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SG10201700892QA - Ultra-High Purity Storage And Dispensing of Liquid Reagents - Google Patents

Ultra-High Purity Storage And Dispensing of Liquid Reagents

Info

Publication number
SG10201700892QA
SG10201700892QA SG10201700892QA SG10201700892QA SG10201700892QA SG 10201700892Q A SG10201700892Q A SG 10201700892QA SG 10201700892Q A SG10201700892Q A SG 10201700892QA SG 10201700892Q A SG10201700892Q A SG 10201700892QA SG 10201700892Q A SG10201700892Q A SG 10201700892QA
Authority
SG
Singapore
Prior art keywords
dispensing
ultra
high purity
liquid reagents
purity storage
Prior art date
Application number
SG10201700892QA
Inventor
Donn K Naito
Andy Krell
Mitchell W Mcferon
Steven Jackson
Joel Robison
Original Assignee
Entegris Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Entegris Inc filed Critical Entegris Inc
Publication of SG10201700892QA publication Critical patent/SG10201700892QA/en

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005Apparatus not specifically provided for elsewhere
    • H01L21/67011Apparatus for manufacture or treatment
    • H01L21/67017Apparatus for fluid treatment
    • H01L21/67023Apparatus for fluid treatment for general liquid treatment, e.g. etching followed by cleaning
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01JCHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J19/00Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J19/02Apparatus characterised by being constructed of material selected for its chemically-resistant properties
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01JCHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J4/00Feed or outlet devices; Feed or outlet control devices
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65DCONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D25/00Details of other kinds or types of rigid or semi-rigid containers
    • B65D25/14Linings or internal coatings
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65DCONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D25/00Details of other kinds or types of rigid or semi-rigid containers
    • B65D25/38Devices for discharging contents
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65DCONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D43/00Lids or covers for rigid or semi-rigid containers
    • B65D43/02Removable lids or covers
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65DCONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D85/00Containers, packaging elements or packages, specially adapted for particular articles or materials
    • B65D85/70Containers, packaging elements or packages, specially adapted for particular articles or materials for materials not otherwise provided for
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01JCHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/02Apparatus characterised by their chemically-resistant properties
    • B01J2219/0204Apparatus characterised by their chemically-resistant properties comprising coatings on the surfaces in direct contact with the reactive components
    • B01J2219/0245Apparatus characterised by their chemically-resistant properties comprising coatings on the surfaces in direct contact with the reactive components of synthetic organic material

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Organic Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Computer Hardware Design (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Filling Or Discharging Of Gas Storage Vessels (AREA)
  • Details Of Rigid Or Semi-Rigid Containers (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
  • General Engineering & Computer Science (AREA)
  • Chemical Vapour Deposition (AREA)
  • Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
SG10201700892QA 2012-08-09 2013-08-07 Ultra-High Purity Storage And Dispensing of Liquid Reagents SG10201700892QA (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US201261681510P 2012-08-09 2012-08-09

Publications (1)

Publication Number Publication Date
SG10201700892QA true SG10201700892QA (en) 2017-04-27

Family

ID=50068554

Family Applications (2)

Application Number Title Priority Date Filing Date
SG11201501002QA SG11201501002QA (en) 2012-08-09 2013-08-07 Ultra-high purity storage and dispensing of liquid reagents
SG10201700892QA SG10201700892QA (en) 2012-08-09 2013-08-07 Ultra-High Purity Storage And Dispensing of Liquid Reagents

Family Applications Before (1)

Application Number Title Priority Date Filing Date
SG11201501002QA SG11201501002QA (en) 2012-08-09 2013-08-07 Ultra-high purity storage and dispensing of liquid reagents

Country Status (8)

