NL8300443A - HIGH VACUUM PROCESSING MODULE. - Google Patents

Description

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Nodule for high vacuum processing

In the Dutch Patent Application No. 8 203 318 of the applicant modules are indicated, in which processing takes place under high vacuum.

In these modules there are a number of conveyors, in which a 'floating' transport of substrates is obtained and maintained with the aid of gaseous medium.

It is indicated here that on the processing side at least a large part of the gaseous medium is extracted in the lateral direction by a vacuum pump arrangement.

The module according to the invention now indicates some additional detailed constructions.

In the processing under very high vacuum, such as 10 bar, it is necessary that the transport medium, which is used in the conveyors for transporting the substrates with the aid of gas cushions, is not impermissibly the very critical processing taking place in this module can disturb.

The module according to the invention is now characterized in that in at least the conveyor sections, which are located on the processing side, on either side of the supply block, in which the supply of transport medium to the central passage for the substrates included in these transporters is provided. takes place, drains are included, which at its entrance are in open communication with this passage and on the other side are connected to the module space to the side of the processing space.

In addition, these channels are substantially leak-tightly separated from this processing space by means of walls on the side of such a conveyor section, if a substrate is present in the conveyor pass during processing.

These spaces are each connected to a high vacuum pump by openings in the side walls of the module and wide discharge pipes.

Thus, on this processing side, the then minimal amount of gaseous transport medium is immediately extracted.

The side walls of the discharge channels can be joined together as a cap and then serve as a shield for such a feed block to collect impurities and process material, such as metal particles and removed particles from the substrate surface.

Another very favorable feature of these walls is that as they extend at least near the imaginary extension of the passage wall of the feed block, the portion thereof, which is an 8300443

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- 2 - forms a passage wall section, is broadened with respect to the adjoining residual part of these walls.

The heat supplied to the substrate during the previous processing can thus be dissipated via this wall. The flow resistance for the medium leaking from such a channel is thereby also greatly increased, and the gap between the passage walls of the conveyor and the side wall can thereby be increased. of the substrate are larger.

With a passage width of 3 mm for such a channel and a width of 40 micrometers for the passage between this wall and the substrate, an approximately 10,000 times greater flow resistance for the gaseous transport medium can thus be obtained in this passage.

As a result, a leakage of this medium to the process space is almost completely prevented and the minimal amount of leaking medium 15 can easily be extracted from the process space, partly through the common drains, and this without disturbing the processing.

Being able to maintain a pressure which is considerably higher with respect to the process vacuum in these channels also ensures that the leaking transport medium prevents impurities and processing particles from entering this passage section and on the passage wall of the protective cap can precipitate.

Furthermore, the highly critical passage wall section of the feed block thus also remains free from such impurities and metal deposits.

A favorable form of the channel wall is that the wide passage wall portion thereof extends at a small angle of inclination to the adjoining narrow side wall section;

Hereby it is obtained that the distance between this passage wall section and that of the feed block can be small, for instance less than 1 mm. This is of great importance for minimizing the dimensions of the combination of feed block and protective cap in the direction of movement of the substrates.

It is important that the deformations of the conveyors as a result of heating and cooling during processing remain minimal,

A further favorable feature is that the supports, which? 35 are disposed to the side of the conveyors, are also designed as cooling elements and at least partly ensure the necessary cooling of these conveyors, and heat is supplied to the passage side via the substrates at least at the conveyor sections on the processing side approximately equal to the heat input to the opposite non-passage 8300443 yes - 3 - «4 * side thereof.

Furthermore, seen in the direction of movement of the substrates, the conveyors can widen in the direction of their attachment to the supports as a cooling element, whereby on the one hand the heat transfer capacity is increased and, on the other hand, an effective attachment is achieved.

When processing under high temperature, 350 - 500 ° C, such as for example in anisotropic etching and microwave metal sputtering, the temperature of the substrate must be virtually the same on both the process-side and the non-processing side during processing. are to prevent excessive deformation of these substrates due to differential expansion.

A favorable feature of the module is now also that, just as the process side of the substrate is heated during processing by the process medium, the non-processing side of the substrate is also heated, for example for a microwave or infrastructure. -red heating can serve.

Thereby cooling takes place in both the upper and lower sections of the conveyors after a short-term processing.

This ensures that, when using 30-100 conveyors with intermediate gene processing spaces, the temperature fluctuations in the substrate are very small and completely permissible.

Furthermore, the temperature of the conveyor sections on the processing and non-processing sides remains virtually the same.

The processing space can thus remain free of cooling elements, on which impurities and metal particles could deposit.

If a stronger cooling of the conveyor sections is to take place, the supports can be connected to each other as a cooling element via cooling channels incorporated in these conveyor sections.

The use of the transport medium in compressed form as a cooling medium, with the medium supply channels in these conveyors being connected thereto via narrow injector channels.

The transport medium supplied at the bottom of the passage mainly serves to maintain the gas cushion, which carries such a substrate with a relatively high consumption thereof.

Due to the greatly reduced amount of leaking medium from the conveyor channels to the processing space and the greatly increased direct discharge of this medium, processing can take place at the bottom of the pass.

