RU92004436A - Способ пассивации внутренней поверхности осаждением керамического покрытия на устройство, подвергаемое закоксовыванию, устройство, обработанное таким образом, и способ применения устройства - Google Patents
Способ пассивации внутренней поверхности осаждением керамического покрытия на устройство, подвергаемое закоксовыванию, устройство, обработанное таким образом, и способ применения устройстваInfo
- Publication number
- RU92004436A RU92004436A RU92004436/26A RU92004436A RU92004436A RU 92004436 A RU92004436 A RU 92004436A RU 92004436/26 A RU92004436/26 A RU 92004436/26A RU 92004436 A RU92004436 A RU 92004436A RU 92004436 A RU92004436 A RU 92004436A
- Authority
- RU
- Russia
- Prior art keywords
- coating
- passivation
- deposition
- subject
- way
- Prior art date
Links
- 238000005524 ceramic coating Methods 0.000 title 1
- 239000011248 coating agent Substances 0.000 title 1
- 238000000576 coating method Methods 0.000 title 1
- 238000002161 passivation Methods 0.000 title 1
- 230000015572 biosynthetic process Effects 0.000 claims 2
- 238000005755 formation reaction Methods 0.000 claims 2
- 229910010293 ceramic material Inorganic materials 0.000 claims 1
- 239000000571 coke Substances 0.000 claims 1
- 239000007789 gas Substances 0.000 claims 1
- 150000002430 hydrocarbons Chemical class 0.000 claims 1
- -1 organometallic silicon compound Chemical class 0.000 claims 1
- 229910052574 oxide ceramic Inorganic materials 0.000 claims 1
- 239000011224 oxide ceramic Substances 0.000 claims 1
- 239000001301 oxygen Substances 0.000 claims 1
- MYMOFIZGZYHOMD-UHFFFAOYSA-N oxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 claims 1
- 229910052760 oxygen Inorganic materials 0.000 claims 1
- 238000000197 pyrolysis Methods 0.000 claims 1
- 238000005979 thermal decomposition reaction Methods 0.000 claims 1
Claims (1)
- Для уменьшения скорости коксообразования во время промышленного пиролиза углеводородов внутреннюю поверхность труб реактора покрывают тонким слоем керамического материала, который осаждают посредством термического разложения металлоорганического соединения кремния, не содержащего кислород, в паровой фазе, в инертной или восстановительной газовой атмосфере для уменьшения образования окисной керамики.
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US07/783264 | 1991-10-28 | ||
US07/783.264 | 1991-10-28 | ||
US07/783,264 US5208069A (en) | 1991-10-28 | 1991-10-28 | Method for passivating the inner surface by deposition of a ceramic coating of an apparatus subject to coking, apparatus prepared thereby, and method of utilizing apparatus prepared thereby |
Publications (2)
Publication Number | Publication Date |
---|---|
RU92004436A true RU92004436A (ru) | 1996-07-10 |
RU2079569C1 RU2079569C1 (ru) | 1997-05-20 |
Family
ID=25128685
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
RU9292004436A RU2079569C1 (ru) | 1991-10-28 | 1992-10-27 | Способ пассивации внутренней поверхности реактора, подвергаемого закоксовыванию, и реактор |
Country Status (8)
Country | Link |
---|---|
US (1) | US5208069A (ru) |
EP (1) | EP0540084B1 (ru) |
AT (1) | ATE142125T1 (ru) |
DE (1) | DE69213387T2 (ru) |
DK (1) | DK0540084T3 (ru) |
ES (1) | ES2092016T3 (ru) |
GR (1) | GR3021324T3 (ru) |
RU (1) | RU2079569C1 (ru) |
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US6074713A (en) * | 1995-04-24 | 2000-06-13 | Corning Incorporated | Preventing carbon deposits on metal |
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TW362118B (en) * | 1995-10-30 | 1999-06-21 | Dow Corning | Method for depositing amorphous SiNC coatings |
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US6660656B2 (en) | 1998-02-11 | 2003-12-09 | Applied Materials Inc. | Plasma processes for depositing low dielectric constant films |
US6303523B2 (en) | 1998-02-11 | 2001-10-16 | Applied Materials, Inc. | Plasma processes for depositing low dielectric constant films |
US6287990B1 (en) | 1998-02-11 | 2001-09-11 | Applied Materials, Inc. | CVD plasma assisted low dielectric constant films |
US6054379A (en) | 1998-02-11 | 2000-04-25 | Applied Materials, Inc. | Method of depositing a low k dielectric with organo silane |
US6667553B2 (en) | 1998-05-29 | 2003-12-23 | Dow Corning Corporation | H:SiOC coated substrates |
