RU2013132038A - METHOD FOR PRODUCING MULTI-LAYERED GRADIENT COATING BY MAGNETRON SPRAYING METHOD - Google Patents
METHOD FOR PRODUCING MULTI-LAYERED GRADIENT COATING BY MAGNETRON SPRAYING METHOD Download PDFInfo
- Publication number
- RU2013132038A RU2013132038A RU2013132038/02A RU2013132038A RU2013132038A RU 2013132038 A RU2013132038 A RU 2013132038A RU 2013132038/02 A RU2013132038/02 A RU 2013132038/02A RU 2013132038 A RU2013132038 A RU 2013132038A RU 2013132038 A RU2013132038 A RU 2013132038A
- Authority
- RU
- Russia
- Prior art keywords
- refractory metal
- thickness
- layer
- metal nitrides
- content
- Prior art date
Links
- 239000011248 coating agent Substances 0.000 title claims abstract 7
- 238000000576 coating method Methods 0.000 title claims abstract 7
- 238000004519 manufacturing process Methods 0.000 title 1
- 238000005507 spraying Methods 0.000 title 1
- 150000004767 nitrides Chemical class 0.000 claims abstract 12
- 239000003870 refractory metal Substances 0.000 claims abstract 12
- 239000010410 layer Substances 0.000 claims abstract 10
- 238000000034 method Methods 0.000 claims abstract 10
- 239000011261 inert gas Substances 0.000 claims abstract 4
- 239000012495 reaction gas Substances 0.000 claims abstract 4
- 239000012790 adhesive layer Substances 0.000 claims abstract 2
- 239000007789 gas Substances 0.000 claims abstract 2
- 238000001755 magnetron sputter deposition Methods 0.000 claims abstract 2
- 239000002184 metal Substances 0.000 claims abstract 2
- 229910052751 metal Inorganic materials 0.000 claims abstract 2
- 239000000203 mixture Substances 0.000 claims abstract 2
- 239000000758 substrate Substances 0.000 claims abstract 2
Landscapes
- Physical Vapour Deposition (AREA)
Abstract
1. Способ получения многослойного градиентного покрытия методом магнетронного напыления, включающий нанесение на предварительно очищенную поверхность металлической подложки адгезионного слоя тугоплавких металлов в среде инертного газа, а затем нитридов тугоплавких металлов в газовой смеси инертного и реакционного газа, отличающийся тем, что содержание нитридов тугоплавких металлов изменяют в направлении толщины напыляемого слоя с получением на поверхности покрытия нитридного слоя.2. Способ по п.1, отличающийся тем, что содержание нитридов тугоплавких металлов изменяют от 0% до 100%, выдерживают до получения требуемой толщины нитридного слоя, затем уменьшают в обратном порядке, выдерживают до получения требуемой толщины слоя тугоплавких металлов и вновь увеличивают в направлении толщины напыляемого слоя.3. Способ по п.2, отличающийся тем, что для увеличения и уменьшения содержания нитридов тугоплавких металлов давление реакционного газа изменяют по линейной зависимости, соответственно, от 0 до 8·10Па, а затем в обратном порядке.4. Способ по п.2, отличающийся тем, что процесс повторяют до достижения требуемой толщины покрытия.1. A method of producing a multilayer gradient coating by magnetron sputtering, comprising applying to a pre-cleaned surface of a metal substrate an adhesive layer of refractory metals in an inert gas, and then refractory metal nitrides in a gas mixture of an inert and reaction gas, characterized in that the content of refractory metal nitrides is changed in the direction of the thickness of the sprayed layer to obtain a nitride layer on the coating surface. 2. The method according to claim 1, characterized in that the content of refractory metal nitrides is changed from 0% to 100%, maintained until the desired thickness of the nitride layer is obtained, then reduced in the reverse order, maintained until the desired thickness of the refractory metal layer is obtained and again increased in the thickness direction sprayed layer. 3. The method according to claim 2, characterized in that in order to increase and decrease the content of refractory metal nitrides, the pressure of the reaction gas is linearly changed, respectively, from 0 to 8 · 10 Pa, and then in the reverse order. The method according to claim 2, characterized in that the process is repeated until the desired coating thickness is achieved.
