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NL168890C - Werkwijze voor kristalgroei vanuit de vloeibare fase. - Google Patents

Werkwijze voor kristalgroei vanuit de vloeibare fase.

Info

Publication number
NL168890C
NL168890C NLAANVRAGE7509560,A NL7509560A NL168890C NL 168890 C NL168890 C NL 168890C NL 7509560 A NL7509560 A NL 7509560A NL 168890 C NL168890 C NL 168890C
Authority
NL
Netherlands
Prior art keywords
liquid phase
crystal growth
growth
crystal
phase
Prior art date
Application number
NLAANVRAGE7509560,A
Other languages
English (en)
Other versions
NL168890B (nl
NL7509560A (nl
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Publication of NL7509560A publication Critical patent/NL7509560A/nl
Publication of NL168890B publication Critical patent/NL168890B/nl
Application granted granted Critical
Publication of NL168890C publication Critical patent/NL168890C/nl

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B19/00—Liquid-phase epitaxial-layer growth
    • C30B19/10—Controlling or regulating
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B19/00—Liquid-phase epitaxial-layer growth
    • C30B19/06—Reaction chambers; Boats for supporting the melt; Substrate holders
    • C30B19/063—Sliding boat system

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Led Devices (AREA)
NLAANVRAGE7509560,A 1974-08-12 1975-08-11 Werkwijze voor kristalgroei vanuit de vloeibare fase. NL168890C (nl)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9155374A JPS5120081A (en) 1974-08-12 1974-08-12 Ketsushoseichohoho oyobi sochi

Publications (3)

Publication Number Publication Date
NL7509560A NL7509560A (nl) 1976-02-16
NL168890B NL168890B (nl) 1981-12-16
NL168890C true NL168890C (nl) 1982-05-17

Family

ID=14029678

Family Applications (1)

Application Number Title Priority Date Filing Date
NLAANVRAGE7509560,A NL168890C (nl) 1974-08-12 1975-08-11 Werkwijze voor kristalgroei vanuit de vloeibare fase.

Country Status (5)

Country Link
US (1) US3981764A (nl)
JP (1) JPS5120081A (nl)
DE (1) DE2535160C3 (nl)
GB (1) GB1468106A (nl)
NL (1) NL168890C (nl)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4142924A (en) * 1976-12-16 1979-03-06 Massachusetts Institute Of Technology Fast-sweep growth method for growing layers using liquid phase epitaxy
DE3036364A1 (de) * 1980-09-26 1982-05-13 Siemens AG, 1000 Berlin und 8000 München Verfahren zur schmelzepitaxie
JPS6283399A (ja) * 1985-10-04 1987-04-16 Mitsubishi Electric Corp 液相エピタキシヤル成長用ボ−ト
US5326716A (en) * 1986-02-11 1994-07-05 Max Planck-Gesellschaft Zur Foerderung Der Wissenschaften E.V. Liquid phase epitaxial process for producing three-dimensional semiconductor structures by liquid phase expitaxy
FR2606036B1 (fr) * 1986-11-05 1988-12-02 Pechiney Procede d'obtention, par refroidissement d'alliages a l'etat fondu, de cristaux de composes intermetalliques, notamment, de monocristaux isoles
DE19828310C2 (de) * 1998-06-25 2000-08-31 Forschungszentrum Juelich Gmbh Einkristallpulver- und Monokornmembranherstellung

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1402965A1 (de) * 1960-03-21 1969-06-12 Innocenti Soc Gen Per L Ind Me Abnehmbare Vorrichtung zum Drehen,Lochvergroessern,Fraesen,Bohren u.dgl. von Werkstuecken groesserer Abmessungen
US3551219A (en) * 1968-05-09 1970-12-29 Bell Telephone Labor Inc Epitaxial growth technique
GB1288041A (nl) * 1968-11-01 1972-09-06 Robinson Waxed Paper Co Ltd
US3677228A (en) * 1970-04-17 1972-07-18 Bell Telephone Labor Inc Crystal growth apparatus
BE786137A (nl) * 1971-07-13 1973-01-11 Philips Nv Werkwijze en inrichting voor het epitaxiaal afzetten van een laag uit kristallijn materiaal op een vlakke zijde van een monokristallijn substraat vanuit een vloeistoffase
US3896765A (en) * 1971-10-06 1975-07-29 Matsushita Electric Ind Co Ltd Apparatus for liquid-phase epitaxial growth
BE791927A (fr) * 1971-11-29 1973-03-16 Western Electric Co Procede de depot par croissance epitaxiale de couches de cristaux semi-conducteurs
US3767481A (en) * 1972-04-07 1973-10-23 Rca Corp Method for epitaxially growing layers of a semiconductor material from the liquid phase
JPS4951180A (nl) * 1972-09-19 1974-05-17
US3762367A (en) * 1973-01-12 1973-10-02 Handotai Kenkyu Shinkokai Growth apparatus for a liquid growth multi-layer film

Also Published As

Publication number Publication date
DE2535160A1 (de) 1976-03-04
GB1468106A (en) 1977-03-23
DE2535160B2 (de) 1979-01-18
NL168890B (nl) 1981-12-16
NL7509560A (nl) 1976-02-16
DE2535160C3 (de) 1979-09-06
US3981764A (en) 1976-09-21
JPS5120081A (en) 1976-02-17

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Legal Events

Date Code Title Description
V1 Lapsed because of non-payment of the annual fee