SG11202003214XA - Bonding head device, bonding method and bonding machine - Google Patents
Bonding head device, bonding method and bonding machineInfo
- Publication number
- SG11202003214XA SG11202003214XA SG11202003214XA SG11202003214XA SG11202003214XA SG 11202003214X A SG11202003214X A SG 11202003214XA SG 11202003214X A SG11202003214X A SG 11202003214XA SG 11202003214X A SG11202003214X A SG 11202003214XA SG 11202003214X A SG11202003214X A SG 11202003214XA
- Authority
- SG
- Singapore
- Prior art keywords
- bonding
- head device
- machine
- bonding method
- bonding machine
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67144—Apparatus for mounting on conductive members, e.g. leadframes or conductors on insulating substrates
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L2224/81—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a bump connector
- H01L2224/812—Applying energy for connecting
- H01L2224/81201—Compression bonding
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L24/81—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a bump connector
Landscapes
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Wire Bonding (AREA)
- Die Bonding (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201710930963.5A CN109637942B (en) | 2017-10-09 | 2017-10-09 | Bonding head device, bonding method and bonding machine |
PCT/CN2018/109405 WO2019072153A1 (en) | 2017-10-09 | 2018-10-09 | Bonding head device, bonding method and bonding machine |
Publications (1)
Publication Number | Publication Date |
---|---|
SG11202003214XA true SG11202003214XA (en) | 2020-05-28 |
Family
ID=66050766
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
SG11202003214XA SG11202003214XA (en) | 2017-10-09 | 2018-10-09 | Bonding head device, bonding method and bonding machine |
Country Status (5)
Country | Link |
---|---|
KR (1) | KR102394691B1 (en) |
CN (1) | CN109637942B (en) |
SG (1) | SG11202003214XA (en) |
TW (1) | TWI673800B (en) |
WO (1) | WO2019072153A1 (en) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN111009481B (en) * | 2019-12-19 | 2023-04-18 | 西北电子装备技术研究所(中国电子科技集团公司第二研究所) | Chip substrate high-pressure flip-chip bonding flexible pressurization method |
CN112881175B (en) * | 2021-01-26 | 2022-07-22 | 湘潭大学 | Low-cost indenter indenter soft landing method and system based on compound deceleration algorithm |
CN113146516B (en) * | 2021-02-01 | 2022-05-27 | 北京理工大学 | A modular flexible fixture |
CN113241319B (en) * | 2021-05-31 | 2021-11-30 | 广东工业大学 | Rapid positioning method and system |
CN119381275B (en) * | 2024-12-27 | 2025-03-28 | 唐人制造(嘉善)有限公司 | A bonding device |
Family Cites Families (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0715182A (en) * | 1993-06-24 | 1995-01-17 | Toshiba Corp | Device and method for treating semiconductor |
JP2003224144A (en) * | 2002-01-30 | 2003-08-08 | Nidec Copal Corp | Die bonding apparatus |
JP2007335733A (en) * | 2006-06-16 | 2007-12-27 | Matsushita Electric Ind Co Ltd | Flatness measuring method of stage and part mounter using the same |
KR20090066458A (en) * | 2007-12-20 | 2009-06-24 | 세크론 주식회사 | Die Bonding Head with Press Unit and Press Unit |
JP5030857B2 (en) * | 2008-05-14 | 2012-09-19 | 芝浦メカトロニクス株式会社 | Electronic component mounting apparatus and mounting method |
JP2010161211A (en) * | 2009-01-08 | 2010-07-22 | Renesas Technology Corp | Method and device for manufacturing semiconductor device |
KR102187124B1 (en) * | 2013-12-19 | 2020-12-04 | (주)제이티 | Transfer tool, and link member thereof |
JP6272676B2 (en) * | 2013-11-07 | 2018-01-31 | 東レエンジニアリング株式会社 | Bonding equipment |
CN103915368B (en) * | 2014-04-02 | 2016-08-31 | 华中科技大学 | A kind of chip pick-and-place device |
CN104966687B (en) * | 2015-06-30 | 2017-08-25 | 北京中电科电子装备有限公司 | A kind of bonding joint device |
CN105070670B (en) * | 2015-07-17 | 2017-12-29 | 北京中电科电子装备有限公司 | A kind of bonding joint device and chip packaging device |
CN106373914B (en) * | 2016-11-10 | 2020-03-24 | 北京中电科电子装备有限公司 | Chip bonding device |
CN106385134B (en) * | 2016-11-24 | 2019-02-22 | 宁波知了智能科技有限公司 | Direct-drive rotating motor bonding head device |
KR101736476B1 (en) * | 2017-03-23 | 2017-05-16 | 한화테크윈 주식회사 | A component keeping head |
JP7325965B2 (en) * | 2018-03-26 | 2023-08-15 | 芝浦メカトロニクス株式会社 | Element mounting apparatus, adjustment method for element mounting apparatus, and element mounting method |
-
2017
- 2017-10-09 CN CN201710930963.5A patent/CN109637942B/en active Active
-
2018
- 2018-10-09 KR KR1020207013002A patent/KR102394691B1/en active Active
- 2018-10-09 TW TW107135604A patent/TWI673800B/en active
- 2018-10-09 SG SG11202003214XA patent/SG11202003214XA/en unknown
- 2018-10-09 WO PCT/CN2018/109405 patent/WO2019072153A1/en active Application Filing
Also Published As
Publication number | Publication date |
---|---|
WO2019072153A1 (en) | 2019-04-18 |
KR102394691B1 (en) | 2022-05-06 |
CN109637942A (en) | 2019-04-16 |
TW201923912A (en) | 2019-06-16 |
CN109637942B (en) | 2021-02-05 |
KR20200060500A (en) | 2020-05-29 |
TWI673800B (en) | 2019-10-01 |
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