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SU518161A3 - Координатна измерительна машина - Google Patents

Координатна измерительна машина

Info

Publication number
SU518161A3
SU518161A3 SU1806581A SU1806581A SU518161A3 SU 518161 A3 SU518161 A3 SU 518161A3 SU 1806581 A SU1806581 A SU 1806581A SU 1806581 A SU1806581 A SU 1806581A SU 518161 A3 SU518161 A3 SU 518161A3
Authority
SU
USSR - Soviet Union
Prior art keywords
portal
aerostatic
groups
copiers
supports
Prior art date
Application number
SU1806581A
Other languages
English (en)
Inventor
Пагелла Элио
Гуерци Карло
Original Assignee
Инг.С.Оливетти Эенд Ко С.П.А.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Инг.С.Оливетти Эенд Ко С.П.А. filed Critical Инг.С.Оливетти Эенд Ко С.П.А.
Application granted granted Critical
Publication of SU518161A3 publication Critical patent/SU518161A3/ru

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/06—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
    • B23Q1/25—Movable or adjustable work or tool supports
    • B23Q1/26—Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members
    • B23Q1/38—Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members using fluid bearings or fluid cushion supports
    • B23Q1/385—Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members using fluid bearings or fluid cushion supports in which the thickness of the fluid-layer is adjustable
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q11/00—Accessories fitted to machine tools for keeping tools or parts of the machine in good working condition or for cooling work; Safety devices specially combined with or arranged in, or specially adapted for use in connection with, machine tools
    • B23Q11/001—Arrangements compensating weight or flexion on parts of the machine
    • B23Q11/0028—Arrangements compensating weight or flexion on parts of the machine by actively reacting to a change of the configuration of the machine
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C29/00—Bearings for parts moving only linearly
    • F16C29/02—Sliding-contact bearings
    • F16C29/025—Hydrostatic or aerostatic
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B5/00—Measuring arrangements characterised by the use of mechanical techniques
    • G01B5/0002—Arrangements for supporting, fixing or guiding the measuring instrument or the object to be measured
    • G01B5/0009—Guiding surfaces; Arrangements compensating for non-linearity there-of
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B5/00—Measuring arrangements characterised by the use of mechanical techniques
    • G01B5/0011—Arrangements for eliminating or compensation of measuring errors due to temperature or weight
    • G01B5/0016—Arrangements for eliminating or compensation of measuring errors due to temperature or weight due to weight
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00—Programme-control systems
    • G05B19/02—Programme-control systems electric
    • G05B19/18—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C2322/00—Apparatus used in shaping articles
    • F16C2322/39—General buildup of machine tools, e.g. spindles, slides, actuators
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/37—Measurements
    • G05B2219/37193—Multicoordinate measuring system, machine, cmm
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/49—Nc machine tool, till multiple
    • G05B2219/49195—Slide, guideway, robot arm deviation
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/49—Nc machine tool, till multiple
    • G05B2219/49271—Air bearing slide, hydraulic, electromagnetic bearing
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S33/00—Geometrical instruments
    • Y10S33/02—Air

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • Human Computer Interaction (AREA)
  • Manufacturing & Machinery (AREA)
  • Automation & Control Theory (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • A Measuring Device Byusing Mechanical Method (AREA)

