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SU490273A1 - Нагреватель дл подложек - Google Patents

Нагреватель дл подложек

Info

Publication number
SU490273A1
SU490273A1 SU1974086A SU1974086A SU490273A1 SU 490273 A1 SU490273 A1 SU 490273A1 SU 1974086 A SU1974086 A SU 1974086A SU 1974086 A SU1974086 A SU 1974086A SU 490273 A1 SU490273 A1 SU 490273A1
Authority
SU
USSR - Soviet Union
Prior art keywords
substrate heater
heater
substrate
paboifa
zone
Prior art date
Application number
SU1974086A
Other languages
English (en)
Inventor
Анатолий Сергеевич Седых
Владимир Алексеевич Сидиров
Валерий Михайлович Строганов
Original Assignee
Предприятие П/Я А-3562
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Предприятие П/Я А-3562 filed Critical Предприятие П/Я А-3562
Priority to SU1974086A priority Critical patent/SU490273A1/ru
Application granted granted Critical
Publication of SU490273A1 publication Critical patent/SU490273A1/ru

Links

Landscapes

  • Air-Conditioning For Vehicles (AREA)
  • Electrochromic Elements, Electrophoresis, Or Variable Reflection Or Absorption Elements (AREA)
  • Electrophonic Musical Instruments (AREA)

Description

Paбoifa  зона
1
д
-J
SU1974086A 1973-11-20 1973-11-20 Нагреватель дл подложек SU490273A1 (ru)

Priority Applications (1)

Application Number Priority Date Filing Date Title
SU1974086A SU490273A1 (ru) 1973-11-20 1973-11-20 Нагреватель дл подложек

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
SU1974086A SU490273A1 (ru) 1973-11-20 1973-11-20 Нагреватель дл подложек

Publications (1)

Publication Number Publication Date
SU490273A1 true SU490273A1 (ru) 1975-10-30

Family

ID=20568789

Family Applications (1)

Application Number Title Priority Date Filing Date
SU1974086A SU490273A1 (ru) 1973-11-20 1973-11-20 Нагреватель дл подложек

Country Status (1)

Country Link
SU (1) SU490273A1 (ru)

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