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SG10201403901SA - Systems And Methods For Measuring High-Intensity Light Beams - Google Patents

Systems And Methods For Measuring High-Intensity Light Beams

Info

Publication number
SG10201403901SA
SG10201403901SA SG10201403901SA SG10201403901SA SG10201403901SA SG 10201403901S A SG10201403901S A SG 10201403901SA SG 10201403901S A SG10201403901S A SG 10201403901SA SG 10201403901S A SG10201403901S A SG 10201403901SA SG 10201403901S A SG10201403901S A SG 10201403901SA
Authority
SG
Singapore
Prior art keywords
systems
methods
light beams
intensity light
measuring high
Prior art date
Application number
SG10201403901SA
Inventor
Anikitchev Sergeui
Gaines David
Original Assignee
Ultratech Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ultratech Inc filed Critical Ultratech Inc
Publication of SG10201403901SA publication Critical patent/SG10201403901SA/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J1/00—Photometry, e.g. photographic exposure meter
    • G01J1/02—Details
    • G01J1/04—Optical or mechanical part supplementary adjustable parts
    • G01J1/0407—Optical elements not provided otherwise, e.g. manifolds, windows, holograms, gratings
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J1/00—Photometry, e.g. photographic exposure meter
    • G01J1/42—Photometry, e.g. photographic exposure meter using electric radiation detectors
    • G01J1/4257—Photometry, e.g. photographic exposure meter using electric radiation detectors applied to monitoring the characteristics of a beam, e.g. laser beam, headlamp beam
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J1/00—Photometry, e.g. photographic exposure meter
    • G01J1/02—Details
    • G01J1/04—Optical or mechanical part supplementary adjustable parts
    • G01J1/0407—Optical elements not provided otherwise, e.g. manifolds, windows, holograms, gratings
    • G01J1/0414—Optical elements not provided otherwise, e.g. manifolds, windows, holograms, gratings using plane or convex mirrors, parallel phase plates, or plane beam-splitters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J1/00—Photometry, e.g. photographic exposure meter
    • G01J1/02—Details
    • G01J1/04—Optical or mechanical part supplementary adjustable parts
    • G01J1/0407—Optical elements not provided otherwise, e.g. manifolds, windows, holograms, gratings
    • G01J1/0477—Prisms, wedges
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/10—Beam splitting or combining systems
    • G02B27/108—Beam splitting or combining systems for sampling a portion of a beam or combining a small beam in a larger one, e.g. wherein the area ratio or power ratio of the divided beams significantly differs from unity, without spectral selectivity
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/04—Prisms
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J1/00—Photometry, e.g. photographic exposure meter
    • G01J1/02—Details
    • G01J1/04—Optical or mechanical part supplementary adjustable parts
    • G01J2001/0481—Preset integrating sphere or cavity
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J1/00—Photometry, e.g. photographic exposure meter
    • G01J1/42—Photometry, e.g. photographic exposure meter using electric radiation detectors
    • G01J1/4257—Photometry, e.g. photographic exposure meter using electric radiation detectors applied to monitoring the characteristics of a beam, e.g. laser beam, headlamp beam
    • G01J2001/4261—Scan through beam in order to obtain a cross-sectional profile of the beam

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Optics & Photonics (AREA)
  • Photometry And Measurement Of Optical Pulse Characteristics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
SG10201403901SA 2013-07-29 2014-07-07 Systems And Methods For Measuring High-Intensity Light Beams SG10201403901SA (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US13/953,423 US8988674B2 (en) 2013-07-29 2013-07-29 Systems and methods for measuring high-intensity light beams

Publications (1)

Publication Number Publication Date
SG10201403901SA true SG10201403901SA (en) 2015-02-27

Family

ID=52390255

Family Applications (1)

Application Number Title Priority Date Filing Date
SG10201403901SA SG10201403901SA (en) 2013-07-29 2014-07-07 Systems And Methods For Measuring High-Intensity Light Beams

Country Status (6)

Country Link
US (1) US8988674B2 (en)
JP (1) JP5774754B2 (en)
KR (1) KR20150014370A (en)
CN (1) CN104501946B (en)
SG (1) SG10201403901SA (en)
TW (1) TWI493159B (en)

