NL2033940B1 - Multi-stage extraction and recycling device and process for chemical polishing effluents - Google Patents
Multi-stage extraction and recycling device and process for chemical polishing effluents Download PDFInfo
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- NL2033940B1 NL2033940B1 NL2033940A NL2033940A NL2033940B1 NL 2033940 B1 NL2033940 B1 NL 2033940B1 NL 2033940 A NL2033940 A NL 2033940A NL 2033940 A NL2033940 A NL 2033940A NL 2033940 B1 NL2033940 B1 NL 2033940B1
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- vessel
- barrel
- unit
- extraction
- effluent
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Links
- 238000000605 extraction Methods 0.000 title claims abstract description 93
- 238000005498 polishing Methods 0.000 title claims abstract description 56
- 239000000126 substance Substances 0.000 title claims abstract description 53
- 238000004064 recycling Methods 0.000 title claims abstract description 45
- 238000000034 method Methods 0.000 title claims abstract description 17
- 230000008569 process Effects 0.000 title claims abstract description 14
- 239000003513 alkali Substances 0.000 claims abstract description 84
- 238000003860 storage Methods 0.000 claims abstract description 78
- 238000004140 cleaning Methods 0.000 claims abstract description 70
- 238000001704 evaporation Methods 0.000 claims abstract description 23
- 230000008020 evaporation Effects 0.000 claims abstract description 21
- 239000002253 acid Substances 0.000 claims description 74
- 239000002904 solvent Substances 0.000 claims description 55
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 claims description 45
- 239000007788 liquid Substances 0.000 claims description 37
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 37
- 235000011121 sodium hydroxide Nutrition 0.000 claims description 15
- 230000005484 gravity Effects 0.000 claims description 10
- 230000004888 barrier function Effects 0.000 claims description 9
- 230000000149 penetrating effect Effects 0.000 claims description 8
- STCOOQWBFONSKY-UHFFFAOYSA-N tributyl phosphate Chemical group CCCCOP(=O)(OCCCC)OCCCC STCOOQWBFONSKY-UHFFFAOYSA-N 0.000 claims description 8
- 239000003350 kerosene Substances 0.000 claims description 6
- 230000007246 mechanism Effects 0.000 claims description 6
- 238000007599 discharging Methods 0.000 claims description 4
- 239000004744 fabric Substances 0.000 claims description 4
- 238000002156 mixing Methods 0.000 claims description 3
- 238000001914 filtration Methods 0.000 claims description 2
- 239000003295 industrial effluent Substances 0.000 abstract 1
- 208000028659 discharge Diseases 0.000 description 26
- 239000000243 solution Substances 0.000 description 26
- 238000010586 diagram Methods 0.000 description 8
- 238000003756 stirring Methods 0.000 description 6
- 239000000047 product Substances 0.000 description 5
- 230000009467 reduction Effects 0.000 description 5
- 238000006722 reduction reaction Methods 0.000 description 5
- 239000003153 chemical reaction reagent Substances 0.000 description 4
- 239000010865 sewage Substances 0.000 description 4
- 241000196324 Embryophyta Species 0.000 description 3
- 241001397173 Kali <angiosperm> Species 0.000 description 3
- -1 alu- minum ions Chemical class 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 230000007613 environmental effect Effects 0.000 description 3
- 238000002360 preparation method Methods 0.000 description 3
- NBIIXXVUZAFLBC-UHFFFAOYSA-N Phosphoric acid Chemical compound OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 description 2
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- 235000010210 aluminium Nutrition 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 229910052698 phosphorus Inorganic materials 0.000 description 2
- 239000011574 phosphorus Substances 0.000 description 2
- 238000000926 separation method Methods 0.000 description 2
- 238000004381 surface treatment Methods 0.000 description 2
- 238000012876 topography Methods 0.000 description 2
- 101100400378 Mus musculus Marveld2 gene Proteins 0.000 description 1
- 238000004220 aggregation Methods 0.000 description 1
- 230000002776 aggregation Effects 0.000 description 1
- 229910000147 aluminium phosphate Inorganic materials 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000005282 brightening Methods 0.000 description 1
- 238000003486 chemical etching Methods 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000007865 diluting Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000012851 eutrophication Methods 0.000 description 1
- 239000002920 hazardous waste Substances 0.000 description 1
- XEEYBQQBJWHFJM-UHFFFAOYSA-N iron Substances [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 230000014759 maintenance of location Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 238000011084 recovery Methods 0.000 description 1
- 239000013589 supplement Substances 0.000 description 1
- 230000002459 sustained effect Effects 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F1/00—Treatment of water, waste water, or sewage
- C02F1/66—Treatment of water, waste water, or sewage by neutralisation; pH adjustment
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D11/00—Solvent extraction
- B01D11/04—Solvent extraction of solutions which are liquid
- B01D11/0488—Flow sheets
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D11/00—Solvent extraction
- B01D11/04—Solvent extraction of solutions which are liquid
- B01D11/0492—Applications, solvents used
-
- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F1/00—Treatment of water, waste water, or sewage
- C02F1/20—Treatment of water, waste water, or sewage by degassing, i.e. liberation of dissolved gases
-
- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F1/00—Treatment of water, waste water, or sewage
- C02F1/26—Treatment of water, waste water, or sewage by extraction
-
- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F2103/00—Nature of the water, waste water, sewage or sludge to be treated
- C02F2103/34—Nature of the water, waste water, sewage or sludge to be treated from industrial activities not provided for in groups C02F2103/12 - C02F2103/32
- C02F2103/346—Nature of the water, waste water, sewage or sludge to be treated from industrial activities not provided for in groups C02F2103/12 - C02F2103/32 from semiconductor processing, e.g. waste water from polishing of wafers
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P10/00—Technologies related to metal processing
- Y02P10/20—Recycling
Landscapes
- Chemical & Material Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Hydrology & Water Resources (AREA)
- Engineering & Computer Science (AREA)
- Environmental & Geological Engineering (AREA)
- Water Supply & Treatment (AREA)
- Organic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Extraction Or Liquid Replacement (AREA)
Abstract
The present invention relates to the technical field of industrial effluent treatment, and specifically discloses a multi—stage extraction and recycling device and process for chemical polishing effluents. The process includes the following steps: controlling a emical polishing effluent to enter a primary extraction unit and a raffinate to enter a secondary extraction unit, cleaning, by a cleaning unit, load phases obtained by the primary extraction and the secondary extraction, and controlling the cleaned load phases to enter a stripping unit for stripping. The device is provided with an outer barrel, an evaporation and concentration unit, and a solution recycling barrel, so efficient extraction of a chemical polishing effluent can be achieved in the device. Moreover, a raffinate obtained by the secondary extraction is treated by the outer barrel and an alkali storage barrel to repare a flocculant.