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As a result, impurities from the processing on the substrate surface are greatly reduced during processing.

Furthermore, in these conveyors use can be made of the in the Netherlands patent application no. Porous segments indicated by the applicant for supplying the gaseous medium to the passage.

In the conveyors, the substrate surface can be cleaned with the aid of the gaseous medium. The processing on the underside of the substrate passage also removes loose substrate particles by gravity.

Thus, it is now also possible for a continuous series of substrates to be passed through the module for processing thereof, whereby the loosened particles on the contact surfaces of these substrates are then efficiently discharged and thus not adversely affected. affect processing.

In extremely critical processing, however, it is also possible that the substrates are fed separately through the processing space of the module. 2Q Thereby, a favorable embodiment of the module is provided, in which a stop is always introduced in the passage, against which a substrate comes to rest, while a previous substrate is released by this stop. j

Due to a slightly higher speed of this previous substrate, this stop then has the opportunity to move to its stop position in the free space created for the next substrate. [

Use can then be made of the porous material and in which case a gas flow from this stop serves as a buffer for avoiding mechanical contact of the substrate with this stop.

The following favorable features follow from the description of the Figures indicated below.

Figure 1 shows the module according to the invention in a cross-section.

Figure 2 is a partial cross section of the module of Figure 1 over its processing space.

Figure 3 is a partial cross section of the module of Figure 1 over its conveyor section.

Figure 4 is a partial longitudinal section of the module following Figure 1 over a number of successive conveyor sections thereof.

Figure 5 is a partial longitudinal section of the module according to 8300443 - 5 - m 4 Λ

Figure 1 using an additional protective cover construction for the conveyors.

Figure 6 is an enlarged cross-sectional view of two successive conveyors, which may be incorporated in the module of Figure 1.

Figure 7 is an enlarged detail of the passage of the conveyor storage of Figure 6.

Figure 8 is an enlarged detail of the mounting of the conveyors of Figure 6 on the side carriers.

Figure 9 shows a detail of a conveyor section with a po-10 giant segment.

Figure 10 shows an enlarged detail of a conveyor section with another embodiment of the porous segment.

Figure 11 shows an enlarged detail of a conveyor section with a segment, in which feed channels for the transport medium are etched only in its side wall.

Figure 12 is a longitudinal section of the conveyor section of Figure 9.

Figure 13 shows a detail of a conveyor at its location on the side carrier.

Figure 14 shows a detail of a conveyor section in which feed channels are incorporated in the side wall of the porous segment. ί

Figure 15 is a plan view of a conveyor arrangement, · i in which a stop occurs between two successive conveyors; finds a substrate resting against it. Figure 16 is the arrangement according to Claim 15, wherein the stop is brought out of the passage. «

Figure 17 shows the arrangement according to Figure 15 in a longitudinal section over successive conveyors. : -

Module 10 is indicated in Figure 1. In this module is located the conveyor arrangement 12 with lower section 14 and upper section 16 and intermediate passage 18 for conveying the substrates 20 therethrough;

In the lower part 22 of this module there is at least one generator 24 of process medium for obtaining plasma, ions, electrons, etc. for high vacuum processing, such as ion implantation, ion milling, plasma etching, electron beam metal deposition, etc., with associated parts, such as "targets", guide electrodes 26, which may or may not be located in the processing space 28 8300443] * £

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+ * i t - 6 - at the bottom of passage 18.

Within the scope of the invention, any form of high-vacuum and other processing is possible using the indicated transport arrangement for the substrates.

5 In the side walls 30 and 32 of the module 10 are the openings 34 and 36, to which the pipes 38 and 40 of the respective high vacuum pumps 42 and 44 are connected, see also Figure 5. Via these pumps mainly transport medium is removed from the processing side of the module.

The non-processing side 46 of the module is connected via the line 48, wall lead-through 5Q and line 52 to the high vacuum pump 54 for also mainly conveying transport medium.

In the Figures 2, 3 and 4 the conveyor sections 14 are indicated in more detail.

The conveyor housing 56 contains the segment 156, which is made of porous material for supplying gaseous medium 98 from passage side 58 and via injection channel 60, feed line 62 and common channel 64 to passage 18,

The conveyor housing 56 is surrounded by the hood 66 with the side walls 68 and 70 to form the respective discharge channels 72 and 74.

The medium pushed to passage 18 is sucked by the high vacuum pumps 42 and 44 through these channels along the substrate 20 and brought to the two module spaces 76 and 78 to the side of the processing space 28 for further extraction thereof. ends 80 and 82 of the conveyor housing 56 allow a good fastening of this housing and ensure a good conduction of heat from this housing to the side carriers 58 and 84.

These carriers are passed through the transport medium 98 as cooling elements under high pressure.

In Fig. 6, a conveyor arrangement 12 'is shown with the cooling duct 86 accommodated in the conveyor housing 56' for passing through it under high pressure of the cooled transport medium 98. The common duct 64 is connected via the injection piece 88 with an extremely narrow passage 90 connected to this channel.

The cap 66 is clamped onto the housing 56. The passage wall sections 92 and 94 are connected to the clamping section 96 of this hood by means of the side walls 68 and 70. The wall sections are further chamfered to facilitate a discharge of medium from passage 18 to channels 72 and 74. The channel 72 is thereby kept spacious with a passage width 8300443 »* - 7 - t of, for example, 3 mm.

