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NO20074444L - Method and device for inspection of objects - Google Patents

Method and device for inspection of objects

Info

Publication number
NO20074444L
NO20074444L NO20074444A NO20074444A NO20074444L NO 20074444 L NO20074444 L NO 20074444L NO 20074444 A NO20074444 A NO 20074444A NO 20074444 A NO20074444 A NO 20074444A NO 20074444 L NO20074444 L NO 20074444L
Authority
NO
Norway
Prior art keywords
inspection
objects
Prior art date
Application number
NO20074444A
Other languages
English (en)
Other versions
NO328737B1 (no
Inventor
Arne Sommerfelt
Bernt Ribbum
Thor Vollset
Torleif Ringsaker
Original Assignee
Tordivel Solar As
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tordivel Solar As filed Critical Tordivel Solar As
Priority to NO20074444A priority Critical patent/NO328737B1/no
Priority to CN200880111202A priority patent/CN101821581A/zh
Priority to KR1020107006556A priority patent/KR20100052546A/ko
Priority to EP08828608A priority patent/EP2191230A1/en
Priority to PCT/NO2008/000307 priority patent/WO2009028956A1/en
Publication of NO20074444L publication Critical patent/NO20074444L/no
Publication of NO328737B1 publication Critical patent/NO328737B1/no

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G01B11/0608—Height gauges
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/9501—Semiconductor wafers

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
NO20074444A 2007-08-31 2007-08-31 Fremgangsmate og innretning for inspeksjon av gjenstander NO328737B1 (no)

Priority Applications (5)

Application Number Priority Date Filing Date Title
NO20074444A NO328737B1 (no) 2007-08-31 2007-08-31 Fremgangsmate og innretning for inspeksjon av gjenstander
CN200880111202A CN101821581A (zh) 2007-08-31 2008-09-01 用于检查物体表面的方法和装置
KR1020107006556A KR20100052546A (ko) 2007-08-31 2008-09-01 물체 표면 조사 방법 및 장치
EP08828608A EP2191230A1 (en) 2007-08-31 2008-09-01 Method and device for inspection of object surfaces
PCT/NO2008/000307 WO2009028956A1 (en) 2007-08-31 2008-09-01 Method and device for inspection of object surfaces

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NO20074444A NO328737B1 (no) 2007-08-31 2007-08-31 Fremgangsmate og innretning for inspeksjon av gjenstander

Publications (2)

Publication Number Publication Date
NO20074444L true NO20074444L (no) 2009-03-02
NO328737B1 NO328737B1 (no) 2010-05-03

Family

ID=40219505

Family Applications (1)

Application Number Title Priority Date Filing Date
NO20074444A NO328737B1 (no) 2007-08-31 2007-08-31 Fremgangsmate og innretning for inspeksjon av gjenstander

Country Status (5)

Country Link
EP (1) EP2191230A1 (no)
KR (1) KR20100052546A (no)
CN (1) CN101821581A (no)
NO (1) NO328737B1 (no)
WO (1) WO2009028956A1 (no)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI432699B (zh) 2009-07-03 2014-04-01 Koh Young Tech Inc 用於檢查測量物件之方法
KR101311255B1 (ko) * 2012-08-20 2013-09-25 주식회사 고영테크놀러지 측정대상물 검사방법
CN103673934A (zh) * 2013-12-31 2014-03-26 中国矿业大学 一种基于网格投影的pcb板平整度检测方法
US10636140B2 (en) * 2017-05-18 2020-04-28 Applied Materials Israel Ltd. Technique for inspecting semiconductor wafers
DE102017208485A1 (de) * 2017-05-19 2018-11-22 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Anordnung und Verfahren zur berührungslosen Entfernungsbestimmung nach Art des Lichtschnittverfahrens
KR102514685B1 (ko) 2017-09-28 2023-03-27 유니버셜 인스트루먼츠 코퍼레이션 개선된 리드 팁 조명 디바이스, 시스템 및 방법
CN108107051B (zh) * 2017-12-19 2020-03-31 无锡先导智能装备股份有限公司 基于机器视觉的锂电池缺陷检测系统及方法
FI128443B (en) 2018-12-21 2020-05-15 Valmet Automation Oy Contactless thickness measurement

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4980763A (en) 1989-06-12 1990-12-25 Welch Allyn, Inc. System for measuring objects viewed through a borescope
US6219063B1 (en) 1997-05-30 2001-04-17 California Institute Of Technology 3D rendering
US6246788B1 (en) * 1997-05-30 2001-06-12 Isoa, Inc. System and method of optically inspecting manufactured devices
JP2005221288A (ja) 2004-02-04 2005-08-18 Chiaki Tanaka 投影法による加工面性状の測定方法及びその装置
JP2006292617A (ja) 2005-04-13 2006-10-26 Nec Electronics Corp 欠陥検査装置及び基板表面の検査方法

Also Published As

Publication number Publication date
NO328737B1 (no) 2010-05-03
CN101821581A (zh) 2010-09-01
KR20100052546A (ko) 2010-05-19
WO2009028956A1 (en) 2009-03-05
EP2191230A1 (en) 2010-06-02

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