RU2648901C2 - Method of active control of product dimensions in the process of its grinding - Google Patents

Abstract

FIELD: instrument engineering.

SUBSTANCE: invention relates to instrument engineering and is intended for automatic control of dimensions, surface roughness and product temperature. Tip is made of an optically transparent high-strength material and allows to realize contact and non-contact measurements. In contact measurements, fixed values of the tip displacement into depressions between projections are preset and measurements of the product dimensions, the roughness and the angle of inclination of the surfaces of the protrusions, temperatures of the protrusions and the tip are made, synchronizing on the movement of the depressions and protrusions of the product. In non-contact measurements, similar measurements are made with a gap between the tip and the product. Electrically controlled friction screw mechanism and a reducer are introduced into the device drive. In the first it is used a screw gear with a special thread for progressive active movements of the tip and returnable passive with the possibility of its frictional sliding. Electric signal is controlled by the screw mounting in the screw gear, which determines the frictional sliding parameters of a measuring rod. Reducer allows to control the electric signal by changing the speed of the tip to ensure a large range of its speeds as approaching the product and different stages of processing its processing.

EFFECT: technical result is the increased accuracy of measurements.

1 cl, 11 dwg

Description

The invention relates to machine, machine tool and instrument engineering and is intended to automatically control the size, surface roughness and temperature of products, primarily with a discontinuous surface (spools, plungers, gears, spline and smooth rollers, drills, mills, countersinks, reamers, taps, gauges, end-length measures, broaches, etc.) during grinding operations on round-, flat- and other types of grinding machines.

Modern contact active control devices (PAC) in the process of processing a product with an intermittent surface should include for the tip: a displacement sensor and a controlled friction drive.

Tip displacement sensors were previously massively created on the basis of inductive transducers with an accuracy of 1-5 μm, and now they are increasingly using more accurate optical sensors, including raster sensors.

The controlled friction drives must provide bi-directional controlled active movement of the tip and the possibility of frictional slippage in the form of a reverse, passive movement when it is pushed by the protrusions of the moving part.

Studies have shown that for guaranteed mechanical contact of the product and the tip, the speed of movement of the latter v _n should be (10 ... 15)% higher than the removal rate v _{from the} allowance from the product, i.e. v _n = (1.10 ... 1.15) сv _s (Leun V.I. “Improving the efficiency of manufacturing technology and the accuracy of measuring the linear dimensions of precision parts of instruments, machines and tool products by means of automatic control.” Doctoral dissertation. S Petersburg, 1994). When designing the PAC, the values of v _s are taken into account for different stages of processing: for rough grinding - v _black = 200 ... 500 μm / s; for fine grinding - v _net = 10 ... 50 microns / s; for nursing, _vout = 0.5 ... 2.0 μm / s.

Thus, for controlled friction drives in PAKs, created, as a rule, on the basis of hydraulic, piezo, and electric drives, it is necessary to control the speed of the tip v _n over a wide range with the ratio of the speeds for the stages of rough grinding and nursing - v _black / v _out = 1000. And taking into account the need for a quick approach to the part with a speed of at least ~ 5 mm / s before starting measurements, this ratio will be even higher.

One-contact PAKs are more visual, therefore this option will be presented for a better demonstration of the proposed one.

A known method of active control of the linear dimensions of products with discontinuous surfaces (analogous method), implemented on the basis of a device for linear measurements (USSR AS No. 13218157, IPC B23Q 15/00, published in Bulletin No. 4, 02/10/2008), use a movable measuring rod with a tip fixed on it, fix the measuring rod from its rotations around its axis, use a controlled speed controller based on a piezoelectric actuator connected through a friction coupling with the measuring rod, through this piezoelectric actuator control the direction The linear velocity and linear speed of the tip, set the tip speed in the direction normal to the rotating (or moving) surface of the product, consisting of protrusions and troughs, provide mechanical contact between the product and the tip, using a fixed magnetic circuit with inductors and a movable core installed on the measuring rod, the current coordinate of the tip is converted into an electrical signal, by the value of which the linear size of the product is judged, linear th size of the product.

The disadvantages of the data of the analogue method are:

1) limitation of measurement accuracy

- interference and interference from the high-frequency high-voltage control signal of the piezoelectric drive,

- due to temperature errors of the tip and product,

- due to the dependence on the width of the depressions between the protrusions of the depth of penetration of the tip in them at a constant speed of its movements for products with an irregular discontinuous surface,

2) restriction of functionality due to the impossibility of:

- measuring the roughness R _a and the inclination angle α of the surfaces of the protrusions,

- conducting contactless measurements,

- synchronization of measurements from the movement of the protrusions of the product,

- control of frictional slippage of the tip.

3) a complex scheme of both a controlled speed controller during its assembly, adjustment and adjustment, as well as a high-voltage control circuit (control signal voltage ~ 1000-2000 V) of the piezo drive.

A known method of active control of the linear dimensions of products (analogue method), implemented on the basis of a device for active control of the linear dimensions of products (patent RU 2316420, IPC VB 49/00, 02/10/2008), which consists in the use of a trihedral movable measuring rod with a through hole with a movable core fixed on it, and a tip at its end, due to the use of three faces of the measuring rod, they are fixed from its rotation around its axis, using a controlled speed controller based on electronic the magnetic actuator connected through a friction connection with the measuring rod, by means of an electromagnetic actuator control the direction and speed of the linear movement of the tip, set the speed of the tip in the direction normal to the moving surface of the product, consisting of protrusions and depressions, provide mechanical contact between the product and the tip , using a movable core and a magnetic circuit with coils, convert the current coordinate of the tip into electronic If a linear signal is used to judge the linear size of the product, the linear size of the product is indicated.

The disadvantages of this analogue method are:

1) limitation of measurement accuracy

- due to temperature errors of the tip and product,

- due to the dependence on the width of the depressions between the protrusions of the depth of penetration of the tip in them at a constant speed of its movements for products with an irregular discontinuous surface,

2) restriction of functionality due to the impossibility of:

- measuring the roughness R _a and the inclination angle α of the surfaces of the protrusions,

- conducting contactless measurements,

- synchronization of measurements from the movement of the protrusions of the product,

- control of frictional slippage of the tip.

The closest in number of common features and in technical essence of the present invention is a method for actively controlling linear dimensions during processing of the product, made with cavities and protrusions on the surface (prototype method, patent RU 2557381, IPC B24B 49/00, G01B 7/12, 06/10/2015), including the use of a movable measuring rod that is connected frictionally to the drive and is fixed from rotations and has a through hole and a tip fixed to its end with its rear side, linear movement of the tip with a given speed towards the surface of the product until mechanical contact occurs between the product and the front surface of the tip with the formation of the working area, the formation of an electrical signal characterizing the current coordinate of the tip, and the use of this signal to calculate the linear size of the product with an indication of its value, use the tip from optically a transparent material with a protective coating deposited on its outer front surface with the formation of a hole corresponding to the con the stroke of the tip with the product, by means of laser radiation, creates an input light flux, which is directed through the through hole of the measuring rod and illuminate it with a given angle of incidence on the inner side of the front surface of the tip, while reflected light and heat flux are formed in the contact zone of the tip with the product, intensity which is associated with the temperature of the tip, directing said flows through said opening of the measuring rod to measure their parameters, separate the reflected luminous flux from the heat, convert the measured parameter of the reflected light flux into an electric signal to calculate the current coordinate of the tip, measure the intensity of the heat flux and form a second electrical signal associated with the current temperature of the tip, taking into account which the value of the linear size of the processed product is adjusted.