Description
MULTI-STAGE EXTRACTION AND RECYCLING DEVICE AND PROCESS FOR
CHEMICAL POLISHING EFFLUENTS
The present invention relates to the technical field of in- dustrial effluent treatment, and particularly to a multi-stage ex- traction and recycling device and process for chemical polishing effluents.
Chemical polishing is a method for eliminating wear marks, etching and levelling by selectively dissolving uneven areas of the surface of a sample by chemical etching of chemical reagents,
With the development of economic construction and urban expansion, people's living standards are improving day by day, and urban wa- ter consumption can no longer meet planning needs. Moreover, vari- ous chemical companies, surface treatment companies, and other manufacturers need to consume a lot of triacid. According to mar- ket research, in the anodic oxidation industry, the metal surface treatment industry, and other industries, triacid is used for lev- elling, brightening, etc., among which phosphoric acid accounts for about 70%. After a chemical polishing solution prepared during production is used for a period of time, the concentration of alu- minum ions, iron ions or some metal ionic impurities will continue to increase, resulting in an increasing viscosity of the chemical polishing solution, which will affect the polishing effect. There- fore, it is necessary to discard a partial tank solution and add a part of new acid to maintain the polishing effect of the tank so- lution.
Currently, there is no efficient method for recycling chemi- cal polishing effluents. The cost of chemical polishing effluent treatment by a qualified hazardous waste treatment company is high, if chemical polishing effluents are treated as sewage in a sewage plant, the load on the entire sewage plant will be too large, which is not conducive to reaching the standard stably for the sewage plant, especially it is difficult to reach the standard for total phosphorus. The discharge of total phosphorus to the ex- ternal environment is likely to cause eutrophication of a sewage- receiving water body and cause serious pollution to the external ecological environment. The existing methods for treating chemical polishing effluents are faced with the problems of low recovery rate or high device investment and operating costs.
An objective of the present invention is to propose a multi- stage extraction and recycling device and process for chemical polishing effluents to overcome the shortcomings in the prior art.
In order to achieve the above objective, the present inven- tion adopts the following technical solutions.
A multi-stage extraction and recycling process for chemical polishing effluents includes the following steps: step 1: filtering, by a filter, a chemical polishing efflu- ent, controlling the filtered chemical polishing effluent to enter a liquid storage barrel, the chemical polishing effluent in the liquid storage barrel to enter a primary extraction unit, an ex- tracted load phase in the primary extraction unit to directly en- ter a cleaning unit, and the remaining liquid to enter a secondary extraction unit for secondary extraction, similarly, controlling an extracted load phase in the secondary extraction unit to di- rectly enter the cleaning unit and the remaining liquid to enter a raffinate barrel for temporary storage, during the primary extrac- tion and the secondary extraction, controlling a solvent in a sol- vent barrel to enter the primary and secondary extraction units at the same time, and when the load phase is cleaned by the cleaning unit, controlling cleaning acid in a cleaning acid barrel to cir- culate into the cleaning unit for use; step 2: cleaning, by the cleaning unit, the load phase enter- ing the cleaning unit, controlling the load phase to enter a stripping unit for stripping, extracting, by the stripping unit, components containing dilute acid from the load phase, discharging the components containing dilute acid into a dilute acid barrel, discharging a part containing the solvent into a solvent recycling barrel, controlling a dilute acid solution in the dilute acid bar- rel to flow into an evaporation and concentration unit, evaporat- ing and concentrating the dilute acid solution to generate a recy- cled acid, controlling the recycled acid to flow into a recycled acid tank for collection and later use and a small part of the di- lute acid solution in the dilute acid barrel to flow into the cleaning acid barrel, and reusing the dilute acid in the cleaning unit; and step 3: condensing vapor generated by the evaporation unit during evaporation to generate condensed water, controlling a part of the condensed water to flow into the solvent recycling barrel and the remaining condensed water to flow into the stripping unit, diluting a solvent-rich solution in the solvent recycling barrel with the condensed water, adding 10% liquid caustic soda from a liquid caustic soda barrel to the solvent recycling barrel to gen- erate a solvent for direct use, and controlling the solvent to di- rectly flow into the solvent barrel for reuse and the remaining effluent in the solvent recycling barrel to flow into an effluent collection barrel for collection and storage.
