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SG106057A1 - Magnet for generating a magnetic field in an ion source - Google Patents

Magnet for generating a magnetic field in an ion source

Info

Publication number
SG106057A1
SG106057A1 SG200104694A SG200104694A SG106057A1 SG 106057 A1 SG106057 A1 SG 106057A1 SG 200104694 A SG200104694 A SG 200104694A SG 200104694 A SG200104694 A SG 200104694A SG 106057 A1 SG106057 A1 SG 106057A1
Authority
SG
Singapore
Prior art keywords
magnet
generating
magnetic field
ion source
ion
Prior art date
Application number
SG200104694A
Inventor
Harald Vanderberg Bo
Neil Horsky Thomas
Raymond Trueira Frank
Original Assignee
Axcelis Tech Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US09/633,322 external-priority patent/US6583544B1/en
Application filed by Axcelis Tech Inc filed Critical Axcelis Tech Inc
Publication of SG106057A1 publication Critical patent/SG106057A1/en

Links

SG200104694A 2000-08-07 2001-08-03 Magnet for generating a magnetic field in an ion source SG106057A1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US63332400A 2000-08-07 2000-08-07
US09/633,322 US6583544B1 (en) 2000-08-07 2000-08-07 Ion source having replaceable and sputterable solid source material

Publications (1)

Publication Number Publication Date
SG106057A1 true SG106057A1 (en) 2004-09-30

Family

ID=33479356

Family Applications (2)

Application Number Title Priority Date Filing Date
SG200104693A SG108825A1 (en) 2000-08-07 2001-08-03 Ion source having replaceable and sputterable solid source material
SG200104694A SG106057A1 (en) 2000-08-07 2001-08-03 Magnet for generating a magnetic field in an ion source

Family Applications Before (1)

Application Number Title Priority Date Filing Date
SG200104693A SG108825A1 (en) 2000-08-07 2001-08-03 Ion source having replaceable and sputterable solid source material

Country Status (1)

Country Link
SG (2) SG108825A1 (en)

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62271334A (en) * 1986-05-16 1987-11-25 Mitsubishi Electric Corp Ion source for ion implantation device
JPH05109365A (en) * 1991-10-11 1993-04-30 Japan Steel Works Ltd:The Electronic cyclotron resonant ion source
JPH09129151A (en) * 1995-11-06 1997-05-16 Hitachi Ltd Negative ion source device
JP2001160368A (en) * 1999-12-01 2001-06-12 Sumitomo Eaton Noba Kk Ion source

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4016421A (en) * 1975-02-13 1977-04-05 E. I. Du Pont De Nemours And Company Analytical apparatus with variable energy ion beam source
US4166952A (en) * 1978-02-24 1979-09-04 E. I. Du Pont De Nemours And Company Method and apparatus for the elemental analysis of solids
US5262652A (en) * 1991-05-14 1993-11-16 Applied Materials, Inc. Ion implantation apparatus having increased source lifetime
US5497006A (en) * 1994-11-15 1996-03-05 Eaton Corporation Ion generating source for use in an ion implanter
US5703372A (en) * 1996-10-30 1997-12-30 Eaton Corporation Endcap for indirectly heated cathode of ion source
US5852345A (en) * 1996-11-01 1998-12-22 Implant Sciences Corp. Ion source generator auxiliary device for phosphorus and arsenic beams
JP3660457B2 (en) * 1996-12-26 2005-06-15 株式会社東芝 Ion generator and ion irradiation device

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62271334A (en) * 1986-05-16 1987-11-25 Mitsubishi Electric Corp Ion source for ion implantation device
JPH05109365A (en) * 1991-10-11 1993-04-30 Japan Steel Works Ltd:The Electronic cyclotron resonant ion source
JPH09129151A (en) * 1995-11-06 1997-05-16 Hitachi Ltd Negative ion source device
JP2001160368A (en) * 1999-12-01 2001-06-12 Sumitomo Eaton Noba Kk Ion source

Also Published As

Publication number Publication date
SG108825A1 (en) 2005-02-28

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