In this prototype method, the input luminous flux is also radially shifted from the axis of the measuring rod, on the inner side of the side surface of the tip there are two opposite working platforms with predetermined angles of inclination and they are used as the first and second reflection zones, the first reflection zone is illuminated with the input light flux, transmit the input light flux inside the tip to the second reflection zone to create a reflected light flux.

In addition, in this prototype method, the number of reflection zones is set to more than two, and the working reflection zone is included in this number of zones.

In addition, in this prototype method, the input light flux is radially offset from the longitudinal axis of the measuring rod, an optical system is installed in front of the back surface of the tip, with which the propagating input light flux is deflected to illuminate the reflection working area in the tip and a reflected light flux deflecting the optical system.

Also in this prototype method, the value of the angle of incidence of the input light flux to the working reflection zone in the tip is set.

In this prototype method, a phase incursion is also used as a measured parameter of the reflected light flux.

The disadvantages of this prototype method are the following:

1) limitation of measurement accuracy

- due to the temperature error of the product,

- due to the dependence on the width of the depressions between the protrusions of the depth of penetration of the tip in them at a constant speed of its movements for products with an irregular discontinuous surface,

2) restriction of functionality due to the impossibility of:

- measuring the roughness R _a and the inclination angle α of the surfaces of the protrusions,

- conducting contactless measurements,

- synchronization of measurements from the movement of the protrusions of the product,

- control of frictional slippage of the tip.

The technical objectives of the invention are to increase the accuracy of measurements and expand the functionality.

This task is ensured by the fact that the method of actively controlling the size, surface roughness and temperature during the processing of the product, made with depressions and protrusions on the surface, including the use of a friction measuring rod connected with a drive and fixed from rotations with a through hole and a tip fixed to it the end with its back side, linear movement of the tip towards the surface of the product, the formation of an electrical signal, characterizing the current coordinate of the tip, and using this signal to calculate the linear size of the product with an indication of its value, using the tip of an optically transparent material with a protective coating deposited on its outer front surface with the formation of a hole corresponding to the contact zone between the tip and the product, creating using laser radiation input light flux with its direction through the through hole of the measuring rod, illuminating it with the inner side of the obverse tilt a source, by the appearance of a reflected light flux in the contact zone between the tip and the product, the formation of a heat flux by the tip, the intensity of which is related to its temperature, the use of the reflected light flux to create an output electric signal, measurement of the heat flux intensity and the formation of a second output electric signal, associated with the current temperature of the tip, the adjustment taking into account this value of the size of the product, provide between the product and the front erhnostyu tip from the working area forming a mechanical contact or gap, respectively for contact or non-contact measurement, the front surface of the inner side tip illumination is performed by a focused input light with its focus located outside the tip receiving a second thermal flow generated product with a tip

the intensity of which is related to the temperature of the product, and they direct this flux together with the first heat flux, and a part of the reflected light flux is extracted and the first reflected light flux is formed on its basis, which, together with two heat fluxes, is directed along the axis of the through hole of the measuring rod for measurement, this selects a fixed value of the immersion of the tip in the depressions between the protrusions and synchronize these immersions of the tip by the movement of the depressions and protrusions of the product, etc. by which two heat fluxes are separated from the first reflected light flux, it is measured with synchronization by the movement of the hollows and protrusions of the product, and as a result, the current coordinate of the tip is judged during mechanical contact between the product and the tip, and optical elements are placed on the back of the tip, by which at least two different lateral parts are extracted from the reflected light flux, mainly in the vertical plane, in the form of the second and third reflected light fluxes, directing them through the through hole of the measuring rod, radially offset, on different sides of its axis, converting into the third and fourth output electrical signals with the measurement of these signals and, accordingly, the intensities of the second and third reflected light fluxes with synchronization by the movement of the valleys and protrusions of the product, according to the levels of which are judged indicatrix of reflection and its inclination and consequently of roughness R _a and the inclination angle α of the projections surface, wherein the laser radiation by the aforementioned create second WMOs luminous flux, which is directed through the through hole of the measuring rod radially offset from one side of its axis, mainly in the horizontal plane, and illuminate with it the inner side of the front and / or side surfaces of the tip and form at least one reflection zone on them with total internal reflection and the creation of the fourth reflected light flux, which

they are directed through the through opening of the measuring rod, mainly also in the horizontal plane, the phase shift of which is converted into the fifth output electrical signal, according to the changes of which the tip movement is judged, while for two heat fluxes, photoelectric conversion is carried out with separation from each other to measure their intensities , measure the intensity of the second heat flux, and form the sixth output electrical signal, which is used to judge the temperature of the product, taking into account what adjust the value of the dimensions of the product, and control the tip speed by means of a drive and changing the fit and nature of the threaded connection of the measuring rod, synchronize changes in the parameters of the latter according to the movement of the depressions and protrusions of the product, while the tip is removed from the product with the measurement of its displacements and is located near the focus of the first input light flux.

Another difference of the invention is that the drive is created on the basis of a mechanically connected electric motor, a gearbox with the possibility of changing the gear ratio by an electric signal, a friction-screw mechanism connecting the gearbox shaft with a measuring rod and converting the rotation of the first into linear movement of the second, while the friction-screw mechanism they are implemented on the basis of a screw transmission with a threaded connection, and parameters and their values of the threaded connection are set, and as a measured pair The first reflected light flux meter uses intensity and phase shift.

Another difference of the invention is that to change the fit in the threaded connection of the screw transmission of the friction screw mechanism, at least one movable element with

the possibility of changing its thickness and / or shape from changes in the electrical signal.

The proposed method is illustrated by drawings.

FIG. 1 represents a device that implements the proposed method.

In FIG. 2 shows the optical diagram of the device for non-contact measurements, where L _in , L _nl and L _nt - the coordinates of the surface of the protrusion, the front and back surfaces of the tip.

FIG. 3 shows from the back of the tip the optical system and the passage of optical (light) and heat fluxes through it.

In FIG. 4 and 5 depict optical flow patterns with illumination (Fig. 4) and without illumination (Fig. 5) of the working area.

FIG. 6 shows the progress of optical and heat fluxes during non-contact measurements.

In FIG. Figures 7 and 8 show a friction-screw mechanism in transverse AA (Fig. 7) and longitudinal BB (Fig. 8) sections with a movable element based on a piezoelectric plate.

In FIG. Figures 9-11 show screw options: when creating a thread by vibro-rolling (Fig. 9, 10) or by winding a wire onto a rod with filling it with a compound (Fig. 11).