Country Link
US (1) US10358263B2 (en)
EP (1) EP2883238A4 (en)
JP (1) JP6490582B2 (en)
KR (1) KR102082165B1 (en)
CN (1) CN104769701B (en)
SG (2) SG11201501002QA (en)
TW (1) TWI622527B (en)
WO (1) WO2014025937A1 (en)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SG11201501002QA (en) 2012-08-09 2015-04-29 Entegris Inc Ultra-high purity storage and dispensing of liquid reagents
CN109071104B (en) 2016-03-31 2020-03-31 富士胶片株式会社 Processing liquid for semiconductor manufacturing, container containing processing liquid for semiconductor manufacturing, pattern forming method, and manufacturing method of electronic device
CN112198755B (en) * 2020-10-20 2024-05-24 江苏高光半导体材料有限公司 Integrated loading box for storing and using mask
KR102373773B1 (en) * 2021-10-16 2022-03-14 엔비스아나(주) Chemical pressure container
WO2024035914A1 (en) 2022-08-12 2024-02-15 Gelest, Inc. High purity tin compounds containing unsaturated substituent and method for preparation thereof
CN119998302A (en) 2022-10-04 2025-05-13 盖列斯特有限公司 Cyclic aza-stannane and cyclic oxastannane compound and process for producing the same

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0221057A4 (en) 1985-05-17 1989-07-25 Schumacher Co J C DISPOSABLE CONTAINER FOR CHEMICALS.
US5046638A (en) * 1990-03-22 1991-09-10 Fluoroware, Inc. Seamless pressure vessel with recessed indentation
JPH04101838A (en) * 1990-08-22 1992-04-03 Nippon Carbide Ind Co Inc Novel container and material therefor
JP3559062B2 (en) 1993-06-30 2004-08-25 三井・デュポンフロロケミカル株式会社 Tetrafluoroethylene / fluoroalkoxytrifluoroethylene copolymer composition
JPH09318497A (en) 1996-05-30 1997-12-12 Nomura Micro Sci Co Ltd Sample vessel, ultrapure water preparation control system, and analyzing method of ultrapure water
JPH10119973A (en) 1996-10-18 1998-05-12 Mitsubishi Gas Chem Co Inc Chemical container having sampling port
JPH10273193A (en) * 1997-03-31 1998-10-13 Mitsubishi Gas Chem Co Inc Large-sized container for transport of high purity chemical
US5928743A (en) * 1997-07-24 1999-07-27 Purepak Technology Corporation Pressurized gas vessel having internal chemical surface
JP2001341794A (en) * 2000-05-31 2001-12-11 Sumitomo Chem Co Ltd Container for ultra-high purity hydrogen peroxide water
US6581649B2 (en) 2001-07-13 2003-06-24 L'air Liquide - Societe Anonyme A'directiore Et Conseil De Surveillance Pour L'etude Et L'exploitation Des Procedes Georges Claude Methods and apparatus for delivering high purity liquids with low vapor pressure
JP2005236050A (en) * 2004-02-19 2005-09-02 Az Electronic Materials Kk Chemical device supply apparatus and container replacement method for electronic device manufacturing
JP5049342B2 (en) 2006-06-02 2012-10-17 アドバンスド テクノロジー マテリアルズ,インコーポレイテッド Liner and packaging containing the same based on a barrier fluoropolymer film
US8002247B2 (en) * 2008-08-22 2011-08-23 Air Products And Chemicals, Inc. Cross purge valve and container assembly
US8162296B2 (en) * 2009-03-19 2012-04-24 Air Products And Chemicals, Inc. Splashguard for high flow vacuum bubbler vessel
SG11201501002QA (en) 2012-08-09 2015-04-29 Entegris Inc Ultra-high purity storage and dispensing of liquid reagents

Also Published As

Publication number Publication date
KR102082165B1 (en) 2020-02-27
JP6490582B2 (en) 2019-03-27
EP2883238A4 (en) 2016-03-16
TWI622527B (en) 2018-05-01
US10358263B2 (en) 2019-07-23
US20150210430A1 (en) 2015-07-30
WO2014025937A1 (en) 2014-02-13
EP2883238A1 (en) 2015-06-17
SG11201501002QA (en) 2015-04-29
TW201420435A (en) 2014-06-01
CN104769701B (en) 2018-05-29
JP2015534256A (en) 2015-11-26
CN104769701A (en) 2015-07-08
KR20150046097A (en) 2015-04-29

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