SU284883A1 - Electric arc evaporator - Google Patents
Electric arc evaporatorInfo
- Publication number
- SU284883A1 SU284883A1 SU1296473A SU1296473A SU284883A1 SU 284883 A1 SU284883 A1 SU 284883A1 SU 1296473 A SU1296473 A SU 1296473A SU 1296473 A SU1296473 A SU 1296473A SU 284883 A1 SU284883 A1 SU 284883A1
- Authority
- SU
- USSR - Soviet Union
- Prior art keywords
- cathode
- electric arc
- evaporator
- anode
- arc evaporator
- Prior art date
Links
Landscapes
- Physical Vapour Deposition (AREA)
Description
Изобретение относитс к области нанесени покрытий в вакууме.The invention relates to the field of vacuum coating.
Известен электродугозой испаритель, содержащий поджигающий электрод, анод и катод .An electric arc evaporator is known, which contains a firing electrode, an anode and a cathode.
Предложенный испаритель отличаетс от известного наличием дополнительного анода, охватывающего нерабочую поверхность катода .The proposed evaporator differs from the known presence of an additional anode covering the non-operating surface of the cathode.
Это обеспечивает стабильное горение дуги при малых токах.This ensures stable arc burning at low currents.
Па чертеже представлен предлагаемый испаритель .Pa drawing presents the proposed evaporator.
Он состоит из поджигающего электрода 1, анода 2, катода 3 и дополнительного анода 4, охватывающего нерабочую поверхность катода .It consists of the firing electrode 1, the anode 2, the cathode 3 and the additional anode 4, covering the inactive surface of the cathode.
Деталь 5, подлежаща покрытию, расположена в области анода. Дуга в испарителе горит между катодом 3 и анодом 2, а ток в цепи дополнительного анода 4 по вл етс лишь в момент ухода катодного п тна с торцевой поверхности на боковую.Part 5 to be coated is located in the anode area. The arc in the evaporator burns between the cathode 3 and the anode 2, and the current in the circuit of the additional anode 4 appears only at the moment the cathode spot leaves the side surface to the side.
Благодар худшим услови м горени дуги 3 малых зазорах катодное п тно самопроизвольно возвращаетс на торцевую поверхкость катода, при этом дуга на торцевой поверхности катода при таких услови х самопроизвольно не гаснет.Due to the worst arcing conditions, 3 small gaps the cathode spot spontaneously returns to the end surface of the cathode, while the arc on the end surface of the cathode does not extinguish spontaneously under such conditions.
Claims (1)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| SU1296473A SU284883A1 (en) | 1969-01-10 | 1969-01-10 | Electric arc evaporator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| SU1296473A SU284883A1 (en) | 1969-01-10 | 1969-01-10 | Electric arc evaporator |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| SU284883A1 true SU284883A1 (en) | 1976-05-15 |
Family
ID=20444304
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| SU1296473A SU284883A1 (en) | 1969-01-10 | 1969-01-10 | Electric arc evaporator |
Country Status (1)
| Country | Link |
|---|---|
| SU (1) | SU284883A1 (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1982002906A1 (en) * | 1981-02-23 | 1982-09-02 | Leonid Pavlovich Sablev | Consumable cathode for electric-arc evaporator of metal |
| US4622452A (en) * | 1983-07-21 | 1986-11-11 | Multi-Arc Vacuum Systems, Inc. | Electric arc vapor deposition electrode apparatus |
| US5458754A (en) | 1991-04-22 | 1995-10-17 | Multi-Arc Scientific Coatings | Plasma enhancement apparatus and method for physical vapor deposition |
| US6103074A (en) * | 1998-02-14 | 2000-08-15 | Phygen, Inc. | Cathode arc vapor deposition method and apparatus |
-
1969
- 1969-01-10 SU SU1296473A patent/SU284883A1/en active
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1982002906A1 (en) * | 1981-02-23 | 1982-09-02 | Leonid Pavlovich Sablev | Consumable cathode for electric-arc evaporator of metal |
| US4622452A (en) * | 1983-07-21 | 1986-11-11 | Multi-Arc Vacuum Systems, Inc. | Electric arc vapor deposition electrode apparatus |
| US5458754A (en) | 1991-04-22 | 1995-10-17 | Multi-Arc Scientific Coatings | Plasma enhancement apparatus and method for physical vapor deposition |
| US6139964A (en) | 1991-04-22 | 2000-10-31 | Multi-Arc Inc. | Plasma enhancement apparatus and method for physical vapor deposition |
| US6103074A (en) * | 1998-02-14 | 2000-08-15 | Phygen, Inc. | Cathode arc vapor deposition method and apparatus |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| SU284883A1 (en) | Electric arc evaporator | |
| FR2410350A1 (en) | HIGH VOLTAGE VACUUM CONTACTORS | |
| EP0002848A1 (en) | Electrical high-pressure metal vapour discharge lamp | |
| SU359977A1 (en) | Electric arc evaporator | |
| US2285796A (en) | Gaseous discharge device | |
| JPS55136449A (en) | Metal halide lamp | |
| SU307666A1 (en) | Electric arc metal evaporator | |
| SU115623A1 (en) | Ignitron | |
| SU270903A1 (en) | Gas discharge device | |
| SU693988A1 (en) | Electric-arc evaporator | |
| SU72188A1 (en) | Ignitron | |
| SU953004A1 (en) | Electric arc metal vaporization device | |
| SU268122A1 (en) | Electric arc metal evaporator | |
| SU91803A1 (en) | Anode of high-voltage mercury rectifier | |
| SU534004A1 (en) | Vacuum Discharge | |
| US1931299A (en) | Gaseous conduction apparatus | |
| SU62084A1 (en) | Electron beam switch | |
| US2886732A (en) | Electric discharge devices of the mercury cathode type | |
| KR860000439B1 (en) | Manufacturing method of color receiver | |
| SU1078957A1 (en) | Electric-arc evaporator | |
| JPS5229167A (en) | Body of electron gun | |
| SU18362A1 (en) | Ionnah bottom tube | |
| US1939377A (en) | Enclosed arc device | |
| SU37772A1 (en) | Device for protecting the walls of flasks of gas and vapor-light lamps from sputtering electrode material | |
| US1975243A (en) | Glow lamp |