In FIG. 1 shows an indicator 1, a control system 2, a measuring transducer 3, consisting of a housing 4, a tip 5 with a protective coating 6, mounted on a movable measuring rod 7 with the possibility of linear movements ΔL using a guide 8, a drive 9, including a friction-screw mechanism, created on the basis of a screw 10, a friction element 11, a movable element 12, an electric motor 13 with a rotor 14, mechanically connected to the shaft of the gearbox 15; optical meter 16, fixed mirror 17, optical system 18, product 19 with a discontinuous surface, grinding wheel (not indicated).

The optical meter 16 (Fig. 2) has an electric input and six outputs, a window for receiving and transmitting optical and heat fluxes and consists of a surface parameter meter 20, a laser 21, a path difference modulator 22, a low coherent 23 and a high coherent 24 gauge, a pyrometer 25, and seven beam splitters 26, mirrors 27 and two optical filters 28 and 29.

The tip 5 is made of high-strength optically transparent material: diamond, ruby, sapphire, silicon carbide or representatives of corundum crystals and conditionally has a front (front), side (side) and back (rear) surface. Its front and side surfaces can have a curvilinear convex shape, close in shape to flat in the area immediately adjacent to the contact zone with the product 19 - the working area with ∅≤1-3 mm. The tip 5 is used simultaneously as a reflector of the optical flux propagating inside the device and a window for receiving and transmitting external optical and heat fluxes and can be a flat-convex collecting lens, and its rear surface attached to the measuring rod 7 can be flat and have a reflective spraying.

The protective coating 6 has an aperture in place and size of the contact zone of the tip 5 with the product 19 and protects most of its external surface from mechanical stress, chip buildup, metal processing results, residual cutting fluid (coolant) and creates conditions for total internal reflection for optical flows .

The measuring rod 7 can be made in the form of a hexagonal tube built into the guide 8 of the translational movement, mainly rolling, preventing it from turning around its axis. On the one hand, it is attached to the tip 5 when sealing with an elastic corrugated tube, and on the other hand, a friction element 11 is inserted into it.

The drive 9 includes a friction-screw mechanism, consisting of connecting a screw rod 10 (conditionally, “screw”) with a friction element 11. The screw rod 10 is made in the form of a cylinder with an external thread, rounded at the vertices like a round thread or Edison thread, with a low height protrusions h, mainly not more than 100 microns. A friction element 11 (conditionally, a “nut”) is put on it, similar to a sleeve or cup, attached to a measuring rod 7, the inner surface of which can also be a thread mating with a screw 10. In a pair of screws, the 10-friction element 11 can be made last from less solid material, forming pairs including materials with low friction, for example, stainless steel - fluoroplastic and others like that.

Along the friction element 11, an electrically controlled movable element 12 is integrated, for example, based on piezoelectric plates (Figs. 1, 8), an electrical input with a signal U _fv connected to the second output of the control system 2. Changing the signal U _fv changes the thickness or shape of the moving element 12 , strengthening or weakening the crimping of the screw 10 by the friction element 11 and changing the fit, the nature of the threaded connection from the gap to the interference (Fig. 7, 8).

The connection of the screw 10 and the friction element 11 creates a screw-nut transmission with the conversion of the angular rotation Δγ of the first to linear displacement ΔL of the second and with the possibility of frictional slippage when it acts on the tip 5.

In one embodiment of the proposed method, a through hole is also created in the friction element 11, the screw 10, the gearbox 15 and the rotor 14 of the electric motor 13 with the possibility of spreading the optical and heat fluxes through them and placing the optical meter 16 after the latter.

In another embodiment, the threaded surfaces of the screw 10 and the friction element 11 may be internal and external, respectively, forming a nut-screw connection.

The electric motor 13 can be stepped and is used for bilateral turns Δγ of its rotor 14 according to the signal U _ed .

The reducer 15 transmits the rotation of the rotor 14 to the screw 10 with the possibility of changing the gear ratio k _p by the signal U _p .

The optical meter 16 is used to measure the position of the surface of the protrusions of the article 19 and tip 5, the temperature of the protrusions of the article 19 and tip 5, the displacements of the latter, the surface roughness R _{a of the} protrusions and their inclination angle α around the axis OZ. It has six outputs electric signals N _Ra, N _α N _audio, N _vi, N _FAs, N _ti and one input signal with U _ou synchronization measurements.

The mirror 17 is attached to the housing 4 and installed inside the measuring rod 7, through the slot in which the optical meter 16 and the tip 5 are optically connected.

The optical system 18 (Fig. 3) includes five optical elements: a central one and two pairs of side ones placed, as an option, together on the same substrate like a Fresnel lens and attached to the back surface of tip 5.

The first optical element 30 is a central and collecting lens, focusing optical and heat fluxes incl. together with the tip 5 with the focus at a distance of 0.5-1.5 mm outside it.

The first pair, i.e. the second 31 and third 32 lateral optical elements are located at distances R ₁ and R ₂ on different sides from the center of the optical system 18, are used for angular deviation and focusing of the two reflected optical fluxes, the following, mainly in the XOY plane, used to measure roughness and angle the inclination of the surfaces of the protrusions. The focus of these optical elements is aligned with the focus of the first optical element 30.

The second pair, i.e. the fourth 33 and fifth 34 lateral optical elements are located symmetrically relative to the center of the optical system 18 and are used like optical wedges for angular deflection of the optical flux used to measure the displacement ΔL of the tip 5, mainly following in the XOZ plane.

This method uses low coherent 23 and high coherent 24 meters, which are the basis of the corresponding interferometers. They work on different principles of action and have a different set of advantages and disadvantages without duplicating each other, increasing the versatility, information content, reliability and accuracy of contact and non-contact measurements.

The low-coded meter 23, together with the optical circuit described below, is the so-called low-coherent interferometer or “white light” interferometer operating, as a rule, in a pulsed mode by a synchronization signal U _ои . With its help, the position of the surfaces of the products is measured under conditions of limiting the coherence of optical flows: reflected from rough surfaces and / or when passing through the coolant (or its vapor-air mixture) in non-contact measurements.

The highly coherent meter 24, together with the optical circuit, forms a Michelson interferometer, used to measure in the selected coordinate system the movements of the tip 5, which is a reflector.

The pyrometer 25 measures the temperatures T _{sun of the} protrusions of the article 19 and T _{n of the} tip 5 by the intensity of the heat flux emitted by them and generates output signals N _tvs , N _tn , following the fifth and sixth inputs of the control system 2 to adjust the measurement results.

Optical filters 28 and 29 are used for spectral separation of spatially combined optical and heat fluxes coming from tip 5. The first one is tuned to the wavelength λ _{o of} laser 21, which, as a rule, comes from a number of the most commonly used 0.63 microns, 1.06 microns , 10.6 μm, and the second - at a wavelength λ _{t of} heat fluxes in the infrared (IR) standard spectrometer range of ~ 3-15 μm for pyrometers.

The control system 2 has six electrical inputs and outputs. All of its inputs connected to six respective outputs from the signals N _Ra, N _α N _audio, N _vi, N _FAs, N _tn optical meter 16, and its outputs are used as follows: first a U signal _oi is connected to an input of an optical meter 16, a second with a signal U _fv connected to the input of the movable element 12 in the drive 9, outputs with signals: the third U _p , the fourth U _ed and the fifth N _ind are connected respectively to the gearbox 15, motor 13 and indicator 1, and the sixth output N _{o is} used to issue summary information.

