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SE8900460D0 - DEVICE FOR RADIATION AND LENS - Google Patents

DEVICE FOR RADIATION AND LENS

Info

Publication number
SE8900460D0
SE8900460D0 SE8900460A SE8900460A SE8900460D0 SE 8900460 D0 SE8900460 D0 SE 8900460D0 SE 8900460 A SE8900460 A SE 8900460A SE 8900460 A SE8900460 A SE 8900460A SE 8900460 D0 SE8900460 D0 SE 8900460D0
Authority
SE
Sweden
Prior art keywords
lense
magnetic
electron ray
permanent magnets
electron
Prior art date
Application number
SE8900460A
Other languages
Swedish (sv)
Other versions
SE463055B (en
SE8900460L (en
Inventor
B Anderberg
Original Assignee
Scanditronix Ab
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Scanditronix Ab filed Critical Scanditronix Ab
Priority to SE8900460A priority Critical patent/SE463055B/en
Publication of SE8900460D0 publication Critical patent/SE8900460D0/en
Priority to PCT/SE1990/000085 priority patent/WO1990009667A1/en
Publication of SE8900460L publication Critical patent/SE8900460L/en
Publication of SE463055B publication Critical patent/SE463055B/en

Links

Classifications

    • G—PHYSICS
    • G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
    • G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
    • G21K5/00—Irradiation devices
    • G21K5/10—Irradiation devices with provision for relative movement of beam source and object to be irradiated

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • High Energy & Nuclear Physics (AREA)
  • Electron Beam Exposure (AREA)
  • Apparatus For Disinfection Or Sterilisation (AREA)

Abstract

An installation (5') for irradiating objects with an electron stream is proposed according to the invention, wherein the electron ray is caused to scan the object while this is moved forward. In order to make the irradiation more homogeneous and more efficient an extra magnetic lense (21) is located immediately beneath the region to be irradiated. This magnetic lense (21) deflects the electron ray in such a way that the different parts of the electron ray will be essentially parallel or a little convergent after said lense. The magnetic lense used consists of a two elongated permanent magnets located close to each other at a small distance. With an appropriate adjustment of the strength and distance of said magnets a suitable deflecting effect is obtained. In addition the permanent magnets are advantageously constructed of magnet elements having a plate-shape, between which a softmagnetical material is located.
SE8900460A 1989-02-10 1989-02-10 DEVICE FOR IRRATION ARTICLES WITH ELECTRONS AND MAGNETIC LENS FOR DEFENDING RAYS OF CHARGED PARTICLES, SPECIFICALLY ELECTRONS SE463055B (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
SE8900460A SE463055B (en) 1989-02-10 1989-02-10 DEVICE FOR IRRATION ARTICLES WITH ELECTRONS AND MAGNETIC LENS FOR DEFENDING RAYS OF CHARGED PARTICLES, SPECIFICALLY ELECTRONS
PCT/SE1990/000085 WO1990009667A1 (en) 1989-02-10 1990-02-08 An irradiation device and a lense

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
SE8900460A SE463055B (en) 1989-02-10 1989-02-10 DEVICE FOR IRRATION ARTICLES WITH ELECTRONS AND MAGNETIC LENS FOR DEFENDING RAYS OF CHARGED PARTICLES, SPECIFICALLY ELECTRONS

Publications (3)

Publication Number Publication Date
SE8900460D0 true SE8900460D0 (en) 1989-02-10
SE8900460L SE8900460L (en) 1990-08-11
SE463055B SE463055B (en) 1990-10-01

Family

ID=20375006

Family Applications (1)

Application Number Title Priority Date Filing Date
SE8900460A SE463055B (en) 1989-02-10 1989-02-10 DEVICE FOR IRRATION ARTICLES WITH ELECTRONS AND MAGNETIC LENS FOR DEFENDING RAYS OF CHARGED PARTICLES, SPECIFICALLY ELECTRONS

Country Status (2)

Country Link
SE (1) SE463055B (en)
WO (1) WO1990009667A1 (en)

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3845312A (en) * 1972-07-13 1974-10-29 Texas Instruments Inc Particle accelerator producing a uniformly expanded particle beam of uniform cross-sectioned density
US4075488A (en) * 1974-09-06 1978-02-21 Agency Of Industrial Science & Technology Pattern forming apparatus using quadrupole lenses
US4661712A (en) * 1985-05-28 1987-04-28 Varian Associates, Inc. Apparatus for scanning a high current ion beam with a constant angle of incidence
JP2699170B2 (en) * 1986-04-09 1998-01-19 イクリプス・イオン・テクノロジー・インコーポレイテッド Ion beam scanning method and apparatus
US4745281A (en) * 1986-08-25 1988-05-17 Eclipse Ion Technology, Inc. Ion beam fast parallel scanning having dipole magnetic lens with nonuniform field
JPH01500942A (en) * 1986-10-08 1989-03-30 バリアン・アソシエイツ・インコーポレイテッド Method and device for keeping incident angle constant in ion beam device

Also Published As

Publication number Publication date
SE463055B (en) 1990-10-01
WO1990009667A1 (en) 1990-08-23
SE8900460L (en) 1990-08-11

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