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MY123712A - Photosensitive resin composition - Google Patents

Photosensitive resin composition

Info

Publication number
MY123712A
MY123712A MYPI20005760A MYPI20005760A MY123712A MY 123712 A MY123712 A MY 123712A MY PI20005760 A MYPI20005760 A MY PI20005760A MY PI20005760 A MYPI20005760 A MY PI20005760A MY 123712 A MY123712 A MY 123712A
Authority
MY
Malaysia
Prior art keywords
substituted
alkyl
unsubstituted
compound
hydrogen
Prior art date
Application number
MYPI20005760A
Inventor
Kura Hisatoshi
Oka Hidetaka
Tanabe Junichi
Kunimoto Kazuhiko
Ohwa Masaki
Original Assignee
Ciba Specialty Chemicals Holding Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ciba Specialty Chemicals Holding Inc filed Critical Ciba Specialty Chemicals Holding Inc
Publication of MY123712A publication Critical patent/MY123712A/en

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/038—Macromolecular compounds which are rendered insoluble or differentially wettable
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
    • C08F2/00—Processes of polymerisation
    • C08F2/46—Polymerisation initiated by wave energy or particle radiation
    • C08F2/48—Polymerisation initiated by wave energy or particle radiation by ultraviolet or visible light
    • C08F2/50—Polymerisation initiated by wave energy or particle radiation by ultraviolet or visible light with sensitising agents
    • C—CHEMISTRY; METALLURGY
    • C07—ORGANIC CHEMISTRY
    • C07C—ACYCLIC OR CARBOCYCLIC COMPOUNDS
    • C07C251/00—Compounds containing nitrogen atoms doubly-bound to a carbon skeleton
    • C07C251/32—Oximes
    • C07C251/62—Oximes having oxygen atoms of oxyimino groups esterified
    • C07C251/64—Oximes having oxygen atoms of oxyimino groups esterified by carboxylic acids
    • C07C251/66—Oximes having oxygen atoms of oxyimino groups esterified by carboxylic acids with the esterifying carboxyl groups bound to hydrogen atoms, to acyclic carbon atoms or to carbon atoms of rings other than six-membered aromatic rings
    • C—CHEMISTRY; METALLURGY
    • C07—ORGANIC CHEMISTRY
    • C07D—HETEROCYCLIC COMPOUNDS
    • C07D209/00—Heterocyclic compounds containing five-membered rings, condensed with other rings, with one nitrogen atom as the only ring hetero atom
    • C07D209/02—Heterocyclic compounds containing five-membered rings, condensed with other rings, with one nitrogen atom as the only ring hetero atom condensed with one carbocyclic ring
    • C07D209/04—Indoles; Hydrogenated indoles
    • C07D209/10—Indoles; Hydrogenated indoles with substituted hydrocarbon radicals attached to carbon atoms of the hetero ring
    • C07D209/14—Radicals substituted by nitrogen atoms, not forming part of a nitro radical
    • C—CHEMISTRY; METALLURGY
    • C07—ORGANIC CHEMISTRY
    • C07D—HETEROCYCLIC COMPOUNDS
    • C07D307/00—Heterocyclic compounds containing five-membered rings having one oxygen atom as the only ring hetero atom
    • C07D307/02—Heterocyclic compounds containing five-membered rings having one oxygen atom as the only ring hetero atom not condensed with other rings
    • C07D307/34—Heterocyclic compounds containing five-membered rings having one oxygen atom as the only ring hetero atom not condensed with other rings having two or three double bonds between ring members or between ring members and non-ring members
    • C07D307/38—Heterocyclic compounds containing five-membered rings having one oxygen atom as the only ring hetero atom not condensed with other rings having two or three double bonds between ring members or between ring members and non-ring members with substituted hydrocarbon radicals attached to ring carbon atoms
    • C07D307/52—Radicals substituted by nitrogen atoms not forming part of a nitro radical
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
    • C08F2/00—Processes of polymerisation
    • C08F2/44—Polymerisation in the presence of compounding ingredients, e.g. plasticisers, dyestuffs, fillers
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08K—Use of inorganic or non-macromolecular organic substances as compounding ingredients
    • C08K5/00—Use of organic ingredients
    • C08K5/16—Nitrogen-containing compounds
    • C08K5/32—Compounds containing nitrogen bound to oxygen
    • C08K5/33—Oximes
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
    • G03F7/028—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with photosensitivity-increasing substances, e.g. photoinitiators
    • G03F7/031—Organic compounds not covered by group G03F7/029

