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SG10201605375YA - Sample holder and sample holder set - Google Patents

Sample holder and sample holder set

Info

Publication number
SG10201605375YA
SG10201605375YA SG10201605375YA SG10201605375YA SG10201605375YA SG 10201605375Y A SG10201605375Y A SG 10201605375YA SG 10201605375Y A SG10201605375Y A SG 10201605375YA SG 10201605375Y A SG10201605375Y A SG 10201605375YA SG 10201605375Y A SG10201605375Y A SG 10201605375YA
Authority
SG
Singapore
Prior art keywords
sample holder
holder set
sample
holder
Prior art date
Application number
SG10201605375YA
Inventor
Kazunori Ando
Original Assignee
Hitachi High Tech Science Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi High Tech Science Corp filed Critical Hitachi High Tech Science Corp
Publication of SG10201605375YA publication Critical patent/SG10201605375YA/en

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N3/00Investigating strength properties of solid materials by application of mechanical stress
    • G01N3/02Details
    • G01N3/04Chucks
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01QSCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q10/00Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02Details
    • H01J37/20Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01LCHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L3/00Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
    • B01L3/50Containers for the purpose of retaining a material to be analysed, e.g. test tubes
    • B01L3/508Containers for the purpose of retaining a material to be analysed, e.g. test tubes rigid containers not provided for above
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01QSCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q30/00Auxiliary means serving to assist or improve the scanning probe techniques or apparatus, e.g. display or data processing devices
    • G01Q30/20Sample handling devices or methods
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00Microscopes
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00Microscopes
    • G02B21/34Microscope slides, e.g. mounting specimens on microscope slides
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01LCHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2200/00Solutions for specific problems relating to chemical or physical laboratory apparatus
    • B01L2200/02Adapting objects or devices to another
    • B01L2200/025Align devices or objects to ensure defined positions relative to each other
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01LCHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2300/00Additional constructional details
    • B01L2300/06Auxiliary integrated devices, integrated components
    • B01L2300/0609Holders integrated in container to position an object
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01LCHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2300/00Additional constructional details
    • B01L2300/08Geometry, shape and general structure
    • B01L2300/0809Geometry, shape and general structure rectangular shaped
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00Features of devices classified in G01N21/00
    • G01N2201/10Scanning
    • G01N2201/104Mechano-optical scan, i.e. object and beam moving
    • G01N2201/1042X, Y scan, i.e. object moving in X, beam in Y

Landscapes

  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Analytical Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • General Health & Medical Sciences (AREA)
  • Optics & Photonics (AREA)
  • Hematology (AREA)
  • Radiology & Medical Imaging (AREA)
  • Clinical Laboratory Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Biochemistry (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Sampling And Sample Adjustment (AREA)
  • Length Measuring Devices By Optical Means (AREA)
SG10201605375YA 2015-09-01 2016-06-30 Sample holder and sample holder set SG10201605375YA (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2015171867A JP6640497B2 (en) 2015-09-01 2015-09-01 Sample holder and sample holder group

Publications (1)

Publication Number Publication Date
SG10201605375YA true SG10201605375YA (en) 2017-04-27

Family

ID=56567384

Family Applications (1)

Application Number Title Priority Date Filing Date
SG10201605375YA SG10201605375YA (en) 2015-09-01 2016-06-30 Sample holder and sample holder set

Country Status (7)

Country Link
US (1) US9865425B2 (en)
EP (1) EP3139398A1 (en)
JP (1) JP6640497B2 (en)
KR (1) KR20170027268A (en)
CN (1) CN106483336B (en)
SG (1) SG10201605375YA (en)
TW (1) TWI700721B (en)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6782191B2 (en) * 2017-04-27 2020-11-11 株式会社日立製作所 Analytical system
CN109254025B (en) * 2018-11-02 2023-09-22 内蒙古工业大学 Device and method for sticking annular carrier net to transmission electron microscope sample
JP7229806B2 (en) * 2019-02-19 2023-02-28 日本電子株式会社 Observation method
EP3751251A1 (en) 2019-06-11 2020-12-16 Anton Paar GmbH Sample transfer with easy tracking of target area
JP7581536B2 (en) 2021-09-30 2024-11-12 株式会社日立ハイテク Analysis System
WO2025169444A1 (en) * 2024-02-09 2025-08-14 Ntt株式会社 Aligning component

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53114288U (en) * 1977-02-18 1978-09-11
JP3293739B2 (en) * 1996-06-13 2002-06-17 株式会社日立製作所 Scanning electron microscope
JP2003257349A (en) * 2002-02-28 2003-09-12 Hitachi High-Technologies Corp Image adjustment standard sample table for scanning image observation equipment
JP2004363085A (en) * 2003-05-09 2004-12-24 Ebara Corp Inspection apparatus by charged particle beam and method for manufacturing device using inspection apparatus
US7442624B2 (en) * 2004-08-02 2008-10-28 Infineon Technologies Ag Deep alignment marks on edge chips for subsequent alignment of opaque layers
JP5403852B2 (en) * 2005-08-12 2014-01-29 株式会社荏原製作所 Detection device and inspection device
JP2008146990A (en) * 2006-12-08 2008-06-26 Hitachi High-Technologies Corp Specimen fixing base, charged particle beam apparatus including the same, and observation / analysis target location specifying method
KR100902403B1 (en) 2007-09-11 2009-06-11 한국기초과학지원연구원 Three-dimensional observation grid for transmission electron microscope and its manufacturing method
DE102009020663A1 (en) * 2009-05-11 2010-11-25 Carl Zeiss Ag Microscopy of an object with a sequence of optical microscopy and particle beam microscopy
JP5624815B2 (en) 2010-07-02 2014-11-12 株式会社キーエンス Magnification observation apparatus and magnification observation method
DE102010052674A1 (en) * 2010-11-24 2012-05-24 Carl Zeiss Ag Sample carrier with alignment mark
JP5788719B2 (en) * 2011-06-09 2015-10-07 株式会社日立ハイテクノロジーズ Stage device and control method of stage device
JP2013140846A (en) * 2011-12-28 2013-07-18 Canon Inc Drawing device and article manufacturing method

Also Published As

Publication number Publication date
JP6640497B2 (en) 2020-02-05
EP3139398A1 (en) 2017-03-08
TW201711076A (en) 2017-03-16
US9865425B2 (en) 2018-01-09
CN106483336B (en) 2019-08-23
JP2017050120A (en) 2017-03-09
US20170062175A1 (en) 2017-03-02
KR20170027268A (en) 2017-03-09
TWI700721B (en) 2020-08-01
CN106483336A (en) 2017-03-08

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