Preferably, the primary extraction unit, the secondary ex- traction unit, the cleaning unit, and the stripping unit are all composed of a centrifugal extractor, the primary extraction unit is a 3-8-stage counter-current extractor, the secondary extraction unit is a 3-6-stage counter-current extractor, the cleaning unit is a single-stage extractor, the stripping unit is a 1- or 2-stage counter-current extractor, the evaporation and concentration unit is composed of an AFC concentration evaporator, the solvent is tributyl phosphate or tributyl phosphatetsulfonated kerosene, and a mixing ratio of tributyl phosphate to sulfonated kerosene is (1: 1) — (9: 1).
Preferably, the primary extraction unit uses a heavy phase weir plate with a specific gravity difference of 0.2-0.5, a ratio of a light phase to a heavy phase is (1: 1) - (10: 1), the operat- ing temperature is 45-70°C, the secondary extraction unit uses a heavy phase weir plate with a specific gravity difference of 0.2- 0.5, a ratio of a light phase to a heavy phase is (1: 1) - (8: 1), the operating temperature is 45-70°C, a ratio of a light phase to a heavy phase of the cleaning unit is (1: 1) - (20: 1), the operat- ing temperature is 45-70°C, the stripping unit uses a heavy phase weir plate with a specific gravity difference of 0.1-0.2, a ratio of a light phase to a heavy phase is (1: 1) - (10: 1), the operat- ing temperature is 50-80°C, and the AFC concentration evaporator in the device is used under ordinary pressure with a steam hot source at 90°C.
Preferably, the device includes an effluent treatment device body, a connecting plate is movably mounted on an outer side of the effluent treatment device body, an outer barrel is movably mounted on the top of the connecting plate, a first water outlet and a second water outlet are formed on the outer barrel, a floc- culant collection mechanism is provided inside the outer barrel, an alkali storage barrel is movably placed above the outer barrel, two connecting rods are movably mounted on the top of the connect- ing plate, a connecting port is formed on the top of each of the connecting rods, one connecting port is connected with a raffinate barrel, a raffinate in the raffinate barrel flows into the outer barrel via the connecting port, and alkali is added from the alka- li storage barrel to the outer barrel to prepare a flocculant.
Preferably, a plug-in block is mounted on both outer end walls of the effluent treatment device body along the end wall di- rection, a clamping slot is formed on a side wall, close to the alkali storage barrel, of the connecting plate, the plug-in block is capable of being plugged inside the clamping slot, the floccu- lant collection mechanism includes an inner barrel and weep holes, the inner barrel is movably mounted inside the outer barrel in a sleeving manner, a plurality of weep holes are uniformly formed at the bottom of the inner barrel in a penetrating manner, and filter cloth is laid on the weep holes.
Preferably, a rotary motor is embedded on the top of the con- necting plate, an output end of the rotary motor is upward and connected with the bottom of the outer barrel, two first sliding chutes are horizontally formed on the top of the connecting plate along the length direction and located at both sides of the outer barrel, a first electric sliding block is slidably mounted inside each of the first sliding chutes, a plurality of hydraulic support rods are mounted on the top of the first electric sliding block along the length direction, and telescopic ends of the hydraulic support rods are upward and connected with the bottom of the alka- 5 li storage barrel.
Preferably, two second sliding chutes are horizontally formed at an end, close to the alkali storage barrel, of the top of the connecting plate along the length direction of the connecting plate, the two second sliding chutes are symmetrical along the end wall direction of the connecting plate, and a second electric sliding block is connected with the bottom of each of the connect- ing rods and slidably mounted inside each of the second sliding chutes.
Preferably, a guide block is mounted at the bottom of the al- kali storage barrel, the section of the guide block is triangular, a rotary rod is movably mounted in the middle of the bottom of the alkali storage barrel in a penetrating manner, the top of the ro- tary rod extends inside the alkali storage barrel, a plurality of second levers are uniformly connected with a part, located inside the alkali storage barrel, of the rotary rod along the outer wall direction of the rotary rod, and a plurality of discharge slots are formed at the bottom of the alkali storage barrel in a pene- trating manner.
Preferably, a barrier plate is placed at the discharge slots at the bottom of the alkali storage barrel, a plurality of third sliding chutes are formed at the bottom of the alkali storage bar- rel, third electric sliding blocks are mounted at a side, close to the alkali storage barrel, of the barrier plate and slidably mounted inside the third sliding chutes, two first levers are uni- formly mounted on a part, located outside the bottom of the alkali storage barrel, of the rotary rod along the outer wall direction of the rotary rod, an electric telescopic rod is embedded at both ends of each of the first levers along the length direction of the first levers, telescopic ends of the two electric telescopic rods are far away from each other, support slots are formed on an inner side wall of the inner barrel, and the telescopic ends of the electric telescopic rods are capable of extending to be plugged inside the support slots.
Preferably, a first slot is formed at the bottom of each of the second levers, a fourth sliding chute is vertically formed on both end walls of the first slot, a fourth sliding block is slida- bly mounted inside the fourth sliding chute, a moving block is placed inside the first slot, a side, close to the moving block, of the fourth sliding block is connected with an end wall of the moving block, the bottom of the moving block is capable of extend- ing inside each of the discharge slots, a plurality of springs are uniformly mounted on the top of the moving block along the length direction, and the top of each of the springs is connected with an inner wall of the top of the first slot.
