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SU441274A1 - Diamond abrasive paste - Google Patents

Diamond abrasive paste

Info

Publication number
SU441274A1
SU441274A1 SU1019164A SU1019164A SU441274A1 SU 441274 A1 SU441274 A1 SU 441274A1 SU 1019164 A SU1019164 A SU 1019164A SU 1019164 A SU1019164 A SU 1019164A SU 441274 A1 SU441274 A1 SU 441274A1
Authority
SU
USSR - Soviet Union
Prior art keywords
diamond abrasive
abrasive paste
paste
diamond
components
Prior art date
Application number
SU1019164A
Other languages
Russian (ru)
Inventor
Гелий Фомич Скрипко
Цирля Аврамовна Кипнис
Валентина Бенционовна Крук
Александр Борисович Гольдман
Original Assignee
Институт сверхтвердых материалов АН УССР
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Институт сверхтвердых материалов АН УССР filed Critical Институт сверхтвердых материалов АН УССР
Priority to SU1019164A priority Critical patent/SU441274A1/en
Application granted granted Critical
Publication of SU441274A1 publication Critical patent/SU441274A1/en

Links

Landscapes

  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)

Description

1one

Изобретение касаетс  составов дл  полировани , в частности паст дл  полировани  полупроводниковых материалов.The invention relates to polishing compositions, in particular, polishing pastes for semiconductor materials.

Известны алмазно-абразивные пасты, в состав которых вход т стеарин и жиры или различные масла.Diamond-abrasive pastes are known, which include stearin and fats or various oils.

Однако наличие жиров и масел в этих пастах затрудн ет отмывание деталей после их обработки от шлама и пасты. Кроме того, наличие большого числа компонентов в пасте делает ее малоустойчивой, как химическа  система .However, the presence of fats and oils in these pastes makes it difficult to wash the parts after they are processed from sludge and paste. In addition, the presence of a large number of components in the paste makes it unstable, like a chemical system.

Целью изобретени   вл етс  повышение чистоты поверхности при обработке полупроводниковых материалов.The aim of the invention is to increase the surface cleanliness when processing semiconductor materials.

Это достигаетс  тем, что в состав пасты введен поверхностно-активный смачиватель ОП-7, компоненты вход т в следуюш,ем составе , вес. %:This is achieved by the fact that the surface-wetting agent OP-7 is introduced into the paste, the components are included in the following composition, weight. %:

порошокpowder

2,5- 7,5 45 -50 42,5-52,5.2.5- 7.5 45 -50 42.5-52.5.

Предмет изобретени Subject invention

Алмазно-абразивна  паста дл  полировани , содержаща  алмаз и стеарин, о т л и ч аю щ а   с   тем, что, с пелью повышени  устойчивости системы, а также повышени  чистоты поверхности при обработке полупроводниковых материалов, в нее введен поверхностно-активный смачиватель ОП-7, и все компоненты вход т в следуюш,ем составе, вес. %: Алмазный порошок2,5- 7,5A diamond-abrasive polishing paste containing diamond and stearin is so necessary that, with a view to improving the stability of the system, as well as improving the surface cleanliness when processing semiconductor materials, the surface-wetting agent OP- 7, and all components are included in the following composition, weight. %: Diamond powder2.5- 7.5

Стеарин45 -50Stearin45 -50

ОП-742,5-52,5.OP-742.5-52.5.

SU1019164A 1965-07-17 1965-07-17 Diamond abrasive paste SU441274A1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
SU1019164A SU441274A1 (en) 1965-07-17 1965-07-17 Diamond abrasive paste

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
SU1019164A SU441274A1 (en) 1965-07-17 1965-07-17 Diamond abrasive paste

Publications (1)

Publication Number Publication Date
SU441274A1 true SU441274A1 (en) 1974-08-30

Family

ID=20438684

Family Applications (1)

Application Number Title Priority Date Filing Date
SU1019164A SU441274A1 (en) 1965-07-17 1965-07-17 Diamond abrasive paste

Country Status (1)

Country Link
SU (1) SU441274A1 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
RU2522351C1 (en) * 2013-02-26 2014-07-10 Константин Борисович Голубев Polishing paste

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
RU2522351C1 (en) * 2013-02-26 2014-07-10 Константин Борисович Голубев Polishing paste

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