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SE0600631L - Apparatus and method of continuous coating in continuous deposition line - Google Patents

Apparatus and method of continuous coating in continuous deposition line

Info

Publication number
SE0600631L
SE0600631L SE0600631A SE0600631A SE0600631L SE 0600631 L SE0600631 L SE 0600631L SE 0600631 A SE0600631 A SE 0600631A SE 0600631 A SE0600631 A SE 0600631A SE 0600631 L SE0600631 L SE 0600631L
Authority
SE
Sweden
Prior art keywords
deposition
target
zone
continuous
normal
Prior art date
Application number
SE0600631A
Other languages
Swedish (sv)
Other versions
SE529426C2 (en
Inventor
Mikael Schuisky
Original Assignee
Sandvik Intellectual Property
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sandvik Intellectual Property filed Critical Sandvik Intellectual Property
Priority to SE0600631A priority Critical patent/SE529426C2/en
Priority to JP2009501384A priority patent/JP2009530500A/en
Priority to EP07716098A priority patent/EP1999293A4/en
Priority to CN2007800102183A priority patent/CN101405432B/en
Priority to PCT/SE2007/050124 priority patent/WO2007108757A1/en
Priority to CA002645924A priority patent/CA2645924A1/en
Priority to KR1020087023078A priority patent/KR20080102224A/en
Publication of SE0600631L publication Critical patent/SE0600631L/en
Publication of SE529426C2 publication Critical patent/SE529426C2/en

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/02—Pretreatment of the material to be coated
    • C23C14/021—Cleaning or etching treatments
    • C23C14/022—Cleaning or etching treatments by means of bombardment with energetic particles or radiation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/225—Oblique incidence of vaporised material on substrate
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
    • C23C14/325—Electric arc evaporation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/562—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

A continuous roll-to-roll deposition coating apparatus and a method to continuous coat an edge of a strip substrate are disclosed. The invention is aimed at accomplishing a hard and abrasion resistant coated metal strip with improved adhesion between a dense coating and the substrate.The deposition coating apparatus, comprises: a vacuum process chamber (114) including an etching zone (116) upstream of a deposition zone (118);at least one ion assisted etcher(120) in the etching zone; and at least one deposition apparatus (122) in the deposition zone,wherein the at least one deposition apparatus includes at least one target (124), wherein the strip substrate, in travelling through the vacuum process chamber, projects a first edge region (140) toward the at least one ion assisted etcher in the etching zone and projects the first edge region toward the target of the at least one deposition apparatus in the deposition zone, wherein the first edge region of the strip substrate includes at least a first angled surface (142) tapered from a first proximal position (144) toward a first distal position, the first proximal position closer to a centre region of the strip substrate than the first distal position, the first angled surface having a first surface normal (150), and wherein the target of the at least one deposition apparatus includes a target surface (126) having a target normal(128) and is angled with respect to the first angled surface so that the target normal intersects the first surface normal at an angle a, where a is greater than or equal to 90 degrees.
SE0600631A 2006-03-21 2006-03-21 Apparatus and method of continuous coating in continuous deposition line SE529426C2 (en)

Priority Applications (7)

Application Number Priority Date Filing Date Title
SE0600631A SE529426C2 (en) 2006-03-21 2006-03-21 Apparatus and method of continuous coating in continuous deposition line
JP2009501384A JP2009530500A (en) 2006-03-21 2007-03-02 Edge coating in continuous deposition line
EP07716098A EP1999293A4 (en) 2006-03-21 2007-03-02 Edge coating in continuous deposition line
CN2007800102183A CN101405432B (en) 2006-03-21 2007-03-02 Edge coating in continuous deposition line
PCT/SE2007/050124 WO2007108757A1 (en) 2006-03-21 2007-03-02 Edge coating in continuous deposition line
CA002645924A CA2645924A1 (en) 2006-03-21 2007-03-02 Edge coating in continuous deposition line
KR1020087023078A KR20080102224A (en) 2006-03-21 2007-03-02 Blade coating in continuous lamination line

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
SE0600631A SE529426C2 (en) 2006-03-21 2006-03-21 Apparatus and method of continuous coating in continuous deposition line

Publications (2)

Publication Number Publication Date
SE0600631L true SE0600631L (en) 2007-08-07
SE529426C2 SE529426C2 (en) 2007-08-07

Family

ID=38323926

Family Applications (1)

Application Number Title Priority Date Filing Date
SE0600631A SE529426C2 (en) 2006-03-21 2006-03-21 Apparatus and method of continuous coating in continuous deposition line

Country Status (7)