In statics, when generating signals, this method, implemented on a circular grinding machine, is carried out as follows.

At the initial time, the signals U _fv , U _mp and U _ed coming from the second, third and fourth outputs of the control system 2 to the inputs of the drive 9 and, accordingly, the gearbox 15 and the motor 13 do not change, and the measuring rod 7 and tip 5 are stationary.

The position of the surfaces of the protrusions of the product 19 and the tip 5 are measured using a low-coherent interferometer as follows.

For convenience of description, it is assumed that the term optical flow is used for cases of their entry / exit from solid, finished blocks, units, etc., and when dividing them, the term is mainly used - part, fraction, etc. Upon contact, the front surface of the tip 5 is aligned with the surface of the protrusion of the product 19 without a gap.

The numbering of the beam splitters 26 is as follows (Fig. 2):

- the first, second and seventh beam splitters are arranged sequentially in a straight line, along the optical flux generated by the laser 21 and next to the input of the highly coherent meter 24,

- the fourth beam splitter is located opposite the optical input of the modulator of the stroke difference 22,

- the third (opposite the output of the path difference modulator 22), the fifth (opposite the input of the low coherent meter 23) and the sixth (opposite the input of the pyrometer 25) are the beam splitters along the part of the optical stream that changed direction after the second beam splitter.

So, in the optical meter 16 (shown in Fig. 2), the laser 21 emits a coherent optical stream with a wavelength of λ _about , which is fed to the inputs of low-coherent and highly coherent interferometers. The composition and principle of operation of the latter are discussed further in the description of the measurements of displacements ΔL of tip 5. The low-coherent interferometer includes a low-coded meter 23 and two interferometers unbalanced relative to each other: a reference and a measuring one (not indicated).

In the reference interferometer, by dividing the optical flux from the laser 21 by the first beam splitter 26 into two parts, the supporting and scanning shoulders are formed (Fig. 2) with the following routes:

- the first beam splitter 26 → the second beam splitter 26 → the third beam splitter 26 = the supporting arm,

- first beam splitter 26 → fourth beam splitter 26 → path difference modulator 22 → third beam splitter 26 = scanning arm.

The length of the support arm is unchanged, and the length of the scanning arm by the signal U _о from the first output of the control system 2 can be changed by the modulator of the difference of the path 22. As such modulators, special fiber phase modulators with a modulation frequency f _{modes of} at least 300 kHz can be used, for example , with a measurement cycle of up to ≈3 μs and a path difference of up to ~ 6000 rad, that for λ _o ≈1.5 μm is about 1.5 mm (Kovalenko V.G. Full-fiber resonant phase modulators for high-precision interferometric sensors: Abstract of thesis. for a job. Scientific Step, Ph.D.: Specialist 04/01/03 Institute of Radio Engineering and Electronics - M .: 2005., Gubin V.P., Kovalenko V.G., Sazonov A.I. , Starostin NI Piezo-fiber phase light modulator with a low level of polarization modulation / Letters in ZhTF, 2002, Volume 28, Issue 7, pp. 78-83.).

So, on the third beam splitter 26 of the reference interferometer, an optical stream 35 is formed, consisting of two parts from the reference and scanning arms with a modulated path difference Δl _ои between them. This stream then goes to the measuring interferometer to the fifth beam splitter 26, the first stable arm of which is a reference (and can include a fiber) and is formed by the passage of light between the fixed mirror 27 and the fifth beam splitter 26. The second is a variable arm, which is a measurement, includes the path of light from the fifth the beam splitter 26 to the tip 5 and the product 19 with sequential passage, the optical filter 28, the sixth beam splitter 26 and after reflection from the mirror 17 and passing along the axis of the through hole measuring the rod 7, the optical element 30 and further through the tip 5. Thus the output of the measuring interferometer, i.e. after the fifth beam splitter 26, a first input optical stream 36 is formed, consisting of several parts, following in the direction of the tip 5.

By the optical element 30, the input optical stream 36 is focused with the focus in the form of an optical stream waist with a diameter of not more than 50-500 μm at a distance of not more than 0.5-1.5 mm outside the front surface of the tip 5.

The reflecting surfaces during the passage of the protrusions of the product 19 past the tip 5 for this flow are:

- for contact measurements - the back and front surfaces of the tip 5, the last of which is aligned with the surface of the protrusion of the product 19 (Fig. 1, 5),

- for non-contact measurements - the back and front surfaces of the tip 5, as well as the surface of the protrusions of the product 19 (Fig. 2, 4, 6).

In contact measurements, the front surface of the tip 5 is aligned with the surface of the protrusion of the product 19 (Fig. 1, 5) and the converging first input optical stream 36 illuminates the rough surface of the protrusion and, being reflected, follows the backward reflected optical stream with a certain reflection indicatrix. It has a spatial intensity distribution within the solid angle, which depends, first of all, on the roughness R _a and the angle of inclination a of the surface of this protrusion.

The first, second and third parts of this reflected optical stream are distinguished by the first 30, second 31 and third 32 optical elements (Fig. 6) and form respectively the first 37, second 38 and third 39 reflected optical streams directed to the mirror 17. In this case, the first the reflected optical stream 37 after passing through the tip 5, a part of the first input optical stream 36 is added, reflected from its back surface.

When contactless measurement when between the front surface of the tip 5 and the surface of the product protrusion 19, a gap l _h, the first reflected optical beam 37 after the tip 5 is composed of three parts, reflected from the back and the front surfaces of the tip 5 and the surface of the article projection 19 (Figure . 2, 4, 6).

So, the first reflected optical stream 37 follows back and sequentially passes in the reverse order the above optical elements: optical element 30 → mirror 17 → sixth beam splitter 26 → optical filter 28. As a result, illuminating the fifth beam splitter 26 and spatially aligned with part of the optical stream, reflected from the mirror 27 gets to the input of the low-coded meter 23. As a result, a difference in the path between the reference and measuring arms is formed in the measuring interferometer - Δl _и .

The second 38 and third 39 reflected optical fluxes are used to measure the roughness R _a and the angle of inclination α of the surfaces of the protrusions and their participation in the measurement process is described further in the corresponding sections.

The operation algorithm of the low-coded meter 23 is based on scanning modulations of the stroke length of the reference interferometer Δl_oi a stroke difference modulator 22 due to the modulation of the signal U_oi and fixing its value corresponding to different parts of the first reflected optical stream 37 at the intensity (contrast) maxima of the generated interference signals for zero path difference Δl_oi-Δl_ai≈0 and phase shift interference measurements in a small range near this condition. Thus, on the example of non-contact measurements within the modulation cycle U_oi the position of several surfaces forming parts of the first reflected optical stream 37 can be determined: the coordinates of the protrusion L_at (with the determination of the size of the product L_ed), front L_nl and back L_nt surfaces of the tip 5 (Fig. 2). You can also define the gap l_s between the tip 5 and the protrusion of the product (for non-contact measurements), the value of the separation of the tip 5 from the protrusion of the product (for contact measurements), the thickness and wear of the tip 5. In this case, a digital signal N is generated at the third input of the optical meter 16_neither, which is the first output electrical signal containing information about the measured parameters, supplied to the third input of the control system 2.