Due to the chamfer of the passage wall section 92, a very low flow resistance for the transport medium is possible therein, and this is partly due to the very small length of such a channel of, for example, only 50 mm.

Between the passage wall section 92 and the passing substrate 20, a narrow gap of the size of, for example, 40 micrometers can be maintained, wherein in combination with a relatively large throughput length for the gaseous medium in the passage section 100, a considerable flow resistance 10 for the transport medium 98 is accomplished.

This resistance can thereby be approximately 10,000 times greater than the resistance of channel 72, which practically prevents leakage of the transport medium, -4

In this channel it is thus possible to maintain an underpressure of, for example, 10 bar, without this having an adverse effect on the processing in space 102, where the high vacuum can amount to approximately 10 bar and in -10 special cases even 10 bar,

Via the channels in the porous segment 156 and supplemented with channels 104, discharge of this medium from the common channel 64 takes place mainly to the narrow passage section 106 and from there to the outlet channel 72, *.

Channel 74 finds drainage of this transport to a lesser extent. medium 98, because passage section 108 is also narrower than passage - section 106.? tr 25 Thus, by pushing the medium in the direction of movement,

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of the substrates by this medium has a driving force on the through- Carrying substrate 20 is exerted In the large surfaces of the passage wall sections of hood 66 and conveyor section 14, heat transfer from the process surface 110 of the substrate takes place, as this surface does in the previous process space by the location therein. finding processing has warmed up.

The lower part 112 of the conveyor section 14 is also heated by this process medium, whereby heat transfer from two sides to cooling medium 98 takes place. Due to the extremely small distance for the heat conduction, for example only about 6 mm, in combination with the heat conduction over the entire processing length of this section, the heat transfer is optimal with thus an extremely small temperature difference. between the passage wall sections 92 and 94 and this bottom section 112.

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As a result, hardly any deformations take place in both the conveyor section 14 and in hood 66 due to temperature differences, which is very important for the extremely narrow passage for the substrates with the micro passage gaps between these substrates and the conveyor sections.

Against the underside of the hood 66 there are still one or more removable shields 114 for collecting process medium therewith, such as metal particles. Such a shield can have any shape and, if necessary, even envelop the entire hood up to passage 18.

This shield can also serve on the sides of the processing space for a complete or partial shielding of the adjacent module spaces 76 and 78 and thus also for a complete or partial closure of these spaces of the module space 22, as shown in Figure 5.

The conveyor section 16 located above has substantially the same construction with, however, the feed channel system 60, 62 and 64 for the segments 156 contained therein.

Above these conveyor sections 16, an electrode plate 116 is arranged to attract process medium thereon, which has passed through the processing spaces 102, without hitting a substrate, see also Figure 1.

At high processing temperatures, it is desirable that during this processing, the conveyor sections 14 and 16 have a substantially the same temperature in order to prevent distortions in these sections.

For this purpose, in this module, one or more ovens 170 are included in the non-processing side 46, which heat these conveyor sections 16 such that their temperature is approximately equal to that of the sub-conveyor sections 14.

Then, for both conveyor sections, substantially the same cooling method, with or without cooling channel 86 in these sections.

In Figure 7, yet again such a conveyor at the location of the passage is shown in an enlarged manner. The differences in dimensions between the various passage slits and channels are clearly expressed in this connection.

The substrate 20, which moves only relatively slowly, for instance 10 mm per second, means that the substrate wall, which has often been roughened by the previous processings in other processing equipment, also serves as a braking surface for the via-section 106 8300443 t -5 .

- 9 - escaping medium.

Even at an escape rate of 50 mm per second at 10 bar, the amount of medium escaped is still extremely small, for example 3,200 mm per second, giving the negligible amount of 0.2 liters -8 per second at 10 bar per conveyor section. This in view of the available suction capacity of the pumps of even higher than 5000 liters per second,

In Fig. 8, the attachment of such a conveyor arrangement 12f to the side carrier 58 is again shown enlarged. With the aid of flows of medium from the obliquely placed channels 118, see also Fig. 14, the substrate 20 thereby becomes in the middle position kept away from passage 18, because its off-center equals the equalizing forces of these flows of medium on the substrate,

In the side wall 30 of the module the passage 180 is incorporated, through which a part of the transport medium on the non-processing side is sucked by a high-vacuum pump,

In Fig. 9 another form of the porous segment 156 'is indicated, in which for a larger part 120 it forms a passage wall section. The substrate moving along it immediately comes to rest on the gas cushion, which flows through the flows. medium is continuously maintained through the porous material.

The top surface thereof can be partially covered with a sealing layer 122, as is also indicated in Figure 12. Hereby it is possible to have a maximum passage for the medium in the middle section 124 thereof, while this passage gradually decreases towards the sides 126; and 128.

The consumption of medium can be limited by means of such a passage restriction.

