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SE8002774L - DEVICE FOR PROTECTING ELECTRIC ISOLATORS - Google Patents

DEVICE FOR PROTECTING ELECTRIC ISOLATORS

Info

Publication number
SE8002774L
SE8002774L SE8002774A SE8002774A SE8002774L SE 8002774 L SE8002774 L SE 8002774L SE 8002774 A SE8002774 A SE 8002774A SE 8002774 A SE8002774 A SE 8002774A SE 8002774 L SE8002774 L SE 8002774L
Authority
SE
Sweden
Prior art keywords
elements
electrically conductive
functions
spaced apart
insulating body
Prior art date
Application number
SE8002774A
Other languages
Swedish (sv)
Other versions
SE450179B (en
Inventor
S A Savov
M S Mintschev
Original Assignee
Vmei Lenin Nis
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Vmei Lenin Nis filed Critical Vmei Lenin Nis
Publication of SE8002774L publication Critical patent/SE8002774L/en
Publication of SE450179B publication Critical patent/SE450179B/en

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32Gas-filled discharge tubes
    • H01J37/32009Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32018Glow discharge
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01BCABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
    • H01B17/00Insulators or insulating bodies characterised by their form
    • H01B17/42Means for obtaining improved distribution of voltage; Protection against arc discharges
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01BCABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
    • H01B17/00Insulators or insulating bodies characterised by their form
    • H01B17/42Means for obtaining improved distribution of voltage; Protection against arc discharges
    • H01B17/46Means for providing an external arc-discharge path
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32Gas-filled discharge tubes
    • H01J37/32431Constructional details of the reactor
    • H01J37/32532Electrodes
    • H01J37/32559Protection means, e.g. coatings
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05BELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B7/00Heating by electric discharge
    • H05B7/16Heating by glow discharge

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Power Engineering (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Emergency Protection Circuit Devices (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Lasers (AREA)
  • Insulators (AREA)

Abstract

A device, preferably a module, for use in a glow discharge apparatus, comprises an insulating body 1 which is surrounded by a plurality of elements, one of which elements 3 is electrically conductive and, in use, functions as an anode element, a second of which elements 2 is electrically conductive, is spaced apart from said one element 3 and, in use, functions as a cathode element, and at least a third of which elements 4 is electrically conductive and is disposed intermediate the said one element 3 and the said second element 2. The electrically conductive elements 2, 3, 4 are spaced apart from one another so that their adjacent surface portions define passages 5 communicating with the exterior of the device which passages 5 are of substantially uniform width along their length. The device protects the insulating body 1 from contamination when it is in the vicinity of a glow discharge. <IMAGE>
SE8002774A 1980-04-15 1980-04-14 DEVICE FOR PROTECTING ELECTRIC ISOLATORS SE450179B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB8012334A GB2073999B (en) 1980-04-15 1980-04-15 Device for use in a glow discharge apparatus

Publications (2)

Publication Number Publication Date
SE8002774L true SE8002774L (en) 1981-10-15
SE450179B SE450179B (en) 1987-06-09

Family

ID=10512791

Family Applications (1)

Application Number Title Priority Date Filing Date
SE8002774A SE450179B (en) 1980-04-15 1980-04-14 DEVICE FOR PROTECTING ELECTRIC ISOLATORS

Country Status (5)

Country Link
AT (1) AT369927B (en)
CH (1) CH657224A5 (en)
FR (1) FR2481012A1 (en)
GB (1) GB2073999B (en)
SE (1) SE450179B (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0908921A1 (en) * 1997-10-10 1999-04-14 European Community Process chamber for plasma enhanced chemical vapour deposition and apparatus employing said process chamber

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR825025A (en) * 1936-11-07 1938-02-22 Dunlop Sa Improvements to the wheels of tractors or other vehicles in order to increase their grip
US2906911A (en) * 1953-05-28 1959-09-29 Berghaus Elektrophysik Anst Leading-in insulators for electric glow discharge receptacles
NL199311A (en) * 1954-08-05
FR1268489A (en) * 1959-05-08 1961-08-04 Berghaus Elektrophysik Anst Insulating carrier organ

Also Published As

Publication number Publication date
FR2481012A1 (en) 1981-10-23
ATA194380A (en) 1982-06-15
CH657224A5 (en) 1986-08-15
GB2073999A (en) 1981-10-21
FR2481012B1 (en) 1985-03-15
GB2073999B (en) 1983-09-07
AT369927B (en) 1983-02-10
SE450179B (en) 1987-06-09

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