Similar circuit solutions have already been tested for work, including with diffusely reflecting surfaces (AS USSR 1758421, IPC G01B 11/24, 08/30/1992), as well as in fiber-optic design (Galkin S.L., Ignatiev A.V., Babadzhan A.I. Fiber-optic linear sensor displacement, Instruments and control systems, 1992, No. 2, p. 24, R. Claus White-light scanning fiber Michelson interferometer for absolute position-distance measurement. Optics Letters, 1995, v. 20, No. 7, pp. 785-787 , patent RU 2147728, IPC G01B 11/06, G01B 9/02, 04/20/2000, Ivanov BB Development of low-coherent fiber-optic interferometry methods: Abstract of thesis for the degree in science, Ph.D. : Special. 04/01/01 Institute of Physics of Microstructures RAS, Nizhny Novgorod Orod - 2005.) and make it possible to achieve measurement accuracy at a level of at least ≈λ _o / 4-λ _o / 2, which for λ _o ≈1.5 μm is ≈0.4-0.8 μm.

The design of the low-coherent interferometer can be slightly modified to improve the operating mode and the obtained characteristics. So, to increase the fraction of light reflected from the back surface of tip 5, a reflective coating can be applied to it or a combination of optical parameters can be selected: tip 5 material with the necessary transparency, refractive index for the used laser wavelength λ _o Also in one of the arms of the measuring interferometer for example, between the fifth beam splitter 26 and the mirror 27, a light guide can be introduced, which reduces the coherence of the optical flux and increases the length of this arm.

Measurement of the surface roughness R _{a of the} protrusions of the product 19 is an additional functionality of this method. So, for example, the roughness R _a for the front and rear surfaces of the main cutting edges and the chamfer faces can be in the range of 0.3-3 μm. For drills and countersinks, the surface roughness parameter R _a can be no higher than 5-10 μm, and for various reamer designs 0.1-5 μm (Handbook of a machine-building engineer. Ed. Dalsky AM, Suslova A.G., Kosilova A.G., Meshcheryakova R.K. In 2 volumes, 5th edition, Mechanical Engineering, 2001).

As described above, the second 31 and third 32 optical elements located at different distances R ₁ and R ₂ from the center of the optical system 18 (Figs. 1, 3, 6) distinguish two different local angular sectors of the reflected optical flux following from the surface the protrusion of the product 19. Then these optical elements carry out the angular deviation and focusing of the two selected light sectors with the formation of two collimated (or close to them) second 38 and third 39 reflected optical fluxes following, mainly in the XOY plane, black of the through hole of the measuring rod 7 to the mirror 17 and further to the input of the optical measuring instrument 16. Next heading its optical components (Fig. 2 not shown), these two reflected optical flux is input to measuring of parameters of surface 20, in which the roughness measurement R _a .

To date, there are many technical solutions for measuring the surface roughness R _a based on measuring the parameters of the reflection indicatrix, including in different parts extracted from the reflected optical flux within the selected local angular sectors. Such measurements can record parameters such as the distribution of the optical flux intensity over spatial frequencies (in the range of certain deviation angles and, accordingly, over the cross section of each of the fluxes), relationships over multiple spatial frequencies, and other parameters. Some technical solutions are based on the use of:

- spatio-temporal sweep (Zagrebelny V.E. Construction of laser systems for controlling surface roughness based on pulsed acousto-optic spatio-temporal sweep: Abstract of dissertation, candidate of technical sciences 05.11.16, MSTU "STANKIN", Moscow, 1993, patent RU 2217696, IPC G01B 11/30, 11.27.2003);

- coordinate measuring photodetectors based on CCD arrays (patent RU 2424492, IPC G01B 11/30, 07/20/2011).

Due to the cyclic movements of the product 19, the roughness R _a is measured by the synchronizing signal U _oi when the protrusions pass past the tip 5. As a result of measuring the spatial structure of the second 38 and third 39 reflected optical fluxes, the roughness R _{a of} the protrusion surface and the measured value with a digital code N _{Ra are} measured which is the third output electrical signal that is transmitted from the first output of the optical meter 16 to the first input of the control system 2.

Let us evaluate the performance of these two two options for measuring the surface roughness R _{a of the} protrusions.

At the same time-space scan with a width of each of the streams ≈10 mm, the duration of the measurement cycle using two solid-state acousto-optical cells with a light and sound pipe made of glass with a sound speed of ≈3000 m / s will take no more than 3.3 μs (Balakshiy V.I., Parygin V .N, Chirkov L.I. Physical basis of acoustooptics. - Radio and communications Moscow, 1985. - P. 280.).

For article 19 with a diameter of ∅ = 10 mm and a rotation speed of n = 600 rpm, this time will be equivalent to a displacement of its surface by ≈1 μm.

The speed of the second group of methods based on CCD matrices is significantly higher, because exposure time for modern high-speed video cameras, for example, such series as Optronis CamRecord (Germany, https://www.cameraiq.ru/catalog/series/358-CamRecord-skorostnaia-videokamera) and NAC Memrecam GX (Japan, https: // www .cameraiq.ru / catalog / group / 1? ref44 = 1) can be ≤0.5-1 μs, which is equivalent to a displacement of the product surface ≈0.16-0.3 μm.

As you can see, the value of the dynamic error arising from the displacement of the product surface during the measurement of both options is quite small and can be neglected. And these estimates show the applicability of similar methods for measuring the roughness R _a .

To measure the angle of inclination α of the surfaces of the protrusions of the product 19, it is used that, as a rule, the reflection indicatrix is symmetric (Toporets A.S. Optics of a rough surface. - L .: Engineering, 1988. - 191 p.) And a change in the angle of inclination of the reflecting surface for two or more measurement channels located in the plane of rotation, changes the ratio of intensities between them.

In this case, the determination of the intensity ratio for the second 38 and third 39 reflected flows makes it possible, for example, based on the calibrated dependencies already available for each roughness value R _{a, to} find the current value of the angle of inclination around the axis OZ of the illuminated portion of the protrusion surface of the article 19. Using this approach for an even number of channels it was previously confirmed (patent RU 2223462, IPC G01B 11/02, G01B 11/30, 02/10/2004).

As a result of measuring the angle of inclination α at the second output of the optical meter 16, an output signal N _{α is formed} , which is the fourth output electric signal supplied to the second input of the control system 2. Such a measurement can be carried out by the synchronizing signal U _о from the first output of the control system 2, including with the implementation of the stroboscopic measurement mode.

Despite the individual microrelief and topography of the surfaces of the protrusions after each grinding cycle, changes in their roughness values R _a and the angle of inclination α for several cycles of product movement can be neglected, which allows the use of a stroboscopic measurement mode for these parameters.

The movement of the tip 5 is measured as follows.