By means of the retaining edge 130 of the housing 56 'in combination with the recess 132, which is incorporated in the side wall of the segment, an enclosure of this segment is obtained in the direction towards the passage after its insertion in the housing,

In Figure 10, this porous segment is shown in yet another form 156 "- thereof, wherein the channel 64" extends with a section 134 to the side of the segment with a section 134 to the bottom end 120 "of this segment.

As a result, transport medium can be more easily discharged via the short piece 136 of the porous material, with possibly even auxiliary flows via channels 138, which are shown on the side of this section 136. These channels can then also be placed obliquely, such as the channels 118 indicated in Figure 14.

Any kind of material can be used for the porous segment, such as Teflon for low process temperatures and stainless steel for processing under high temperature, such as 500 ° C.

In Figure 11, segment 156111 is made of solid metal or other material, with channels 118T * * etched into its sidewall, with the outlet of these channels in feed channel 64M '.

In Figure 13, the porous segments 140 and 142 extend to the side supports. In addition, the side wall sections 144 fill the passage space 146 on either side of the centrally located passage portion 18.

The medium 98 supplied by these segments 140 and 142 flows to an increased degree via the wall section 148 into the passage section 18, thereby effecting a gas cushion sufficient for the substrates such that mechanical contact of these substrates with the wall section 148 is avoided.

The buffer stop 150 is included between the successive conveyor arrangements 12 in Figure 15, see also Figure 17.

In the indicated rest position, substrate 152 rests against the gas cushion of the buffer walls 154 and 156. Such a cushion is thereby effected on command and maintained via the porous material of this stop.

The gas flow via this buffer is so large and concentrated that no mechanical contact of the substrate with this buffer is possible. Instead of the porous material, a deposit is also possible, where in a segment with channels incorporated in its side wall lined up.

The present substrate 158 is given the opportunity to move from this substrate 152. After reaching a certain intermediate distance, the stop is then moved in an upward direction by some distance, so that substrate 152 can follow the previous substrate 158.

In another embodiment, this displacement takes place in the lateral direction.

Such a displaced stop is shown in Figure 16, wherein after some time this substrate 152 has been moved under the stop, so that the stop can again be brought to its rest position to stop the subsequent substrate.

Because the substrates with the aid of the transport medium supplied via the conveyors independently with a slightly higher degree;

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In order to be able to move velocity, a separate throughput of these substrates is thus obtained through the processing space of the module.

Such a stop arrangement is thus at some distance from the module section in which processing takes place.

It is important that the discharge for the transport medium from the conveyor section on the processing side does not also serve for the discharge of the transport medium from the conveyor sections on the non-processing side.

This is because the consumption of these second sections of gaseous medium can be considerably larger and it can affect the discharge capacity of the discharge channels to such an extent that this vacuum cannot be achieved in critical processing under very high vacuum.

In Figure 1, a sufficient separation of the processing side from the non-processing side has been obtained, partly with the aid of the walls 162 and 164, optionally in combination with side wall sections 144 of the segments 140, see Figure 13.

The suction shown in Figure 8 on either side of the passage also effects such separation.

Within the scope of the invention, any type of processing is possible with also variations in cooling, discharge and cleaning of the process transport medium. The removal of contaminants can for instance take place with the aid of water screens or similar structures, which are placed in the drains to the vacuum pumps or not. i

Furthermore, the module can also process tape as an uninterrupted! »25 a series of substrates take place, j

It can also contain more than one type of processing in succession; sections of it.

It is also possible that in the module, or in the supply or discharge thereof; a substrate in a section thereof can be brought laterally out of the passage, for which purpose flows of gaseous transport medium can be useful, whether or not in combination with a guide wall, which can be commanded from its rest position with opened passage in a ge leadership position in this passage.

For this purpose, if desired, a large number of gas flows from feed blocks, which are located between successive conveyor sections, can also act on the substrate, at least temporarily, if desired.

Within the scope of the invention, these substrates can be transported by means of force forces exerted on them by the flows. [8300443 | (t - 12 - medium in the subsequent conveyors are moved independently, with systems in this module and possible supply and discharge available, to control the speed of their displacement per group of conveyors.

For this purpose, in at least some conveyor sections, through a modified form thereof, the transport medium flowing therethrough to the passage can exert a resulting force on the substrate moving through this passage section, which is opposite to the direction of movement of this substrate.

In addition, such a force action can be controlled by controlling the supply of the transport medium. Sensors are then incorporated in the module, which control the speed of such a substrate and provide corrective signals to the valves in the supply of the transport medium.

In order to be able to properly follow the substrates during their movement, an orientation means, such as a layer of metal, can be provided on these substrates at least locally for accurately determining their subsequent positions per time unit in cooperation with the sensors. Thus, if necessary, adjustment of the substrate feed speed can be made.

Such an orientation agent can be applied to the non-planar, thin side walls of the substrate and thus do not interfere with the processing.

The speed control sensors and other sensors may be arranged in the non-processing side of the module and / or ds supply and return, with a working area thereof between the succeeding conveyor sections.

In order to counteract contaminants from these sensors as much as possible, they can then preferably have a position in the spaces aside from the extension of the processing space.

Furthermore, in this module, the testing and measuring of the substrates can also take place when they are stationary, for which purpose the buffer stops indicated in Figure 15 can also be used in their adapted form.

