SE8002774L - DEVICE FOR PROTECTING ELECTRIC ISOLATORS - Google Patents
DEVICE FOR PROTECTING ELECTRIC ISOLATORSInfo
- Publication number
- SE8002774L SE8002774L SE8002774A SE8002774A SE8002774L SE 8002774 L SE8002774 L SE 8002774L SE 8002774 A SE8002774 A SE 8002774A SE 8002774 A SE8002774 A SE 8002774A SE 8002774 L SE8002774 L SE 8002774L
- Authority
- SE
- Sweden
- Prior art keywords
- elements
- electrically conductive
- functions
- spaced apart
- insulating body
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32018—Glow discharge
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
- H01B17/00—Insulators or insulating bodies characterised by their form
- H01B17/42—Means for obtaining improved distribution of voltage; Protection against arc discharges
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
- H01B17/00—Insulators or insulating bodies characterised by their form
- H01B17/42—Means for obtaining improved distribution of voltage; Protection against arc discharges
- H01B17/46—Means for providing an external arc-discharge path
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32532—Electrodes
- H01J37/32559—Protection means, e.g. coatings
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B7/00—Heating by electric discharge
- H05B7/16—Heating by glow discharge
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Power Engineering (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
- Emergency Protection Circuit Devices (AREA)
- Electron Sources, Ion Sources (AREA)
- Lasers (AREA)
- Insulators (AREA)
Abstract
A device, preferably a module, for use in a glow discharge apparatus, comprises an insulating body 1 which is surrounded by a plurality of elements, one of which elements 3 is electrically conductive and, in use, functions as an anode element, a second of which elements 2 is electrically conductive, is spaced apart from said one element 3 and, in use, functions as a cathode element, and at least a third of which elements 4 is electrically conductive and is disposed intermediate the said one element 3 and the said second element 2. The electrically conductive elements 2, 3, 4 are spaced apart from one another so that their adjacent surface portions define passages 5 communicating with the exterior of the device which passages 5 are of substantially uniform width along their length. The device protects the insulating body 1 from contamination when it is in the vicinity of a glow discharge. <IMAGE>
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB8012334A GB2073999B (en) | 1980-04-15 | 1980-04-15 | Device for use in a glow discharge apparatus |
Publications (2)
Publication Number | Publication Date |
---|---|
SE8002774L true SE8002774L (en) | 1981-10-15 |
SE450179B SE450179B (en) | 1987-06-09 |
Family
ID=10512791
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
SE8002774A SE450179B (en) | 1980-04-15 | 1980-04-14 | DEVICE FOR PROTECTING ELECTRIC ISOLATORS |
Country Status (5)
Country | Link |
---|---|
AT (1) | AT369927B (en) |
CH (1) | CH657224A5 (en) |
FR (1) | FR2481012A1 (en) |
GB (1) | GB2073999B (en) |
SE (1) | SE450179B (en) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0908921A1 (en) * | 1997-10-10 | 1999-04-14 | European Community | Process chamber for plasma enhanced chemical vapour deposition and apparatus employing said process chamber |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR825025A (en) * | 1936-11-07 | 1938-02-22 | Dunlop Sa | Improvements to the wheels of tractors or other vehicles in order to increase their grip |
US2906911A (en) * | 1953-05-28 | 1959-09-29 | Berghaus Elektrophysik Anst | Leading-in insulators for electric glow discharge receptacles |
NL199311A (en) * | 1954-08-05 | |||
FR1268489A (en) * | 1959-05-08 | 1961-08-04 | Berghaus Elektrophysik Anst | Insulating carrier organ |
-
1980
- 1980-04-10 AT AT194380A patent/AT369927B/en not_active IP Right Cessation
- 1980-04-14 SE SE8002774A patent/SE450179B/en not_active IP Right Cessation
- 1980-04-15 GB GB8012334A patent/GB2073999B/en not_active Expired
- 1980-04-17 CH CH299380A patent/CH657224A5/en not_active IP Right Cessation
- 1980-04-18 FR FR8008830A patent/FR2481012A1/en active Granted
Also Published As
Publication number | Publication date |
---|---|
FR2481012A1 (en) | 1981-10-23 |
ATA194380A (en) | 1982-06-15 |
CH657224A5 (en) | 1986-08-15 |
GB2073999A (en) | 1981-10-21 |
FR2481012B1 (en) | 1985-03-15 |
GB2073999B (en) | 1983-09-07 |
AT369927B (en) | 1983-02-10 |
SE450179B (en) | 1987-06-09 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
NUG | Patent has lapsed |
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