SG11201608362TA - Method and device for embossing of a nanostructure - Google Patents
Method and device for embossing of a nanostructureInfo
- Publication number
- SG11201608362TA SG11201608362TA SG11201608362TA SG11201608362TA SG11201608362TA SG 11201608362T A SG11201608362T A SG 11201608362TA SG 11201608362T A SG11201608362T A SG 11201608362TA SG 11201608362T A SG11201608362T A SG 11201608362TA SG 11201608362T A SG11201608362T A SG 11201608362TA
- Authority
- SG
- Singapore
- Prior art keywords
- nanostructure
- embossing
- Prior art date
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41F—PRINTING MACHINES OR PRESSES
- B41F19/00—Apparatus or machines for carrying out printing operations combined with other operations
- B41F19/02—Apparatus or machines for carrying out printing operations combined with other operations with embossing
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B30—PRESSES
- B30B—PRESSES IN GENERAL
- B30B15/00—Details of, or accessories for, presses; Auxiliary measures in connection with pressing
- B30B15/06—Platens or press rams
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B44—DECORATIVE ARTS
- B44B—MACHINES, APPARATUS OR TOOLS FOR ARTISTIC WORK, e.g. FOR SCULPTURING, GUILLOCHING, CARVING, BRANDING, INLAYING
- B44B5/00—Machines or apparatus for embossing decorations or marks, e.g. embossing coins
- B44B5/0052—Machines or apparatus for embossing decorations or marks, e.g. embossing coins by pressing
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B44—DECORATIVE ARTS
- B44B—MACHINES, APPARATUS OR TOOLS FOR ARTISTIC WORK, e.g. FOR SCULPTURING, GUILLOCHING, CARVING, BRANDING, INLAYING
- B44B5/00—Machines or apparatus for embossing decorations or marks, e.g. embossing coins
- B44B5/02—Dies; Accessories
- B44B5/026—Dies
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B44—DECORATIVE ARTS
- B44C—PRODUCING DECORATIVE EFFECTS; MOSAICS; TARSIA WORK; PAPERHANGING
- B44C1/00—Processes, not specifically provided for elsewhere, for producing decorative surface effects
- B44C1/24—Pressing or stamping ornamental designs on surfaces
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/0002—Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70691—Handling of masks or workpieces
- G03F7/70733—Handling masks and workpieces, e.g. exchange of workpiece or mask, transport of workpiece or mask
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70691—Handling of masks or workpieces
- G03F7/70783—Handling stress or warp of chucks, masks or workpieces, e.g. to compensate for imaging errors or considerations related to warpage of masks or workpieces due to their own weight
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D62/00—Semiconductor bodies, or regions thereof, of devices having potential barriers
- H10D62/10—Shapes, relative sizes or dispositions of the regions of the semiconductor bodies; Shapes of the semiconductor bodies
- H10D62/117—Shapes of semiconductor bodies
- H10D62/118—Nanostructure semiconductor bodies
-
- H10P76/204—
-
- H10P76/2041—
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Shaping Of Tube Ends By Bending Or Straightening (AREA)
- Nanotechnology (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| PCT/EP2014/058141 WO2015161868A1 (en) | 2014-04-22 | 2014-04-22 | Method and device for embossing a nanostructure |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| SG11201608362TA true SG11201608362TA (en) | 2016-11-29 |
Family
ID=50588682
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| SG11201608362TA SG11201608362TA (en) | 2014-04-22 | 2014-04-22 | Method and device for embossing of a nanostructure |