US6159871A (en) | 1998-05-29 | 2000-12-12 | Dow Corning Corporation | Method for producing hydrogenated silicon oxycarbide films having low dielectric constant |
US6316052B1 (en) | 1998-08-19 | 2001-11-13 | Anelva Corporation | Method for the surface treatment of vacuum materials and surface treated vacuum |
FR2784396B1 (fr) * | 1998-10-09 | 2000-11-10 | Commissariat Energie Atomique | Revetements anti-cokage d'alliages refractaires utilises dans le domaine petrolier |
US6358618B1 (en) | 1999-09-22 | 2002-03-19 | Corning Incorporated | Protective coating on metal |
FR2798939B1 (fr) | 1999-09-24 | 2001-11-09 | Atofina | Reduction du cokage dans les reacteurs de craquage |
KR100619351B1 (ko) * | 2000-07-26 | 2006-09-06 | 에스케이 주식회사 | 탄화수소 열분해 반응기 튜브 내벽에 코크 저감을 위한 코팅방법 |
US6461415B1 (en) * | 2000-08-23 | 2002-10-08 | Applied Thin Films, Inc. | High temperature amorphous composition based on aluminum phosphate |
US6709721B2 (en) | 2001-03-28 | 2004-03-23 | Applied Materials Inc. | Purge heater design and process development for the improvement of low k film properties |
US7678465B2 (en) | 2002-07-24 | 2010-03-16 | Applied Thin Films, Inc. | Aluminum phosphate compounds, compositions, materials and related metal coatings |
CA2497468C (en) * | 2002-08-14 | 2011-10-11 | Applied Thin Films, Inc. | Aluminum phosphate compounds, compositions, materials and related composites. |
US7311944B2 (en) * | 2002-12-23 | 2007-12-25 | Applied Thin Films, Inc. | Aluminum phosphate coatings |
US8017182B2 (en) * | 2007-06-21 | 2011-09-13 | Asm International N.V. | Method for depositing thin films by mixed pulsed CVD and ALD |
US7638170B2 (en) * | 2007-06-21 | 2009-12-29 | Asm International N.V. | Low resistivity metal carbonitride thin film deposition by atomic layer deposition |
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US8163170B2 (en) * | 2008-12-02 | 2012-04-24 | Lummus Technology Inc. | Coil for pyrolysis heater and method of cracking |
RU2558812C1 (ru) * | 2014-04-17 | 2015-08-10 | Федеральное Государственное Автономное Образовательное Учреждение Высшего Профессионального Образования "Сибирский Федеральный Университет" | Способ получения покрытия из карбида кремния на кварцевом изделии |
RU2606690C2 (ru) * | 2015-07-13 | 2017-01-10 | Закрытое акционерное общество Научно-инженерный центр "ИНКОМСИСТЕМ" | Способ получения покрытия из аморфного кремния на внутренней поверхности металлического субстрата |
US10876206B2 (en) | 2015-09-01 | 2020-12-29 | Silcotek Corp. | Thermal chemical vapor deposition coating |
US10087521B2 (en) | 2015-12-15 | 2018-10-02 | Silcotek Corp. | Silicon-nitride-containing thermal chemical vapor deposition coating |
DE202017002044U1 (de) | 2017-04-18 | 2017-05-09 | Closed Joint Stock Company Research-Engineering Center "INCOMSYSTEM" | Vorrichtung zur Passivierung der Oberfläche von Langrohren bei der induktiven Erwärmung |
US11161324B2 (en) | 2017-09-13 | 2021-11-02 | Silcotek Corp. | Corrosion-resistant coated article and thermal chemical vapor deposition coating process |
EP3856949A1 (en) * | 2018-09-28 | 2021-08-04 | Corning Incorporated | Methods for sub-austenite transformation temperture deposition of inorganic particles and articles produced by the same |
WO2020252306A1 (en) | 2019-06-14 | 2020-12-17 | Silcotek Corp. | Nano-wire growth |
EP4100493A1 (en) * | 2020-02-06 | 2022-12-14 | SABIC Global Technologies B.V. | Systems and methods for steam cracking hydrocarbons |
CN114150293A (zh) * | 2021-11-25 | 2022-03-08 | 四川大学 | 一种TiN与二氧化硅双层涂层的沉积方法及装置 |
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-
1991
- 1991-10-28 US US07/783,264 patent/US5208069A/en not_active Expired - Lifetime
-
1992
- 1992-10-17 ES ES92203187T patent/ES2092016T3/es not_active Expired - Lifetime
- 1992-10-17 EP EP92203187A patent/EP0540084B1/en not_active Expired - Lifetime
- 1992-10-17 DK DK92203187.7T patent/DK0540084T3/da active
- 1992-10-17 DE DE69213387T patent/DE69213387T2/de not_active Expired - Fee Related
- 1992-10-17 AT AT92203187T patent/ATE142125T1/de not_active IP Right Cessation
- 1992-10-27 RU RU9292004436A patent/RU2079569C1/ru not_active IP Right Cessation
-
1996
- 1996-10-10 GR GR960402687T patent/GR3021324T3/el unknown
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