SU1492309A1 - Method of determining resistance of contact connection between wire and thin film conductor - Google Patents

Abstract

The invention can be used to measure the electrical resistance of the contact connections of integrated circuits and microassemblies. The purpose of the invention — improving the accuracy of the measurement process — is achieved by introducing an additional step of measuring the section of the contact connection circuit formed by the wire lead and the film conductor. According to this method, the resistance of a wire section of a predetermined length is measured by connecting a pair of clamps to a wire, the resistance of a thin-film conductor section is also measured by a specified length by installing a pair of probes on the film, then determining the lengths of the wire sections and thin-film conductor from the contact connection equal to half of specified, the resistance of the circuit is measured: half of the wire section - contact connection - half of the thin-film conductor section, by connecting to The first clamp and the first probe are used to measure the resistance of the chain section: half of the wire section — contact connection — half of the thin-film conductor section by connecting the second clamp and the second probe to them, and the resistance of the contact connection is determined by the formula given in the description of the invention. 1 il.

Description

The invention relates to electrical engineering, in particular to microelectronics, and can be used to measure the electrical resistance of the contact connections of integrated circuits and microassemblies.

The purpose of the invention is to improve the accuracy of determining the resistance of the contact joint.

The drawing shows schematically the object of measurement.

According to the drawing, the wire I through the contact connection 2 is connected to the thin-film i conductor 3 located on the substrate 4, and 5 and 6 are the points where the measuring device clamps are connected to the wire 1, and 7 and 8 are installed

R

np

CI mynoB H; i thin screen 3.

The determination of the resistance of the contact connection of the wire and the thin-film conductor is carried out as follows.

Resistance to R is measured (a separate section of wire 1 by connecting two clamps to it at a given distance of 1 |. Resistance is measured on the measuring device and the measured result is recorded. The measurement result is

R R, + RII LM, + Rnp,

3 O 3 J 1

where Rii, Rvj are the resistances of the 1st and 2nd terminals, respectively,

- transition resistance of contacts will be clamped - wire, corresponding to the 1st and 2nd terminals,

-resistance wire section.

The resistance R of the separated section of the thin-film conductor 3 is measured by placing two shucks on the film at a given distance of 1. The resistance is measured by a measuring instrument and the measured result is recorded. In this case, the measurement result is represented as

RrJ RUI, RU, RKUJji L) (

where RU,, Rm, - resistance of the 1st and 2nd probes, respectively,

the contact resistances of the probe thin-film conductor corresponding to the 1st and 2nd probes,

Rn is the resistance of the thin film conductor region.

Next, the resistance R ", H R4 section of the wire 1 chain - contact connection 2 - gonkleinochny conductor 3 are measured by the corresponding connection of the 1st or the fourth clamps to the wire

1 42309

ke 1 on race

-GI (about 1 places

pin connection 2 and the corresponding installation of the 1st or 2nd plug not) and the film conductor 3 on

distance g - 1 from the place of contact)

Compound 2. Measuring the resistance of the measuring instrument is carried out and the measured result is recorded.

In this case, the measurement results can be represented as 1

Rj r

Y

  j Rnp R +

n

    Ru4 I

(3)

R / (- Rjj + Rnj5 + 2 + R RnA

 RMU. lu,

(four)

where .s R "j", i2 R

up

. R,

five

0 5

0

0

five

five

 Rtu ,, i2 components of the measured resistance according to equations (1) and (2);

R is the resistance of the contact connection. The sum of equations (3) and (4) with the corresponding substitution in their right-hand side of the values from (1) and (2), find the resistance of the contact connection.

Thus, the resistance of the contact connection is found by conducting four separate measurements :, resistance of the wire section R, resistance of the thin-film conductor section R2I. Resistance of the chain section half of the wire section — contact connection — half of the thin-film conductor section with the corresponding connection of the measuring probes to them: 1- clamp and 1st probe and a pair of measuring probes: 2nd clamp and 2nd probe R and R according to the formula

R 2 (R5 + R / i - R - RO) (5)

To provide the necessary stands for the installation of probes, an instrument or an instrument for measuring linear dimensions is used, for example a UIM-23 microscope.

When using the proposed method, the accuracy of the determination of 5I will be higher.

JIH HHH ConposSYPGNYA, PrGCHK NG MblXCVl. i

G (ready: 1 (my ynpcn K; iR, l) also reduces the cost of the process of measuring it and measuring zoilon.

Formula and h

The method of determining the resistance of the contact connection of the wire and the thin film conductor, which consists in measuring the resistance of the wire section by connecting a resistance meter to the wire section through a pair of clamps, measuring the resistance of the thin film conductor section by connecting a resistance meter to the thin film conductor section, measuring are the resistance of the chain section: half of the wire section - contact connection - half of the thin-film section windows explorer by connecting a resistance meter through the first clamp and the first probe, the difference ayushiys in that in order to increase accuracy, measured resistance of the circuit portion: half portion of the wire - contact connection - half portion of the thin film conductors by

9 2-JO 96

n (1; to 1) the resistance meter through the second clamp and the second probe, and the resistance of the contact connection is determined by the formula

R

, (R,

R / (- R, - R / j)

where R, is the measured resistance of the wire section;

R {is the measured resistance of the thin-film conductor section;

Rj is the resistance of the chain section; half wire section — contact connection — half the thin-film conductor section, measured by connecting a resistance meter to them through the first clamp and the first probe;

Rjt is the resistance of the chain section: half of the wire section — contact connection — half of the thin-film conductor section, measured by connecting a resistance meter to them through a second clamp and a second probe.

Claims (2)

Claim The method of determining the resistance of the contact connection of the wire and thin-film conductor, which consists in measuring the resistance of the wire section by connecting a resistance meter to the wire section through a pair of clamps, measuring the resistance of the thin-film conductor section by connecting to the thin-film section of the resistance meter through a pair of probes, measuring the resistance of the section chains: half of the wire - contact connection - half of the thin-film wire However, by connecting a resistance meter through the first clamp and the first probe, characterized in that, in order to improve accuracy, measure the resistance of the circuit: half of the wire - contact connection - half of the thin-film conductor by 2 309 connections of the resistance meter through the second clamp and the second probe, and the resistance of the contact connection is determined by the formula ⁵ 1 R = ₂ (R ^ + R <- R _t - R,), where R ₍ is the measured resistance of the wire section; ¹⁰ - the measured resistance of the thin-film conductor section; R ₅ - resistance of the circuit section: half of the wire section 15 - contact connection - half of the thin-film conductor section, measured by connecting to them 20 resistance meters through the first clamp and the first probe; R4 - resistance of the circuit section: half of the wire section - contact connection - half of the thin-film conductor section, measured by connecting a resistance meter to them through the second clamp and the second probe.