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SG11202111144YA - Bonding apparatus - Google Patents

Bonding apparatus

Info

Publication number
SG11202111144YA
SG11202111144YA SG11202111144YA SG11202111144YA SG11202111144YA SG 11202111144Y A SG11202111144Y A SG 11202111144YA SG 11202111144Y A SG11202111144Y A SG 11202111144YA SG 11202111144Y A SG11202111144Y A SG 11202111144YA SG 11202111144Y A SG11202111144Y A SG 11202111144YA
Authority
SG
Singapore
Prior art keywords
bonding apparatus
bonding
Prior art date
Application number
SG11202111144YA
Inventor
Shigeyuki Sekiguchi
Yuji Eguchi
Kohei Seyama
Original Assignee
Shinkawa Kk
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shinkawa Kk filed Critical Shinkawa Kk
Publication of SG11202111144YA publication Critical patent/SG11202111144YA/en

Links

Classifications

    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K13/00Apparatus or processes specially adapted for manufacturing or adjusting assemblages of electric components
    • H05K13/04Mounting of components, e.g. of leadless components
    • H05K13/0417Feeding with belts or tapes
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/50Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the groups H01L21/18 - H01L21/326 or H10D48/04 - H10D48/07 e.g. sealing of a cap to a base of a container
    • H01L21/52Mounting semiconductor bodies in containers
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005Apparatus not specifically provided for elsewhere
    • H01L21/67011Apparatus for manufacture or treatment
    • H01L21/67132Apparatus for placing on an insulating substrate, e.g. tape
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005Apparatus not specifically provided for elsewhere
    • H01L21/67011Apparatus for manufacture or treatment
    • H01L21/67144Apparatus for mounting on conductive members, e.g. leadframes or conductors on insulating substrates
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67721Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations the substrates to be conveyed not being semiconductor wafers or large planar substrates, e.g. chips, lead frames
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/74Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies
    • H01L24/75Apparatus for connecting with bump connectors or layer connectors
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K13/00Apparatus or processes specially adapted for manufacturing or adjusting assemblages of electric components
    • H05K13/04Mounting of components, e.g. of leadless components
    • H05K13/0404Pick-and-place heads or apparatus, e.g. with jaws
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K13/00Apparatus or processes specially adapted for manufacturing or adjusting assemblages of electric components
    • H05K13/04Mounting of components, e.g. of leadless components
    • H05K13/0417Feeding with belts or tapes
    • H05K13/0419Feeding with belts or tapes tape feeders
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K13/00Apparatus or processes specially adapted for manufacturing or adjusting assemblages of electric components
    • H05K13/04Mounting of components, e.g. of leadless components
    • H05K13/043Feeding one by one by other means than belts
    • H05K13/0434Feeding one by one by other means than belts with containers
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/6838Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping with gripping and holding devices using a vacuum; Bernoulli devices
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/74Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies and for methods related thereto
    • H01L2224/75Apparatus for connecting with bump connectors or layer connectors
    • H01L2224/7565Means for transporting the components to be connected
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K13/00Apparatus or processes specially adapted for manufacturing or adjusting assemblages of electric components
    • H05K13/04Mounting of components, e.g. of leadless components
    • H05K13/0404Pick-and-place heads or apparatus, e.g. with jaws
    • H05K13/0408Incorporating a pick-up tool
    • H05K13/0409Sucking devices

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Computer Hardware Design (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Die Bonding (AREA)
  • Wire Bonding (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Supply And Installment Of Electrical Components (AREA)
SG11202111144YA 2019-04-11 2020-04-07 Bonding apparatus SG11202111144YA (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2019075412 2019-04-11
PCT/JP2020/015746 WO2020209269A1 (en) 2019-04-11 2020-04-07 Bonding device

Publications (1)

Publication Number Publication Date
SG11202111144YA true SG11202111144YA (en) 2021-11-29

Family

ID=72751115

Family Applications (1)

Application Number Title Priority Date Filing Date
SG11202111144YA SG11202111144YA (en) 2019-04-11 2020-04-07 Bonding apparatus

Country Status (7)

Country Link
US (1) US11749541B2 (en)
JP (1) JP7205941B2 (en)
KR (1) KR102708943B1 (en)
CN (1) CN113661564B (en)
SG (1) SG11202111144YA (en)
TW (1) TWI734434B (en)
WO (1) WO2020209269A1 (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI734434B (en) * 2019-04-11 2021-07-21 日商新川股份有限公司 Joining device
WO2024023926A1 (en) * 2022-07-26 2024-02-01 ヤマハ発動機株式会社 Surface mounter and surface mounting method
US20240375251A1 (en) * 2023-05-10 2024-11-14 Taiwan Semiconductor Manufacturing Company, Ltd. Die bonding system and die bonding method using the same

