NL145716B - Elektronenstraalapparaat. - Google Patents

Elektronenstraalapparaat.

Info

Publication number: NL145716B
Authority: NL; Netherlands
Prior art keywords: electron beam; beam device; electron
Prior art date: 1964-06-06

Application number

NL646406449A

Other languages

English (en)

Other versions

NL6406449A (nl

Original Assignee

Philips Nv

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1964-06-06

Filing date

1964-06-06

Publication date

1975-04-15

1964-06-06 Application filed by Philips Nv filed Critical Philips Nv

1964-06-06 Priority to NL646406449A priority Critical patent/NL145716B/nl

1965-06-02 Priority to DEN26822A priority patent/DE1260048B/de

1965-06-03 Priority to SE07302/65A priority patent/SE332466B/xx

1965-06-03 Priority to US460981A priority patent/US3394254A/en

1965-06-03 Priority to CH775565A priority patent/CH437562A/de

1965-06-03 Priority to AT505965A priority patent/AT256197B/de

1965-06-04 Priority to FR19624A priority patent/FR1443476A/fr

1965-06-04 Priority to BE664970A priority patent/BE664970A/xx

1965-06-04 Priority to GB23933/65A priority patent/GB1098865A/en

1965-12-07 Publication of NL6406449A publication Critical patent/NL6406449A/xx

1975-04-15 Publication of NL145716B publication Critical patent/NL145716B/nl

Classifications

- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
- H01J37/10—Lenses
- H01J37/14—Lenses magnetic
- H01J37/141—Electromagnetic lenses

Landscapes

Physics & Mathematics (AREA)
Electromagnetism (AREA)
Chemical & Material Sciences (AREA)
Analytical Chemistry (AREA)
Electron Beam Exposure (AREA)
Analysing Materials By The Use Of Radiation (AREA)

NL646406449A 1964-06-06 1964-06-06 Elektronenstraalapparaat. NL145716B (nl)

Priority Applications (9)

Application Number	Priority Date	Filing Date	Title
NL646406449A NL145716B (nl)	1964-06-06	1964-06-06	Elektronenstraalapparaat.
DEN26822A DE1260048B (de)	1964-06-06	1965-06-02	Elektronenstrahlgeraet mit elektromagnetischer Linse
SE07302/65A SE332466B (nl)	1964-06-06	1965-06-03
US460981A US3394254A (en)	1964-06-06	1965-06-03	Electron-optical system with a magnetic focussing lens having a cooling means
CH775565A CH437562A (de)	1964-06-06	1965-06-03	Elektronenstrahlgerät
AT505965A AT256197B (de)	1964-06-06	1965-06-03	Elektronenstrahlgerät
FR19624A FR1443476A (fr)	1964-06-06	1965-06-04	Appareil à faisceau électronique
BE664970A BE664970A (nl)	1964-06-06	1965-06-04
GB23933/65A GB1098865A (en)	1964-06-06	1965-06-04	Improvements in or relating to electro-magnetic lenses and to apparatus including such lenses

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
NL646406449A NL145716B (nl)	1964-06-06	1964-06-06	Elektronenstraalapparaat.

Publications (2)

Publication Number	Publication Date
NL6406449A NL6406449A (nl)	1965-12-07
NL145716B true NL145716B (nl)	1975-04-15

Family

ID=19790247

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
NL646406449A NL145716B (nl)	1964-06-06	1964-06-06	Elektronenstraalapparaat.

Country Status (8)

