記錄媒體3中所儲存的資料。 另外’請參考圖4所示’依本發明另一較 學記錄媒體4包括一基板31、一反射層33、一保護J之j 硬膜保護層37、一緩衝層38及一介面層3g。 ^上所述’光學記錄媒體4的部^件係 此不再闡^在本實施例中,緩衝層38係形成於^所达故 :硬膜保護層37之間,以便緩衝或吸收施 ; 體4上的外力及光學記錄媒體"可能產生的内己:媒 中’緩衝層38同樣係以濺鍍方式所形成,而其材可二θ 有機聚合物、蠟質(waxe )、橡膠(rubb ^几你疋 等。 ^ 、氣化飾 需注意者,依本發明之光學記錄媒體除了 之CD或DVD ’其亦可以是可錄式光學記錄媒體疋; R、CD-RW、DVD-R 或DVD-RW ;例如,如圖5 疋⑶一 又一較佳實施例之光學記錄媒體5包括一 依本發明 32、一反射層33、一保護層35、一硬膜保土護層π、、-一記二層 層38及一介面層39。在本實施例中,記錄層3 、=厂 以是包括有機物,如?1^1^1〇(:口111116、。戈1二貝,、可 (AZ〇compounds),而此有機物在經過雷射光的照:後, 200421332 五、發明說明(6) 為使本發明之内容更容易理解,以下將舉—每 祝明依本發明較佳實施例之光學記錄媒體製造方二例, 程。 乃’去的流 會因為雷射光聚焦所產生的高溫而產生結構的變化,以便 寫入資料;另外,記錄層32係位於基板31與反射層33之 間’其材質可以是包括金屬,如Ge-Sb-Te、或是Ag-In-Sb-T e ’而記錄層3 2之金屬在經過讀取裝置之雷射光的照射 後’會因為雷射光聚焦所產生的高溫而發生相變化,據此 ,成資料的寫入。另外,依本發明之光學記錄媒體 是雙層結構之DVD、DVD-R或DVD-RW的其中一層。、 可以 以 製 記CD 結 入 射 之 板 質 形 積 請 造方 錄基'CD 構, 式或 層之 接 一側 之基 。在 成介 ,及 然 π π b所不,依本發明較佳實施例之光鐵二 法6包括步驟60卜604。首先,步驟fini γ予記錄士 姑 ,t ^ Ό υ 1係預fJ 扳。在本實施例中,光學記錄基板可以曰頂广一; 一R、CD-RW、DVD、DVD-R 或DVD-RW 等本疋習知的 其通常具有一基板、一反射層及一保罐學記錄媒^ 可複寫式的光學記錄媒體之結構,| 1層’若為 ,更形成有一記錄層。 、3在基板與 著,在步驟6 0 2中,一介面層係形成於“ < 。承上所述,本步驟係將介面層形、光學記錄;^ 板的一側,其材質係為能夠與基板穩=光學記錄 本實施例中,介面層是利用濺鍍方^天接合之物 面層時,不會於基板與介面層之間^所形成,故 接合狀況不佳的情形。 生内應力的 後’步驟6 0 3係於介面層上形成一 γ v __ 、戈衝層。在本^ 光200421332 V. The substances described in (5) of the invention are, for example, organic compounds, thermofusibie n, epoxy resin, silicon dioxide, aluminum oxide, and the like. It should be noted that since the two-face layer 39 and the hard film protective layer 37 are formed on the reading interface layer 39 and the hard film protective layer 37 of the optical recording medium 3, the reading device 2 & laser light must pass through smoothly. The substance is sufficient for the reading device to read the data stored in the optical recording medium 3. In addition, "Please refer to Fig. 4" according to another comparative recording medium 4 of the present invention, which includes a substrate 31, a reflective layer 33, a j-hard film protective layer 37, a buffer layer 38, and an interface layer 3g. ^ The components of the optical recording medium 4 described above are not explained here. In this embodiment, the buffer layer 38 is formed between the hard film protective layer 37 to buffer or absorb the application; External force on the body 4 and the possible internal recording medium: The buffer layer 38 in the medium is also formed by sputtering, and the material can be two-theta organic polymer, waxe, rubber ( rubb ^ Ji you 疋 etc. ^ For those who need to pay attention to the vaporization decoration, in addition to the CD or DVD of the optical recording medium according to the present invention, it can also be a recordable optical recording medium; R, CD-RW, DVD-R Or DVD-RW; for example, as shown in FIG. 5 (3), an optical recording medium 5 according to another preferred embodiment includes a 32, a reflective layer 33, a protective layer 35, a hard-layer soil-retaining protective layer π, according to the present invention. ,-A two-layer layer 38 and an interface layer 39. In this embodiment, the recording layer 3, = factory includes organic matter, such as? 1 ^ 1 ^ 10 (: port 111116, .Ge 1 2 shell, , 可 (AZ〇compounds), and this organic matter is subjected to laser light: 200421332 V. Description of the invention (6) In order to make the content of the present invention easier to understand The following will be given-two