Description

как и аэростатические опоры портала, они установлены на регулировочных винтах 20 со сферическими головками. На чертежах видны расположенные вдоль траверсы копиры 21-24 узлов компенсации осадки портала и прогиба траверсы.
На схеме включени  аэростатических опор в пневмосеть (см. фиг. 5) видны аэростатические опоры 11 (перва  группа) и 12 (втора  группа) направл ющих портала, регул торы давлепи  воздуха 25 и 26, подводимого к упом нутым группам, и копиры 21 и 22, воздействующие на упом нутые регул торы.
Аналогично изображены аэростатические опоры 16 (перва  группа) и 18 (втора  труппа ) направл ющих каретки, регул торы дав лени  воздуха 27 и 28, подводимого к этим группам, и копиры 23 и 24, управл ющие этими регул торами.
Работу координатной измерительной мащины по сн ют фиг. 6-12. На этих фигурах схематически изображены колонны 3, 4, портал с траверсой 5, каретка 6, аэростатические опоры 11 и 12 портала и аэростатические опоры 16 и 18 направл ющих каретки.
Когда каретка 6 находитс  посредине траверсы 5 (см. фиг. 6), ее вес равномерно распредел етс  между аэростатическими опорами 11 и 12, и в них устанавливаетс  одинаковый зазор 5.
В этом положении с помощью регулировочных винтов 15 юстируют траверсу, добива сь ее параллельности поверхности стола 2. Если теперь сместить каретку из среднего положени , например, вправо (см. фиг. 7), то ее вес распределитс  неравномерно, и в случае отсутстви  узла компенсации осадки портала зазор в первой группе аэростатических опор уменьшитс , а во второй увеличитс . Это приводит к перекосу траверсы и возникновению погрешности измерени .
Дл  компенсации этой погрешности регул тор давлени  воздуха 25, подводимого к аэростатическим опорам И, увеличивает давление , а регул тор 26 - уменьшает давление, подводимое к аэростатическим опорам 12, и портал выравниваетс  (см. фиг. 8).
Соответствующим подбором профил  копиров 21 и 22 можно добитьс  посто нства зазора 5 в аэростатических опорах портала при любом положении каретки 6.
Аналогично действует компенсатор прогиба траверсы.
В среднем положении каретки 6 под вли нием ее веса траверса прогибаетс  на величину f (см. фиг. 9). Дл  компенсации прогиба регул торы давлени  27 и 28 увеличивают его в обеих группах аэростатических опор 16 и 18 одинаково, и каретка поступательно поднимаетс  (см. фиг. 10).
Если каретка 6 смещена из среднего положени  (см. фиг. И), то прогибы траверсы под первой и второй группами аэростатических опор неодинаковы (соответственно /i и /2), и кроме смещени  каретки возникает и ее перекос . Дл  компенсации этих погрешностей давление в опоре 18 должно быть большим, чем в опоре 16, что и достигаетс  соответствующим подбором профилей копиров 23 и 24.
Соответствующей юстировкой копиров 21- 24 можно добитьс  строго поступательного, параллельного поверхности стола 2 перемещени  каретки 6 (см. фиг. 12).

Claims (2)

1. Координатна  измерительна  машина, содержаща  основание, стол дл  закреплени  контролируемого объекта, перемещаемый вдоль основани  портал с траверсой и двум  группами аэростатических опор, каретку, перемещаемую вдоль траверсы с двум  группами аэростатических опор, пиноль с чувствительным элементом и узлы компенсации прогиба траверсы и осадки портала, отличающа с  тем, что, с целью повышени  точности , узлы компенсации прогиба траверсы и осадки портала выполнены в виде регул торов давлени  воздуха, подводимого к аэростатическим опорам, и расположенных вдоль траверсы копиров, управл ющих этими регул торами .
2. Машина по п. 1, отличающа с  тем, что число управл ющих копиров равно числу групп аэростатических направл ющих.
иг.1
I ту j
Фиг. 5
(fv.
-J8 Jf
1
19
Т
±16
Фиг. 5
12
.12
-1
// уу//7//7/7
/
77
9uz.6
///////////////
II .
,77
.7/
у /////////7///
Фие. 8
7/
777777777777
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////////////
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SU1806581A 1971-07-09 1972-07-07 Координатна измерительна машина SU518161A3 (ru)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
IT6933971 1971-07-09

Publications (1)

Publication Number Publication Date
SU518161A3 true SU518161A3 (ru) 1976-06-15

Family

ID=11311910

Family Applications (1)

Application Number Title Priority Date Filing Date
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Country Status (8)

Country Link
US (1) US3831283A (ru)
CA (1) CA969756A (ru)
CH (1) CH537570A (ru)
DD (1) DD101974A5 (ru)
DE (1) DE2231644A1 (ru)
FR (1) FR2145931A5 (ru)
GB (1) GB1393035A (ru)
SU (1) SU518161A3 (ru)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4594791A (en) * 1985-01-24 1986-06-17 The Warner & Swasey Company Bridge type coordinate measuring machine
US4630374A (en) * 1985-01-24 1986-12-23 The Warner & Swasey Company Bridge type coordinate measuring machine
US4727653A (en) * 1985-01-22 1988-03-01 Mitutoyo Mfg. Co., Ltd. Coordinate measuring instrument
US4882847A (en) * 1989-02-03 1989-11-28 The Warner And Swasey Company Coordinate measuring machine with improved carriage way arrangement
US4887360A (en) * 1989-02-03 1989-12-19 The Warner & Swasey Company Way bearing arrangement for a horizontal arm coordinate measuring machine
USRE33254E (en) * 1985-01-24 1990-07-10 Bridge type coordinate measuring machine