Family Cites Families (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3054480B2 (en) * 1991-12-20 2000-06-19 株式会社日立製作所 Pellet bonding equipment
US5608638A (en) * 1995-02-06 1997-03-04 Advanced Micro Devices Device and method for automation of a build sheet to manufacture a packaged integrated circuit
CH693229A5 (en) * 1997-04-30 2003-04-30 Esec Tradingsa Means and method for assembling vonHalbleiterchips on a substrate.
KR100252317B1 (en) * 1997-10-30 2000-04-15 윤종용 Die Bonding Device of Lead Frame
US7353589B2 (en) * 2003-10-15 2008-04-08 Matsushita Electric Industrial Co., Ltd. Component mounting apparatus
JP4397349B2 (en) * 2005-05-20 2010-01-13 株式会社新川 Chip bonding equipment
JP2011035178A (en) * 2009-08-03 2011-02-17 Hitachi High-Technologies Corp Electronic component mounting apparatus
JP2012019189A (en) * 2010-06-11 2012-01-26 Shibaura Mechatronics Corp Apparatus and method for mounting electronic component
JP5420483B2 (en) * 2010-06-30 2014-02-19 ヤマハ発動機株式会社 Component conveying method, component conveying apparatus and component mounting apparatus
JP2013004615A (en) * 2011-06-14 2013-01-07 Hitachi High-Tech Instruments Co Ltd Electronic component mounting device and electronic component mounting method
JP6055239B2 (en) * 2012-08-29 2016-12-27 ファスフォードテクノロジ株式会社 DIE BONDING DEVICE, DIE PICKUP DEVICE, AND DIE PICKUP METHOD
US9966247B2 (en) * 2012-09-06 2018-05-08 Fuji Machine Mfg. Co., Ltd. Control system and control method for component mounting machine
EP2903403A4 (en) * 2012-09-28 2016-04-27 Fuji Machine Mfg SUBSTRATE PROCESSING MACHINE
JP5507775B1 (en) * 2013-11-25 2014-05-28 キヤノンマシナリー株式会社 Bonding apparatus and bonding method
JP6343199B2 (en) * 2014-07-28 2018-06-13 株式会社Fuji COMMUNICATION SYSTEM, MOUNTING DEVICE, AND COMMUNICATION DATA PROCESSING METHOD
US10199254B2 (en) * 2015-05-12 2019-02-05 Nexperia B.V. Method and system for transferring semiconductor devices from a wafer to a carrier structure
WO2016208069A1 (en) 2015-06-26 2016-12-29 富士機械製造株式会社 Component mounting apparatus
JP6488940B2 (en) * 2015-08-07 2019-03-27 富士電機株式会社 Semiconductor device
KR102059421B1 (en) * 2016-01-06 2019-12-26 야마하 모터 로보틱스 홀딩스 가부시키가이샤 Electronic component mounting unit
TWI632626B (en) * 2016-01-06 2018-08-11 日商新川股份有限公司 Electronic parts processing unit
GB2549250B (en) * 2016-02-15 2021-06-30 Pragmatic Printing Ltd Apparatus and method for manufacturing plurality of electronic circuits
JP6705668B2 (en) * 2016-03-11 2020-06-03 ファスフォードテクノロジ株式会社 Die bonding apparatus and semiconductor device manufacturing method
KR20190022159A (en) * 2017-08-25 2019-03-06 세메스 주식회사 Die bonding apparatus
KR102047035B1 (en) * 2017-09-25 2019-11-20 세메스 주식회사 Die bonding apparatus
TWI734434B (en) * 2019-04-11 2021-07-21 日商新川股份有限公司 Joining device

Also Published As

Publication number Publication date
US11749541B2 (en) 2023-09-05
US20220165591A1 (en) 2022-05-26
KR20210144881A (en) 2021-11-30
TW202041138A (en) 2020-11-01
CN113661564A (en) 2021-11-16
JPWO2020209269A1 (en) 2020-10-15
WO2020209269A1 (en) 2020-10-15
TWI734434B (en) 2021-07-21
JP7205941B2 (en) 2023-01-17
KR102708943B1 (en) 2024-09-25
CN113661564B (en) 2024-03-01

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