As previously described, the laser 21 emits a coherent optical stream with a wavelength of λ _o (Fig. 2), which is divided by the first beam splitter 26 into two parts. The first of them, without changing direction and sequentially passing through the second and seventh beam splitters 26, enters the input of the highly coherent meter 24 and becomes the reference optical stream. The second part of the stream, deflected by the first beam splitter 26, then, without changing direction, passes through the fourth beam splitter 26, leaving the window of the optical meter 16, becomes the second input optical stream 42 (highlighted by a dotted line) and follows to the mirror 17. Then it passes radially offset through the through hole of the measuring rod 7 along the route: the fourth optical element 33 → tip 5, after reflection from which it becomes the fourth reflected optical stream 43 (highlighted by a dotted line) and then follows the path: heels Optical element 34 → 17 → mirror optical measuring window 16 → 26 → seventh splitter highly coherent input meter 24. At last the fourth input 43 and the reflected reference optical spatial streams are combined and interfere with each other.

For the second input 42 and the fourth reflected 43 optical flows, the tip 5 is a reflector, and the angle of incidence on the inner faces of its front and side surfaces is selected from the condition of total internal reflection for all possible external media, among which there may be a metal product (n≈1.5 for iron), air (n≈1) and coolant (n≈1.56). The zones on its inner side of the front or side surfaces, illuminated by light and reflecting it, will be called reflection zones, and one of them, corresponding to the area of external mechanical contact with the product 19, is called the working zone.

The second input 42 and the fourth reflected 43 optical fluxes inside the tip 5 can follow this way:

1) with illumination of the working area, for example, the following routes

- the fourth optical element 33 → the working area → the fifth optical element 34 (Fig. 2),

- the fourth optical element 33 → the first reflection zone → the working area → the second reflection zone → the fifth optical element 34 (Fig. 4);

2) without lighting the working area, for example, the following routes

- the fourth optical element 33 → the first reflection zone → the second reflection zone → the fifth optical element 34 (Fig. 5).

In accordance with the arrangement of the fourth 33 and fifth 34 optical elements, the second input 42 and fourth reflected 43 optical flows follow in the XOZ plane and form the measuring channel of the Michelson displacement interferometer. Measurements of phase incursion Δφ between tip displacement ΔL from 5 followed by photoelectric conversion and fazotsifrovym allow considering double stroke streams to form highly coherent output meter 24, the output code N _vi defined by the formula N _wi = 2k⋅ΔL / λ _o, where k - coefficient of proportionality. The N _vi code, which is the fifth output electrical signal, is supplied from the fourth output of the optical meter 16 to the third input of the control system 2, and also allows calculating the speed v _n = ΔL / Δt = N _Lн ⋅λ _o / 2k⋅Δt and the acceleration a _n = ΔL / Δt ² = N _Lн ⋅λ _o / 2k⋅Δt ^{2 of} tip 5.

Measurement of the speed v _n and accelerations a _{n of the} tip 5 allows you to track the dynamics of its movements in the process of contact measurements. This is especially important at the moments of its sharp return movements when exiting from the cavity to the protrusion and will allow determining the dynamic forces with known masses of the tip 5 and the measuring rod 7 and the resistance created in the friction-screw mechanism. The data obtained are used to select the optimal combination of the device’s operating modes in dynamics with maximum measurement accuracy, with the exception of the tip 5 being torn off when leaving the trench for a protrusion and for other purposes.

Temperature measurements are based on the fact that the optically transparent tip 5 itself is a source of heat flux 40 and passes through it an external second heat flux 41 from the product 19. The intensities of the heat fluxes 40 and 41 are associated with the temperatures of the tip 5 and the processed protrusions of the product 19. The first is inertial, slowly changing, and the second is variable, with a maximum signal at the protrusion and a minimum at the depression and is modulated by the frequency of rotation of the protrusions of the product 19, their passage past the tip 5.

These two different-frequency flows, spatially aligned, focused and guided by the first optical element 30 pass sequentially through the through hole in the measuring rod 7 and, reflected by the mirror 17 into the window of the optical meter 16, are sent by the sixth beam splitter 26 through the optical filter 29 to the optical input of the pyrometer 25. By photoelectric conversion, these different frequency heat fluxes 40 and 41 are converted into electrical signals and then separated by filtering and measured separately about. As a result of measurements at the outputs of the pyrometer 25 and, respectively, at the fifth and sixth outputs of the optical meter 16, signals N _TVs and N _t are generated, associated with the temperatures of the protrusions of the product 19 and tip 5, transmitted to the fifth and sixth inputs of the control system 2. For the device, the signal is N _t is the fifth output electrical signal.

In certain cases, the pyrometer 25 can have an electrical input with a signal on it via the bus U _ои from the control system 2, synchronized with the passage of the protrusions of the product 19. Then the frequency separation of two different-frequency signals can be performed by synchronous detection.

In dynamics, the proposed method is carried out mainly by contact measurements at the stages of black and finish grinding and non-contact - at the stage of nursing.

Contact measurements begin with adjustments after approaching the tip 19 of the tip 5 and the appearance of mechanical contact between them with small translational-reciprocal movements:

- progressive due to controlled movements, sinking into the cavity between the protrusions,

- returnable due to reverse push-out movements of a shock nature from collisions with protrusions and frictional slipping of the measuring rod 7 in the friction-screw mechanism.

For translational movements of the tip 5, a signal U _{p is} supplied to the input of the reducer 15, which sets the desired gear ratio k _p , and the signal U _ed supplied to the electric motor 13 rotates its rotor 14 by an angle Δγ, which leads to a rotation by an angle Δγ '= Δγ / k _{p the} output shaft of the gearbox 15, connected to the screw 10, which in turn is connected to the friction element 11 by a screw-nut transmission moves the measuring rod 7 and the tip 5.

All movements of the tip 5 and the position of the surface of the protrusions of the product 19 are recorded by low coherent 23 and / or highly coherent 24 meters. At the same time, with the help of the first, the values of the separation of the tip 5 from the surface of the protrusion when they exit from the cavity are also measured. The obtained measurement results by signals N _neither and N _vi are transmitted to the third and fourth input of control system 2.

The implementation of contact measurements involves synchronizing the operation of the drive 9 and the optical meter 16 by the movement of the troughs and protrusions of the product, for example, by a synchronizing signal associated with the current position of the part during its processing.

This is possible if there is preliminary information about the product and current information about the position of the part of the machine fixing the product, the spindle (for circular grinding machines) using a feedback sensor (High-speed motor spindles of the drives of the main movement of metal cutting machines / Bushuev V.V., Molodtsov V. V .: Vestnik MGTU Stankin, 2011, No. 3 - pp. 24-26), which can be used in machines absolute angular photoelectric position sensors (absolute encoders) LIR-DA119, LIR-DA219, LIR-DA136, LIR-DA158 , LIR-DA190 (http://www.skbis.ru/inde x.php? p = 3 & c = 5) manufactured by OJSC SKB IS (St. Petersburg) or other manufacturers.