Country	Link
US (1)	US3394254A (nl)
AT (1)	AT256197B (nl)
BE (1)	BE664970A (nl)
CH (1)	CH437562A (nl)
DE (1)	DE1260048B (nl)
GB (1)	GB1098865A (nl)
NL (1)	NL145716B (nl)
SE (1)	SE332466B (nl)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
GB1234183A (nl) *	1967-08-18	1971-06-03
GB1238889A (nl) *	1968-11-26	1971-07-14
NL175245C (nl) *	1977-05-26	1984-10-01	Philips Nv	Elektronenmicroscoop met hulplens en elektromagnetische lens hiervoor.
DE2752598C3 (de) *	1977-11-25	1981-10-15	Dr.-Ing. Rudolf Hell Gmbh, 2300 Kiel	Verfahren zum Betrieb einer elektromagnetischen fokussierenden elektronen-optischen Linsenanordnung und Linsenanordnung hierfür
JPS5842935B2 (ja) *	1978-04-07	1983-09-22	日本電子株式会社	走査電子顕微鏡等の対物レンズ
JP2744823B2 (ja) *	1989-11-16	1998-04-28	日本電子株式会社	電子レンズ
US5289009A (en) *	1990-08-02	1994-02-22	U.S. Philips Corporation	Charged particle beam system and cooling device, a coil comprising a cooling member and a cooling member for use in such a charged particle beam system
GB2397691B (en)	2003-01-24	2005-08-10	Leica Microsys Lithography Ltd	Cooling of a device for influencing an electron beam
EP2211368B1 (en)	2005-11-28	2012-06-27	Carl Zeiss SMT GmbH	Particle-optical component
EP1970935B1 (en) *	2007-03-14	2011-01-12	ICT, Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH	Lens coil cooling of a magnetic lens
DE102008064696B4 (de)	2008-12-23	2022-01-27	Carl Zeiss Microscopy Gmbh	Teilchenoptische Vorrichtung mit Magnetanordnung und ihre Verwendung zum Abbilden oder Beleuchten
US10486232B2 (en) *	2015-04-21	2019-11-26	Varian Semiconductor Equipment Associates, Inc.	Semiconductor manufacturing device with embedded fluid conduits

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
DE895350C (de) *	1938-11-06	1953-11-02	Siemens Ag	Elektronenmikroskop
US2202505A (en) *	1939-01-13	1940-05-28	Baird Television Ltd	Electromagnetic focusing coil
US3008044A (en) *	1960-02-25	1961-11-07	Gen Electric	Application of superconductivity in guiding charged particles
NL278366A (nl) *	1961-05-27

1964
- 1964-06-06 NL NL646406449A patent/NL145716B/nl unknown
1965
- 1965-06-02 DE DEN26822A patent/DE1260048B/de not_active Withdrawn
- 1965-06-03 AT AT505965A patent/AT256197B/de active
- 1965-06-03 US US460981A patent/US3394254A/en not_active Expired - Lifetime
- 1965-06-03 SE SE07302/65A patent/SE332466B/xx unknown
- 1965-06-03 CH CH775565A patent/CH437562A/de unknown
- 1965-06-04 GB GB23933/65A patent/GB1098865A/en not_active Expired
- 1965-06-04 BE BE664970A patent/BE664970A/xx unknown

Also Published As

Publication number	Publication date
CH437562A (de)	1967-06-15
SE332466B (nl)	1971-02-08
US3394254A (en)	1968-07-23
NL6406449A (nl)	1965-12-07
GB1098865A (en)	1968-01-10
DE1260048B (de)	1968-02-01
BE664970A (nl)	1965-12-06
AT256197B (de)	1967-08-10

Publication	Publication Date	Title
NL144114B (nl)	1974-11-15	Elektronenstraalbuis.
FI47397C (fi)	1973-11-12	Sihtilaite.
DK128545B (da)	1974-05-20	Sneplov.
NL149653B (nl)	1976-05-17	Ondulator.
NL159576B (nl)	1979-03-15	Plethysmograaf.
NL156858B (nl)	1978-05-16	Elektronenstraalbuis.
NL145716B (nl)	1975-04-15	Elektronenstraalapparaat.
NL148737B (nl)	1976-02-16	Elektronenbuis.
DK113245B (da)	1969-03-03	Dyvelhulbor.
DK120143B (da)	1971-04-13	Buemaskinsav.
NL152925B (nl)	1977-04-15	Vuurmaker.
DK113960B (da)	1969-05-12	Molluscicid.
NL142277B (nl)	1974-05-15	Elektronenmicroscoop.
DK116253B (da)	1969-12-22	Insekticid.
FR1408312A (fr)	1965-08-13	Poutre
DK113892B (da)	1969-05-05	Insecticid.
DK116177B (da)	1969-12-15	Parkometer.
DK117326B (da)	1970-04-13	Insecticid.
FR3575M (fr)	1965-10-04	Triphénylhalogénoéthylenes substitués.
DK118931C (da)	1971-03-22	Murdyvelaggregat.
DK110048C (da)	1968-09-02	Akaricid.
FR93672E (fr)	1969-05-02	Graisso.
FR94524E (fr)	1969-08-29	Décolleteuse-broyeuse.
NL153371B (nl)	1977-05-16	Elektronenstraalbuis.
DK119097B (da)	1970-11-09	Betjeningsapparat.

Legal Events

Date	Code	Title	Description
1981-04-15	VJC	Lapsed due to non-payment of the due maintenance fee for the patent or patent application
1985-08-31	NL80	Abbreviated name of patent owner mentioned of already nullified patent	Owner name: PHILIPS