Such testing or measuring can then take place in, for example, 0.5 seconds, without the subsequent substrates moving at some distance from each other touching each other.

However, the test and measurement section, which is located in front of the processing space, viewed in the direction of movement of the substrates, is then located at least at a substrate length of this space, so as not to affect the processing in a negative sense.

Within the scope of the invention, other and possibly additional systems for control, testing and measuring and sorting are also possible.

Also, in the module at least locally a flotation 1 transport 8300443 - 13 - can be effected using a conveyor arrangement on only one side of the passage, 8300443

Claims (92)

1. Module for processing of supplied substrates or tape and at least consisting of a series of conveyors for a "floating" transport in a passage of these substrates and which are arranged successively in the direction of movement of the substrates with intermediate sections 5 of the module incorporated processing space, characterized in that it further comprises means for laterally removing at least a part of the gaseous transport medium escaping via these conveyors to this processing space. 2. Module according to claim 1, characterized in that such a conveyor arrangement consists of at least one conveyor section on the processing side of this passage. Nodule according to Claim 1, characterized in that such a conveyor arrangement consists of at least one conveyor section on the non-processing side of this passage. Module according to any one of the preceding Claims, characterized in that such a conveyor arrangement consists of at least one supply block for supplying a gaseous medium to it. corresponding passage section, such that at least during the. processing between these conveyor sections and the substrates moving along it. 2Q a "floating" gas cushion for these substrates is established and maintained. Nodule according to one of the preceding Claims, characterized in that, in this conveyor arrangement, a conveyor section is included on the processing side of the passage, a second conveyor section is also included on the non-processing side of this passage. and each comprising at least one supply block for supplying gaseous medium to the passage section located between these sections, such that at least during processing between these conveyor sections on either side of the substrate moving past it becomes a "floating gas cushion for this substrate. accomplished · Nodule according to any one of the preceding Claims, characterized in that at least one discharge for gaseous medium discharge from this module is connected to the module section, which is located on the processing side. 35 Nodule according to Claim 6, characterized in that for that purpose there is a communication space on the processing side of the passage on either side of the processing space for discharging the gaseous medium through it, 8300443 - 15 - Nodule according to Claim 7, characterized in that it further comprises means such that, during processing, the discharge of the gaseous transport medium supplied to the processing side via the conveyor sections located therein is likewise for at least the largest. part of it on this side takes place in the lateral direction. 5 Method of the module according to Claim 8, characterized in that the discharge of the gaseous medium supplied via the conveyor sections on the processing side for at least most of it takes place in the lateral direction via at least one discharge, which is connected on the module section, which is on the processing side. 10. Module according to claim 8, characterized in that as on the processing side of the passage there is a communication space on either side of the processing space, therein the outlets of the conveyor sections which are connected to the processing side, open. Nodule according to Claim 10, characterized in that it is further designed in such a way that the discharge of the processing space sections also lead to these communication spaces. Nodule according to Claim 10, characterized in that these communication spaces are connected to passages which are incorporated in the side walls of the module section on the processing side of the passage. Nodule according to any one of the preceding Claims, characterized in that: such a passage on the other side thereof is connected to a subsequent discharge section. 14. Module according to claim 13, characterized in that means are included in this discharge for removing contaminants from the discharged gaseous medium. Nodule according to Claim 12, characterized in that the discharge is connected via pipes to at least one high-vacuum pump, 3Q 16. Nodule according to one of the preceding Claims, characterized in that such means are incorporated in the non-processing side thereof. that at least the gaseous transport medium supplied via this conveyor section takes place during the processing. Nodule according to Claim 16, characterized in that for this purpose the 33 discharge system consists of at least one communication space, into which at least the discharge from the conveyor sections located on this non-processing side opens and this communication space is connected via discharge pipes to at least one vacuum pump . ____ 8300443 - 16 - A module according to Claim 17, characterized in that means for separating contaminants are included in these pipes. Method of the module according to any one of the preceding Claims, characterized in that during the processing of the substrates the discharge of medium on the processing side is so great that substantially no discharge of medium takes place to the non-processing side. 20. Module according to Claim 8, characterized in that a wall is included in this module on either side of the central passage section, so that at least the separation of the processing side 10 from the non-processing side becomes thereby. 21. Module according to any one of the preceding Claims, characterized in that in this module further means are included such that the discharge of the transport medium from the conveyor sections present in the processing side is at least locally and depending on the position of the conveying substrates is substantially separated from the outlet of the gaseous medium, which is located in the processing space sections. 22. Module according to Claim 21, that in at least the conveyor sections on the processing side, the feed block is further provided with such; Some walls on either side thereof, which are in open communication with the passage 20, provide drainage channels for at least a partial discharge of the gaseous transport medium to the side of this block. Module according to Claim 22, characterized in that these walls extend over some distance into communication spaces located to the side of the processing space. 24, Module according to Claim 23, characterized in that the discharge channels on the side of the feed block are in open communication with these communication spaces. 25. Module according to any one of the preceding Claims, characterized in that the walls to the side of the feed block extend to at least near the imaginary extension of the passage wall section of this feed block to form additional passage wall actions. 