TH44028A - Fluid filtration method - Google Patents

Abstract

DC60 (24/05/43) The separating agent 12, which is intercepted by the first film 10, is used as the second film 13 and thus prevents the blockage of the first 10 and external forces, for example, bubbles. It is fed to the second filter film 13 to maintain the level of filtration capacity. And when the extracted material is mixed with the filtered water The filtered water is re-circulated in a tank where the waste water is stored. And after it was verified that the required aggregation rate was met Filtering will start again. The separable substance 12, which is intercepted by the first film 10, is used as the second film 13 and thus prevents the blockage of the first 10 and external forces. For example, the bubble is fed to the filter film at Two 13 to maintain the level of filterability. And when the extracted material is mixed with the filtered water The filtered water is re-circulated in a tank where the waste water is stored. And after it was verified that the required aggregation rate was met Filtering will start again.

Claims (9)

1. The method of fluid filtration consists of preparation of filters. By feeding the fluid containing the separable to the first filter, the separable deposition is deposited on the first filter surface. To create a second filter Filtration of the extracted substance by feeding the fluid to the filter and external force to the second filter element. While there is still a filter. Substances that can be further separated So there will be a second filter recovery. 2. How to filter the fluid according to claim 1, where the filtering arrangement is assembled With fluid circulation 3. How to filter the fluid according to claim 2, where the filter preparation is assembled By adding smaller flakes-shaped material to the fluid 4. Method for filtration of the fluid according to claim 1, where the second filter contains a substance Separable with different sizes 5. Method for filtration of the fluid according to claim 1, where the substance can be separated is composed of Particles of different sizes And the second filter consists of a small hole larger than the smallest of the particles. And larger than the largest particle size 6. Method for filtration of the fluid according to claim 5, where the fluid contains a separable substance at Contains wastewater released in the semiconductor wafer formation of the semiconductor lump or in the cutting of the semiconductor wafer. 7. The fluid filtration method according to claim 1, wherein the separable substance has Particle size distribution With a maximum of two sizes And a small hole of the filter that one will have Size between the two maximum sizes 8. The fluid filtration method according to claim 1, where the larger the separable substance Than the small hole of the first filter Will be greater than the amount of separable matter smaller than the hole. Small size of the first filter 9. Methods for filtering objects in the fluid according to claim 1, where such filtering It consists of 1 repeating flow 0. Fluid filtration method according to claim 9 where the fluid recirculation It consists of detecting the concentration. Of the separable substance included in the fluid passing through the filter and the re-flow recirculation stop when the detected concentration is lower than the Pre-defined first value 1 1. Method for filtering the fluid according to claim 10, which still consists of rotation. Recirculation When the detected concentration exceeds the second preset value 1. 2. Fluid filtration method according to claim 10, where concentration detection It consists of detecting the transparency of the fluid by the optical receiver 1. 3. How to filter the fluid according to claim 1 where such filtration consists of Filtration of the fluid as it is sucked through filter 1 4. Method of filtration fluid according to claim 13, where the suction pressure used in the suction Will be within the range 0.2 to 0.5 kg / cm2 1 5. How to filter the fluid according to claim 1, where the external force is Also the second filter element Consisting of an external force applied to the second filter surface so that the second filter element can be moved 1 6. How to filter the fluid according to claim 15, where such external force Consists of a continuous external force 1 7. Method for filtering the fluid according to claim 15, where such external force Consists of providing gas flow Along the surface of the first filter 1 8. Method for filtering the fluid according to claim 15, where such external force Consists of applying force to at least partially release the second filter element 1. 9. How to filter the fluid according to claim 15, where such external force It consists of a force control to keep the second filter thickness constant 2. 0. Method for filtering the fluid according to claim 15, where such filters are placed in Vertical direction And that external force consists of an elevation of gas bubbles 2 1. Method of filtration of the fluid according to claim 15, where such external forces Consists of providing 2 mechanical vibrations 2. Method of filtration of the fluid according to claim 15, where such external force It consists of 2 sound wave generation 3. How to filter the fluid according to claim 15, where such external forces Contains the flow of the fluid 2 4. Method of filtration of the fluid according to claim 1, where the first filter is made with Polyolefin High Polymer 2 5. Method for filtering the fluid according to claim 1, where the first filter has an uneven surface 2. 6. How to filter the fluid according to claim 1, where the first filter consists of With a bag filter With gaps And a suction hose is inserted in a bag filter 2 7. How to filter the fluid according to claim 1 where the second filter consists of With various elements At least one element selected from a group containing Si, SiGe, A1203, Si oxides, metal oxides. And a group of elements among IIa-VIIa and IIb-VIIb, semiconductor compounds, glass, resins, ceramics and abrasive CMP 2. 8. Method for filtering the fluid according to claim 1, where the second filter is made up of Si 2. 9. How to filter the fluid according to claim 28, where the second filter is made up of Si 3. 0. Method for filtering the fluid according to claim 1, where the second filter consists of With mechanical processing wastes arising in the process of mechanical processing 3 1. The fluid filtration method in accordance with claim 30, whereby the mechanical processing step It consists of a step in abrasion or a step in rain 3. 2. The method of filtration of the fluid according to claim 1, where the waste obtained from the The trick is a waste of cutting into cubes. 3. The method of fluid filtration consists of preparation of filters. By feeding the fluid containing the separable to the first filter, the separable deposition is deposited on the first filter surface. To create a second filter, the first and second filters are placed vertically. Filtration of the separable substance by feeding the fluid to the filter and providing an elevated gas bubble to the second filter. While the separation of the substance is still being filtered Exit from the next fluid 3 4. Method of filtration of the fluid according to claim 33, whereby such gas bubbles are directly provided. On the second filter element Which is deposited on the first filter 3 5. Method for filtration of the fluid according to claim 33, where the first filter consists of A number of pieces that surround gap 3. 6. The fluid filtration method according to claim 35 continues to include: Suction of fluid through the gap between the elements of the first filter 3 7. The method of fluid filtration consists of preparation of filters. By feeding a fluid containing the separable substance to the first filter and masking the separable material onto the first filter surface to form a second filter. Filtering of separated substances By feeding the fluid to the filter And so will be Removal of isolated substances from fluid Agitation of the second filter element While the following separates are still filtered, so a second filter regeneration occurs. Fluid recirculation Detection of the concentrations of the separable substance in the fluid passing through the filter and stopping the fluid recirculation. When the detected level is lower than the specified value First value 3 8. The fluid filtration method according to claim 37 continues to include: Returning to recirculation fluid When the detected concentration exceeds the Preset second value 3 9. The fluid filtration method according to claim 37, where the detection of such concentrations consists of detecting the transparency of the fluid by the optical receiver 4. 0. The method of fluid filtration consists of fluid preparation. By feeding the fluid containing the separable to the first filter, the separable deposition is deposited on the first filter surface. To form a second filter, filtration of the separated substances By feeding fluid to the filter and filter recovery To allow continuous filtering By external force It goes to the second layer of the filter layer.