SU593097A1

SU593097A1 - Vacuum meter

Info

Publication number: SU593097A1
Application number: SU762359038A
Authority: SU
Inventors: Владимир Михайлович Геллер; Вениамин Григорьевич Данилов; Виктор Германович Пономаренко; Леонард Яковлевич Трайнин
Original assignee: Новосибирский электротехнический институт
Priority date: 1976-05-12
Filing date: 1976-05-12
Publication date: 1978-02-15

Description

1one

Изобретение относитс к технике измерени высокого вакуума и может быть исиользовано дл измерени давлений в дианазоне мм рт. ст.The invention relates to a technique for measuring high vacuum and may be used to measure pressures in a dianazone mm Hg. Art.

Известны вакуумметры, основанные на образовании в разреженной газовой среде зар женных частиц (дионов) ири прохождении через нее быстрых электронов, содержащие источник нитани , выходной прибор и датчик, имеющий инжектор электронов и источник магнитного пол 1.Vacuum gauges are known that are based on the formation of charged particles (dions) in a rarefied gas medium through which fast electrons pass through it, containing a source of filament, an output device and a sensor having an electron injector and a source of magnetic field 1.

Иаиболее близким техническим решением вл етс вакуумметр, содержащий источник питани , выходной нрибор и датчик, включающий инжектор электронов и снабженный источником магнитного пол , конфигураци которого нодобрана так, что в объеме датчика образована адиабатическа ловушка с магнитными пробками 2.And the closest technical solution is a vacuum gauge containing a power source, an output device and a sensor including an electron injector and supplied with a magnetic field source, the configuration of which is adapted so that an adiabatic trap with magnetic plugs 2 is formed in the sensor volume.

Однако этот вакуумметр имеет малую скорость измерени давлений, так как давление измер етс по времени задержани электронов, инжектированных от инжектора электронов в адиабатическую ловушку с магнитными пробками , которое обратно пропорционально давлению и может составл ть величину до нескольких секунд.However, this vacuum gauge has a low pressure measurement rate, since the pressure is measured by the retention time of electrons injected from the electron injector into an adiabatic trap with magnetic plugs, which is inversely proportional to pressure and can be up to several seconds.

Целью изобретени вл етс повышение скорости измерени давлений.The aim of the invention is to increase the rate of pressure measurement.

Иоставленна цель достигаетс тем, что в вакуумметре, содержащем датчик, в камере которого размещены инжектор электронов и коллектор, а снаружи - источник, магнитного пол , выполненный в виде соленоидной катушки , блок питани и регистрирующий прибор , подключенный к коллектору, источник магнитного пол размещен между инжектором п коллектором и образует в объеме датчика магнитное зеркало.The goal is achieved by the fact that in a vacuum gauge containing a sensor in whose chamber an electron injector and a collector are placed, and outside a source, a magnetic field made in the form of a solenoid coil, a power supply unit and a recording device connected to the collector, a magnetic field source is placed between Injector n collector and forms in the volume of the sensor magnetic mirror.

На чертеже изображена схема нредлагаемого вакуумметра.The drawing shows a diagram of the proposed vacuum gauge.

Камера 1 датчнка 2 присоединена к объему 3, в котором измер етс давление. На камеру 1 надет соленоид 4, содержащий ноле зеркальной геометрии. С одной стороны соленоида 4 расположен инжектор 5 - электронна пушка с фотокатодом, с другой стороны находитс коллектор 6.Camera 1 of sensor 2 is connected to volume 3, in which pressure is measured. Camera 1 is equipped with a solenoid 4 containing zero mirror geometry. On one side of the solenoid 4 is an injector 5 - an electron gun with a photocathode, on the other side there is a collector 6.

Вакуумметр также включает в себ блок электропитани 7 и выходной прибор 8.The gauge also includes a power supply unit 7 and an output device 8.

Блок электропитани 7 включает в себ схему 9 снлового питани соленоида 4 и схему 10 питани инжектора 5.The power supply unit 7 includes a circuit 9 for powering the solenoid 4 and the power supply unit 10 of the injector 5.

Устройство работает следующим образом.The device works as follows.

Claims

The electrons are emitted by an electron injector 5 located in the region of small magnetic fields, at an angle a to the magnetic field line and moving towards the area in which the magnetic field is at a maximum (magnetic mirror or magnetic tube, depending on the terminology used) . In this case, according to the theory of electron motion in inhomogeneous magnetic fields, the value of where the a is the angle of inclination of the electron path to the magnetic field line, B is the magnetic zero value, Bi is the magnetic field value at the location of the injector 5. a -, D - 2 sin% i to the region where electrons cannot penetrate. If (W is the maximum magnetic field strength), then the electrons are reflected from the magnetic mirror in the region where. Therefore, in the absence of collisions with gas molecules, i.e. at an ideal vacuum in the system, the current to collector 6 will be equal to 0. If the device is filled with gas under a certain pressure, then some electrons, having collided with the molecules of the gas, should change your angle with the direction of the magnetic field so that they can pass to the collector 6 through the magnetic mirror. Thus, the ratio / collector 6 / electron source is proportional to the gas pressure P under the condition / collector / electron source where / collector 6, / source - the currents measured by device 8. As a result of the magnetic mirror formed in sensor 2, the residence time of the electron in the device from the moment of departure from the injector 5 to the exit to the output device 8 is reduced many times, and this increases the speed of pressure measurement. Thus, the formation of a magnetic mirror in the volume of the sensor 2 when selecting the configuration of its magnetic field makes it possible to increase the speed of pressure measurement by 10-100 times, depending on the range of the measured pressure of a normal mm Hg. Art. At the same time, the effects of the breaking currents during measurement were completely eliminated. The invention The vacuum gauge containing a sensor in whose chamber an electron injector and a collector are placed, and outside a magnetic field source made in the form of a solenoid coil, a power supply and a recording device connected to the collector, is distinguished by the speed of pressure measurement, in it the source of the magnetic field is placed between the injector and the collector and forms a magnetic mirror in the sensor volume. Sources of information taken into account in the examination 1.Lekk. J. Pressure measurement in vacuum systems. M., 1966, p. 124.

2. USSR author's certificate №323685, cl. G OIL 21/32, 1967.