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SE0302056D0 - Method of rational large volume CVD production - Google Patents

Method of rational large volume CVD production

Info

Publication number
SE0302056D0
SE0302056D0 SE0302056A SE0302056A SE0302056D0 SE 0302056 D0 SE0302056 D0 SE 0302056D0 SE 0302056 A SE0302056 A SE 0302056A SE 0302056 A SE0302056 A SE 0302056A SE 0302056 D0 SE0302056 D0 SE 0302056D0
Authority
SE
Sweden
Prior art keywords
large volume
cvd production
rational
rational large
volume cvd
Prior art date
Application number
SE0302056A
Other languages
English (en)
Other versions
SE0302056L (sv
SE527351C2 (sv
Inventor
Lena Pettersson
Johnny Bergstedt
Edvard Laitila
Bo Danielsen
Bjoern Lifvergren
Original Assignee
Seco Tools Ab
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seco Tools Ab filed Critical Seco Tools Ab
Priority to SE0302056A priority Critical patent/SE527351C2/sv
Publication of SE0302056D0 publication Critical patent/SE0302056D0/sv
Priority to AT04445074T priority patent/ATE317920T1/de
Priority to EP20040445074 priority patent/EP1496137B1/en
Priority to DE200460000402 priority patent/DE602004000402T2/de
Priority to US10/880,447 priority patent/US20050032444A1/en
Publication of SE0302056L publication Critical patent/SE0302056L/sv
Publication of SE527351C2 publication Critical patent/SE527351C2/sv
Priority to US11/633,476 priority patent/US7740909B2/en

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/458—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for supporting substrates in the reaction chamber
    • C23C16/4581—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for supporting substrates in the reaction chamber characterised by material of construction or surface finish of the means for supporting the substrate
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C24/00—Coating starting from inorganic powder
    • C23C24/02—Coating starting from inorganic powder by application of pressure only
    • C23C24/04—Impact or kinetic deposition of particles
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C4/00—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge
    • C23C4/02—Pretreatment of the material to be coated, e.g. for coating on selected surface areas
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C4/00—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge
    • C23C4/04—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge characterised by the coating material
    • C23C4/06—Metallic material
    • C23C4/08—Metallic material containing only metal elements
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T442/00—Fabric [woven, knitted, or nonwoven textile or cloth, etc.]
    • Y10T442/10—Scrim [e.g., open net or mesh, gauze, loose or open weave or knit, etc.]
    • Y10T442/102—Woven scrim
    • Y10T442/109—Metal or metal-coated fiber-containing scrim
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T442/00—Fabric [woven, knitted, or nonwoven textile or cloth, etc.]
    • Y10T442/10—Scrim [e.g., open net or mesh, gauze, loose or open weave or knit, etc.]
    • Y10T442/102—Woven scrim
    • Y10T442/109—Metal or metal-coated fiber-containing scrim
    • Y10T442/11—Including an additional free metal or alloy constituent
    • Y10T442/112—Particulate free metal or alloy constituent
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T442/00—Fabric [woven, knitted, or nonwoven textile or cloth, etc.]
    • Y10T442/10—Scrim [e.g., open net or mesh, gauze, loose or open weave or knit, etc.]
    • Y10T442/102—Woven scrim
    • Y10T442/109—Metal or metal-coated fiber-containing scrim
    • Y10T442/121—Including a nonwoven fabric which is not a scrim
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T442/00—Fabric [woven, knitted, or nonwoven textile or cloth, etc.]
    • Y10T442/10—Scrim [e.g., open net or mesh, gauze, loose or open weave or knit, etc.]
    • Y10T442/102—Woven scrim
    • Y10T442/109—Metal or metal-coated fiber-containing scrim
    • Y10T442/131—Including a coating or impregnation of synthetic polymeric material
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T442/00—Fabric [woven, knitted, or nonwoven textile or cloth, etc.]
    • Y10T442/10—Scrim [e.g., open net or mesh, gauze, loose or open weave or knit, etc.]
    • Y10T442/102—Woven scrim
    • Y10T442/133—Inorganic fiber-containing scrim
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T442/00—Fabric [woven, knitted, or nonwoven textile or cloth, etc.]
    • Y10T442/10—Scrim [e.g., open net or mesh, gauze, loose or open weave or knit, etc.]
    • Y10T442/102—Woven scrim
    • Y10T442/172—Coated or impregnated

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Vapour Deposition (AREA)
  • Cutting Tools, Boring Holders, And Turrets (AREA)
SE0302056A 2003-07-10 2003-07-10 Metod att belägga skär SE527351C2 (sv)

