SU1206636A1 - Vacuum gauge - Google Patents

Description

The invention relates to the field of measuring the pressure of a rarefied gas, namely, ionization gauges, and may find application in the development of these instruments.

The aim of the invention is to improve the reliability of a vacuum gauge by comparing a signal proportional to the channel current to a signal proportional to the emission current and the effect of the differential voltage of these signals on the operation of the emission current regulator.

The drawing shows a block diagram of a vacuum gauge.

The vacuum gauge contains an electronic ionization transducer 1 pressure, the anode of which is supplied with voltage from the power source 2, the ion current amplifier 3 is connected to the collector circuit of the transducer, the regulating device 5 and the cathode heating current sensor 6 are connected to the cathode circuit 5 an amplifier 7 of the stabilizer is connected, controlled by signals from the emission current sensor 8 and the adder 9. The comparator 10 matches the current sensor 6 signal with the reference voltage of the cathode filament current limit, the signal c in The output of the comparator is applied to the adder 9, and simultaneously to the other input of the adder the voltage is applied from the reference source 11 of the power supply. Resistor 12 serves to bias the potential of the cathode.

The diagram shows the voltages U (ji,, of the reference power source, the voltage Ug from sensor 6

, Editor I.Nikolaychuk

Compiled by A. Zosimov

Tehred A.AchCorrector A.Zimokos

Order 8701/43 Circulation 778 Subscription

VNIIPI USSR State Committee

for inventions and discoveries 113035, Moscow, Zh-35, Raushsk nab., 4/5

Branch PPP Patent, Uzhgorod, Proektna St., 4

.

2066362

cathode current, voltage U

ogre with comparator 10, current limiting,

the cathode, the voltage U, from the output of the adder 9 ,. the conversion current Td is 5 bodies and the voltage Uj from the emission current sensor.

Vacuum meter works as follows.

When the converter is in operating mode and the filament current of the cathode of the converter is less than the limited maximum value.

ten

five

0

five

0

and

3k

and

Uc

and

from opg

and

ogre

 0;

and the stabilizer maintains the corresponding emission current

 Cr (and, „,

- and where

stabilizer gain factor. With V increasing the pressure above the limit measured by the converter, the cathode current rises up to the allowable limit, and the voltage from the cathode heating current sensor becomes

ug, won,; Warp 0; and, and ,, - Ug. and the stabilizer reduces the emission current to zero, and the filament current remains at a constant permissible level for the cathode. A further increase in pressure is not dangerous for the cathode. When the pressure drops to the operating values in the anode-cathode circuit, an emission current appears. This current, acting on the stabilizer input, reduces the current of the cathode to the operating values. This causes worp, 0; U (K - Uop2, and the stabilizer maintains the corresponding emission current.

Claims (1)

VACUUMMETER, containing a measuring electronic ionization pressure transducer, the collector of which is connected to the input of an ion current amplifier, an anode of the emission current emitter to the anode voltage source, and the cathode is included in the emission current stabilizer circuit with a reference voltage source, characterized in that, in order to increase reliability and wide operating pressure range, a cathode glow current sensor, a voltage comparator, the first input of which is connected to the output of the cathode glow current sensor and the second input from the source th reference voltage, and an adder having a first input connected to the output voltage of the comparator, the second input to the output of reference voltage source and an output connected to the input of stabilized <g