PL137040B1 - Control device for detecting defects in regular structures - Google Patents
Control device for detecting defects in regular structures Download PDFInfo
- Publication number
- PL137040B1 PL137040B1 PL1980222821A PL22282180A PL137040B1 PL 137040 B1 PL137040 B1 PL 137040B1 PL 1980222821 A PL1980222821 A PL 1980222821A PL 22282180 A PL22282180 A PL 22282180A PL 137040 B1 PL137040 B1 PL 137040B1
- Authority
- PL
- Poland
- Prior art keywords
- output
- input
- signal
- circuit
- image
- Prior art date
Links
- 230000007547 defect Effects 0.000 title claims description 31
- 238000004458 analytical method Methods 0.000 claims description 58
- 238000012937 correction Methods 0.000 claims description 20
- 238000000034 method Methods 0.000 claims description 18
- 239000003990 capacitor Substances 0.000 claims description 17
- 230000008569 process Effects 0.000 claims description 17
- 238000012545 processing Methods 0.000 claims description 12
- 238000004519 manufacturing process Methods 0.000 claims description 6
- 238000007689 inspection Methods 0.000 claims description 5
- 230000035945 sensitivity Effects 0.000 claims description 5
- 230000007704 transition Effects 0.000 claims description 5
- 230000000007 visual effect Effects 0.000 claims description 2
- 230000003111 delayed effect Effects 0.000 description 14
- 238000010586 diagram Methods 0.000 description 13
- 230000008859 change Effects 0.000 description 8
- 230000001276 controlling effect Effects 0.000 description 7
- 238000013507 mapping Methods 0.000 description 6
- 230000006870 function Effects 0.000 description 5
- 238000010191 image analysis Methods 0.000 description 5
- RTZKZFJDLAIYFH-UHFFFAOYSA-N Diethyl ether Chemical compound CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 description 4
- OTMSDBZUPAUEDD-UHFFFAOYSA-N Ethane Chemical compound CC OTMSDBZUPAUEDD-UHFFFAOYSA-N 0.000 description 4
- 239000011521 glass Substances 0.000 description 4
- 239000004065 semiconductor Substances 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 239000012634 fragment Substances 0.000 description 3
- 238000013139 quantization Methods 0.000 description 3
- 230000003287 optical effect Effects 0.000 description 2
- 230000004044 response Effects 0.000 description 2
- 238000005070 sampling Methods 0.000 description 2
- 229910000831 Steel Inorganic materials 0.000 description 1
- 230000032683 aging Effects 0.000 description 1
- FFBHFFJDDLITSX-UHFFFAOYSA-N benzyl N-[2-hydroxy-4-(3-oxomorpholin-4-yl)phenyl]carbamate Chemical compound OC1=C(NC(=O)OCC2=CC=CC=C2)C=CC(=C1)N1CCOCC1=O FFBHFFJDDLITSX-UHFFFAOYSA-N 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 238000010835 comparative analysis Methods 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000001934 delay Effects 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 238000003708 edge detection Methods 0.000 description 1
- 239000000839 emulsion Substances 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 238000001914 filtration Methods 0.000 description 1
- 230000007274 generation of a signal involved in cell-cell signaling Effects 0.000 description 1
- 238000005286 illumination Methods 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- 238000012886 linear function Methods 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 238000012216 screening Methods 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/956—Inspecting patterns on the surface of objects
Landscapes
- General Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- Immunology (AREA)
- General Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Pathology (AREA)
- Physics & Mathematics (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Image Processing (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US2182679A | 1979-03-19 | 1979-03-19 | |
| US06/021,822 US4292672A (en) | 1979-03-19 | 1979-03-19 | Inspection system for detecting defects in regular patterns |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| PL222821A1 PL222821A1 (it) | 1981-01-30 |
| PL137040B1 true PL137040B1 (en) | 1986-04-30 |
Family
ID=26695138
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| PL1980222821A PL137040B1 (en) | 1979-03-19 | 1980-03-19 | Control device for detecting defects in regular structures |
Country Status (9)
| Country | Link |
|---|---|
| KR (1) | KR830001829B1 (it) |
| CA (1) | CA1140251A (it) |
| DD (1) | DD149585A5 (it) |
| DE (1) | DE3010559C2 (it) |
| FI (1) | FI800767A (it) |
| FR (1) | FR2452101A1 (it) |
| GB (1) | GB2044925B (it) |
| IT (1) | IT1130315B (it) |
| PL (1) | PL137040B1 (it) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CA1196085A (en) * | 1980-11-07 | 1985-10-29 | John W.V. Miller | Method and apparatus for detecting defects in glass bottles using event proximity |
| DE3578768D1 (de) * | 1985-03-14 | 1990-08-23 | Toppan Printing Co Ltd | Einrichtung zum ueberpruefen von abdruecken. |
| DE3522179A1 (de) * | 1985-06-21 | 1987-01-02 | Forschungsgemeinschaft Aut Sic | Vorrichtung zur durchfuehrung optischer messungen an eingebauten windschutzscheiben |
| DE3737869A1 (de) * | 1987-11-09 | 1989-05-24 | Wagner Hans Juergen Dipl Ing | Verfahren und einrichtung zum optischen pruefen von gegenstaenden |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB1234941A (en) * | 1967-08-16 | 1971-06-09 | Emi Ltd | Improvements in or relating to pattern recognition devices |
| US3620630A (en) * | 1969-05-28 | 1971-11-16 | Raytheon Co | Radiation-sensitive mesh defect inspection system |
-
1980
- 1980-03-06 IT IT20392/80A patent/IT1130315B/it active
- 1980-03-10 FR FR8005292A patent/FR2452101A1/fr active Granted
- 1980-03-12 CA CA000347468A patent/CA1140251A/en not_active Expired
- 1980-03-12 FI FI800767A patent/FI800767A/fi not_active Application Discontinuation
- 1980-03-14 GB GB8008672A patent/GB2044925B/en not_active Expired
- 1980-03-15 KR KR1019800001095A patent/KR830001829B1/ko active
- 1980-03-17 DD DD80219717A patent/DD149585A5/de unknown
- 1980-03-19 DE DE3010559A patent/DE3010559C2/de not_active Expired
- 1980-03-19 PL PL1980222821A patent/PL137040B1/pl unknown
Also Published As
| Publication number | Publication date |
|---|---|
| IT1130315B (it) | 1986-06-11 |
| PL222821A1 (it) | 1981-01-30 |
| DE3010559C2 (de) | 1984-07-12 |
| FR2452101B1 (it) | 1984-07-20 |
| DD149585A5 (de) | 1981-07-15 |
| FR2452101A1 (fr) | 1980-10-17 |
| KR830001829B1 (ko) | 1983-09-12 |
| GB2044925B (en) | 1983-02-09 |
| FI800767A (fi) | 1980-09-20 |
| DE3010559A1 (de) | 1980-10-23 |
| CA1140251A (en) | 1983-01-25 |
| GB2044925A (en) | 1980-10-22 |
| IT8020392A0 (it) | 1980-03-06 |
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