26. Module according to Claim 25, characterized in that, of at least the wall, which, viewed in the direction of movement of the substrate, is situated for such a feed block, the part containing the passage wall section has a greater width. than the adjacent wall section. 27. Module according to Claim 26, characterized in that the wall arrangement in combination with the feed block is further designed such that, viewed in the direction of movement of the substrates, the channel before the feed block is wider than the channel after this block. 8300443 "- 17 - 28. Module according to claim 26, characterized in that the wall section containing the passage wall section is widened in the direction towards this block. 29. Module according to Claim 28, characterized in that this basket section is chamfered with a start of the chamfer, which is located at least near this passage wall section, 30. A module according to claim 29, characterized in that the communication opening between the wall section containing the passage wall section and the feed block is larger than 0.3 mm. 31. A module according to claim 30, characterized in that the largest width of the discharge channel, seen in the direction of movement of the substrates, located before the supply block, is greater than 1 mm. 32. Module according to Claim 31, characterized in that it is furthermore designed in such a way that the intermediate passage at the location of the supply blocks is of such a height that the gap is wide at each position of the two conveyor sections on either side of the passage. - between the passage wall sections and the substrate is less than 0.1 mm. 33. A module according to any one of the preceding Claims, characterized in that the walls on the side of the feed block form part of a cap which is fixed on this block. 34. A module according to claim 33, characterized in that the block for the purpose of placing this cap on it at the location of this attachment has a width which is less than the width of the passage wall section of the block together with the two communication openings to the side of it. Module according to Claim 34, characterized in that a channel for the gaseous transport medium is included in this widened section. 36. A module according to Claim 35, characterized in that it is furthermore designed in such a way that medium flows from a channel in a carrier to the side of the conveyor sections via the conveyor channel to a channel which is accommodated in the carrier. the other side of these sections is located. 37. Method of the module according to Claim 36, characterized in that during this process transport medium, which flows through at least the channel included in such a conveyor section, ensures the cooling of this section. 38. Module according to Claim 35, characterized in that a segment is fixed in this block, a wall part of which forms a passage wall section, channels are included in this segment, which lead into the passage and are connected at its entrance to a common 8300443 - 18 - supply channel, which is included in this block and which communicates with the channel in the widened section of this section. 39. Module according to Claim 38, characterized in that this connection consists of a very narrow channel, which is received in a tube. Module according to Claim 34, characterized in that a segment is fixed in this block, a wall part of which forms a passage-wall section, channels are included in this segment, which terminate in the passage and are connected to its entrance to a common feed channel, which is also included in this block, and this channel communicates with a feed channel, which is located in a carrier for the conveyor section. Nodule according to Claim 38 or 40, characterized in that this segment consists of porous material. Nodule according to Claim 41, characterized in that this material is stainless steel. 43. Module according to any one of the preceding Claims, characterized in that, viewed in the direction of movement of the substrates, this segment at the front thereof is provided with means such that the transport medium flows more easily through this front to the passage. then through the rest of the segment. 44. Module according to claim 43, characterized in that for this purpose the common supply channel extends on this side with a portion thereof some distance to the side of this segment in the direction of the passage wall section. 45. Module according to any one of the preceding Claims, characterized in that the feed block on both sides of the segment also forms a wall passage section and wherein, viewed in the direction of movement of the substrates, at least the wall section for the segment is removed some distance from the imaginary extension of the passage wall section of the segment. Nodule according to Claim 45, characterized in that this wall section of the feed block is further designed such that, from the segment, it offers an at least locally increasing passage width for the passing substrate. 47. Module according to claim 46, characterized in that the wall section for the segment extends some distance further from the imaginary extension of the passage wall section of the segment than the wall CO section after this segment. Method of the module according to any one of the preceding claims, characterized in that, in the discharge channel, which, viewed in the direction of movement of the substrates, is situated in front of the supply block, the pressure of the transport medium is lower than in the discharge channel at the rear of the feed block. - 19 - 49. Module according to any one of the preceding Claims, characterized in that the construction of the conveyors is further such that in both sections thereof the flow resistance is greater than the flow resistance of the maximum discharge gap, between the passage wall section of the 5 therein included feed block and the substrate. A module according to Claim 49, characterized in that the flow-through resistor for the gaseous medium in such a section is greater than that of a discharge gap between the passage wall section of the feed block included therein and the substrate with a width of 10 micrometers. jg 51. Module according to Claim 50, characterized in that this resistance is such that in the common supply channel of medium for the segment included in the block with discharge channels included therein, a pressure of at least 0.005 bar becomes to maintain. 52. Method of the module according to Claim 51, characterized in that Ί5 that during the transport of substrates by the conveyors at a locally minimum gap width between conveyor sections and the substrate of 2 micrometers the thrust in the gap section, adjacent to the segment rises to at least 0.005 bar. 53. Method of the module according to Claim 51, characterized in that the thrust in the common medium supply channel in the feed block, which is included in the conveyor section on the non-processing side, is greater than that in the feed block, which is included in the conveyor section on the processing side. 54. Module according to any one of the preceding Claims, characterized in that it is further designed in such a way that the passage in the conveyors offers a relatively wide passage for the substrates with a total height thereof, which is at least 50 micrometers larger than that of the substrates to be passed through, 55. Module according to Claim 54, characterized in that, viewed in the direction of movement of the substrates, the width of the passage wall section of the feed block on the non-processing side is greater than the width of the feed block on the processing side. 56. A module according to any one of the preceding Claims, characterized in that the processing side of the module is located below the passage for the substrates. 