Compared with the prior art, the present invention has the following beneficial effects.
In the present invention, the outer barrel, the evaporation and concentration unit, and the solution recycling barrel are pro- vided. When treated in the device, a chemical polishing effluent is simultaneously extracted by the first extraction unit and the secondary extraction unit to achieve efficient extraction of the chemical polishing effluent in the device. Moreover, a raffinate obtained by the secondary extraction is treated by the outer bar- rel and the alkali storage barrel to prepare a flocculant that is economical and can offset the partial cost of chemical polishing effluent treatment. A load phase cleaned by the cleaning unit is extracted by the stripping unit and concentrated by the evapora- tion and concentration unit to form a recycled acid that can be used directly. During stripping, cleaning acid can be stripped to the extent of direct use, which improves the continuous utiliza- tion of the cleaning acid in the device. Condensed water formed by condensing vapor generated during evaporation can be directly con- veyed to the stripping unit and the solution recycling barrel for direct use, which reduces the demand for water in the device and improves the environmental friendliness of the device. Condensed water and liquid caustic soda are added to the solution recycling barrel to directly regenerate a solvent that directly flows into the solvent barrel for use, which greatly improves the environmen- tal friendliness of the device and the recycling rate of the chem-
ical polishing effluent, and realizes the energy saving and emis- sion reduction of the device. Moreover, an economical product man- ufactured by the device indirectly reduces the cost of chemical polishing effluent treatment.
In the present invention, the first levers, the second lev- ers, and the electric telescopic rods are provided. When the outer barrel rotates, the first levers stir a liquid to mix the liquid with alkali and other reagents more thoroughly, which improves the preparation efficiency of a flocculant. When the electric tele- scopic rods abut into the support slots, the outer barrel drives the rotary rod to rotate, and the second levers stir alkali in the alkali storage barrel to break the agglomerated alkali in the al- kali storage barrel, which improves the smooth operation of the device. When the electric telescopic rods abut into the support slots, through the rise and movement of the alkali storage barrel, the inner barrel can be collected, which improves the convenience of collection of a flocculant for technicians. There are multiple inner barrels, a new inner barrel can be mounted through the elec- tric support rods, which greatly improves the convenience of use of the device.
Clear water is injected into the outer barrel via the con- necting port, the outer barrel rotates, the water is discharged via the water outlet formed on the outer barrel, and the self- cleaning of the outer barrel is also completed, which greatly im- proves the convenience of use of the device.
If liquid caustic soda in the device is not enough, the alka- li storage barrel and the electric telescopic rods move the inner barrel out, clear water is added to the outer barrel via the con- necting port that is connected with a clear water pipeline, alkali is added from the alkali storage barrel to the outer barrel, and required liquid caustic soda is obtained and conveyed to the lig- uid caustic soda barrel via the other outlet formed on the outer barrel, which greatly improves the convenience of use of the de- vice.
In the present invention, the moving blocks and the springs are provided. If alkali agglomerates in the discharge slots, the discharge of the alkali will be affected. When the second levers rotate to the discharge slots, the moving blocks in the second levers directly bounce into the discharge slots under the elastic force of the springs to dash agglomerated alkali out of the dis- charge slots so as to continuously discharge the alkali, which en- sures the stable operation of the device.
FIG. 1 is a schematic flowchart of a process of the present invention.
FIG. 2 is a schematic structural diagram of an overall struc- ture of the present invention.
FIG. 3 is a schematic structural diagram of a connecting plate of the present invention.
FIG. 4 is a schematic diagram of a sectional structure of an alkali storage barrel of the present invention.
FIG. 5 is a schematic diagram of an enlarged structure of A in FIG. 4 of the present invention.
FIG. 6 is a schematic structural diagram of a first lever of the present invention.
FIG. 7 is a schematic structural diagram of a moving block of the present invention.
FIG. 8 is a schematic structural diagram of a first slot of the present invention.
FIG. 9 is a schematic structural diagram of a barrier plate of the present invention.
In the figures, 1: effluent treatment device body; 2: con- necting plate; 3: outer barrel, 4: alkali storage barrel; 5: hy- draulic support rod; 6: connecting rod; 7: connecting port; 8: ro- tary motor; 9: first sliding chute; 10: first electric sliding block; 11: second sliding chute; 12: second electric sliding block; 13: clamping slot; 14: plug-in block; 15: inner barrel; 16: weep hole; 17: rotary rod; 18: first lever; 19: second lever; 20: guide block; 21: discharge slot; 22: barrier plate; 23: third sliding chute; 24: third electric sliding block; 25: first slot; 26: moving block; 27: fourth sliding chute; 28: fourth sliding block; 29: spring; 30: electric telescopic rod; and 31: support slot.
The technical solutions in embodiments of the present inven- tion will be clearly and completely described below with reference to the drawings in the embodiments of the present invention. Obvi- ously, the described embodiments are only some but not all of the embodiments of the present invention.