Country Status (8)
| Country | Link |
|---|---|
| US (4) | US10118381B2 (en) |
| EP (2) | EP3134771B1 (en) |
| JP (1) | JP6391709B2 (en) |
| KR (3) | KR102545684B1 (en) |
| CN (4) | CN112445064A (en) |
| SG (1) | SG11201608362TA (en) |
| TW (4) | TWI824579B (en) |
| WO (1) | WO2015161868A1 (en) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2019210976A1 (en) | 2018-05-04 | 2019-11-07 | Ev Group E. Thallner Gmbh | Stamp and method for embossing |
| TWI875369B (en) * | 2018-10-25 | 2025-03-01 | 日商尼康股份有限公司 | Substrate bonding device, parameter calculation device, substrate bonding method and parameter calculation method |
| WO2020136048A1 (en) * | 2018-12-28 | 2020-07-02 | Asml Holding N.V. | Apparatus and method for cleaning a support structure in a lithographic system |
| EP4646630A1 (en) | 2023-01-03 | 2025-11-12 | EV Group E. Thallner GmbH | Device and method for processing a substrate in an evacuated processing chamber |
Family Cites Families (41)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6180288B1 (en) * | 1997-03-21 | 2001-01-30 | Kimberly-Clark Worldwide, Inc. | Gel sensors and method of use thereof |
| AT405775B (en) | 1998-01-13 | 1999-11-25 | Thallner Erich | Method and apparatus for bringing together wafer-type (slice-type, disk-shaped) semiconductor substrates in an aligned manner |
| WO2004044651A1 (en) | 2002-11-13 | 2004-05-27 | Molecular Imprints, Inc. | A chucking system and method for modulating shapes of substrates |
| US6943117B2 (en) | 2003-03-27 | 2005-09-13 | Korea Institute Of Machinery & Materials | UV nanoimprint lithography process using elementwise embossed stamp and selectively additive pressurization |
| KR100504080B1 (en) * | 2003-05-26 | 2005-07-27 | 한국기계연구원 | Uv nanoimprint lithography using the selective added pressure |
| DE102004007060B3 (en) | 2004-02-13 | 2005-07-07 | Thallner, Erich, Dipl.-Ing. | Semiconductor wafer bonding device using application of adhesive before alignment and contacting of corresponding surfaces of semiconductor wafers |
| CN100555076C (en) * | 2004-07-26 | 2009-10-28 | 鸿富锦精密工业(深圳)有限公司 | Be used for pressing mold of nano impression and preparation method thereof |
| DE102005036775B4 (en) * | 2004-08-09 | 2007-01-25 | Schuler Pressen Gmbh & Co. Kg | Forming device with ejector and method for ejecting workpieces |
| US20070164476A1 (en) * | 2004-09-01 | 2007-07-19 | Wei Wu | Contact lithography apparatus and method employing substrate deformation |
| DK1789848T3 (en) * | 2004-09-08 | 2010-10-25 | Nil Technology Aps | Flexible nano-embossed piston |
| US7331283B2 (en) * | 2004-12-16 | 2008-02-19 | Asml Holding N.V. | Method and apparatus for imprint pattern replication |
| US8563491B2 (en) | 2005-03-04 | 2013-10-22 | The Procter & Gamble Company | Methods of cleansing skin and rinse-off or wipe-off compositions therefor |
| KR101256383B1 (en) | 2005-05-03 | 2013-04-25 | 코닌클리케 필립스 일렉트로닉스 엔.브이. | Method and device for transferring a pattern from a stamp to a substrate |
| JP4854383B2 (en) * | 2006-05-15 | 2012-01-18 | アピックヤマダ株式会社 | Imprint method and nano-imprint apparatus |
| TWI322754B (en) | 2006-05-18 | 2010-04-01 | Molecular Imprints Inc | Method for expelling gas positioned between a substrate and a mold |
| US8215946B2 (en) * | 2006-05-18 | 2012-07-10 | Molecular Imprints, Inc. | Imprint lithography system and method |
| WO2007136832A2 (en) | 2006-05-18 | 2007-11-29 | Molecular Imprints, Inc. | Method for expelling gas positioned between a substrate and a mold |