57. A module according to any one of the preceding Claims, characterized in that it is further designed such that, as heat is supplied to the substrate during processing, the successive conveyors ensure that these substrates are cooled so that their temperature is within permissible limits. 8300443 - 20 - 58 Module according to Claim 57, characterized in that the carrying parts on either side of the conveyors are designed to function as cooling elements for this purpose. Module according to Claim 58, characterized in that, as the 5 feed blocks of the conveyors are mounted on these carriers, these blocks are widened in at least the longitudinal direction of the passage at the location of this mounting, 60, A module according to Claim 58, characterized in that a space is included in at least one of the support pieces with feed and discharge feed for passage through the gaseous transport medium under high pressure as cooling medium. 61, Module according to Claim 60, characterized in that a transfer channel is included in such a conveyor section, which connects the common supply channel for the segment included therein to a channel in this support piece, which opens into this cooling space, 62, Module according to Claim 61, characterized in that this channel in the support piece is extremely narrow and is incorporated in a pipe section, 63, A module according to any one of the preceding claims, characterized in that in the case of the conveyor sections on at least the processing side, viewed in the longitudinal direction of the passage, the caps, which are mounted on their supply blocks, have such a width with respect to those processing space sections situated between these conveyor sections, that during the processing the heat transfer to these hoods through the process medium is substantially equal to the heat supply of this medium to the substrates, 64, Module according to Claim 63, characterized in that such a conveyor section is further designed such that the heat-transferring capacity of the passage wall sections of this hood is greater than that of the feed block, 65, Module according to one of the preceding Claims, characterized in that, as heat is supplied therein to the substrates during the processing side, at least one heat source is also included on the non-processing side for heating the conveyor sections on this side, Module according to Claim 65, characterized in that this heat source is an infrared or microwave oven, Method of the module according to Claim 66, characterized in that during the processing by these furnace (s) at least substantially; the same amount of heat is supplied to the conveyors as through the process medium. _ 8300443 ------- - 21 - 68. Module according to any one of the preceding Claims, characterized in that a removable shield construction is arranged on the processing side in the immediate vicinity of the conveyor sections for guiding the process medium to the processing space sections between the 5 conveyor sections. and depositing process medium on it. 69. Module according to Claim 68, characterized in that these screening constructions extend in transverse direction of the passage, so that process medium can hardly reach the conveyor sections · 70. Nodule according to Claim 69, with characterized in that this cap is a closed wall with openings therein provided for passage of the process medium to the processing space sections between the conveyor sections. 71 module according to Claim 70, characterized in that this cap 15 extends transversely into the communication spaces on either side of the processing space. Module according to any one of the preceding Claims, characterized in that this hood is mounted on the conveyor sections in such a way that heat transfer thereof to these conveyor sections can take place. 73, module according to any one of the preceding Claims, characterized in that, as a porous segment is included in the feed block of a conveyor section, it extends up to the supports and parts thereof to fill the passage space to the side of the substrate passage by at least some distance, A module according to Claim 73, characterized in that such passage sections of the segment are also connected to the common supply channel for this segment. 75, Module according to Claim 74, characterized in that a narrow passage for the substrates is provided between these passage parts. 76. Method of the module according to Claim 75, characterized in that the gaseous transport medium flowing from the passage side wall during processing ensures sufficient guiding of the substrates without mechanical contact. Module according to any one of the preceding Claims, characterized in that it comprises means for correctly functioning at least one of the following processings: 3300443 - 22 - ion beam deposition, plasma deposition, plasma etching, sputter etching, sputter deposition, ion milling, CVD systems, chrome etching, electron beam annealing? ion implantation, electron beam deposition, high vacuum evaporation, reactive ion etching and so on. 78, Module according to Claim 77, characterized in that means are included therein for correctly guiding the process medium or several process media to the substrates, such as electrodes and the like. 79. A module according to any one of the preceding Claims, characterized in that on the non-processing side at least one electrode plate is incorporated for attracting process medium, which has passed through the process space section between the successive conveyors. 80. Module according to Claim 79, characterized in that slits are included in this plate for the purpose of discharging at least the gaseous transport medium. > 81. Module according to Claim 80, characterized in that these slits are furthermore large enough to allow sufficient rays from the furnace (s) to pass through for heating the conveyor sections. 82. Module according to any one of the preceding Claims, characterized in that the segments of the conveyors on at least the processing side are designed such that, viewed in transverse direction of the passage, their flow-through resistance for the gaseous transport medium from the central section decreases sideways. 83. Module according to Claim 82, characterized in that, as for these segments use is made of porous material, this segment on its side, which is connected to the common supply channel, is locally provided for this purpose. a sealing covering layer, which at least on site makes the passage of medium through the porous material at least more difficult. 