Claims (4)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| RU2013132038/02A RU2551331C2 (en) | 2013-07-10 | 2013-07-10 | Method of production of multi-layer gradient coating by method of magnetron deposition |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| RU2013132038/02A RU2551331C2 (en) | 2013-07-10 | 2013-07-10 | Method of production of multi-layer gradient coating by method of magnetron deposition |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| RU2013132038A true RU2013132038A (en) | 2015-01-20 |
| RU2551331C2 RU2551331C2 (en) | 2015-05-20 |
Family
ID=53280686
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| RU2013132038/02A RU2551331C2 (en) | 2013-07-10 | 2013-07-10 | Method of production of multi-layer gradient coating by method of magnetron deposition |
Country Status (1)
| Country | Link |
|---|---|
| RU (1) | RU2551331C2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2023201766A1 (en) * | 2022-04-18 | 2023-10-26 | 东南大学 | Anti-corrosion and anti-fouling composite treatment method for surface of additive manufacturing metal part |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| RU2635617C1 (en) * | 2016-12-23 | 2017-11-14 | Федеральное государственное бюджетное образовательное учреждение высшего образования "Российский химико-технологический университет имени Д.И. Менделеева" | Method of filtration material production |
| RU2669953C1 (en) * | 2017-08-29 | 2018-10-17 | Публичное акционерное общество "Региональный инжиниринговый центр промышленных лазерных технологий "КАИ - Лазер" | Device for hybrid laser-acoustic creation of functional-gradient material |
| RU2697145C1 (en) * | 2018-06-19 | 2019-08-12 | Андрей Валентинович Пакулин | Carbon-zinc coating, coating production method and coated structure |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001003166A (en) * | 1999-04-23 | 2001-01-09 | Nippon Sheet Glass Co Ltd | Method for coating surface of substrate with coating film and substrate by using the method |
| DE102004033342A1 (en) * | 2004-07-09 | 2006-02-02 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Process for producing wear-resistant and fatigue-resistant edge layers in titanium alloys and components produced therewith |
| RU2423550C1 (en) * | 2009-11-30 | 2011-07-10 | Общество с ограниченной ответственностью "Производственное предприятие Турбинаспецсервис" | Heat protecting cover for turbine blades and procedure for its fabrication |
| EP2363510A1 (en) * | 2010-02-26 | 2011-09-07 | IMC Infomusic Consultants GmbH | Surface coatings for medical implants |
| RU2433209C1 (en) * | 2010-06-15 | 2011-11-10 | Государственное образовательное учреждение высшего профессионального образования "Пермский государственный технический университет" | Method for obtaining wear-resistant and thermodynamically resistant multi-layer coating on basis of high-melting metals and their compounds |
-
2013
- 2013-07-10 RU RU2013132038/02A patent/RU2551331C2/en active IP Right Revival
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2023201766A1 (en) * | 2022-04-18 | 2023-10-26 | 东南大学 | Anti-corrosion and anti-fouling composite treatment method for surface of additive manufacturing metal part |
Also Published As
| Publication number | Publication date |
|---|---|
| RU2551331C2 (en) | 2015-05-20 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| PH12018501092A1 (en) | High conductivity graphane-metal composite and methods of manufacture | |
| EA201992653A1 (en) | METHOD FOR PRODUCING A COATING LAYER, A CONSTRUCTION PANEL AND A COATED FOIL | |
| MX2019010190A (en) | Method for producing a steel strip with an aluminium alloy coating layer. | |
| EA201390169A1 (en) | METHOD OF OBTAINING A MATERIAL CONTAINING A BASIS COATED | |
| WO2015196066A3 (en) | Method for the fabrication and transfer of graphene | |
| EA201391270A1 (en) | METHOD AND DEVICE FOR PLACING METAL PRODUCTS | |
| TW200639269A (en) | Plating method | |
| RU2013132038A (en) | METHOD FOR PRODUCING MULTI-LAYERED GRADIENT COATING BY MAGNETRON SPRAYING METHOD | |
| MX2016013455A (en) | Method for plating a moving metal strip and coated metal strip produced thereby. | |
| MX2015014977A (en) | Method of manufacturing multi-layer thin film, member including the same and electronic product including the same. | |
| MY165453A (en) | Drill having a coating | |
| RU2016103250A (en) | TiB2 LAYERS AND THEIR MANUFACTURE | |
| UA100712C2 (en) | Method for producing an enamelled steel substrate | |
| MX2017001398A (en) | Electrical connection element, method for producing an electrical connection element, and use of an electrical connection element. | |
| WO2017062355A3 (en) | Methods for depositing dielectric barrier layers and aluminum containing etch stop layers | |
| RU2013152884A (en) | DLC COATED ITEM AND METHOD FOR APPLYING DLC COATING | |
| WO2015090991A3 (en) | Method for producing patterned metallic coatings | |
| WO2014057052A3 (en) | Method of manufacturing rotogravure cylinders | |
| RU2014108988A (en) | CERAMIC TILE FOR LAYING COMBUSTION CHAMBERS, IN PARTICULAR OF GAS TURBINES, AND METHOD OF ITS PRODUCTION | |
| TW201612137A (en) | Method for producing double-sided metallized ceramic substrates | |
| MX347724B (en) | Coating increasing the friction coefficient and production thereof by means of atmospheric pressure plasma coating. | |
| RU2016135416A (en) | COMPONENT WITH A WIRELESS COATING AND METHOD FOR APPLYING A WASTABLE COATING | |
| TW201711957A (en) | A method of making a graphitic carbon sheet | |
| TW201712927A (en) | A method of making a multilayer structure | |
| RU2009138176A (en) | METHOD FOR PRODUCING NANOSTRUCTURED GRADIENT OXIDE COATING OF CATALYTIC CLASS BY MAGNETRON SPRAYING METHOD |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| MM4A | The patent is invalid due to non-payment of fees |
Effective date: 20160711 |
|
| NF4A | Reinstatement of patent |
Effective date: 20191002 |
|
| PD4A | Correction of name of patent owner | ||
| PC41 | Official registration of the transfer of exclusive right |
Effective date: 20210310 |