Other special algorithms for determining the current position of the product during processing can also be applied. One of the options can be based on the use of always existing natural non-zero deviations of the dimensions of the product and the use of the autocorrelation function of the results of its measurement. So, due to the initial measurements, the profile of the product 19 is measured in amplitude and in time along the external contour of the protrusion-trough, similar to palpation, in which the tip 5 is similar to the probe of the profilometer, and the measurement results are similar to the profilogram. Next, the duration of the cycle of movement of the product 19 is determined, for example, by determining the delay time through which these measured values are repeated. This procedure is based on the availability of preliminary information about the workpiece. Such a determination using the autocorrelation function can be carried out software (software) or hardware (hardware) similar to the use of already tested devices (AS USSR 478316 IPC G06F 15/36, 07.25.1975).

On the basis of this, it becomes possible to determine the time points of the beginning and end of the protrusions, time intervals and phases corresponding to them, making it possible to measure the width of the protrusions L _vs1 , L _vs2 ... L _vsn and troughs L _vp1 , L _vp2 ... L _vpn (Fig. 1), the overall alignment products 19 and the control system 2 at the first output, a signal U _{o of} measurement synchronization is generated.

So, then the device is adjusted. A fixed value of the penetration of the tip 5 into the depressions of the product 19 and the landing of the screw 10 are selected with the measurement of motion parameters by low-coherent and highly coherent interferometers (displacement ΔL, speed v _n and acceleration a _n ) by determination of dynamic forces, fixing the appearance of a gap _lz between tip 5 and the surface of the protrusion when exit from the cavity to the ledge.

Also, the signal U _fv at the input of the movable element 12 is set to fit the screw 10. To ensure displacements ΔL of the tip 5 in the screw-nut gear and friction slippage, both a constant fit with U _fv = const and a variable for U _fv = var, s synchronization of the movement of the hollows and protrusions of the product with two possible states: clearance / interference, which for screw 10 corresponds to clamped / free.

Similar adjustments can be made in a series of cycles of rotation of the product 19 with their total duration of not more than 3-20 s. And upon their completion, active control begins with synchronization of the movements of the tip 5 from the protrusions of the product 19. At the same time, it enters the cavity to a certain depth at a certain point in time before the oncoming protrusion, leaving the protrusion without interruption from its surface with a minimum of dynamic efforts.

All displacement ΔL tip 5 measured highly coherent interferometer to a tracking mode, and in the synchronizing signal U _ou held low coherence interferometer measuring pulse is measured and the temperature of the tip 5 and the protrusion roughness of its surface, and its angle of inclination. From the fifth output of the control system 2, the current value of the product size L _ed and other parameters are displayed on indicator 1, and at the sixth output, the measurement results are generated by the signal N _o .

Such contact measurements are also carried out at the stage of fine grinding with the transition to non-contact measurements at the nursing stage, at which, upon reaching the desired product size, processing and active control end.

We estimate the discreteness of measurements along the surface of the product 19 ΔL _d . For a drill with a diameter of 10 mm with a circumference _Lb = 31.4 mm and a rotational speed n = 600 rpm of a part, the duration of one revolution will be t _rev = 100 ms and for a measurement cycle with a duration of _ts = 3 μs, determined mainly the speed of the modulator of the path difference 22, the linear discreteness of measurements ΔL _{d is} determined by the formula ΔL _d = L _s t t _c / t _about and for the data indicated will be at the level of 1 μm.

Stroboscopic measurement mode

To reduce the ΔL _d value, for example, when controlling critical sections of protrusions, such as the cutting edge of a tool, with a radius of ≈2-4 μm (http://www.stroitelstvo-new.ru/drevesina/zatochka/lezvie.shtml), as well as increasing the accuracy of measurements due to multiple measurements with their subsequent averaging, a stroboscopic measurement mode is proposed. It consists in measurements with a low coherence interferometer 23, synchronized with the passage of the protrusions of the moving product 19 past the tip 5 in each movement cycle for a series of adjacent, adjacent cycles.

At the same time, at the moment of time corresponding to the contact of the tip 5 with the protrusion, determined in advance or by a signal from the machine spindle position sensor entering the control system 2 (not shown), a pulse signal U _о arriving at the electrical input of the stroke difference modulator is generated at its first output 22. When the change of the signal at the electrical input path difference modulator 22 changes the cycle length Δl stroke _ou scanning arm and respectively implementing change path difference Δl between the two parts _oi optiches th stream 35 and respectively a first input 36 of optical flow output low coherence interferometer. In this process the length of the arms of the reference and measuring interferometers becomes Δl _ou ≈Δl _uu that, ultimately, is fixed nizkogerentnym measurer 23 with the definition of the position in the measurement signal U _ou.

The number of measurements for the stroboscopic measurement mode can be estimated as follows. If the measurement error is 1 μm, the metal removal rate for the nursing stage is 0.5 μm / s at a rotation speed of n = 600 rpm, the total number of revolutions and, accordingly, the number of stroboscopic measurements in the series will be no more than 20.

The formation of a series of signals U _{о with a} period t _c equal to the period t _{about the} rotation of the product 19: t _c = t _about carries out a series of measurements of the position of the surface of the protrusion on the local illuminated area of its surface.

Carrying out a series of measurements in the interval when the change in the size of the product 19 from processing is less than the error allows us to average the measurement results, reduce the random component and improve the accuracy of measurements.

When the period t _{c is} increased by a small fraction of Δt from cycle to cycle t _c = t _r + Δt, the position of this local illuminated area will also shift, thereby scanning the surface of the protrusion for a certain time. Provided _{on the} t >> Δt measurements similar increase the measurement resolution along the surface of the article ΔL _d 19 without increasing the difference in stroke frequency modulation modulator 22. For example, previous data _about t = 100 ms and t _n = 3 microseconds formation signal U _ou mode stroboscopic measurements with Δt = 1 μs in the following time sequence: 0, 100.001 ms, 200.002 ms, 300.003 ms will reduce for a series of measurements ΔL _{d by} 3 times, i.e. 0.33 microns.

As can be seen, by changing the formation time (phase) of the clock signal U _о , which controls the operation of the stroke difference modulator 22, from cycle to cycle (revolution to revolution), it is possible to control the parameters of the movement of the control area on the surface of the protrusion: the step value (discrete), as well as the direction and speed displacement.

Contactless measurement as described above can advantageously be carried out in the final treatment stage, nursing approaching the tip 5 to a rotating article 19 before the gap therebetween l _of a range of 0.5-1.5 mm (Fig. 2). It is determined by the difference in the position of the protrusions L _in and the front surface of the tip 5, measured, respectively, by low coherent and highly coherent interferometers. The constancy of its value in the indicated range is maintained, generated at the fourth output of the control system 2, a compensating control signal U _ed supplied to the electric motor 13.

As with the contact measurements described above, according to the measurement synchronization signal U _о from the first output of the control system 2, when the protrusion passes by the tip 5, the positions L _in its surface, roughness R _a , and the angle of inclination α, the temperature of the protrusions and tip 5 are measured. All measured data are transmitted from the outputs of the optical meter 16 to the corresponding inputs of the control system 2.

With non-contact measurements, the stroboscopic measurement mode described previously can also be implemented.

The essence of the proposed method is as follows.

1. To improve the accuracy of measurements and expand the functionality through the use of a durable optically transparent tip for active control, it is proposed to implement non-contact measurements of the position of the surface of the protrusions, its angle of inclination, roughness and temperature.

