SU1302023A2 - Turbomolecular vacuum pump - Google Patents

Abstract

The invention relates to vacuum technology, and allows increasing the degree of compression of a pump. The rotor 2 transverse partitions (PP) 4 and 5 rat divided by a number of steps (C). PP 5 before each even along the pumped gas C has a variable thickness decreasing to their periphery. In PP 4, before each odd C, radial slots 6 are made and at the level of PP. 4 in the gap there are sealing elements made in the form of conical protrusions 7 facing to the axis of body 1 with vertices. in the direction of the next C, which reduces gas backflows. 2 Il. (L to

Description

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1302023

The invention relates to vacuum technology, in particular to the construction of turbo-molecular vacuum pumps, and is an improvement of the invention of Tio Auth. No. 918552.

The purpose of the invention is to increase the degree of compression of the pump.

Figure 1 shows a pump with a double-sided taper of sealing elements, a longitudinal section; Fig. 2 - the same, with a single-taper sealing element.

Turbomolecular vacuum pump. It includes a housing 1 and a cylindrical rotor 2. with a gap. 2. With blades 3, located parallel to the axis of the pump. In the rotor 2, transverse partitions 4 and 5 are installed, dividing it on a series of steps, and in partitions 4, radial slots 6 are made in front of each odd course of the gas being pumped out, in the gap at the level of partitions 4 with slots 6, elements, and the blades 3 in the fourth and odd steps are made

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filled in the form of conical protrusions 7, facing vertices to the axis of the housing I.

Iasos works as follows.

Gas from the evacuated volume enters the pump body 1, where its molecules interact with the rotor blades 3, 2 and receive a pulse in the direction of pumping. The molecules entering the space by adjacent steps collide with the surfaces of the partitions 5 and the protrusions 7, and the shape of these surfaces causes a predominant reflection of the striking gas molecules in the direction of the subsequent step and thus provides the least reflection in the direction: the previous step, which allows reduce gas backflows in the pump and, consequently, increase its compression ratio.

Claims (1)

Invention Formula Turbomolecular vacuum pump according to Aut. St. 918552, characterized in that, in order to increase the degree of compression, the transverse partitions in front of each even step have a variable depth, with opposite angles of inclination,. .-, -,. on. The transverse partitions 3 are in front of the outer side to their periphery, and the sealing parts of each even step have alternating elements made in the form of conical thickness decreasing to their peaks facing to the rifle axis with their tops, and the thickening elements of the head. o five 0 five filled in the form of conical protrusions 7, facing vertices to the axis of the housing I. Iasos works as follows. Gas from the evacuated volume enters the pump body 1, where its molecules interact with the rotor blades 3, 2 and receive a pulse in the direction of pumping. The molecules entering the space by adjacent steps collide with the surfaces of the partitions 5 and the protrusions 7, and the shape of these surfaces causes a predominant reflection of the striking gas molecules in the direction of the subsequent step and thus provides the least reflection in the direction: the previous step, which allows reduce gas backflows in the pump and, consequently, increase its compression ratio. Invention Formula Turbomolecular vacuum pump according to bus No. 918552, characterized in that, in order to increase the degree of compression, the transverse partitions in front of each even step have a variable depth, decreasing x ,.-. .-, -,.  It is located at their periphery, and the sealing elements are made in the form of conical protrusions, which point towards the axis of the body with their vertices. VNISHI Z. Order 1200/35 Circulation 575 Subscription Random polygons pr-tie, Uzhgorod, st; Project, 4