examples of the manufacturing method of the optical recording medium according to the preferred embodiment of the present invention. The flow will cause structural changes due to the high temperature generated by the laser light focusing in order to write data. In addition, the recording layer 32 is located between the substrate 31 and the reflective layer 33. Its material may include a metal, such as Ge-Sb-Te, or Ag-In-Sb-T e. After the laser light of the reading device is irradiated, a phase change occurs due to the high temperature generated by the laser light focusing, and data is written accordingly. In addition, the optical recording medium according to the present invention is a double-layered DVD, One layer of DVD-R or DVD-RW. The plate shape product that can be entered into a CD knot is required to record the structure of the CD structure, or the layer on the side of the layer. In Cheng Jie, and then π π b No, according to the preferred embodiment of the present invention, the light iron method 6 includes steps 60 and 604. First, the step fini γ is recorded to the recorder, t ^ Ό υ 1 is a pre-fJ switch. In this embodiment, optical recording The substrate can be called top one; one R, CD-RW, DVD, DVD-R or DVD-RW, etc.疋 The conventional structure usually has a substrate, a reflective layer, and a canned recording medium. ^ A rewritable optical recording medium structure, | 1 layer, if it is, a recording layer is formed. In step 602, an interface layer is formed in "<. As mentioned above, this step is to layer and optically record the interface; ^ One side of the board is made of a material that is stable with the substrate = optical In this embodiment, when the interface layer is an object surface layer that is bonded by sputtering, it will not be formed between the substrate and the interface layer, so the bonding condition is not good. After the internal stress is generated, the step 603 is to form a γ v __ and Ge Chong layer on the interface layer. In this ^ light
第10頁 200421332 五、發明說明(7) ' ' 例中,緩衝層係利用濺鍍方式所形成,故在形成緩衝層 時,不會於介面層與緩衝層之間產生内應力的堆積。 最後,如步驟604所不,於緩衝層上形成一硬膜保護 層。在本實施例中,硬膜保護層的材質可以是任意一種習 知的硬獏保護層之材料;而且,本步驟係利用濺鍍方式形 成硬膜保護層,故在形成硬膜保護層時,不會於硬膜保護 層與緩衝層之間產生内應力的堆積。 需注意者,上述之步驟6 0 3可以是選擇性實施者,亦 是,可以不需在介面層與硬膜保護層之間形成緩衝 是在介面層上直接形成硬膜保護層。 % 綜上所述,由於依本發明之;學記錄媒體及直 法係於光學記錄媒體之讀取面形成古 、 八衣k方 層,所以能夠利用硬膜保護層來有;ί面層及硬膜保護 之讀取面;另外,依本發明之光風“地保瘦光學圮錄媒體 係利用濺鍍方式於基板與硬膜保錄媒體及其製造方法 避免接合面的内應力堆積及接合狀、、=之間形成介面層,來 利用旋轉塗佈方式所造成之均勻性_ =佳的情形,並避免 對光學記錄媒體的機械與光電性柄、&佳的問題,進而排除 以上所述僅,性,而非;;=良'響。、 本發明之精神與乾疇,而對其進行 壬可未脫離 應包含於後附之申請專利範圍中。之4效修改或變更,均Page 10 200421332 V. Description of the invention (7) In the example, the buffer layer is formed by sputtering, so when the buffer layer is formed, no internal stress build-up occurs between the interface layer and the buffer layer. Finally, as shown in step 604, a hard film protective layer is formed on the buffer layer. In this embodiment, the material of the hard coat protection layer may be any conventional hard coat protection layer material; moreover, this step is to form a hard coat protection layer by a sputtering method. Therefore, when forming the hard coat protection layer, There is no accumulation of internal stress between the hard film protective layer and the buffer layer. It should be noted that the above-mentioned step 603 may be a selective