Referring to FIG. 1 to FIG. 8, a multi-stage extraction and recycling process for chemical polishing effluents includes the following steps: step 1: a chemical polishing effluent is filtered by a fil- ter, the filtered chemical polishing effluent is controlled to en- ter a liquid storage barrel, the chemical polishing effluent in the liquid storage barrel is controlled to enter a primary extrac- tion unit, an extracted load phase in the primary extraction unit is controlled to directly enter a cleaning unit, the remaining liquid is controlled to enter a secondary extraction unit for sec- ondary extraction, similarly, an extracted load phase in the sec- ondary extraction unit is controlled to directly enter the clean- ing unit, the remaining liquid is controlled to enter a raffinate barrel for temporary storage, during the primary extraction and the secondary extraction, a solvent in a solvent barrel is con- trolled to enter the primary and secondary extraction units at the same time, and when the load phase is cleaned by the cleaning unit, cleaning acid in a cleaning acid barrel is controlled to circulate into the cleaning unit for use; step 2: the load phase entering the cleaning unit is cleaned by the cleaning unit and controlled to enter a stripping unit for stripping, components containing dilute acid are extracted from the load phase by the stripping unit and discharged into a dilute acid barrel, a part containing the solvent is discharged into a solvent recycling barrel, a dilute acid solution in the dilute ac- id barrel is controlled to flow into an evaporation and concentra- tion unit and evaporated and concentrated to generate a recycled acid, the recycled acid is controlled to flow into a recycled acid tank for collection and later use, a small part of the dilute acid solution in the dilute acid barrel is controlled to flow into the cleaning acid barrel, and the dilute acid is reused in the clean- ing unit; and step 3: vapor generated by the evaporation unit during evapo- ration is condensed to generate condensed water, a part of the condensed water is controlled to flow into the solvent recycling barrel, the remaining condensed water is controlled to flow into the stripping unit, a solvent-rich solution in the solvent recy- cling barrel is diluted with the condensed water, 10% liquid caus- tic soda is added from a liquid caustic soda barrel to the solvent recycling barrel to generate a solvent for direct use, the solvent is controlled to directly flow into the solvent barrel for reuse, and the remaining effluent in the solvent recycling barrel is con- trolled to flow into an effluent collection barrel for collection and storage. A close connection is formed among the components, which improves the energy saving and emission reduction of the de- vice and improves the recycling rate of the chemical polishing ef- fluent in the device.
As an optimized technical solution of the present invention, the primary extraction unit, the secondary extraction unit, the cleaning unit, and the stripping unit are all composed of a cen- trifugal extractor, the primary extraction unit is a 3-8-stage counter-current extractor, the secondary extraction unit is a 3-6- stage counter-current extractor, the cleaning unit is a single- stage extractor, the stripping unit is a 1- or 2-stage counter- current extractor, the evaporation and concentration unit is com- posed of an AFC concentration evaporator, the solvent is tributyl phosphate or tributyl phosphate+sulfonated kerosene, and a mixing ratio of tributyl phosphate to sulfonated kerosene is (1: 1) - (9: 1). The extraction and collection rate of the chemical polishing effluent in the device are improved by combining the primary ex- traction with the secondary extraction. The reuse of the cleaning acid and the use of vapor generated during evaporation of the di- lute acid by the evaporation unit greatly improve the close con- nection among the steps when the chemical polishing effluent is treated in the device. Products generated at the steps can also be utilized to the maximum extent, which greatly improves the capaci- ty utilization rate of the device and improves the energy saving and emission reduction of the device.
As an optimized technical solution of the present invention, the primary extraction unit uses a heavy phase weir plate with a specific gravity difference of 0.2-0.5, a ratio of a light phase to a heavy phase is (1: 1) - (10: 1), the operating temperature is 45-70°C, the secondary extraction unit uses a heavy phase weir plate with a specific gravity difference of 0.2-0.5, a ratio of a light phase to a heavy phase is (1: 1) - (8: 1), the operating temperature is 45-70°C, a ratio of a light phase to a heavy phase of the cleaning unit is (1: 1) - (20: 1), the operating tempera- ture is 45-70°C, the stripping unit uses a heavy phase weir plate with a specific gravity difference of 0.1-0.2, a ratio of a light phase to a heavy phase is (1: 1) - (10: 1), the operating tempera- ture is 50-80°C, and the AEC concentration evaporator in the device is used under ordinary pressure with a steam hot source at 90°C.
Such an arrangement improves the extraction effect of the device.
As an optimized technical solution of the present invention, the device includes an effluent treatment device body 1, a con- necting plate 2 is movably mounted on an outer side of the efflu- ent treatment device body 1, an outer barrel 3 is movably mounted on the top of the connecting plate 2, a first water outlet and a second water outlet are formed on the outer barrel 3, a flocculant collection mechanism is provided inside the outer barrel 3, an al- kali storage barrel 4 is movably placed above the outer barrel 3, two connecting rods 6 are movably mounted on the top of the con- necting plate 2, a connecting port 7 is formed on the top of each of the connecting rods 6, one connecting port 7 is connected with a raffinate barrel, a raffinate in the raffinate barrel flows into the outer barrel 3 via the connecting port 7, and alkali is added from the alkali storage barrel 4 to the outer barrel 3 to prepare a flocculant. A chemical polishing effluent can be efficiently treated by the special treatment processes applied to the multiple structures and components in the effluent treatment device body 1.
When the chemical polishing effluent is treated in the device, products generated at the steps can be recycled, and the chemical polishing effluent is used to support economical products through special treatment to achieve the energy saving and emission reduc- tion of the device. Moreover, an economical product manufactured by the device indirectly reduce the cost of chemical polishing ef- fluent treatment.