84. A module according to claim 83, characterized in that this layer, viewed in the direction of movement of the substrates, is located on the rear portion of such a segment. 85. Module according to any one of the preceding Claims, characterized in that channels are etched in the side wall of the porous or non-porous segment, which are inclined towards the center of the passage 35 for the substrates. 86. A module according to any one of the preceding Claims, characterized in that means are included in at least one section thereof or in the supply or discharge of this module for at least temporarily stopping a substrate on site. 8300443 - 23 - A module according to Claim 86, characterized in that a buffer block arrangement is arranged in such a section between successive conveyors for thereby temporarily closing at least a part of this passage, 88. Module according to Claim 87, characterized in that a buffer block section is located on either side of the center of the passage, each of which is connected outside the passage, 89. Module according to Claim 88, characterized in that that channels for gaseous medium are arranged in such a buffer block section and these channels are connected via a command valve to a supply for the gaseous medium, 90, module according to Claim 89, characterized in that such a section exists from porous material. 91 module according to Claim 86, characterized in that it comprises means for <15 displacing this buffer block arrangement *. 92. Method of the module according to any one of the preceding Claims, characterized in that, after a passing substrate, this buffer block blocks the passage for the next substrate, simultaneously a flow of gaseous medium through this block in the direction of the next substrate is propelled for buffering of this substrate until it is in a rest position thereof against this block and in which a mini gas cushion is maintained under high pressure between this block and the substrate and then, after reaching a sufficient intermediate distance to the previous substrate, this substrate can move independently by moving this buffer block. 93. Method of Claim 92, characterized in that the thrust of the transport medium in the conveyors, which are located in the direction of movement of the substrates of this buffer block arrangement, has a greater speed of movement of the sub-conveyed through it. 30 streets then effect the speed of the substrates moving behind this arrangement. 94. A module according to any one of the preceding Claims, characterized in that means are included in at least a section thereof to permit, if desired, a displacement of a substrate laterally out of the passage, 95. Module according to any one of the preceding Claims, characterized in that means are included in the supply and / or discharge sections thereof to enable, if desired, a displacement of a substrate in the lateral direction from the passage. 8300443 - 24 - 96. A module as claimed in Claim 94 or 95, characterized in that arrangements are arranged between a number of successive conveyors on at least one side of the passage in such a way that medium can be propelled therein towards the passage, which sideways on a conveying 5 substrate can act, 97. Method of the module according to Claim 96, characterized in that at least temporary flows of transport medium act on such a substrate and thus effect a lateral displacement thereof. 98, Module according to Claim 96, characterized in that a guide wall is also arranged in this section obliquely relative to the transit passage, which is designed in such a way that it runs from a rest position with a free passage of the passage, can be brought to a position in the passage, 99. Module according to Claim 98, characterized in that a large number of gaseous medium gushing channels are arranged in this guide wall. 100. Module according to Claim 99, characterized in that porous material is again used for this purpose in this guide wall, 101. Module according to any one of the preceding Claims, characterized in that the conveyors on one side thereof are open for some distance to the side of the passage such that discharge can take place in the lateral direction of the substrate, 102, Module according to one of the preceding Claims, characterized in that its design is further such that the thrust on the substrates is adjustable. A module according to Claim 102, characterized in that this thrust on the substrates is adjustable in groups of conveyor sections, 104. A module according to Claim 102, characterized in that at least some conveyor sections have a structure such that flows of transport medium from such a conveyor section result in a force action on the substrate, which is opposite to the direction of movement of the substrate. 105. Method of the module according to Claim 104, characterized in that control pulses are given during the processing by means of sensors, which at least locally determine the speed of the substrates, to valves which are included in the supply of at least one of the conveyor sections. 8300443 - 25 - 106. Substrate for its processing in the module according to Claim 105, characterized in that an orientation means is provided thereon for controlling such a feed in conjunction with the sensors. Substrate according to Claim 106, characterized in that such an orientation means is arranged * on its side with the lowest height. Substrate according to Claim 106, characterized in that such an orientation means is provided on its non-processing side. 109. Module according to any one of the preceding Claims, characterized in that, J, the sensors are included in the non-processing side to the side of the extension of the processing space, 110. Module according to any one of the preceding Claims, characterized in that it contains a section for testing, inspecting or measuring the substrates. Module according to Claim 110, characterized in that the module is designed in such a way that this can be done in the event of a temporary standstill of the substrate. 112. Module according to Claim 111, characterized in that for this purpose a buffer block arrangement is included in this section, which can temporarily block the passage on command J. 113. Method of the module according to Claim 112, characterized in that the standstill time is less than 0.5 seconds. 114. A module according to any one of the preceding Claims, characterized in that it comprises several arrangements for processing. 115. A module according to any one of the preceding Claims, characterized in that means are provided therein for simultaneous processing of at least two substrates viewed in transverse direction of the passage. 116. Module according to any one of the preceding Claims, characterized in that the conveyor section on at least the processing side® narrows in the direction of the processing source. 117. A module according to any one of the preceding claims, characterized in that it comprises means for temperature control, which ensure that the temperature of the substrate on the non-processing side is lower than on the processing side, Module according to Claim 117, characterized in that the adjustment is such that the temperature difference is a maximum of 10 ° C. 8300443