Families Citing this family (54)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SE391026B (sv) * 1975-10-23 1977-01-31 Johansson Ab C E Forfarande och anordning vid en koordinationsmetmaskin
IT1074271B (it) * 1976-09-30 1985-04-20 Olivetti & Co Spa Macchina di misurazione di precisione a portale
DE2718506C2 (de) * 1977-04-26 1978-11-23 Fa. Carl Zeiss, 7920 Heidenheim Mehrkoordinaten-Meßmaschine
US4155173A (en) * 1977-05-13 1979-05-22 Sprandel Hans W Mounting for coordinate measuring machine arms and probes
DE2724858A1 (de) * 1977-06-02 1978-12-07 Heidenhain Gmbh Dr Johannes Laengenmessgeraet mit korrektureinrichtung
JPS5478581A (en) * 1977-12-05 1979-06-22 Toshiba Mach Co Ltd Centering method in lathe and its device
JPS5485678A (en) * 1977-12-20 1979-07-07 Canon Inc High accuracy alignment method for air bearing guide system xy stage
US4213244A (en) * 1978-05-08 1980-07-22 The Bendix Corporation Coordinate measuring machine having a failsafe protection system
US4207680A (en) * 1978-05-08 1980-06-17 The Bendix Corporation Coordinate measuring machine having an air counterbalance system
US4209910A (en) * 1978-05-12 1980-07-01 Gunther Rathsack Ingenieurtechnik Auxiliary device for vertical turning and boring machine tools
DE2941412A1 (de) * 1979-10-12 1981-04-23 Schneider & Kern, 7119 Niedernhall Messmaschine, insbesondere zur laengenmessung
DE3024455C2 (de) * 1980-06-28 1986-10-09 Daimler-Benz Ag, 7000 Stuttgart Mehrkoordinaten-Meßgerät
GB2099151B (en) * 1981-02-14 1985-09-04 Lk Tool Co Ltd Measuring machine
IL63856A (en) * 1981-09-16 1984-12-31 Beta Eng & Dev Ltd Three dimensional digitizer for digitizing the surface contour of a solid body
DE3243088C2 (de) * 1981-11-25 1986-08-07 Mitutoyo Mfg. Co., Ltd., Tokio/Tokyo Koordinatenmeßmaschine
GB2112140B (en) * 1981-12-16 1985-08-07 Mauser Werke Oberndorf Coordinate measuring machine
DE3150977A1 (de) * 1981-12-23 1983-06-30 Fa. Carl Zeiss, 7920 Heidenheim Verfahren und einrichtung zur ermittlung und korrektur von fuehrungsfehlern
DE3150978A1 (de) * 1981-12-23 1983-06-30 Fa. Carl Zeiss, 7920 Heidenheim Messmaschine in portalbauweise
US4507868A (en) * 1982-08-30 1985-04-02 The Warner & Swasey Company Coordinate measuring machine with a self aligning pneumatic counterbalance
JPS5978533A (ja) * 1982-10-27 1984-05-07 Canon Inc 露光装置
DE3336002C2 (de) * 1983-10-04 1985-11-07 Dr. Johannes Heidenhain Gmbh, 8225 Traunreut Führungsvorrichtung
GB2160975B (en) * 1984-05-14 1988-11-09 Mitutoyo Mfg Co Ltd Coordinate measuring instrument
US4630381A (en) * 1984-07-24 1986-12-23 Mitutoyo Mfg. Co., Ltd. Coordinate measuring instrument
IT1185224B (it) * 1984-08-16 1987-11-04 Mauser Werke Oberndorf Contropunta per apparecchi di misurazione a coordinate
GB2188571B (en) * 1986-04-05 1990-02-21 Butterley Engineering Limited Machine measurement systems
US4719705A (en) * 1986-06-24 1988-01-19 The Perkin-Elmer Corporation Reticle transporter
DE3723466A1 (de) * 1987-07-16 1989-01-26 Barry Controls Gmbh Nachstelleinrichtung zum korrigieren der lage einer maschine
JPS6435310A (en) * 1987-07-31 1989-02-06 Mitutoyo Corp Multidimensional measuring machine
US4958438A (en) * 1989-03-30 1990-09-25 The Warner & Swasey Company Rotary table for a coordinate measuring machine and method of determining the axis of table rotation
US5166606A (en) * 1989-11-03 1992-11-24 John H. Blanz Company, Inc. High efficiency cryogenic test station
US5077523A (en) * 1989-11-03 1991-12-31 John H. Blanz Company, Inc. Cryogenic probe station having movable chuck accomodating variable thickness probe cards
US5160883A (en) * 1989-11-03 1992-11-03 John H. Blanz Company, Inc. Test station having vibrationally stabilized X, Y and Z movable integrated circuit receiving support
SE468727B (sv) * 1991-07-09 1993-03-08 Johansson Ab C E Maskinstativ, saerskilt foer s k koordinatmaetmaskiner, jaemte saett att utfoera maskinstativet
DE4126532A1 (de) * 1991-08-10 1993-02-11 Plath Hans Henning Dr Ing Koordinatenmessgeraet
IT1257067B (it) * 1992-07-31 1996-01-05 Dea Spa Macchina di misura.
KR0141161B1 (ko) * 1995-03-20 1998-07-01 이대원 회전 테이블을 구비한 스테이지 장치 및 스테이지 장치의 구동 방법
IT1289550B1 (it) * 1996-12-31 1998-10-15 Inpeco S R L Processo per la fabbricazione di un basamento per lo scorrimento a sostentamento pneumostatico di carri mobili,particolarmente
JP2004142035A (ja) * 2002-10-25 2004-05-20 Mori Seiki Co Ltd 工作機械
FR2853056B1 (fr) * 2003-03-28 2005-07-15 Snecma Moteurs Dispositif et procede de mesure de profil
SE527899C2 (sv) * 2004-12-15 2006-07-04 Hexagon Metrology Ab Koordinatmätmaskin med inbördes förflyttbara ben
JP4933775B2 (ja) * 2005-12-02 2012-05-16 独立行政法人理化学研究所 微小表面形状測定プローブ
US7421795B2 (en) * 2006-08-04 2008-09-09 Seagate Technology Llc Sapphire alignment fixture
US7885786B2 (en) * 2008-10-15 2011-02-08 Seagate Technology Llc Sleeve cone quality measurement system and method
DE102009008722A1 (de) * 2009-02-06 2010-08-19 Carl Zeiss Industrielle Messtechnik Gmbh Koordinatenmessgerät zum Bestimmen von Raumkoordinaten an einem Messobjekt sowie ein Tastkopfsystem für ein solches Koordinatenmessgerät
CN102012204B (zh) * 2010-11-24 2011-12-21 南京工业大学 数控静压转台的精度检测装置及方法
US9435766B2 (en) 2013-12-05 2016-09-06 General Electric Company System and method for inspection of components
CN110537076B (zh) 2017-04-19 2021-09-03 瑞尼斯豪公司 支承布置
US10646883B2 (en) 2017-04-19 2020-05-12 Renishaw Plc Contamination trap
US10826369B2 (en) 2017-04-19 2020-11-03 Renishaw Plc Positioning apparatus with relatively moveable members and a linear motor mounted thereon
JP2020517939A (ja) 2017-04-19 2020-06-18 レニショウ パブリック リミテッド カンパニーＲｅｎｉｓｈａｗ Ｐｕｂｌｉｃ Ｌｉｍｉｔｅｄ Ｃｏｍｐａｎｙ 測定装置カウンターバランス
EP3392610B1 (en) 2017-04-19 2022-02-23 Renishaw PLC Bearing mount
CN109551308B (zh) * 2018-12-04 2020-08-11 中国航发贵州红林航空动力控制科技有限公司 一种高精度阀组件的加工方法
CN111256558B (zh) * 2020-02-27 2021-08-06 浙江博阳压缩机有限公司 一种用于气缸滑片槽的综合检测装置及方法
DE112021002639T5 (de) * 2020-06-16 2023-03-02 Fanuc Corporation Fluidausgleichsvorrichtung und werkzeugmaschine

