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SG11201700861XA - Magnetic element and method of fabrication thereof - Google Patents

Magnetic element and method of fabrication thereof

Info

Publication number
SG11201700861XA
SG11201700861XA SG11201700861XA SG11201700861XA SG11201700861XA SG 11201700861X A SG11201700861X A SG 11201700861XA SG 11201700861X A SG11201700861X A SG 11201700861XA SG 11201700861X A SG11201700861X A SG 11201700861XA SG 11201700861X A SG11201700861X A SG 11201700861XA
Authority
SG
Singapore
Prior art keywords
fabrication
magnetic element
magnetic
Prior art date
Application number
SG11201700861XA
Inventor
Michael Tran
Cheow Hin Sim
Original Assignee
Agency Science Tech & Res
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency Science Tech & Res filed Critical Agency Science Tech & Res
Priority to SG11201700861XA priority Critical patent/SG11201700861XA/en
Publication of SG11201700861XA publication Critical patent/SG11201700861XA/en

Links

Classifications

    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11CSTATIC STORES
    • G11C11/00Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor
    • G11C11/02Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements
    • G11C11/16Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements using elements in which the storage effect is based on magnetic spin effect
    • G11C11/161Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements using elements in which the storage effect is based on magnetic spin effect details concerning the memory cell structure, e.g. the layers of the ferromagnetic memory cell
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01FMAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F10/00Thin magnetic films, e.g. of one-domain structure
    • H01F10/08Thin magnetic films, e.g. of one-domain structure characterised by magnetic layers
    • H01F10/10Thin magnetic films, e.g. of one-domain structure characterised by magnetic layers characterised by the composition
    • H01F10/12Thin magnetic films, e.g. of one-domain structure characterised by magnetic layers characterised by the composition being metals or alloys
    • H01F10/123Thin magnetic films, e.g. of one-domain structure characterised by magnetic layers characterised by the composition being metals or alloys having a L10 crystallographic structure, e.g. [Co,Fe][Pt,Pd] thin films
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01FMAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F10/00Thin magnetic films, e.g. of one-domain structure
    • H01F10/32Spin-exchange-coupled multilayers, e.g. nanostructured superlattices
    • H01F10/324Exchange coupling of magnetic film pairs via a very thin non-magnetic spacer, e.g. by exchange with conduction electrons of the spacer
    • H01F10/3254Exchange coupling of magnetic film pairs via a very thin non-magnetic spacer, e.g. by exchange with conduction electrons of the spacer the spacer being semiconducting or insulating, e.g. for spin tunnel junction [STJ]
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01FMAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F10/00Thin magnetic films, e.g. of one-domain structure
    • H01F10/32Spin-exchange-coupled multilayers, e.g. nanostructured superlattices
    • H01F10/324Exchange coupling of magnetic film pairs via a very thin non-magnetic spacer, e.g. by exchange with conduction electrons of the spacer
    • H01F10/3268Exchange coupling of magnetic film pairs via a very thin non-magnetic spacer, e.g. by exchange with conduction electrons of the spacer the exchange coupling being asymmetric, e.g. by use of additional pinning, by using antiferromagnetic or ferromagnetic coupling interface, i.e. so-called spin-valve [SV] structure, e.g. NiFe/Cu/NiFe/FeMn
    • H01F10/3272Exchange coupling of magnetic film pairs via a very thin non-magnetic spacer, e.g. by exchange with conduction electrons of the spacer the exchange coupling being asymmetric, e.g. by use of additional pinning, by using antiferromagnetic or ferromagnetic coupling interface, i.e. so-called spin-valve [SV] structure, e.g. NiFe/Cu/NiFe/FeMn by use of anti-parallel coupled [APC] ferromagnetic layers, e.g. artificial ferrimagnets [AFI], artificial [AAF] or synthetic [SAF] anti-ferromagnets
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01FMAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F10/00Thin magnetic films, e.g. of one-domain structure
    • H01F10/32Spin-exchange-coupled multilayers, e.g. nanostructured superlattices
    • H01F10/324Exchange coupling of magnetic film pairs via a very thin non-magnetic spacer, e.g. by exchange with conduction electrons of the spacer
    • H01F10/3286Spin-exchange coupled multilayers having at least one layer with perpendicular magnetic anisotropy
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01FMAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F10/00Thin magnetic films, e.g. of one-domain structure
    • H01F10/32Spin-exchange-coupled multilayers, e.g. nanostructured superlattices
    • H01F10/324Exchange coupling of magnetic film pairs via a very thin non-magnetic spacer, e.g. by exchange with conduction electrons of the spacer
    • H01F10/329Spin-exchange coupled multilayers wherein the magnetisation of the free layer is switched by a spin-polarised current, e.g. spin torque effect
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01FMAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F41/00Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties
    • H01F41/14Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for applying magnetic films to substrates
    • H01F41/30Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for applying magnetic films to substrates for applying nanostructures, e.g. by molecular beam epitaxy [MBE]
    • H01F41/302Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for applying magnetic films to substrates for applying nanostructures, e.g. by molecular beam epitaxy [MBE] for applying spin-exchange-coupled multilayers, e.g. nanostructured superlattices
    • H01F41/305Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for applying magnetic films to substrates for applying nanostructures, e.g. by molecular beam epitaxy [MBE] for applying spin-exchange-coupled multilayers, e.g. nanostructured superlattices applying the spacer or adjusting its interface, e.g. in order to enable particular effect different from exchange coupling
    • H01F41/307Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for applying magnetic films to substrates for applying nanostructures, e.g. by molecular beam epitaxy [MBE] for applying spin-exchange-coupled multilayers, e.g. nanostructured superlattices applying the spacer or adjusting its interface, e.g. in order to enable particular effect different from exchange coupling insulating or semiconductive spacer
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10NELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N50/00Galvanomagnetic devices
    • H10N50/01Manufacture or treatment
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10NELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N50/00Galvanomagnetic devices
    • H10N50/10Magnetoresistive devices
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10NELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N50/00Galvanomagnetic devices
    • H10N50/80Constructional details
    • H10N50/85Materials of the active region
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10BELECTRONIC MEMORY DEVICES
    • H10B61/00Magnetic memory devices, e.g. magnetoresistive RAM [MRAM] devices
    • H10B61/20Magnetic memory devices, e.g. magnetoresistive RAM [MRAM] devices comprising components having three or more electrodes, e.g. transistors
    • H10B61/22Magnetic memory devices, e.g. magnetoresistive RAM [MRAM] devices comprising components having three or more electrodes, e.g. transistors of the field-effect transistor [FET] type

