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SG83089A1 - Isolation process for surface micromachined sensors and actuators - Google Patents

Isolation process for surface micromachined sensors and actuators

Info

Publication number
SG83089A1
SG83089A1 SG9610874A SG1996010874A SG83089A1 SG 83089 A1 SG83089 A1 SG 83089A1 SG 9610874 A SG9610874 A SG 9610874A SG 1996010874 A SG1996010874 A SG 1996010874A SG 83089 A1 SG83089 A1 SG 83089A1
Authority
SG
Singapore
Prior art keywords
actuators
isolation process
surface micromachined
micromachined sensors
sensors
Prior art date
Application number
SG9610874A
Inventor
Sridhar Dr Uppili
Pang Dow Dr Foo
Yong Hong Loh
Yu Bo Miao
Lian Jun Dr Liu
Original Assignee
Eg & G Internat
Inst Of Microelectronics
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Eg & G Internat, Inst Of Microelectronics filed Critical Eg & G Internat
Priority to SG9610874A priority Critical patent/SG83089A1/en
Publication of SG83089A1 publication Critical patent/SG83089A1/en

Links

SG9610874A 1996-10-18 1996-10-18 Isolation process for surface micromachined sensors and actuators SG83089A1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
SG9610874A SG83089A1 (en) 1996-10-18 1996-10-18 Isolation process for surface micromachined sensors and actuators

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
SG9610874A SG83089A1 (en) 1996-10-18 1996-10-18 Isolation process for surface micromachined sensors and actuators

Publications (1)

Publication Number Publication Date
SG83089A1 true SG83089A1 (en) 2001-09-18

Family

ID=20429489

Family Applications (1)

Application Number Title Priority Date Filing Date
SG9610874A SG83089A1 (en) 1996-10-18 1996-10-18 Isolation process for surface micromachined sensors and actuators

Country Status (1)

Country Link
SG (1) SG83089A1 (en)

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5242863A (en) * 1990-06-02 1993-09-07 Xiang Zheng Tu Silicon diaphragm piezoresistive pressure sensor and fabrication method of the same
US5316979A (en) * 1992-01-16 1994-05-31 Cornell Research Foundation, Inc. RIE process for fabricating submicron, silicon electromechanical structures
WO1994017557A1 (en) * 1993-01-19 1994-08-04 Hughes Aircraft Company Thermally matched readout/detector assembly and method for fabricating same
WO1994018697A1 (en) * 1993-02-04 1994-08-18 Cornell Research Foundation, Inc. Microstructures and single mask, single-crystal process for fabrication thereof
US5354695A (en) * 1992-04-08 1994-10-11 Leedy Glenn J Membrane dielectric isolation IC fabrication
EP0702221A2 (en) * 1994-09-14 1996-03-20 Delco Electronics Corporation One-chip integrated sensor

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5242863A (en) * 1990-06-02 1993-09-07 Xiang Zheng Tu Silicon diaphragm piezoresistive pressure sensor and fabrication method of the same
US5316979A (en) * 1992-01-16 1994-05-31 Cornell Research Foundation, Inc. RIE process for fabricating submicron, silicon electromechanical structures
US5354695A (en) * 1992-04-08 1994-10-11 Leedy Glenn J Membrane dielectric isolation IC fabrication
WO1994017557A1 (en) * 1993-01-19 1994-08-04 Hughes Aircraft Company Thermally matched readout/detector assembly and method for fabricating same
WO1994018697A1 (en) * 1993-02-04 1994-08-18 Cornell Research Foundation, Inc. Microstructures and single mask, single-crystal process for fabrication thereof
EP0702221A2 (en) * 1994-09-14 1996-03-20 Delco Electronics Corporation One-chip integrated sensor

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