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3218108A (en) * 1962-10-11 1965-11-16 Link Division Of General Prec Precision positioning apparatus
GB1076404A (en) * 1963-03-16 1967-07-19 Asquith Ltd William Improvements in silde bearing for machine tools
US3447840A (en) * 1966-07-15 1969-06-03 Bendix Corp Bearing means
BE720283A (ru) * 1967-09-14 1969-02-17
US3639993A (en) * 1970-02-09 1972-02-08 Dea Spa Improvements relating to machines and apparatus having a support for guiding a movable member

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4727653A (en) * 1985-01-22 1988-03-01 Mitutoyo Mfg. Co., Ltd. Coordinate measuring instrument
US5191717A (en) * 1985-01-22 1993-03-09 Mitutoyo Mfg. Co., Ltd. Coordinate measuring instrument
US4594791A (en) * 1985-01-24 1986-06-17 The Warner & Swasey Company Bridge type coordinate measuring machine
US4630374A (en) * 1985-01-24 1986-12-23 The Warner & Swasey Company Bridge type coordinate measuring machine
USRE33254E (en) * 1985-01-24 1990-07-10 Bridge type coordinate measuring machine
US4882847A (en) * 1989-02-03 1989-11-28 The Warner And Swasey Company Coordinate measuring machine with improved carriage way arrangement
US4887360A (en) * 1989-02-03 1989-12-19 The Warner & Swasey Company Way bearing arrangement for a horizontal arm coordinate measuring machine

Also Published As

Publication number Publication date
CH537570A (it) 1973-05-31
FR2145931A5 (ru) 1973-02-23
DD101974A5 (ru) 1973-11-20
US3831283A (en) 1974-08-27
GB1393035A (en) 1975-05-07
CA969756A (en) 1975-06-24
DE2231644A1 (de) 1973-01-18

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