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Power Engineering (AREA)
  • Nanotechnology (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Mram Or Spin Memory Techniques (AREA)
  • Hall/Mr Elements (AREA)
SG11201700861XA 2014-09-25 2015-09-25 Magnetic element and method of fabrication thereof SG11201700861XA (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
SG11201700861XA SG11201700861XA (en) 2014-09-25 2015-09-25 Magnetic element and method of fabrication thereof

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
SG10201406062S 2014-09-25
PCT/SG2015/050345 WO2016048248A1 (en) 2014-09-25 2015-09-25 Magnetic element and method of fabrication thereof
SG11201700861XA SG11201700861XA (en) 2014-09-25 2015-09-25 Magnetic element and method of fabrication thereof

Publications (1)

Publication Number Publication Date
SG11201700861XA true SG11201700861XA (en) 2017-03-30

Family

ID=55581588

Family Applications (1)

Application Number Title Priority Date Filing Date
SG11201700861XA SG11201700861XA (en) 2014-09-25 2015-09-25 Magnetic element and method of fabrication thereof

Country Status (3)

Country Link
US (1) US20170279040A1 (en)
SG (1) SG11201700861XA (en)
WO (1) WO2016048248A1 (en)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2019125366A1 (en) * 2017-12-18 2019-06-27 Intel Corporation Spin orbit coupling based memory with resistivity modulation
WO2019125383A1 (en) * 2017-12-18 2019-06-27 Intel Corporation Perpendicular spin orbit coupling based memory with composite free layer
US11575083B2 (en) 2018-04-02 2023-02-07 Intel Corporation Insertion layer between spin hall effect or spin orbit torque electrode and free magnet for improved magnetic memory
US11476412B2 (en) 2018-06-19 2022-10-18 Intel Corporation Perpendicular exchange bias with antiferromagnet for spin orbit coupling based memory
US11069853B2 (en) 2018-11-19 2021-07-20 Applied Materials, Inc. Methods for forming structures for MRAM applications
KR102632986B1 (en) * 2019-10-01 2024-02-05 에스케이하이닉스 주식회사 Electronic device
CN116134989A (en) * 2020-11-30 2023-05-16 华为技术有限公司 A kind of memory and electronic equipment
JP2022144398A (en) * 2021-03-19 2022-10-03 キオクシア株式会社 Magnetic storage device

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2904724B1 (en) * 2006-08-03 2011-03-04 Commissariat Energie Atomique MAGNETIC DEVICE IN THIN LAYERS WITH HIGH PERPENDICULAR SPIN POLARIZATION IN THE LAYER PLAN, MAGNETIC TUNNEL JUNCTION AND SPIN VALVE USING SUCH A DEVICE
KR20100104413A (en) * 2009-03-17 2010-09-29 서울대학교산학협력단 Magnetic memory device using perpendicular magnetic anisotopy
US8072800B2 (en) * 2009-09-15 2011-12-06 Grandis Inc. Magnetic element having perpendicular anisotropy with enhanced efficiency
TWI398973B (en) * 2009-12-31 2013-06-11 Ind Tech Res Inst Magnetoresistive device with perpendicular magnetization
US9019758B2 (en) * 2010-09-14 2015-04-28 Avalanche Technology, Inc. Spin-transfer torque magnetic random access memory with perpendicular magnetic anisotropy multilayers
US9245608B2 (en) * 2011-09-22 2016-01-26 Qualcomm Incorporated Thermally tolerant perpendicular magnetic anisotropy coupled elements for spin-transfer torque switching device
US8697484B2 (en) * 2011-12-20 2014-04-15 Samsung Electronics Co., Ltd. Method and system for setting a pinned layer in a magnetic tunneling junction
JP5856490B2 (en) * 2012-01-20 2016-02-09 ルネサスエレクトロニクス株式会社 Magnetoresistive element and magnetic memory
JP5836163B2 (en) * 2012-03-08 2015-12-24 ルネサスエレクトロニクス株式会社 Magnetic memory cell and method for manufacturing magnetic memory cell
US8900884B2 (en) * 2012-06-18 2014-12-02 Headway Technologies, Inc. MTJ element for STT MRAM
US8687415B2 (en) * 2012-07-06 2014-04-01 International Business Machines Corporation Domain wall motion in perpendicularly magnetized wires having artificial antiferromagnetically coupled multilayers with engineered interfaces
US20140110804A1 (en) * 2012-10-18 2014-04-24 Agency For Science, Technology And Research Magnetoresistive device and method for forming the same
US20140306303A1 (en) * 2013-04-16 2014-10-16 Headway Technologies, Inc. Seed Layer for Perpendicular Magnetic Anisotropy (PMA) Thin Film
US9537088B1 (en) * 2015-07-13 2017-01-03 Micron Technology, Inc. Magnetic tunnel junctions

Also Published As

Publication number Publication date
WO2016048248A1 (en) 2016-03-31
US20170279040A1 (en) 2017-09-28

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