With contact measurements, it becomes possible to fix and measure the values of the tip 5 separation from the protrusion during the exit from the cavity of the product with the aim of its subsequent exclusion.

Improving the accuracy of contact measurements and ensuring equal dynamic loads for products with an irregular discontinuous surface is ensured by the formation of a fixed value of the tip 5 dropping into the cavity between the protrusions, for example, no more than 5-50 microns, depending on from the features of the product, the processing stage and other parameters.

2. It is also proposed to synchronize measurements, including with the implementation of the stroboscopic measurement mode. It is based on synchronization for a series of product movement cycles of a series of pulse measurements of parameters along the product surface: the position of the protrusion surface, its roughness and the angle of inclination. So you can go to the measurement mode from cycle to cycle of any local section of each protrusion with control of the step value, direction and speed of its movement. This will allow you to measure the parameters of the protrusions with a very small step, increasing the resolution ΔL _d measurement discreteness along the surface of the product and reducing the speed requirements of the elements of the device.

With such a zero step, it is possible to carry out a series of measurements for several cycles of the selected area on the ledge, followed by averaging of their results.

3. To expand the functionality of the drive 9, it is proposed to use electrically controlled in it:

- gear 15 with the possibility of changing the signal U _{p the} gear ratio k _p rotations of the rotor 14 of the electric motor 13 to the screw 10,

- friction-screw mechanism with screw transmission of the screw-nut type with conversion into displacements ΔL of the friction element 11 attached to the measuring rod 7 from angular rotations Δγ of the screw 10 with the possibility of changing the landing of the latter. These changes in the landing of the screw 10 in the friction element 11 are carried out by changing the compression of the first by the signal U _fv by controlling the changes in the thickness and / or shape of the movable element 12, built into the second, with the possibility of creating a constant value or with a variable synchronized by the movements of the protrusions and depressions of the product 19.

Assessment of feasibility and achieved technical level.

The feasibility of the mechanical part of the device, including the tip mounted on the measuring rod 7, limited in angular rotations, linear movements ΔL of which are carried out using a guide and connected to the gearbox 15 and the electric motor 13 with the rotor was previously confirmed by the prototype design (patent RU 2447984, IPC В24В 49 / 00, G01B 7/12, 04/20/2007). The performance check was carried out on a mod grinding machine. ZA110 with a rotational speed of the product of 150-600 rpm, the range of movement of the measuring rod 7 was ≈100 mm, and the product was a two-hole countersink with carbide cutting teeth with a protrusion width of 0.05 mm. The total mass of the measuring rod 7 with other elements was in the range of 30-35 grams.

As the movable element 12, a two-layer, bimorphic, bending type production piezoelectric element can be used. NII Elpa OJSC (Russia, http://www.elpapiezo.ru/index.shtml), with a working frequency of at least 5-7 kHz, sufficient for the operating modes described above.

Currently, the technology for creating a regular microrelief on the surfaces of products is already quite developed and can be used to create a screw 10 (Schneider Yu.G. Operational properties of parts with a regular microrelief. - 2-3 ed. Rev. and additional - L., Mechanical Engineering , Leningrad Departure, 1982.- 248 p., Ill.).

In connection with the foregoing, the feasibility of the invention should not be in doubt.

This invention can be practically implemented in a slightly different way than specifically described, without departing from the essence of the invention and in the scope of the claimed formula.

As can be seen from the entire description, the proposed invention improves the accuracy of measurements and expands the functionality and, accordingly, successfully solves the technical problems.

Claims (2)

1. The method of active control in the process of grinding the dimensions of the product, made with hollows and protrusions on the surface, including the use of a movable measuring rod connected with friction with a drive and fixed from rotations with a through hole and a tip made of optically transparent material with a protective coating applied to its end, applied on its outer front surface with the formation of a hole equal in area and shape to the zone of contact of the tip with the product, linear movement of the tip in the direction of the surface of the product, the formation of an electrical signal characterizing the current coordinate of the tip, and the use of this signal to calculate the linear size of the product with an indication of its value, creating by means of laser radiation an input light flux with its direction through the through hole of the measuring rod, illuminating the inside of the front side the surface of the tip, reflection from it with the appearance in the contact zone of the tip with the product of the reflected light flux, the formation of a heat flux tip whose intensity is related to its temperature, using the reflected light flux to create an output electric signal, measuring the heat flux intensity and generating a second output electric signal associated with the current tip temperature, adjusting for this product size value, characterized in that five optical elements are placed on the back of the tip, the inside of the front of the tip is illuminated the input light flux focused by the first optical element with the focus of this light flux outside the tip, the tip receives a second heat flux formed by the product, the intensity of which is related to the temperature of the product, and direct this flux together with the first heat flux, and a part of the reflected light is emitted flow and form on its basis the first reflected light flux, which together with two heat fluxes using the aforementioned first optical element nt is directed along the axis of the through hole of the measuring rod for measurement, a fixed value of the tip immersion in the depressions between the protrusions is selected, and these tip immersions are synchronized by the movement of the depressions and protrusions of the product, and the first reflected light flux is separated from two heat fluxes, this first reflected one is measured luminous flux with synchronization along the movement of the valleys and protrusions of the product, while the second and third optical elements are isolated from the reflected light flux two different lateral parts, mainly in the vertical plane, in the form of the second and third reflected light streams, direct them through the through hole of the measuring rod radially offset on opposite sides of its axis, convert the third and fourth output electrical signals with the measurement of these signals and accordingly, the intensities of the second and third reflected light fluxes with synchronization by the movement of the valleys and protrusions of the product, the levels of which judge the reflection indicatrix and its inclination, and correspondingly about the roughness and angle of inclination of the surface of the protrusions, while using the aforementioned laser radiation create a second input light flux, which is directed through the through hole of the measuring rod radially offset from one side of its axis, mainly in the horizontal plane, and illuminate with the help of the fourth optical element them the inner side of the front and / or side surfaces of the tip and form on them at least one reflection zone with full internal reflection and the creation of by means of the fifth optical element of the fourth reflected light flux following through the through hole of the measuring rod, mainly also in the horizontal plane, the phase shift of which is converted into the fifth output electrical signal, by the changes of which the movement of the tip is judged, while photoelectric conversion is performed for two heat fluxes with separation from each other to measure their intensities, measure the intensity of the second heat flux, and form the sixth output an electrical signal used to judge the temperature of the product, taking into account what the value of the dimensions of the product is adjusted, while moving the measuring rod, control its speed, change the friction force between the associated friction drive and the measuring rod and synchronize the changes in this fit on the movement of the valleys and protrusions of the product . 2. The method according to p. 1, characterized in that the drive uses a mechanically connected electric motor, a gearbox, configured to change the gear ratio by an electric signal, and a friction-screw mechanism connecting the gearbox shaft to the measuring rod and converting the rotation of the first to linear movement the second, while the friction-screw mechanism is implemented on the basis of a helical gear with a threaded connection with the given parameters and values of the threaded connection, and as measured of the first parameter of the first reflected light flux, the intensity and phase shift are used.

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