As an optimized technical solution of the present invention, a plug-in block 14 is mounted on both outer end walls of the ef- fluent treatment device body 1 along the end wall direction, a clamping slot 13 is formed on a side wall, close to the alkali storage barrel 4, of the connecting plate 2, the plug-in block 14 can be plugged inside the clamping slot 13, the flocculant collec- tion mechanism includes an inner barrel 15 and weep holes 16, the inner barrel 15 is movably mounted inside the outer barrel 3 in a sleeving manner, a plurality of weep holes 16 are formed at the bottom of the inner barrel 15 in a penetrating manner, and filter cloth is laid on the weep holes 16. If the placement of the device is restricted by the topography of the site, the connecting plate 2 can be pulled out from the plug-in block 14 and mounted on the other end of the effluent treatment device body 1 or other places, as long as one connecting port 7 is connected with a second outlet of the raffinate barrel, which greatly improves the convenience of use of the device and reduces the special requirements of the de- vice for the site. During preparation of a flocculant, the floccu- lant directly falls into the inner barrel 15 for collection, after the flocculant is collected, the inner barrel 15 can be directly taken out, the flocculant can be subjected to solid-liquid separa- tion quickly through the weep holes 16 and the filter cloth, which improves the convenience of collection of a flocculant for techni- cians.
As an optimized technical solution of the present invention, a rotary motor 8 is embedded on the top of the connecting plate 2, an output end of the rotary motor 8 is upward and connected with the bottom of the outer barrel 3, two first sliding chutes 9 are horizontally formed on the top of the connecting plate 2 along the length direction and located at both sides of the outer barrel 3, a first electric sliding block 10 is slidably mounted inside each of the first sliding chutes 9, a plurality of hydraulic support rods 5 are mounted on the top of the first electric sliding block
10 along the length direction, and telescopic ends of the hydrau- lic support rods 5 are upward and connected with the bottom of the alkali storage barrel 4. The first electric sliding block 10 and the hydraulic support rods 5 drive the alkali storage barrel 4 to move, which is convenient for technicians to add reagents required for preparing a flocculant to the outer barrel 3.
As an optimized technical solution of the present invention, two second sliding chutes 11 are horizontally formed at an end, close to the alkali storage barrel 4, of the top of the connecting plate 2 along the length direction of the connecting plate 2, the two second sliding chutes 11 are symmetrical along the end wall direction of the connecting plate 2, and a second electric sliding block 12 is connected with the bottom of each of the connecting rods 6 and slidably mounted inside each of the second sliding chutes 11. Under the drive of the second electric sliding block 12, the connecting port 7 connected with the raffinate barrel moves to the top of the outer barrel 3 to convey a raffinate into the outer barrel 3.
As an optimized technical solution of the present invention, a guide block 20 is mounted at the bottom of the alkali storage barrel 4, the section of the guide block 20 is triangular, a rota- ry rod 17 is movably mounted in the middle of the bottom of the alkali storage barrel 4 in a penetrating manner, the top of the rotary rod 17 extends inside the alkali storage barrel 4, a plu- rality of second levers 19 are uniformly connected with a part, located inside the alkali storage barrel 4, of the rotary rod 17 along the outer wall direction of the rotary rod 17, and a plural- ity of discharge slots 21 are formed at the bottom of the alkali storage barrel 4 in a penetrating manner. Alkali can be discharged more smoothly with the help of the guide block 20, the rotary rod 17 drives the second levers 19 to rotate and stir alkali in the alkali storage barrel 4 to prevent alkali from agglomerating to affect the normal drop of alkali, which improves the smooth opera- tion of the device.
As an optimized technical solution of the present invention, a barrier plate 22 is placed at the discharge slots 21 at the bot- tom of the alkali storage barrel 4, a plurality of third sliding chutes 23 are formed at the bottom of the alkali storage barrel 4, third electric sliding blocks 24 are mounted on a side, close to the alkali storage barrel 4, of the barrier plate 22 and slidably mounted inside the third sliding chutes 23, two first levers 18 are uniformly mounted on a part, located outside the bottom of the alkali storage barrel 4, of the rotary rod 17 along the outer wall direction of the rotary rod 17, an electric telescopic rod 30 is embedded at both ends of each of the first levers 18 along the length direction of the first levers 18, telescopic ends of the two electric telescopic rods 30 are far away from each other, sup- port slots 31 are formed on an inner side wall of the inner barrel 15, and the telescopic ends of the electric telescopic rods 30 can extend to be plugged inside the support slots 31. When the outer barrel 3 rotates, the first levers 18 stir a liquid in the outer barrel 3 to mix the liquid with alkali more thoroughly. When the electric telescopic rods 30 are clamped inside the support slots 31, the outer barrel 3 rotates to drive the rotary rod 17 to ro- tate. When the electric telescopic rods 30 are clamped inside the support slots 31, the inner barrel 15 can be lifted out through the hydraulic support rods 5 to collect a flocculant, which im- proves the convenience of use of the device.
As an optimized technical solution of the present invention, a first slot 25 is formed at the bottom of each of the second lev- ers 19, a fourth sliding chute 27 is vertically formed on both end walls of the first slot 25, a fourth sliding block 28 is slidably mounted inside the fourth sliding chute 27, a moving block 26 is placed inside the first slot 25, a side, close to the moving block 26, of the fourth sliding block 28 is connected with an end wall of the moving block 26, the bottom of the moving block 26 can ex- tend inside each of the discharge slots 21, a plurality of springs 29 are uniformly mounted on the top of the moving block 26 along the length direction, and the top of each of the springs 29 is connected with an inner wall of the top of the first slot 25. When the second levers 19 rotate to the discharge slots 21, the moving blocks 26 in the second levers 19 directly bounce into the dis- charge slots 21 under the elastic force of the springs 29 to dash agglomerated alkali out of the discharge slots 21 so as to contin-
uously discharge the alkali, which ensures the stable operation of the device.