Country Link
EP (1) EP1999293A4 (en)
JP (1) JP2009530500A (en)
KR (1) KR20080102224A (en)
CN (1) CN101405432B (en)
CA (1) CA2645924A1 (en)
SE (1) SE529426C2 (en)
WO (1) WO2007108757A1 (en)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SE531749C2 (en) * 2007-09-17 2009-07-28 Seco Tools Ab Method of precipitating durable layers on cemented carbide with arc evaporation and cathode with Ti3SiC2 as the main component
JP5616265B2 (en) 2011-03-25 2014-10-29 Hoya株式会社 Thin film deposition method, mask blank manufacturing method, and transfer mask manufacturing method
SE536952C2 (en) * 2012-06-25 2014-11-11 Impact Coatings Ab Continuous roll-to-roll device
KR102244623B1 (en) * 2014-04-03 2021-04-23 어플라이드 머티어리얼스, 인코포레이티드 Sputtering arrangement for sputtering a material on a substrate surface
EP3031982B1 (en) * 2014-12-10 2017-03-29 voestalpine Precision Strip AB A long life cermet coated crêping blade
CN107923125B (en) * 2015-07-02 2020-09-11 福伊特专利有限公司 Component of a machine for producing and/or treating a fibrous web and method for producing a coating of a component
CN105870319B (en) * 2016-04-26 2019-03-05 贝骨新材料科技（上海）有限公司 A kind of roll-to-roll manufacturing method of strip piezoelectric film sensor
JP7382809B2 (en) * 2019-12-02 2023-11-17 キヤノントッキ株式会社 Film-forming method and film-forming equipment
CN111235539B (en) * 2020-03-10 2021-04-20 摩科斯新材料科技(苏州)有限公司 Method and device for depositing thin film on inner wall of small hole
CN111424248A (en) * 2020-05-13 2020-07-17 沈阳理工大学 Preparation method of high-temperature oxidation-resistant SiC/ZrC coating on surface of carbon/carbon composite material
KR20210149266A (en) * 2020-06-01 2021-12-09 삼성디스플레이 주식회사 Substrate fixing device, deposition processing equipment including same, and deposition processing method using same
CN113808935B (en) * 2020-06-16 2023-12-15 中微半导体设备(上海)股份有限公司 Corrosion-resistant coating forming method and device, plasma component and reaction device
CN112044706A (en) * 2020-08-05 2020-12-08 王华彬 Coating technology of coating scraper coating
CN114250436B (en) * 2020-09-25 2024-03-29 中微半导体设备(上海)股份有限公司 Corrosion-resistant coating preparation method, semiconductor part and plasma reaction device
CN112962078B (en) * 2021-02-01 2023-07-18 肇庆宏旺金属实业有限公司 Coating production line and coating process
CN118028745B (en) * 2023-07-27 2025-02-25 上海超导科技股份有限公司 Belt conveyor system for ion beam assisted deposition coating device

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56111804A (en) * 1980-02-09 1981-09-03 Dainippon Printing Co Ltd Manufacture of body differing in optical property according to direction
JP3679113B2 (en) * 1992-12-23 2005-08-03 ウンアクシス バルツェルス アクチェンゲゼルシャフト Layer deposition method and apparatus
CN1064294C (en) * 1994-04-25 2001-04-11 吉莱特公司 Amorphous diamond coating of blades
JPH10330930A (en) * 1997-05-28 1998-12-15 Victor Co Of Japan Ltd Sputtering device and production of magnetic head using the same
JP4641596B2 (en) * 2000-07-26 2011-03-02 株式会社アルバック Sputtering film forming apparatus and film forming method on three-dimensional substrate
SE519466C2 (en) * 2000-12-07 2003-03-04 Swedev Ab Schaber or razor blade with nickel coating including abrasion-resistant particles and method of manufacture
DE10147708C5 (en) * 2001-09-27 2005-03-24 Von Ardenne Anlagentechnik Gmbh target arrangement
SE527180C2 (en) * 2003-08-12 2006-01-17 Sandvik Intellectual Property Rack or scraper blades with abrasion resistant layer and method of manufacture thereof
SE527386C2 (en) * 2003-12-23 2006-02-21 Sandvik Intellectual Property Coated stainless steel strip product with decorative appearance
EP1815040B1 (en) * 2004-09-08 2016-01-06 BIC Violex S.A. Method for deposition of a layer on a razor blade edge and razor blade

Also Published As

Publication number Publication date
EP1999293A4 (en) 2010-07-21
CN101405432A (en) 2009-04-08
KR20080102224A (en) 2008-11-24
SE529426C2 (en) 2007-08-07
EP1999293A1 (en) 2008-12-10
WO2007108757A1 (en) 2007-09-27
CA2645924A1 (en) 2007-09-27
CN101405432B (en) 2011-04-13
JP2009530500A (en) 2009-08-27

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