SU369502A1 - DEVICE FOR MEASUREMENT OF SPECIFIC RESISTANCE OF SEMICONDUCTOR MATERIAL - Google Patents

Description

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The invention relates to the field of measurement technology.

In the known devices for measuring the resistivity of a semiconductor material, the geometrical dimensions of which do not affect the measurement results, the measurement process is automated by automatically moving the measuring head along the ingot, removing and clamping the head to the ingot and recording the measurement results. At the same time, the introduction of corrections for the sample geometry is not performed or carried out manually.

To improve the measurement accuracy by introducing an automated correction for the sample geometry, the proposed device is additionally equipped with a linear displacement sensor of the measuring head (for example, a rheostat) electrically connected with a functional converter, the output of which is connected to a current stabilizer correction circuit.

The drawing shows a functional diagram of the described device consisting of a four-probe head L of a DC stabilizer 2, a digital voltmeter 3, a control unit 4, a probe 5 movement mechanism 5, a rheostat sensor 6, a function converter 7, a current stabilizer link 8.

Through the current probes 9 and 10 of the measuring head L pressed to the sample under study 11, a direct current is passed from the stabilized source 2. The voltage is removed

My potential probes 12 and 13 are fed to the input of a measuring device (for example, a digital voltmeter) 3. The control unit 4 by means of mechanism 5 draws and presses the probe head to the sample and moves it

along the butt. The movement is detected by a rheostatic or other linear movement sensor 6. An electrical signal proportional to the displacement of the probe head from the center of the sample is fed to the input of the functional converter 7, which realizes the nonlinear dependence of the correction factor F on the magnitude of the displacements.

The input of the functional converter is connected to the correction link 8 of the stabilizer 2, which sets the amount of current through the current probes to obtain a direct reading of the building resistance value, i.e..

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Subject invention

A device for measuring the resistivity of a semiconductor material, containing a four-probe measuring head, its movement mechanism with a control unit, a direct current stabilizer, and a digital voltmeter, characterized in that it is equipped with a sensor for linear movement of the measuring head (for example, a rheostat) electrically connected to a functional converter, the output of which is connected to a current stabilizer correction circuit.