Priority Applications (6)

Application Number Priority Date Filing Date Title
SE0302056A SE527351C2 (sv) 2003-07-10 2003-07-10 Metod att belägga skär
AT04445074T ATE317920T1 (de) 2003-07-10 2004-06-28 Verfahren zur rationalen, grossvolumigen chemischen dampfphasenbeschichtung
EP20040445074 EP1496137B1 (en) 2003-07-10 2004-06-28 Method of rational large volume CVD production
DE200460000402 DE602004000402T2 (de) 2003-07-10 2004-06-28 Verfahren zur rationalen, grossvolumigen chemischen Dampfphasenbeschichtung
US10/880,447 US20050032444A1 (en) 2003-07-10 2004-07-01 Method of rational large volume CVD production
US11/633,476 US7740909B2 (en) 2003-07-10 2006-12-05 Method of rational large volume CVD production

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
SE0302056A SE527351C2 (sv) 2003-07-10 2003-07-10 Metod att belägga skär

Publications (3)

Publication Number Publication Date
SE0302056D0 true SE0302056D0 (sv) 2003-07-10
SE0302056L SE0302056L (sv) 2005-01-25
SE527351C2 SE527351C2 (sv) 2006-02-14

Family

ID=27764978

Family Applications (1)

Application Number Title Priority Date Filing Date
SE0302056A SE527351C2 (sv) 2003-07-10 2003-07-10 Metod att belägga skär

Country Status (5)

Country Link
US (2) US20050032444A1 (sv)
EP (1) EP1496137B1 (sv)
AT (1) ATE317920T1 (sv)
DE (1) DE602004000402T2 (sv)
SE (1) SE527351C2 (sv)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7874770B2 (en) † 2005-03-30 2011-01-25 Sumitomo Electric Hardmetal Corp. Indexable insert
WO2007103578A1 (en) * 2006-03-09 2007-09-13 Cabot Microelectronics Corporation Method of polishing a tungsten carbide surface

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4619866A (en) * 1980-07-28 1986-10-28 Santrade Limited Method of making a coated cemented carbide body and resulting body
DE3902532C1 (sv) 1989-01-28 1989-11-23 Krupp Widia Gmbh, 4300 Essen, De
DE3931713C1 (sv) * 1989-09-22 1991-03-14 Balzers Ag, Balzers, Li
SE9101953D0 (sv) * 1991-06-25 1991-06-25 Sandvik Ab A1203 coated sintered body
JP2519632B2 (ja) * 1992-06-26 1996-07-31 東京タングステン株式会社 モリブデン又はモリブデン基合金網及びその製造方法
JP3563789B2 (ja) * 1993-12-22 2004-09-08 キヤノン株式会社 電子写真感光体の製造方法及び該製造方法に用いられる治具
SE509984C2 (sv) * 1994-03-18 1999-03-29 Sandvik Ab Chargeringssystem för CVD
US20020041928A1 (en) * 1997-03-26 2002-04-11 Leonid V. Budaragin Method for coating substrate with metal oxide coating
US6544599B1 (en) * 1996-07-31 2003-04-08 Univ Arkansas Process and apparatus for applying charged particles to a substrate, process for forming a layer on a substrate, products made therefrom
US6494937B1 (en) * 2001-09-27 2002-12-17 Idatech, Llc Hydrogen purification devices, components and fuel processing systems containing the same
JP4236292B2 (ja) * 1997-03-06 2009-03-11 日本碍子株式会社 ウエハー吸着装置およびその製造方法
US6231969B1 (en) * 1997-08-11 2001-05-15 Drexel University Corrosion, oxidation and/or wear-resistant coatings
EP1323847A3 (en) * 2001-12-28 2005-09-14 Seco Tools Ab Coated cemented carbide body and method for use
CN1898412A (zh) * 2003-12-22 2007-01-17 山高刀具公司 用于涂覆切削刀具的载体和方法

Also Published As

Publication number Publication date
DE602004000402D1 (de) 2006-04-20
US20070111618A1 (en) 2007-05-17
SE0302056L (sv) 2005-01-25
EP1496137A1 (en) 2005-01-12
US20050032444A1 (en) 2005-02-10
US7740909B2 (en) 2010-06-22
SE527351C2 (sv) 2006-02-14
EP1496137B1 (en) 2006-02-15
ATE317920T1 (de) 2006-03-15
DE602004000402T2 (de) 2006-11-09

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