When the present invention is used, the model of centrifugal extractor is CTX50-N, a technician first filters a chemical pol- ishing effluent once by using the filter, and a pore size of a filter element of the filter is 5-10 microns. Then, the technician conveys the chemical polishing effluent filtered by the filter in- to the liquid storage barrel for storage. The chemical polishing effluent in the liquid storage barrel is directly conveyed into the primary extraction unit for primary extraction, and during the primary extraction, a solvent in the solvent barrel is conveyed into the primary extraction unit via a pipeline. A load phase and a raffinate are separated from the chemical polishing effluent through the primary extraction, the load phase is directly con- veyed to the cleaning unit, and the raffinate enters the secondary extraction unit for secondary extraction. During the secondary ex- traction, similarly, the solvent is conveyed from the solvent bar- rel into the secondary extraction unit. The raffinate obtained by the primary extraction is extracted in the secondary extraction unit to obtain a load phase and a raffinate, the load phase ob- tained by the secondary extraction directly enters the cleaning unit, and the raffinate obtained by the secondary extraction en- ters the raffinate barrel for collection and later use. By per- forming extraction in such a way, the collection rate of the pri- mary extraction can reach 74-75%, the collection rate of the sec- ondary extraction can reach 45-47%, the comprehensive collection rate of the primary extraction and the secondary extraction reach- es 85-87%, which indicates that the present invention has the ad- vantages of efficient recycling.
After the load phases respectively obtained by the primary extraction and the secondary extraction enter the cleaning unit, cleaning acid in the cleaning acid barrel is conveyed into the cleaning unit, and mixed and reacted with the extract phases to clean the load phases respectively obtained by the primary extrac- tion and the secondary extraction so as to prevent impurities from being contained therein. Then, the load phases cleaned by the cleaning unit are directly conveyed into the stripping unit. When the cleaning unit cleans the chemical polishing effluent, cleaning acid in the cleaning acid barrel circulates into the cleaning unit for use. The load phases treated by the cleaning unit are stripped in the stripping unit, components containing dilute acid are ex- tracted from the extract phases and discharged into the dilute ac- id barrel, and a part containing the solvent is discharged to the solvent recycling barrel. A part of a dilute acid solution in the dilute acid barrel flows into the cleaning acid barrel, a part of dilute acid in the cleaning acid barrel directly flows into the cleaning unit as circulating dilute acid to supplement dilute acid in the cleaning acid barrel, and the dilute acid in the cleaning acid barrel is recycled. When the concentration of aluminum ions in the cleaning acid in the cleaning acid barrel reaches 20000 mg/L, the cleaning acid directly flows to a chemical polishing ef- fluent, is mixed with the chemical polishing effluent, and is sub- jected to multiple extractions together with the effluent, and di- lute acid is extracted and can be reused, which improves the sus- tained use of the dilute acid in the device. The cleaning acid en- ters the stripping unit for extraction, and thus the present in- vention has the advantages of high utilization rate, no waste of raw materials, energy saving, and emission reduction.
The other part of dilute acid in the dilute acid barrel di- rectly flows to the evaporation and concentration unit, and is evaporated and concentrated by the evaporation and concentration unit to a specific gravity of recycled acid greater than 1.7.
Then, the recycled acid directly flows into the recycled acid tank for collection. Vapor generated during evaporation is condensed to form condensed water, a part of the condensed water flows into the solvent recycling barrel and is mized with a liquid containing the solvent in the solvent recycling barrel, and 10% liquid caustic soda is added from the liquid caustic soda barrel to the solvent recycling barrel to generate a solvent for direct use. At this time, the solvent directly flows into the solvent barrel for re- use, and the remaining effluent in the solvent recycling barrel flows into the effluent collection barrel for collection and stor- age. The other part of the condensed water flows into the strip- ping unit to provide water for the stripping unit. In this way,
the utilization rate of the components in the device is further increased, a lot of resources are saved, and the energy saving and environmental friendliness of the device are achieved.
Then, the hydraulic support rods 5 jack up the alkali storage barrel 4, the first electric sliding blocks 10 drive the alkali storage barrel 4 to move to expose the opening of the outer barrel 3, which is convenient for the technician to add reagents required for preparing a flocculant to the outer barrel 3. At the same time, under the drive of the second electric sliding blocks 12, the connecting port 7 connected with the raffinate barrel moves to the top of the outer barrel 3 and conveys a raffinate into the outer barrel 3. The alkali storage barrel 4 moves again to the top of the outer barrel 3, at this time, the third electric sliding blocks 24 drive the barrier plate 22 to move to expose the dis- charge slots 21, and alkali in the alkali storage barrel 4 flows out via the discharge slots 21 and enters the outer barrel 3. The electric telescopic rods 30 extend outwards until the telescopic ends of the electric telescopic rods 30 are clamped inside the support slots 31, at this time, the rotary motor 8 drives the out- er barrel 3 to rotate, which enables the second levers 12 to ro- tate. When rotating, the second levers 19 stir the alkali in the alkali storage barrel 4 to prevent aggregation of the alkali and to break aggregated alkali. If alkali aggregates in the discharge slots 21, the discharge of the alkali will be affected. When the second levers 19 rotate to the discharge slots 21, the moving blocks 26 in the second levers 19 directly bounce into the dis- charge slots 21 under the elastic force of the springs 29 to dash aggregated alkali out of the discharge slots 21 so as to continu- ously discharge the alkali, which ensures the stable operation of the device. When the electric telescopic rods 30 do not abut against the support slots 31, the outer barrel 3 rotates, at this time, the first levers 18 stir a liquid in the outer barrel 3 to mix the liquid in the outer barrel 3 with alkali more thoroughly, which accelerates the preparation of a flocculant.
