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SG10201905253RA - Teaching apparatus and teaching method for substrate transfer system - Google Patents

Teaching apparatus and teaching method for substrate transfer system

Info

Publication number
SG10201905253RA
SG10201905253RA SG10201905253RA SG10201905253RA SG10201905253RA SG 10201905253R A SG10201905253R A SG 10201905253RA SG 10201905253R A SG10201905253R A SG 10201905253RA SG 10201905253R A SG10201905253R A SG 10201905253RA SG 10201905253R A SG10201905253R A SG 10201905253RA
Authority
SG
Singapore
Prior art keywords
teaching
transfer system
substrate transfer
teaching method
teaching apparatus
Prior art date
Application number
SG10201905253RA
Inventor
Isokawa Hidetatsu
Hashimoto Koichi
Inaba Mitsuhiko
Iida Makoto
Original Assignee
Ebara Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ebara Corp filed Critical Ebara Corp
Publication of SG10201905253RA publication Critical patent/SG10201905253RA/en

Links

Classifications

    • H10P72/3302—
    • H10P72/0428—
    • H10P72/53—
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J11/00—Manipulators not otherwise provided for
    • B25J11/0095—Manipulators transporting wafers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/16—Programme controls
    • B25J9/1628—Programme controls characterised by the control loop
    • B25J9/163—Programme controls characterised by the control loop learning, adaptive, model based, rule based expert control
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/16—Programme controls
    • B25J9/1694—Programme controls characterised by use of sensors other than normal servo-feedback from position, speed or acceleration sensors, perception control, multi-sensor controlled systems, sensor fusion
    • B25J9/1697—Vision controlled systems
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
    • B65G47/74—Feeding, transfer, or discharging devices of particular kinds or types
    • B65G47/90—Devices for picking-up and depositing articles or materials
    • B65G47/905—Control arrangements
    • H10P72/0412—
    • H10P72/0456—
    • H10P72/0464—
    • H10P72/0606—
    • H10P72/0612—
    • H10P72/3202—
    • H10P72/33—
    • H10P72/3306—
    • H10P72/3402—
    • H10P72/7608—

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Robotics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Automation & Control Theory (AREA)
  • Manipulator (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
SG10201905253RA 2018-06-12 2019-06-10 Teaching apparatus and teaching method for substrate transfer system SG10201905253RA (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2018111666A JP2019216152A (en) 2018-06-12 2018-06-12 Teaching apparatus and teaching method for substrate transfer system

Publications (1)

Publication Number Publication Date
SG10201905253RA true SG10201905253RA (en) 2020-01-30

Family

ID=68764200

Family Applications (1)

Application Number Title Priority Date Filing Date
SG10201905253RA SG10201905253RA (en) 2018-06-12 2019-06-10 Teaching apparatus and teaching method for substrate transfer system

Country Status (6)

Country Link
US (1) US20190378740A1 (en)
JP (1) JP2019216152A (en)
KR (1) KR20190140840A (en)
CN (1) CN110600397A (en)
SG (1) SG10201905253RA (en)
TW (1) TW202002143A (en)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US12176227B2 (en) * 2019-03-26 2024-12-24 Tokyo Electron Limited State determination device, state determination method, and computer-readable recording medium
JP7188407B2 (en) * 2020-03-25 2022-12-13 ブラザー工業株式会社 Machine tools and machine tool control methods
US11676845B2 (en) 2020-06-30 2023-06-13 Brooks Automation Us, Llc Automated teach apparatus for robotic systems and method therefor
EP4526091A1 (en) * 2022-05-20 2025-03-26 Entegris, Inc. End of arm attachment for a robotic arm
JP7527048B1 (en) * 2023-06-13 2024-08-02 株式会社新川 Substrate Transport Device

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10189686A (en) * 1996-12-25 1998-07-21 Tokyo Electron Ltd Transfer device
JPH10313037A (en) * 1997-05-06 1998-11-24 Applied Materials Inc Monitoring system for substrate transfer system
US7085622B2 (en) * 2002-04-19 2006-08-01 Applied Material, Inc. Vision system
JP4257570B2 (en) * 2002-07-17 2009-04-22 株式会社安川電機 Transfer robot teaching device and transfer robot teaching method
JP2005005608A (en) * 2003-06-13 2005-01-06 Ebara Corp Teaching apparatus for substrate transfer robot and teaching method
JP4381962B2 (en) * 2004-11-12 2009-12-09 大日本スクリーン製造株式会社 Substrate processing equipment
JP4993614B2 (en) * 2008-02-29 2012-08-08 東京エレクトロン株式会社 Teaching method for conveying means, storage medium, and substrate processing apparatus
JP6111065B2 (en) * 2012-12-28 2017-04-05 川崎重工業株式会社 Automatic teaching system and teaching method
JP6250406B2 (en) * 2014-01-15 2017-12-20 株式会社荏原製作所 Abnormality detection apparatus for substrate processing apparatus and substrate processing apparatus
JP6596375B2 (en) * 2016-03-31 2019-10-23 株式会社荏原製作所 Teaching apparatus and teaching method

Also Published As

Publication number Publication date
KR20190140840A (en) 2019-12-20
CN110600397A (en) 2019-12-20
TW202002143A (en) 2020-01-01
US20190378740A1 (en) 2019-12-12
JP2019216152A (en) 2019-12-19

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