| EP2029963A1 (en) * | 2006-05-31 | 2009-03-04 | Canon Kabushiki Kaisha | Gap measuring method, imprint method, and imprint apparatus |
| JP2008098263A (en) * | 2006-10-10 | 2008-04-24 | Canon Inc | Near-field exposure mask and resist pattern forming method using the mask |
| JP4418476B2 (en) * | 2007-03-20 | 2010-02-17 | 株式会社日立ハイテクノロジーズ | MICROSTRUCTURE TRANSFER APPARATUS AND MICROSTRUCTURE MANUFACTURING METHOD |
| NL2004409A (en) | 2009-05-19 | 2010-11-22 | Asml Netherlands Bv | Imprint lithography apparatus. |
| EP2287666B1 (en) | 2009-08-22 | 2012-06-27 | EV Group E. Thallner GmbH | Device for embossing substrates |
| JP5469041B2 (en) * | 2010-03-08 | 2014-04-09 | 株式会社日立ハイテクノロジーズ | Fine structure transfer method and apparatus |
| CN103069251A (en) | 2010-09-03 | 2013-04-24 | Ev集团E·索尔纳有限责任公司 | Apparatus and method for reducing wedge error |
| JP5930622B2 (en) | 2010-10-08 | 2016-06-08 | キヤノン株式会社 | Imprint apparatus and article manufacturing method |
| CN102096315B (en) * | 2010-12-22 | 2012-04-04 | 青岛理工大学 | Device and method for nanoimprinting whole wafer |
| JP2012190877A (en) * | 2011-03-09 | 2012-10-04 | Fujifilm Corp | Nanoimprint method and nanoimprint device for use therein |
| JPWO2012133840A1 (en) | 2011-03-30 | 2014-07-28 | 日本電気株式会社 | Imprint apparatus, imprint method, electronic circuit board, and electronic apparatus |
| KR20220008392A (en) * | 2011-08-12 | 2022-01-20 | 에베 그룹 에. 탈너 게엠베하 | Apparatus and method for bonding substrates |
| JP6004738B2 (en) * | 2011-09-07 | 2016-10-12 | キヤノン株式会社 | Imprint apparatus and article manufacturing method using the same |
| CN102346369B (en) * | 2011-09-08 | 2013-04-10 | 青岛理工大学 | Whole wafer nanoimprint lithography machine |
| EP2587560A1 (en) * | 2011-10-26 | 2013-05-01 | Forschungsverbund Berlin e.V. | Light emitting diode |
| JP5824380B2 (en) * | 2012-02-07 | 2015-11-25 | キヤノン株式会社 | Imprint apparatus, imprint method, and article manufacturing method |
| CN102591143B (en) * | 2012-02-29 | 2014-04-16 | 青岛理工大学 | Large-area nano-imprint lithography device and method |
| CN102566262B (en) * | 2012-02-29 | 2013-06-19 | 青岛理工大学 | Device suitable for wafer-level nanoimprint lithography of non-flat substrate |
| JP6069689B2 (en) * | 2012-07-26 | 2017-02-01 | 大日本印刷株式会社 | Nanoimprint template |
| CN103631086A (en) * | 2012-08-21 | 2014-03-12 | 华中科技大学 | Manufacturing method for micro-nano graphs used for integrated optoelectronic device |
| TWI609763B (en) * | 2012-10-04 | 2018-01-01 | 大日本印刷股份有限公司 | Imprint method and imprinting device |
| JP6188123B2 (en) * | 2012-12-28 | 2017-08-30 | 芝浦メカトロニクス株式会社 | Bonding device and bonding processing method |
| JP6328001B2 (en) * | 2013-08-30 | 2018-05-23 | キヤノン株式会社 | Curable composition for imprint, film, method for producing film |
| US10578964B2 (en) * | 2013-12-31 | 2020-03-03 | Canon Nanotechnologies, Inc. | Asymmetric template shape modulation for partial field imprinting |
-
2014
- 2014-04-22 SG SG11201608362TA patent/SG11201608362TA/en unknown
- 2014-04-22 EP EP14719720.6A patent/EP3134771B1/en active Active
- 2014-04-22 KR KR1020227014424A patent/KR102545684B1/en active Active
- 2014-04-22 KR KR1020217012962A patent/KR102394754B1/en active Active
- 2014-04-22 EP EP19186550.0A patent/EP3591470A1/en active Pending
- 2014-04-22 CN CN202011230126.XA patent/CN112445064A/en active Pending
- 2014-04-22 CN CN202011231500.8A patent/CN112445066A/en active Pending
- 2014-04-22 KR KR1020167029271A patent/KR102249004B1/en active Active
- 2014-04-22 CN CN202011231477.2A patent/CN112445065A/en active Pending
- 2014-04-22 US US15/113,111 patent/US10118381B2/en active Active