Two outlets are formed on the outer barrel 3 and controlled by an electromagnetic valve. After being prepared, a flocculant falls into the inner barrel 15 for collection, at this time, the electric telescopic rods 30 abut into the support slots 31, the alkali storage barrel 4 is lifted to lift the inner barrel 15, which is convenient for separation of the liquid in the outer bar- rel 3 from the flocculant. The alkali storage barrel 4 moves out- wards to move the inner barrel 15 out, the technician can directly take away the inner barrel 15 in which the flocculant is stored to store and re-treat the flocculant. There are multiple inner bar- rels 15, and a new inner barrel 15 is fixed through the electric telescopic rods 30. When the inner barrel 15 is separated from the outer barrel 3, an effluent in the outer barrel 3 is directly dis- charged via one outlet, and a raffinate is added to the outer bar- rel 3 via the connecting port 7 connected with the raffinate bar- rel, after the raffinate is added, a new inner barrel 15 is mount- ed inside the outer barrel 3, and the above steps are repeated to prepare a flocculant.
The other connecting port 7 is connected with a clear water pipeline. When liquid caustic soda in the device is not enough, the alkali storage barrel 4 and the electric telescopic rods 30 move the inner barrel 15 out, clear water is added to the outer barrel 3 via the connecting port 7 connected with the clear water pipeline, alkali is added from the alkali storage barrel 4 to the outer barrel 3, and required liquid caustic soda is obtained and conveyed to the liquid caustic soda barrel via the other outlet of the outer barrel 3, which greatly improves the convenience of use of the device.
Clear water is injected into the outer barrel 3 via the con- necting port 7, the outer barrel 3 rotates, the water is dis- charged via the water outlet of the outer barrel 3, and the self- cleaning of the outer barrel 3 is also completed, which greatly improves the convenience of use of the device.
If the placement of the device is restricted by the topogra- phy of the site, the connecting plate can be pulled out from the plug-in block 14 and mounted on the other end of the effluent treatment device body 1 or other places, as long as one connecting port is connected with a second outlet of the raffinate barrel, which greatly improves the convenience of use of the device and reduces the special requirements of the device for the site.
The above are preferred specific embodiments of the present invention only, but the scope of protection of the present inven- tion is not limited thereto.
Equivalent replacements or changes made by those skilled in the art within the technical scope dis- closed by the present invention according to the technical solu- tions and inventive concepts of the present invention shall fall within the scope of protection of the present invention.
Claims (10)
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| JP3700892B2 (en) * | 1997-09-17 | 2005-09-28 | 株式会社荏原製作所 | Method for producing flocculant |
| CN1173893C (en) * | 2000-12-22 | 2004-11-03 | 华南理工大学 | A kind of polymerized basic aluminum silicon flocculant and preparation method thereof |
| CN1634773A (en) * | 2003-12-29 | 2005-07-06 | 中国科学院生态环境研究中心 | Method and equipment for synthesizing inorganic polymer flocculant by ultrasonic wave |
| CN103588272B (en) * | 2013-11-29 | 2015-11-04 | 哈尔滨优方净水科技有限公司 | A kind of preparation method of inorganic flocculating agent and utilize the enhanced coagulation method of its process low-temperature and low turbidity height organism water body |
| CN108236894A (en) * | 2017-10-21 | 2018-07-03 | 成都莫尼塔科技有限公司 | The process units of flocculating agent anhydrous slufuric acid ammonium aluminium |
| CN112320776B (en) * | 2020-10-13 | 2022-04-01 | 东莞市三人行环境科技有限公司 | Chemical waste liquid throwing and washing water regenerated acid recovery system and application thereof |
| CN112299635B (en) * | 2020-10-22 | 2023-09-05 | 中新联科环境科技(安徽)有限公司 | Method for purifying chemical polishing waste liquid |
| CA3197352A1 (en) * | 2020-11-26 | 2022-06-02 | Tapio HONKANEN | Method for producing coagulant aluminium salts |
| CN112707565B (en) * | 2020-12-16 | 2024-02-27 | 中新联科环境科技(安徽)有限公司 | Cation method treatment mode for chemical polishing aging liquid |
| CN214990819U (en) * | 2021-06-23 | 2021-12-03 | 无锡清诺环境工程有限公司 | Solid-liquid separation device in fluorine-containing wastewater membrane treatment system |
| CN215756608U (en) * | 2021-08-09 | 2022-02-08 | 重庆昆顶生物技术有限公司 | Sewage treatment flocculating agent feeding device |
| CN113651465A (en) * | 2021-09-16 | 2021-11-16 | 河南晋开化工投资控股集团有限责任公司 | Chemical strong brine pretreatment device and pretreatment method |
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| SHIN C H ET AL: "A solvent extraction approach to recover acetic acid from mixed waste acids produced during semiconductor wafer process", JOURNAL OF HAZARDOUS MATERIALS, ELSEVIER, AMSTERDAM, NL, vol. 162, no. 2-3, 15 March 2009 (2009-03-15), pages 1278 - 1284, XP025805131, ISSN: 0304-3894, [retrieved on 20080618], DOI: 10.1016/J.JHAZMAT.2008.06.029 * |
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