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Medicinal Chemistry (AREA)
  • Polymers & Plastics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Polymerisation Methods In General (AREA)
  • Materials For Photolithography (AREA)
  • Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
  • Optical Filters (AREA)
  • Addition Polymer Or Copolymer, Post-Treatments, Or Chemical Modifications (AREA)
  • Indole Compounds (AREA)
  • Photosensitive Polymer And Photoresist Processing (AREA)
  • Macromonomer-Based Addition Polymer (AREA)
  • Heterocyclic Compounds That Contain Two Or More Ring Oxygen Atoms (AREA)
  • Furan Compounds (AREA)
  • Polyamides (AREA)
  • Non-Metallic Protective Coatings For Printed Circuits (AREA)

Abstract

PHOTOSENSITIVE COMPOSITIONS COMPRISING (A) AN ALKALI SOLUBLE COMPOUND; (B) AT LEAST ONE COMPOUND O ,FORMULA ? OR ?? (??) WHEREIN R? INTER ABA IS C?-C? CYCLOALKANOYL, C?-C?? ALKENOYL, OR BENZOYL WHICH S UNSUBSTITUTED OR SUBSTITUTED; AR? IS EITHER C?-C?? ARYL OR C?-C?? ARYLOYL EACH OF WHICH IS UNSUBSTITUTED OR SUBSTITUTED; X KS 2 OR 3;M? WHEN X IS 2, INTER ALIA IS A GROUP PHENYLENE OR NAPHTHYLENE, EACH OF WHICH OPTIONALLY IS SUBSTITUTED I.A. BY OR?, SR? OR NR?R? OR M?, WHEN X IS 3, IS A TRIVALENT GROUP, OPTIONALLY SUBSTITUTED; R? IS FOR EXAMPLE HYDROGEN OR C?-C??ALKYL; C?-C? ALKYL WHICH IS FOR EXAMPLE SUBSTITUTED BY -OH, -SH, CN, C?-C?ALKENOXY, OR -OCH?CH?CN; R? IS FOR EXAMPLE HYDROGEN, C?-C?? ALKYL, C?-C??ALKENYL, CYCLOHEXYL, OR PHENYL WHICH IS UNSUBSTITUTED OR SUBSTITUTED; R? AND R? INDEPENDENTLY OF EACH OTHER INTER ALIA ARE HYDROGEN, C?-C??ALKYL, C?- C?HYDROXYALKYL, C?-C??ALKOXYALKYL, C?-C?ALKENYL, C?-C?CYCLOALKYL, PHENYL-C?-C?ALKYL, C?- C?ALKANOYL, C?-C?ALKENOYL, BENZOYL OR PHEHYL WHICH IS UNSUBSTITUTED OR SUBSTITUTED; AND (C) A PHOTOPOLYMERIZABLE COMPOUND; EXHTHIT AN UNEXPECTEDLY GOOD PERFORMANCE, IN PARTICULAR IN PHOTORESIST TECHNOLOGY.
MYPI20005760A 1999-12-15 2000-12-07 Photosensitive resin composition MY123712A (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP99811161 1999-12-15
EP00810630 2000-07-17

Publications (1)

Publication Number Publication Date
MY123712A true MY123712A (en) 2006-05-31

Family

ID=26073958

Family Applications (1)

Application Number Title Priority Date Filing Date
MYPI20005760A MY123712A (en) 1999-12-15 2000-12-07 Photosensitive resin composition

Country Status (22)

Country Link
US (1) US7829257B2 (en)
JP (1) JP4532726B2 (en)
KR (1) KR20010082582A (en)
CN (1) CN1302339C (en)
AT (1) AT410146B (en)
AU (1) AU773749B2 (en)
BE (1) BE1013705A3 (en)
BR (1) BR0005866A (en)
CA (1) CA2328342A1 (en)
CH (1) CH694673A5 (en)
CZ (1) CZ20004639A3 (en)
DE (1) DE10061948A1 (en)
DK (1) DK200001877A (en)
ES (1) ES2189609B1 (en)
FI (1) FI20002731A (en)
FR (1) FR2802655B1 (en)
GB (1) GB2357293B (en)
IT (1) IT1319687B1 (en)
MY (1) MY123712A (en)
NL (1) NL1016814C2 (en)
SE (1) SE522645C2 (en)
SG (1) SG97168A1 (en)

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NL1016814C2 (en) 2002-01-29
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AU773749B2 (en) 2004-06-03
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FR2802655A1 (en) 2001-06-22

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