- 2014-04-22 JP JP2016563848A patent/JP6391709B2/en active Active
- 2014-04-22 WO PCT/EP2014/058141 patent/WO2015161868A1/en not_active Ceased
- 2014-04-22 CN CN201480078179.0A patent/CN106462053B/en active Active
-
2015
- 2015-03-24 TW TW111123484A patent/TWI824579B/en active
- 2015-03-24 TW TW109114811A patent/TWI772789B/en active
- 2015-03-24 TW TW104109441A patent/TWI654134B/en active
- 2015-03-24 TW TW108104053A patent/TWI694967B/en active
-
2018
- 2018-09-25 US US16/141,059 patent/US10493747B2/en active Active
-
2019
- 2019-10-16 US US16/654,098 patent/US10906293B2/en active Active
-
2020
- 2020-12-17 US US17/124,931 patent/US20210129520A1/en not_active Abandoned
Also Published As
| Publication number | Publication date |
|---|---|
| TWI772789B (en) | 2022-08-01 |
| US10493747B2 (en) | 2019-12-03 |
| KR20220058671A (en) | 2022-05-09 |
| CN112445066A (en) | 2021-03-05 |
| TWI654134B (en) | 2019-03-21 |
| KR102545684B1 (en) | 2023-06-20 |
| CN106462053B (en) | 2020-12-01 |
| WO2015161868A1 (en) | 2015-10-29 |
| JP6391709B2 (en) | 2018-09-19 |
| TWI694967B (en) | 2020-06-01 |
| CN112445065A (en) | 2021-03-05 |
| JP2017516302A (en) | 2017-06-15 |
| KR102394754B1 (en) | 2022-05-04 |
| KR102249004B1 (en) | 2021-05-07 |
| US20190022999A1 (en) | 2019-01-24 |
| EP3591470A1 (en) | 2020-01-08 |
| KR20160145599A (en) | 2016-12-20 |
| CN112445064A (en) | 2021-03-05 |
| KR20210050597A (en) | 2021-05-07 |
| US20200047485A1 (en) | 2020-02-13 |
| US10118381B2 (en) | 2018-11-06 |
| TW202237526A (en) | 2022-10-01 |
| US20170001431A1 (en) | 2017-01-05 |
| EP3134771A1 (en) | 2017-03-01 |
| EP3134771B1 (en) | 2019-08-28 |
| US20210129520A1 (en) | 2021-05-06 |
| TW202030145A (en) | 2020-08-16 |
| CN106462053A (en) | 2017-02-22 |
| TWI824579B (en) | 2023-12-01 |
| US10906293B2 (en) | 2021-02-02 |
| TW201930179A (en) | 2019-08-01 |
| TW201544447A (en) | 2015-12-01 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| ZA201904259B (en) | Device and method | |
| EP3219412A4 (en) | Shaping device and a shaping method | |
| SG10201407721WA (en) | Article anti-lost device and method | |
| ZA201702900B (en) | Device and method | |
| PT2893817T (en) | Device and method for producing of a de-alcoholised beverage | |
| PL3275040T3 (en) | Method and device for forming a battery | |
| PT3204150T (en) | A method and a device for producing nanoparticles | |
| PL2982303T3 (en) | Medical device and method for producing a medical device | |
| GB201409795D0 (en) | A Method and apparatus | |
| GB2530380B (en) | Device and method for generating a speed value | |
| PL2923973T3 (en) | Device and method for positioning products | |
| EP3171391A4 (en) | Step-and-repeat-type imprinting device and method | |
| GB2525625B (en) | Device and method | |
| SG11201608362TA (en) | Method and device for embossing of a nanostructure | |
| GB2537546B (en) | Method and device for activating and deactivating a gs-tool | |
| GB2539611B (en) | Belt-finishing device and method for operating a belt-finishing device | |
| SG11201608018XA (en) | Sensing device and method for sensing a force | |
| HUE037769T2 (en) | Method and device for applying a seal | |
| GB201419799D0 (en) | A test device and method of using a test device | |
| IL235083B (en) | Liquid-atomization method and device | |
| GB201416790D0 (en) | Device and method | |
| PL3010316T3 (en) | A deformable apparatus and method | |
| SG11201701644XA (en) | Drawing device and drawing method | |
| SG11201609083RA (en) | A method and a device forcoating a base body | |
| SG10201911997PA (en) | Method and device for embossing of a nanostructure |