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JP6964517B2 (en) * 2015-03-29 2021-11-10 住友化学株式会社 Laminated board measurement method
US10612976B1 (en) * 2015-10-06 2020-04-07 J.A. Woollan Co., Inc. Systems and methods for producing a more uniform intensity wavelength dispersed beam of electromagnetic radiation entering a multi-element detector, while maintaining information content therein
CN107367516B (en) * 2017-07-19 2020-08-04 武汉华星光电半导体显示技术有限公司 Coating detection and repair device and method thereof
US10613426B1 (en) * 2018-06-14 2020-04-07 Dhpc Technologies, Inc. System, method and device for a long range, real size weapon systems plume simulator for testing optical detection devices in the field
US10527920B1 (en) 2018-06-14 2020-01-07 Dhpc Technologies, Inc. System, method and device for a high fidelity electro-optical simulator
US11774323B1 (en) 2021-03-25 2023-10-03 Dhpc Technologies, Inc. System and method for creating a collimated space for a high fidelity simulator

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US4333173A (en) * 1979-06-15 1982-06-01 Hitachi, Ltd. Optical information processor with prismatic correction of laser beam shape
US4342050A (en) 1980-09-29 1982-07-27 Xerox Corporation Beam intensity measurement system for raster scanners
GB2120779B (en) * 1982-03-31 1985-10-09 Komatsu Mfg Co Ltd Quantitative analysis in accordance with cars
US4565426A (en) 1983-05-02 1986-01-21 Cullen Ralph A W Beam splitter
JPS6259820A (en) * 1985-09-11 1987-03-16 Mitsubishi Electric Corp Beam mode profiler
US4711526A (en) 1986-07-07 1987-12-08 Coherent, Inc. Attenuating beam splitter
JPS63100333A (en) * 1986-10-17 1988-05-02 Mitsubishi Electric Corp Laser energy detector
DE3706271A1 (en) 1987-02-26 1988-09-08 Erwin Strigl DEVICE FOR MEASURING THE INTENSITY PROFILE OF A LASER BEAM
US4797555A (en) 1987-05-28 1989-01-10 The United States Of America As Represented By The Secretary Of The Air Force High energy laser target plate
US4828384A (en) 1987-12-03 1989-05-09 Westinghouse Electric Corp. High power laser beam intensity mapping apparatus
JPH01246829A (en) * 1988-03-28 1989-10-02 Tokyo Electron Ltd Beam annealing device
US5100231A (en) 1989-04-27 1992-03-31 Coherent, Inc. Apparatus for measuring the mode quality of a laser beam
US5408553A (en) 1992-08-26 1995-04-18 The United States Of America As Represented By The United States Department Of Energy Optical power splitter for splitting high power light
EP0605055B1 (en) 1992-12-29 1997-08-06 Koninklijke Philips Electronics N.V. Pyrometer including an emissivity meter
JPH07225151A (en) * 1994-02-15 1995-08-22 Nec Eng Ltd Laser output measuring instrument
US5590148A (en) 1994-08-24 1996-12-31 Duke University Birefringent beamsplitter for high power lasers and laser applications
JPH0868690A (en) * 1994-08-30 1996-03-12 Central Res Inst Of Electric Power Ind Optical sensor for measuring light intensity and optical measuring device
JP3526652B2 (en) * 1995-05-11 2004-05-17 倉敷紡績株式会社 Optical measuring method and optical measuring device
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US8619247B1 (en) 2010-04-08 2013-12-31 Haas Laser Technologies, Inc. Laser beam analysis apparatus
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Also Published As

Publication number Publication date
JP2015042972A (en) 2015-03-05
US8988674B2 (en) 2015-03-24
CN104501946B (en) 2018-01-16
US20150029497A1 (en) 2015-01-29
TW201504600A (en) 2015-02-01
JP5774754B2 (en) 2015-09-09
TWI493159B (en) 2015-07-21
KR20150014370A (en) 2015-02-06
CN104501946A (en) 2015-04-08

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