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SG104194G - High resolution photoresist of imide containing polymers - Google Patents

High resolution photoresist of imide containing polymers

Info

Publication number
SG104194G
SG104194G SG104194A SG104194A SG104194G SG 104194 G SG104194 G SG 104194G SG 104194 A SG104194 A SG 104194A SG 104194 A SG104194 A SG 104194A SG 104194 G SG104194 G SG 104194G
Authority
SG
Singapore
Prior art keywords
high resolution
containing polymers
imide containing
resolution photoresist
photoresist
Prior art date
Application number
SG104194A
Original Assignee
Hoechst Celanese Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US06/832,116 external-priority patent/US4837124A/en
Application filed by Hoechst Celanese Corp filed Critical Hoechst Celanese Corp
Priority to SG104194A priority Critical patent/SG104194G/en
Publication of SG104194G publication Critical patent/SG104194G/en

Links

SG104194A 1986-02-24 1994-07-29 High resolution photoresist of imide containing polymers SG104194G (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
SG104194A SG104194G (en) 1986-02-24 1994-07-29 High resolution photoresist of imide containing polymers

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US06/832,116 US4837124A (en) 1986-02-24 1986-02-24 High resolution photoresist of imide containing polymers
SG104194A SG104194G (en) 1986-02-24 1994-07-29 High resolution photoresist of imide containing polymers

Publications (1)

Publication Number Publication Date
SG104194G true SG104194G (en) 1994-10-28

Family

ID=26664143

Family Applications (1)

Application Number Title Priority Date Filing Date
SG104194A SG104194G (en) 1986-02-24 1994-07-29 High resolution photoresist of imide containing polymers

Country Status (1)

Country Link
SG (1) SG104194G (en)

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