implementer, that is, it is not necessary to form a buffer between the interface layer and the hard film protective layer, and a hard film protective layer is directly formed on the interface layer. % In summary, according to the present invention, since the recording medium and the direct method are formed on the reading surface of the optical recording medium, the k-layers are formed on the reading surface of the optical recording medium, so the hard film protective layer can be used; Reading surface protected by hard film; In addition, according to the light wind of the present invention, the “preservative thin optical recording medium” uses the sputtering method on the substrate and the hard film recording medium and its manufacturing method to avoid the internal stress accumulation and joint state of the joint surface. An interface layer is formed between the, and = to take advantage of the uniformity caused by the spin coating method, and to avoid problems with the mechanical and optoelectronic handles of the optical recording medium, and to eliminate the problems described above. Only, sex, not ;; = good 'ring., The spirit and stem of the present invention, and it should be included in the scope of patents attached without departing from the scope of the patent application attached.
第11頁 200421332 圖式簡單說明 (五)、【圖式簡單說明】 圖1為一示意圖,顯示習知之光學記錄媒體的示意圖; 圖2為一示意圖,顯示另一習知之光學記錄媒體的示意 圖; 圖3為一示意圖,顯示依本發明較佳實施例之光學記錄 媒體的示意圖; 圖4為一示意圖,顯示依本發明另一較佳實施例之光學 記錄媒體的示意圖,其更具有一緩衝層; 圖5為一示意圖,顯示依本發明又一較佳實施例之光學 記錄媒體的示意圖,其更具有一記錄層;以及 圖6為一流程圖,顯示依本發明較佳實施例之光學記錄 媒體製造方法的流程。 元件符號說明: 1 光學記錄媒體 11 基板 13 反射層 15 保護層 17 硬膜保護層 2 光學記錄媒體 3 光學記錄媒體 31 基板 31 1 孔洞 3 2 記錄層Page 11 200421332 Schematic description (five), [Schematic description] Figure 1 is a schematic diagram showing a conventional optical recording medium; Figure 2 is a schematic diagram showing another conventional optical recording medium; 3 is a schematic diagram showing a schematic diagram of an optical recording medium according to a preferred embodiment of the present invention; FIG. 4 is a schematic diagram showing a schematic diagram of an optical recording medium according to another preferred embodiment of the present invention, which further has a buffer layer 5 is a schematic diagram showing a schematic diagram of an optical recording medium according to another preferred embodiment of the present invention, which further has a recording layer; and FIG. 6 is a flowchart showing an optical recording according to a preferred embodiment of the present invention Process of media manufacturing method. Description of component symbols: 1 Optical recording medium 11 Substrate 13 Reflective layer 15 Protective layer 17 Hard film protective layer 2 Optical recording medium 3 Optical recording medium 31 Substrate 31 1 Hole 3 2 Recording layer
第12頁 200421332Page 12 200421332
圖式簡單說明 33 反射層 35 保護層 37 硬膜保護層 38 緩衝層 39 介面層 4 光學記錄媒體 5 光學記錄媒體 6 光學記錄媒體製造方法 6(H 〜604 光學記錄媒體製造方法的流程Brief description of the drawings 33 Reflective layer 35 Protective layer 37 Hard film protective layer 38 Buffer layer 39 Interface layer 4 Optical recording medium 5 Optical recording medium 6 Manufacturing method of optical recording medium 6 (H ~ 604 Process flow of manufacturing method of optical recording medium
第13頁Page 13
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